SITEK SlickDevice S1 User manual

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© SITEK Process Solutions
SlickDevice™ S1/F1 Intelligent SRD Controller
Owner'sManual
SITEK Process Solutions
www.sitekprocess.com
916-797-9000
233 Technology Way, Bldg. 3
Rocklin, CA 95765
Cover Page 1

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© SITEK Process Solutions
Table of contents
Introduction..................................................................................................................................................................5
Benefits.....................................................................................................................................................................5
Layout ...........................................................................................................................................................................6
Process Description ......................................................................................................................................................8
Features....................................................................................................................................................................8
Initial Start Up...............................................................................................................................................................9
General Settings .........................................................................................................................................................10
Clock Setting ...........................................................................................................................................................11
Screen Brightness and Volume...............................................................................................................................12
Change Password ...................................................................................................................................................13
Recipe Program Settings.............................................................................................................................................14
Quality Rinse...........................................................................................................................................................17
Skip step or Dry only recipe....................................................................................................................................18
Editing Process Settings in a recipe ........................................................................................................................18
Process Setting Example.........................................................................................................................................20
Quick Reference of Operations Screens.....................................................................................................................21
IDLE.........................................................................................................................................................................21
Rinse .......................................................................................................................................................................22
Purge.......................................................................................................................................................................22
Dry1 ........................................................................................................................................................................23
Dry2 ........................................................................................................................................................................24
Q-rinse (Optional step) ...........................................................................................................................................24
Process Complete Successful..................................................................................................................................25
Process Complete Unsuccessfull ............................................................................................................................26
Alarms.........................................................................................................................................................................27
How to clear alarms................................................................................................................................................30
Maintenance Mode / Tool Down ...........................................................................................................................31
Error codes .............................................................................................................................................................32
Error Codes List.......................................................................................................................................................33
N2 Saver: Customized Nitrogen Parameters ..............................................................................................................35
Autocycle ....................................................................................................................................................................37
Manual Mode .............................................................................................................................................................39
Lamp test ................................................................................................................................................................41

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Valve Actuators.......................................................................................................................................................41
Valve Security Interlocks. ...................................................................................................................................42
Sensors Test f..........................................................................................................................................................44
How to check the sensors...................................................................................................................................45
Start and Stop Button test..................................................................................................................................46
Sensors Check List...............................................................................................................................................47
Actuators ................................................................................................................................................................48
Actuators – Anti-Static............................................................................................................................................49
Anti-Static unit working properly .......................................................................................................................49
Anti-Static unit failing .........................................................................................................................................50
Anti-Static unit not connected ...........................................................................................................................51
Actuators – N2 Heater............................................................................................................................................52
N2 Heater working properly...............................................................................................................................53
N2 Heater failing.................................................................................................................................................54
N2 Heater Security Interlock ..............................................................................................................................55
Actuators – Bowl Heater ........................................................................................................................................56
Bowl Heater working properly ...........................................................................................................................57
Bowl Heater failing .............................................................................................................................................58
Bowl Heater Process Switch ...............................................................................................................................59
Bowl Heater Overtemp Switch ...........................................................................................................................60
Motor and Tach – Manual Mode............................................................................................................................61
Motor/Tach Manual Mode For S1 Model ..............................................................................................................62
Motor/Tach Manual Mode For F1 Model ..............................................................................................................63
Open Speed Loop ...............................................................................................................................................64
Closed Speed Loop..............................................................................................................................................68
Resistivity Probe Test .............................................................................................................................................72
Resistivity Probe working properly.....................................................................................................................73
Resistivity Probe not connected .........................................................................................................................74
All Manual Operation .............................................................................................................................................75
Manual Mode Security Interlocks list.....................................................................................................................77
Analytics .....................................................................................................................................................................78
Logbook ......................................................................................................................................................................79
How to download SITEK SlickDevice™ log information onto your laptop..................................................................83
Program Installation: ..............................................................................................................................................83
USB Cable: ..............................................................................................................................................................83

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Operation: ..............................................................................................................................................................84
Download file: ........................................................................................................................................................89

