Telemark 851 User manual

MODEL 851 THICKNESS MONITOR
INSTRUCTION MANUAL
Software Version 2.0
Copyright © TELEMARK, 1990-2019 –All rights reserved
May 2019
telemark.com
Brand and product names are trademarks or
registered trademarks of their respective companies.
Current version of this manual can be found at
https://telemark.com/quartz-crystal-control/851-thickness-monitor/

Telemark Model 851 Thickness Monitor Instruction Manual
2 SPECIFICATIONS
SAFETY WARNING
HIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN EVAPORATION SYSTEMS. GREAT
CARE MUST BE EXERCISED WHEN PERFORMING MAINTENANCE. HUMAN CONTACT WITH THE
VOLTAGES CAN BE FATAL.
WARRANTY
The 851 is guaranteed against faulty materials, function, and workmanship for a period of 12 months after
delivery from Telemark.
This warranty is valid only for normal use where regular maintenance is performed as instructed. This
warranty shall not apply if repair has been performed or an alteration make by anyone other than an
authorized Telemark representative or if a malfunction occurs through abuse, misuse, negligence, or
accident. No charge will be made for repairs made under warranty at Telemark’s facilities. Defective parts will
be repaired or replaced at Telemark’s option. Customer will be responsible for freight charges to Telemark’s
facility.
USER RESPONSIBILITY
The user is responsible for proper operation and ordinary maintenance of the equipment, following
procedures described in this manual, including reference documents. Proper operation includes timely
replacement of parts that are missing, broken, or plainly worn. If the user has a reasonable doubt about
understanding the use or installation of a component, Telemark or your local representative should be called.
It is vitally important that the user properly install the equipment as described in Chapter 3
(Installation) of this manual, with particular attention to the correct grounding methods described.
The Warranty will be void if the equipment is improperly installed and/or not adequately grounded.
SOFTWARE
Parts of the 851 software are made with open source software.
Linux is licensed under GNU General Public License (GPL), version 2.
All Xenomai code running in kernel space is licensed under the terms of the Linux kernel license, GNU
General Public License (GPL), version 2.
Xenomai libraries linked to application are licensed under the terms of the GNU Lesser General Public
License (LGPL), version 2.1.
Qt is licensed under GNU Lesser General Public License (LGPL) version 2.1.
The original “open source”source code is available from Telemark for a nominal fee.

Telemark Model 851 Thickness Monitor Instruction Manual
3 SPECIFICATIONS
TABLE OF CONTENTS
1 SPECIFICATIONS 5
PURPOSE 5
PACK LIST 5
SPECIFICATIONS 6
2 INSTALLATION 9
MOUNTING 9
PROPER GROUNDING 9
REAR PANEL CONNECTIONS 9
SENSOR HEAD INSTALLATION 13
SENSOR OSCILLATOR 14
INSTRUMENTATION FEEDTHROUGH 14
SENSOR CRYSTAL REPLACEMENT 15
3 PROGRAMING CONTROLS 16
PROGRAM BUTTONS 16
RESULTS 17
USB 17
RIGHT SIDE BAR BUTTONS 19
ENTERING ALPHA CHARACTERS 20
COPYING, DELETING AND MOVING 21
4 PROGRAMING 23
GETTING STARTED 23
SETUP 23
5 OPERATION DISPLAYS AND CONTROLS 32
INITIAL POWER UP 32

Telemark Model 851 Thickness Monitor Instruction Manual
4 SPECIFICATIONS
DISPLAYS 33
OPERATING CONTROLS 34
SIDE BAR CONTROLS 35
6 OPERATION 37
SIMULATE OPERATION 37
SELECTING A MATERIAL 37
STARTING A MATERIAL 38
STATUS DISPLAYS 38
MODES 39
SIMULATE 40
ERROR, WARNING, AND INFORMATION MESSAGES 40
7 TUNING 41
EMPIRICAL CALIBRATION 41
8 COMPUTER INTERFACE 43
GENERAL 43
RS-232 SERIAL INTERFACE 43
PROTOCOL 43
DATA TYPES 44
MESSAGE RECEIVED STATUS 44
DEBUG COMPUTER INTERFACE 45
INSTRUCTION SUMMARY 45
INSTRUCTION DESCRIPTIONS 46
9 TROUBLE SHOOTING 50

