SMC Networks XLG Series User manual

Doc. no.XL*****-OMI0010-E
High Vacuum LType Valve
PRODUCT NAME
XLG Series
MODEL/ Series
Thank you for purchasing this SMC product.
Be sure to read this Operation Manual carefully and understand its contents before
operating this product to ensure the safety of the operator and this product.
Please refer to the drawing and other informative documents for the construction and
specifications of this product.
Further, ensure your operating environment satisfies the requirements specified for the
product.
Keep this Operation Manual available whenever necessary.

- 1 -
XL*****-OMI0010-E
Contents
Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2
1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4
(Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance)
2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6
(Maintenance parts)
3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 8
4. Construction and Outer dimensions - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 10
5. Period and scope of warranty - - - - - - - - - - - - - - - - - - - - - - - - - - - - 12
6. Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 13

- 2 -
XL*****-OMI0010-E
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or
“Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1), and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -- Safety
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury .
Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3.Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is
to be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.

- 3 -
XL*****-OMI0010-E
Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1. The warranty period of the product is 1 year in service or 1.5 years after the product is
delivered,whichever is first.*2)
Also, the product may have specified durability, running distance or replacement parts. Please consult
your nearest sales branch.
2.For any failure or damage reported within the warranty period which is clearly our responsibility, a
replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage incurred
due to the failure of the product.
3.Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in
the specified catalog for the particular products.
*2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or
failure due to the deterioration of rubber material are not covered by the limited warranty.
Compliance Requirements
1.The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2.The exports of SMC products or technology from one country to another are govemed by the relevant
security laws and regulation of the countries involved in the transaction. Prior to the shipment of a
SMC product to another country, assure that all local rules goveming that export are known and
followed.

- 4 -
XL*****-OMI0010-E
1. Product Specific Precautions 1
Common Precautions 1 Be sure to read before handling.
Design
Warning
●All models
1. The material of the body and bonnet is A6063, and other metal components of the vacuum
part are made of SUS304. The sealing material of the vacuum part is FKM as standard, but
this can be changed to other materials (refer to “How to Order”). Confirm whether the fluid to
be used is compatible with the materials before use.
Grease for vacuum is applied to the sliding part of the vacuum (Fluorine grease: Y-VAC2).
2. Select materials for the pilot pressure piping and fittings whose heat resistance is suitable for
the applicable operating temperature.
●Models with auto switch
1. Keep the temperature of the switch below 60
o
C
●With heater (thermistor)
1. When using a model with a heater, a mechanism to prevent overheating should be
installed.
Selection
●All models
1. When controlling valve responsiveness, take note of the size and length of piping, as well
as the flow rate characteristics of the actuating solenoid valve.
2. Keep the pilot pressure within the specified range.
The specified range of XLG-16, XLG-25 and XLG-40 is from 0.3MPa to 0.5MPa, and that
is for XLG-50, XLG-63, XLG-80, XLG-100 and XLG-160 is from 0.4MPa to 0.5MPa.
3. Keep within the specified range of the pilot pressure.
●High temperature type
1. If using gases that cause a large amount of deposits, heat the valve body to prevent deposits
in the valve.
Mounting
●All models
1. In high humidity environments, keep the valve packed until the time of installation.
2. For models with switches, secure the lead wires so that they have sufficient slack, without
any unreasonable force applied to them.
3. Perform piping so that excessive force is not applied to the flange sections. When there is
vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply
torque directly to the flange section.
4. Vibration resistance allows for normal operation of up to 30 m/s
2
(45 to 250Hz), but
continuous vibration may cause a decline in durability.
Arrange piping to avoid excessive vibration or impacts.
●High temperature type (temperature specification / H0 H4 H5)
1. In models with a heater (thermistor), take care not to damage the insulationcomponents of the
lead wires and connector section.
2. The set temperature for models with a heater should be established without any drafts or heat
insulation. It will change depending on conditions such as heat insulation measures and the
heating of other piping. Fine adjustment is not possible.
Caution
Caution

- 5 -
XL*****-OMI0010-E
3. When installing heater accessories or mounting a heater, check insulation resistance at the
actual operating temperature. Acurrent leakage breaker or fuse should be installed.
4. If the valve is to be insulated, only the body should be insulated, excluding the bonnet part.
5. In models with a heater, when the heater is in operation, the entire valve becomes hot. Be
careful not to touch it with bare hands, as burns will result.
1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.
2. There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it
should be handled so that the seal surface is not damaged in any way.
If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should
be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and
experience (e.g. a specialist).
1. When removing deposits from the valve, take care not to damage any part of it.
2. Replace the bonnet assembly when the valve is approaching the end of its service life.
* For details regarding endurance cycles, please reference Section 5 of this Operation
manual titled Period and scope of warranty . (pages 12)
3. If damage is suspected prior to the end of the service life, perform early maintenance.
4. SMC specified parts should be used for service. Refer to the Construction / Maintenance
parts table.
5. When removing the valve seal and external seal, take care not to damage the sealing
surfaces. When installing the valve seal and external seal, be sure that the O-ring is not
twisted. (Refer to Section 6 Parts Replacement Procedure (pages 13 to 15) for details.)
Piping
Caution
Maintenance
Warning
Caution