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Introduction
The S1 and F1 models of SITEK's SlickDevice™ are the first intelligent replacement controllers for the
Semitool Spin Rinse Dryer.
SlickDevice™ uses intelligent automation and control algorithms for smooth and safe tool operation
using a clear and easy-to-read interface showing the process in real-time.
Featuring an intuitive Graphic User Interface, advanced analytics, programmable process settin gs,
and built-in diagnostic tools, the SlickDevice™ S1/F1 SRD controllers provide all required functionality
for a reliable and continuous operation.
Benefits
Direct cost savings through the N2 Saver feature
Intuitive and user-friendly operator interface
Direct “plug and play” upgrade
Full-color Touch screen display that can be operated wearing any gloves
Intelligent controller technology featuring advanced automation and control algorithms
Real-time alerts and warnings
Programmable process settings and easy recipe editing interface
Quality rinse (Q-Rinse) option for enhanced operation
Advanced Diagnostic tools and maintenance mode with intuitive troubleshooting
Time-saving and better results with automatic checklists for sensors

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Layout
Front panel:
• Illuminated “Upload” push button for data transfer
• Crystal-Lex full color touch screen display
• Illuminated, industrial grade ON/OFF switch
• Protective cap over mini-USB port
The S1 Model of the SlickDevice™ is a highly efficient controller designed to operate
with SRDs that feature Brushless DC Motors and Servo Amps.
The SlickDevice™ F1 Model is specifically engineered to operate with SRDs that
have brushed DC motors and DC motor controllers.

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Rear panel F1 Model:
• Resistivity probe connector
• RPJ12 umbilical cord connector
• 50 pin ribbon cable RPJ2 connector
• Ground cable
• All connectors match existing Semitool 101 or 102 controllers. **Replacement to a
102 controller requires an adapter to account for an alternate pin format.
Rear panel S1 Model:
• Resistivity probe connector
• RPJ12 umbilical cord connector
• RPJ19 connector for servo amp
• 50 pin ribbon cable RPJ2 connector
• Ground cable
• All connectors match existing Semitool 101 or 102 controllers. **Replacement to a
102 controller requires an adapter to account for an alternate pin format.

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Process Description
The Spin Rinse Dryer (SRD) is a rinse and drying system that uses centrifugal forces to rinse and dry
the surface of a substrate.
The substrates are usually loaded into the SRD’s stainless-steel chamber and axially rotated while
injecting DI (deionized water) for the rinse process.
The liquid on the substrate surface is spun off and drained from the bowl, while liquid droplets on
the drying chamber surfaces are evaporated.
To improve with drying the substrates, ambient or heated N2 or CDA is introduced at controlled
RPM and time duration. Heater blanket(s) assist in drying by directly heating the chamber surface.
Features
• 6 total recipe capacity:
• 5 process recipes
• 1 auto cycles
• Data logging and analytics
• Safe Manual Mode operation with alarm diagnostics
• N2 waste reduction
• Heated or ambient N2 process configuration

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Initial Start Up
• Once the SlickDevice™ controller is installed into the SRD, connect the ground wire, and
complete all cable connections, including the 110v/220v power cord.
• Turn on the N2 and DI water facility supply to the tool.
• Turn on the SlickDevice™ controller.
The controller is now ready for the initial run.
Note: The controller will self-calibrate to the motor controller and motor.
First, the Time & Date must be set. A
screen requiring this step will
automatically populate.
To set the time, use the up/down
arrows under “H,M,S” in “Set Time”.
To set the date, use the up/down
arrows under “Set Date”.
Next, a password must be set. A screen
requiring this step will automatically
populate.
The initial password is 0-0-0-0.
The password can now be changed to
any 4 numbers combination.
The password can be changed later in
the Settings section of the controller.

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General Settings
Adjustment of general settings (Clock, Brightness, Volume and Password).
When the Idle screen appears,
Press “Menu”.
Enter the password that was set
on initial startup.
Select “Controller Settings”
from the Main Menu page 1
of 2.