Telemark Model 851 Thickness Monitor Instruction Manual
5 SPECIFICATIONS
1
SPECIFICATIONS
PURPOSE
The 851 thickness monitor allows improved manual control of the vacuum film deposition process by
providing a direct display of film thickness and deposition rate during deposition.
Semiautomatic control of film thickness can be accomplished by utilization of the shutter control relay in the
851. The shutter control relay allows for direct operator control of the systems shutter and will also
automatically close the shutter when the deposition thickness equals a preprogrammed value.
PACK LIST
STANDARD ITEMS
The standard items included with the 851 monitor are:
Part No.
Quantity
Description
122-0851-1
1
Cable, Shielded Twisted Pair, 25 FT.
124-0909-8
1
Connector Kit, 9 Pin, D-Sub Male
124-0925-8
1
Connector Kit, D-Sub, 25pin, Male
200-0002-1
1
Telemark Product Manuals USB Drive
376-9010-1
1
Power Cord
851-0004-1
2
Chassis Ear, 851
851-0005-1
2
Chassis Leg, 851
861-0502-1*
1
Adapter, BNC Male/Male
861-0500-1
1
Oscillator Assembly
851-0600-4
1
Assembly, Chassis 851
* A BNC male/male adaptor is supplied for installations that have a 6 inch female BNC cable coming from the
vacuum system feedthrough.

Telemark Model 851 Thickness Monitor Instruction Manual
6 SPECIFICATIONS
ADDITIONAL ITEMS
Additional items that may be ordered and shipped with an 851.
1. Additional Oscillator and shielded RJ45 cable for sensor 2.
Part No.
Description
861-0505-1
Oscillator Kit
2. Each sensor needs a 6 inch coax cable to go between the oscillator and the feedthrough. The type
needed depends on the feedthrough connection.
Part No.
Description
880-2420-8
Cable, 6” BNC Male/Microdot
880-2421-1
Cable, 6" BNC Male/Male
3. Each sensor needs a 30 inch coax in-vacuum cable to go between the feedthrough and the sensor
inside the vacuum chamber.
Part No.
Description
880-2320-4
30 inch coax in-vacuum cable, Microdot
4. Telemark has a wide selection of O-Ring and CF flange feedthroughs available to pass the cooling
water and coaxial signal in to the chamber.
5. Crystals
Part No.
Description
880-0201-3
6MHz gold coated sensing crystals (Disc of 10)
880-0202-3
6MHz aluminum alloy sensing crystals (Disc of 10)
880-0203-3
5MHz gold coated sensing crystals (Disc of 10)
Please refer to the Telemark Price List for feedthroughs, more accessories and other products.
SPECIFICATIONS
INPUT POWER
Input Power Requirements
90-264 VAC, 47-63 Hz
PHYSICAL
Operating Temperature Range
0 to 50C
Physical Weight
4.3 LB
Physical Size
1/2 19” rackmount case
3 1/2” high x 8 1/2”deep
MEASUREMENT
Frequency Resolution
0.03 Hz @6.0 MHz
Mass Resolution
0.375 ng/cm2
Thickness Accuracy
0.5% + 1 count
Measurement Update Rate
Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate
1 Hz
Sensor Crystal Frequency
5 or 6 MHz

Telemark Model 851 Thickness Monitor Instruction Manual
7 SPECIFICATIONS
DISPLAY
Thickness Display
Autoranging: 0.000 to 999.9 KÅ
Rate Display
Autoranging: 0.0 to 999 Å/sec
Time To Go
0 to 9:59:59 H:MM:SS
Crystal Health %
0 to 99%
Graphics Display
480x800 Color LCD touch screen with backlighting
COMMUNICATION
RS-232
Ethernet (TCP/IP)
MATERIAL STORAGE CAPACITY
Material
99, user definable
MATERIAL PARAMETERS
Material Name
12 character string
Sensor #
1 or 2
Material Density
0.80 to 99.9 gm/cm3
Acoustic Impedance
0.50 to 59.9 gm/cm2 sec
Tooling Factor
10.0 to 499.9%
Target Thickness
0.000 to 999.9 KÅ
Crystal Marginal %
0 to 99%
Crystal Fail
Switch, Stop
Backup Sensor #
1 or 2
Backup Tooling Factor
0 to 499.9%
The 851 also has a built in material library that contains many common material names along with their
density and acoustic impedance values.
INPUT/OUTPUT CAPABILITY
Discrete Input/Output
4 pre-programmed inputs
Input 1 = Start/Zero
Input 2 = Stop
Input 3 = Source shutter
Input 4 = Sensor shutter
Passive/Active is software selectable:
Passive TTL level inputs activated by a short across input pins.
Active inputs activated by 12 to 24 volts DC across the input pins.
4 pre-programmed outputs
SPST relay, 50VDC max, 2A max.
Output 1 = Target Thickness Reached
Output 2 = Crystal Fail
Output 3 = Source shutter
Output 4 = Sensor shutter
SENSOR CAPABILITY
Sensor Inputs
RJ45 connector
2 Standard