- 6 -
XL*****-OMI0010-E
2. Product Specific Precautions 2
Common Precautions 2 Be sure to read before handling
Maintenance Parts
SMC specified parts should be used for service.Refer to the construction drawing.
1. Replace the bonnet assembly when changing the sealant material. Due to the different
materials used, changing only the seal may prove inadequate.
Bonnet assembly (Construction part no.) 1
Temperature
Specifications
Valve size
16 25 40 50
For general
environments
XLG16-30-1 XLG25-30-1 XLG40-30-1 XLG50-30-1-1
For high
temperature
XLG16-30-1H XLG25-30-1H XLG40-30-1H XLG50-30-1H-1
TemperatureSpeci
fications
Valve size
63 80 100 160
For general
environments
XLG63-30-1-1 XLG80-30-1-1 XLG100-30-1-1 XLG160-30-1-1
For high
temperature
XLG63-30-1H-1 XLG80-30-1H-1 XLG100-30-1H-1 XLG160-30-1H-1
Note1) The magnet for auto switch is not provided. When the magnet for auto switch is
necessary, add “-M9//” at the suffix of the part number.
Note2) List the optional sealant material symbol after the model number, except for the
standard sealant material (FKM: compound No. 1349-80).
Note3) The bonnet assembly includes valve seals.
External seal / Valve seal
Description
Construction
No.
Material
Valve size
16 25 40 50
External seal
(3)
Standard XLF16-6 XLF25-6 AS568-035V AS568-039V
Special - - AS568-035 ** AS568-039 **
Valve seal (2)
Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V
Special B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 **
Description
Construction
No.
Material
Valve size
63 80 100 160
External seal
(3)
Standard AS568-043V AS568-045V AS568-050V AS568-167V
Special AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 **
Valve seal (2)
Standard AS568-233V B2401-V85V AS568-349V B2401-G155V
Special AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 **
Note1) List the optional sealant material symbol after the model number, except for the
standard sealant material (FKM: compound no. 1349-80).
Note2) Refer to the Construction of each series for the construction numbers.
Note3) We do not guarantee the quality if the seal material is changed by customer.

- 7 -
XL*****-OMI0010-E
Additional symbols of the seal materials
Seal material
EPDM
Barrel
Perfluoro
R
Kalrez
R
Chemraz
R
VMQ FKM for
PLASMA
ULTIC
ARMOR
R
Combination No.
2101-80
70W 4079 SS592
SS630
SSE38
1232-70
3310-75 UA4640
Symbol
-XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1
Note1) Due to the different materials used, changing only the seal may prove inadequate.
Barrel Perfluoro
R
is a registered trademark of MATSUMURAOIL Co.,Ltd.
Kalrez
R
is a registered trademark of E. I. du Pont de Nemours and Company.
Chemraz
R
is a registered trademark of Greene, Tweed & Co.,
ULTIC ARMOR
R
is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD .

- 8 -
XL*****-OMI0010-E
3. Specifications
3-1. Vale specifications
Note1) Conductance is “molecular flow” measured with an elbow pipe which has the same
dimension as each applicable flange.
Note2) The seal sliding part for vacuum uses vacuum grease (Y-VAC2).
Note3) For one cycle of cylinder.
Model XLG-16
XLG-25
XLG-40
XLG-50-1
XLG-63-1
XLG-80-1
XLG-100-1
XLG-160-1
Flange (valve) size 16 25 40 50 63 80 100 160
Actuating type Double acting / pressurized to open/close
Fluid Vacuum of inert gas
Operating temperature
o
C 5 to 60 (5 to 150 for high temperature type)
Operating pressure Pa(abs)
Atmospheric pressure to 1 x 10
-5
Conductance l/s Note 1 5 14 45 80 160 200 300 800
Leakage
Pam
3
/s
Internal
1.3 x 10
-10
for the standard material (FKM)
at ambient temperature, excluding gas permeation
External
1.3 x 10
-
10
for the standard material (FKM)
at ambient temperature, excluding gas permeation
Flange type KF(NW) KF(NW),K(DN)
Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2
Surface treatment for body
Outside: hard anodized Inside: basis material
Pilot pressure MPa(G)
0.3 to 0.6 0.4 to 0.6
Air consumption
cm
3
Note 3
0.5MPa
38 91 430 280 500 1000 2300 3700
Port size M5 Rc 1/8
Weight kg 0.28 0.46 1.1 1.4 2.3 4.1 7.6 14.9