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Clock Setting
Select “Clock” from the Settings
page.
To set the time, use the up/down
arrows under “H,M,S” in “Set Time”.
To set the date, use the up/down
arrows under “Set Date”.
Save settings and press “back to
menu”.

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Screen Brightness and Volume
The default value corresponds to recommended SITEK setting.
Select “Brightness” or “Volume”
from the Settings page.
Move the slider to set the “Screen
Brightness” or “Beep Volume”.
Touch default to set the default value
for Screen Brightness/Volume.

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Change Password
Select “Password” from the Settings
page.
To change the password, you must
first enter the current password, then
enter and confirm the new password.
Use “ENTER” to move to the next
field.
** Forgot password? Contact SITEK
for password reset procedure.

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Recipe Program Settings
Enter the password to access Recipe
Edit mode.
Using the Recipe Edit screen you can
edit Time, RPM, Resistivity, and Q-
Rinse. You can also change the process
settings for Dry1 and Dry2 steps by
selecting either of those respective
icons.
Use the numeric pad on the right to
enter numeric data. Use Clear to delete
a current value inside of a field.
You can navigate to each cell using
“ENTER” or by tapping on it directly.
Idle: Also known as the Operator
mode.
To create or modify a recipe, select
"Recipe" to access and edit recipes.

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To create or modify an existing recipe,
select the desired cell so it becomes
highlighted.
Key in the new value for "Time" or "RPM"
using the numbers pad.
Select "ENTER" to move to the next field.
Selecting "Cancel" or leaving the
recipe prior to saving will disregard all
changes.
Select “CLEAR” to erase the previous
value, then use the number pad to
enter a new value.
If an incorrect entry is made, use the "Delete"
button to re-enter a new value.

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When completed, select "Save" to
capture the changes. Verify the new
values once the display has refreshed.
Return to the main process screen via
"Back to process".

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Quality Rinse
Quality Rinse time can be adjusted using
+ or – symbols. Available range from
zero to 3600 Seconds.
The Quality Rinse (Q-Rinse) function is
offered as an additional feature. Q-Rinse
requires a DI resistivity set point to be met
to complete the rinse process and proceed
to purge.
An advanced algorithm is utilized to
determine a temperature compensated
resistivity value measured during the
Q-Rinse step.
The available range for Resistivity Value in
Q-Rinse step is zero to 18 Megohm.
"QRINSE TIME" determines how long the
controller will continue rinsing if the set
point is not met. If this timer concludes,
the controller will alarm.

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Skip step or Dry only recipe
Editing Process Settings in a recipe
To create a Dry only recipe or to skip any
step, place a zero in the "Time" cell to skip
that step. The recipe will advance
accordingly.
Use the Dry buttons with the pencil icon to
edit the process parameters for Dry cycles.
Process parameters like Nitrogen Flow,
Nitrogen heater, Blanket Heater or Static
Eliminator can be adjusted for each recipe.
You can also use the “Process Settings”
button on the top of the screen for the
same function.
NOTE: Save the recipe by pressing “Save”
before selecting Process Settings.

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Touching the corresponding valve or
actuator will toggle the selected
parameter during the Dry 1 or Dry 2
Cycle.
Every selection is saved automatically.
Touching the "UNDO" button restores
all parameters to default values for
Dry1 and Dry2 Cycles.
Note: If the tool does not include a Static Eliminator, turning the Anti-
Static eliminator off will remove any alarm related to this option.
This example shows how to set the
process to deactivate "Anti-Static" for
Recipe 04 during Dry1 and Dry2 cycles.

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In this example, the process is set to run the Dry 2 Cycle with just N2 flowing into the chamber, no N2
Heater, no Bowl Heater, and no Anti-Static for Recipe 04.
Process Setting Example
Running the Recipe
Setting the process to run the Dry 2 Cycle
with just N2 flowing into the chamber, No
N2 Heater, No Bowl Heater, and No Anti-
Static is simple. After selecting "RECIPE
04", touch every option to activate "Yes" or
"No".
This is a recipe running according to the
previous process settings selections.
Bowl
Heater Off
Anti-Static
Off
N2 Valve
ON
N2 Heater
Off