- 9 -
XL*****-OMI0010-E
3-2. Heater specifications
Item XL□-25 XL□-40 XL□-50 XL□-63
Rated voltage of the heater 90 to 240ACV
S
y
m
b
o
l
H
4
Heater assembly number - XLA25-60S-1 XLA25-60S-1 XLA25-60S-2
No. of heater assemblies - 1 pc. 1 pc. 1 pc.
Initial power /
Power
consumption (W)
100 VAC
- 200/40 200/50 400/100
200 VAC
- 800/40 800/50 800/100
H
5
Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3
No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.
Initial power /
Power
consumption (W)
100 VAC
200/40 400/70 400/80 600/130
200 VAC
800/40 1600/80 1600/80 2400/130
Item XL□-80 XL□-100 XL□-160
Rated voltage of the heater 90 to 240ACV
S
y
m
b
o
l
H
4
Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2
No. of heater assemblies 1 pc. 2 pcs. 3 pcs.
Initial power/
Power
consumption (W)
100 VAC 600/150 800/220 1200/350
200 VAC 2400/150 3200/220 4800/350
H
5
Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2
No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.
Initial power/
Power
consumption (W)
100 VAC 800/180 1200/300 1600/400
200 VAC 3200/180 4800/300 6400/400
Note 1) Initial power and power consumption are nominal values.
Note 2) Heaters are not available for the size 16 models.
The heaters are PTC thermistor type design. These
thermistors self regulate their temperature by
switching the resistance at certain critical
temperatures, so a separate temperature controller is
unnecessary.
If the temperature of the PTC heaters fitted exceeds
200
o
C, then it may fail. The maximum operating
temperature for the valve is 150
o
C. If the heater
temperature is over 200
o
C or valve temperature is
over 150
o
C, please use thermostat to control the
heaters to prevent overheating.
With PTC type heaters, there is an initial surge of
current (inrush current) after the power is supplied. These inrush current will reduce overtime. If
multiple heater assemblies are used, the inrush current to the heaters will be magnified and care
should be taken. When multiple heater assemblies or valves are used, do not apply power to the
heater assemblies simultaneously. Keep approximately 30 seconds between applications of power to
each heater assembly. This will allow for incremental spacing to prevent harmful large initial surge.
0 5 10 15 20 25 30
時間 (秒）
電流
Time (sec.)
Duration of the inrush current flow (as a guide)
200V
100V
Curre
nt

- 10 -
XL*****-OMI0010-E
4. Construction and Outer dimensions
4-1. Size 16, 25 and 40
Model
A B C D E Fn G H J
XLG-16 40 110 38 1 - 30 17 40 26
XLG-25 50 120 48 1 12 40 26 39 27.5
XLG-40 65 171 66 2 11 55 41 63 36
Bonnet assembly (maintenance part)
Body, external seal and accessories are not
included.
A
A
B
JH
φG
φ
Fn
C
D
C EE
(KF
Flange)
Unit: mm
Pilot port (Pressurized / Totally closed)
①
Pilot port (Pressurized / Totally closed)
External seal (maintenance part)
③
Axial seal (material : FKM)
⑥
Scraper (Material : FKM)
⑦
Valve (material : SUS304)
⑤
②
④
Heater (option)
Magnet (option)
Valve seal
(maintenance part)
Body(material: A6063)
Auto switch (option)

- 11 -
XL*****-OMI0010-E
4-2．Size 50,63,80,100,160
Model
A B C D E Fn Fd G H J K
XLG-50-1 70 183 80 31 10.5 75 - 52 77 29 10.5
XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9
XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9
XLG-100-1
108 270.5 154 55 11 134 130 102 92 58 9
XLG-160-1
138 339 200 65 11 190 180 153 124 62 12.5
H
φ
G
J
K
A
A
B
φ
Fd
(K Flange)
φ
Fn
(KF Flange)
C
D
C EE
E
Unit: mm

- 12 -
XL*****-OMI0010-E
5. Period and scope of warranty
The warranty period is 3 million cycles (for size 16, 25 and 40), 2 million cycles (for size 50, 63
and 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18
months after delivery or 12 months in service, whichever comes first.
Note) The endurance will depend on the operating conditions (such as if the flow rate is large).
If the valve has been used outside of the specifications, or if a failure occurs as a result of
mounting onto amachine or replacement of an assembly, O-ring etc. bythe user, the guarantee
cannot be applied.
For any failure reported within the warranty period which is clearly our responsibility, the
whole valve will be replaced. This guarantee does not apply to any damage incurred due to the
failure of the valve.
Result of endurance test
(with the circuit shown on the right)
The valve was opened and closed in an internal
vacuum state at an ordinary (room)
temperature and checked for internal and external
leakage and operation.
It was confirmed that XLG-16, XLG-25, XLG-40
satisfied the valve specification up to 3 million
cycles,XLG-50, XLG-63, XLG-80 satisfied it up to 2
million cycles, XLG-100 and XLG-160 satisfied it up to
1 million cycles.
The test was performed with FKM, the standard
sealant material.
ブランクフランジ
1～10 Pa 真空ポンプ
耐久試験条件
試験品姿勢:横向き
Blank flange
Test product orientation:
Horizontal
Endurance test conditions Vacuum pump

- 13 -
XL*****-OMI0010-E
6. Parts Replacement Procedure
6-1. Precautions
Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along
with the precautions above, comply with the following precautions too.
Warning
•If it is expected that product materials may get stuck to the product, ensure safety is
assured before handling. It is recommended to wear gloves and a mask.
•Pay attention to the handling of components according to the procedure in the next item
onwards. Do not apply excessive force or impact. This will not only damage the product
but also decrease its performance and life expectancy.
•It is not possible to disassemble the bonnet assembly of this product. If the components
and assembly are damaged, or damage is expected, exchange the bonnet assembly
itself.
•Do not disassemble the parts that are not explained in this operation manual. The
performance and life may decrease. Also, it may cause danger.

- 14 -
XL*****-OMI0010-E
6-2. Replacement Procedure of the valve seal (O-ring)
Step 1 Step 2 Step 3
Step 4 Step 5 Step 6
Tightening
torque Nm
0.7
1.5
2.5
6
6
15
20
102
Valve
size
XLG-16
-25
-40
-50
-63
-80
-100
-160
4
3
21
①
②
③
④
Size16,25 and 40 Size
50,63,80,100 and 160
Bottom of the
gas release
groove
Wipe any dust off the O-ring
surface with a clean cloth
(Bemcot TM) dipped into
ethanol, and insert the O-ring
into the O-ring groove. Push
the O-ring in numerical order
(diagonally) to insert it into the
O-ring groove. (Use dust-free
gloves.)
Loosen the hexagon socket head cap screws
gradually in numerical order. First tighten evenly
by hand until the O-ring is compressed, and then
apply extra tightening fully.
Loosen the hexagon socket head cap screws
gradually in numerical order.
Note) For valve sizes larger than 50, pay
attention to the position of the hexagon socket
head cap screws which should be
removed.( Those mounted outermost should be
removed.)
Remove the O-ring from the gas
release part of the O-ring groove
with a tool whose height is as the
same as the depth of the gas
release part.
(Be careful not to damage the
O-ring groove.)
Wipe any dust off the
O-ring groove with a
clean cloth (Bemcot TM)
dipped into ethanol.
(Confirm that there is no
waste thread or dust.)
Wipe any dust off the
O-ring surface with a
clean cloth (Bemcot
TM) dipped into
ethanol.
4
3
21
3
4
2 1

- 15 -
XL*****-OMI0010-E
6-3. Replacement Procedure of the External Seal (O-ring)
Step 1 Step 2 Step 3
Step 4 Step 5
Tightening
torque
Nm
0.7
1.5
2.5
6
6
15
20
102
Valve
size
XLG-16
-25
-40
-50
-63
-80
-100
-160
4
3
21
①
②
③
④
Size 16,25,40 Size
50,63,80,100,160
Wipe any dust off the O-ring surface and
O-ring seat with a clean cloth (Bemcot
TM) dipped into ethanol.
Tighten the socket head cap screws in numerical order. First tighten
them evenly by hand until the O-ring is compressed, and then apply
extra tightening overall to complete.
Loosen the hexagon socket head cap screws
gradually in numerical order.
Note) For valve sizes larger than 50, pay
attention to the position of the hexagon socket
head cap screws which should be removed.
Those mounted outermost should be removed.
Remove the O-ring from the
body.
(Take care not to damage the
mounting surface of the body.)
Wipe any dust off the
O-ring surface and
mounting surface of the
body with a clean cloth
(Bemcot TM) dipped into
ethanol. After wiping off,
mount the O-ring.
4
3
21

- 16 -
XL*****-OMI0010-E
Revision history
Ｃ
ＣＣ
ＣConstruction oo
Ｄ
ＤＤ
ＤSafety Instructions PQ
Ｅ
ＥＥ
ＥLimited warranty and Disclaimer SR
1st Printing :JP
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: [phone]
URL http://www.smcworld.com
Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
© 2012 SMC Corporation All Rights Reserved