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8 SPECIFICATIONS
OSCILLATOR CAPABILITY
Oscillator Input
BNC, In a standard installation it is connected to a 6
inch coaxial cable, but the total cable length from
crystal head to oscillator must be between 24 to 48
inches. Please contact the factory for options when
the length is outside of this range.
Oscillator Output
RJ45 connector connects to the 851 via supplied 25
foot RJ45 shielded cable. Other lengths are available.
SHUTTER PARAMETERS
Source Shutter Relay Type
Normally open, normally closed, or none.
Sensor Shutter Relay Type
Dual or none.
UTILITY SETUP PARAMETERS
Crystal Frequency
5 or 6 MHz
Simulate Mode
On/Off
Interface Address
1 to 32
Attention Volume
0 to 10
Alert Volume
0 to 10
Alarm Volume
0 to 10
Touch Volume
0 to 10
Error Beep Volume
0 to 10
Data Points/Minute
30 to 600 PPM
Confirm Saves
Disable, Enable
Date
MM/DD/YY
Time
0 to 23:59

2
INSTALLATION
MOUNTING
The 851 is intended for rack mounting, but can be use on a tabletop. For maximum operating ease it should
be mounted at approximately eye level. If the 851 is mounted in a rack containing other heat generating
equipment, care should be taken that there is adequate ventilation to assure that the ambient temperature
does not exceed the 851’s ambient temperature rating.
PROPER GROUNDING
The 851 was designed for maximum noise immunity and in most cases will require no special grounding
precautions. In the event that noise sensitivity is noted in unusually noisy environments, more attention to
proper grounding may be required. It is important that the rack in which the 851 is mounted is tightly grounded
to the vacuum station. This grounding is best accomplished by a multipoint mechanical connection through
the structure itself or through grounding straps. Grounding straps should be as wide as practicable and can
be solid or braid.
A small diameter copper conductor does not create an effective ground.
Although the D.C. resistance measured with such a connection may be low, the inductance can be high
allowing rapidly changing currents to create large potential differences over the length of the ground wire.
Multiple current paths significantly reduce the inductance, and since the inductance of a conductor is in-
versely proportional to its radius, wide straps will have the lowest inductance.
In particularly noisy environments it is desirable to ground the 851 to the rack frame, or other good ground, by
means of a grounding strap connected to the grounding lug provided on the rear panel.
REAR PANEL CONNECTIONS
External connections are made through the rear panel (See figure 2-1).

Telemark Model 851 Thickness Monitor Instruction Manual
10 INSTALLATION
Figure 2-1, 851 Rear Panel
POWER
The power receptacle is an internationally approved type. A fuse and RFI filter are part of the power
receptacle assembly. The power plug must be removed to change the fuse.
USB
The USB port on the front panel is for connecting a USB drive to copy, backup and install; materials, system
settings, data log and new system software.
GROUND LUG
In particularly noisy environments the 851 should be grounded to the instrument rack, or other good ground,
by means of the grounding lug in the rear panel.
RS-232
The RS-232 connector is for connecting the 851 to a PLC or computer for remote operation and/or data
collection, see chapter 8. CTS and RTS are optional.
Figure 2-2, RS-232 Connection

Telemark Model 851 Thickness Monitor Instruction Manual
11 INSTALLATION
ETHERNET
The Ethernet connector is for connecting the 851 to a computer to run the touch screen remotely using VNC,
see chapter 4. DO NOT PLUG THE CABLE FROM THE OSCILLATOR INTO THE ETHERNET
CONNECTOR.
SENSOR
The system interface with the sensor oscillator is a Shielded RJ45 cable that is supplied with the 851.
ONLY PLUG THE CABLE FROM THE OSILLATIOR INTO RJ45 CONNECTOR ON THE SENSOR CARD.
INPUT/OUTPUT
The input/output card is through a 25-pin female D connector has 4 preprogrammed inputs and 4
preprogrammed outputs.
The input type is configured by software setting one of two ways:
1. Passive TTL level inputs activated by a short across input pins.
2. Active inputs activated by 12 to 24 volts DC across the input pins.
The outputs are made through SPST relays that are 50VDC max and 2A max. Each output connection is
made to the normally open (N.O.) and additionally for output 1 and 2 the normally closed (N.C.) may be used.

Telemark Model 851 Thickness Monitor Instruction Manual
12 INSTALLATION
Figure 2-3, I/O Card Connections, Active Input

Telemark Model 851 Thickness Monitor Instruction Manual
13 INSTALLATION
Figure 2-4, I/O Card Connections, Passive Input
SENSOR HEAD INSTALLATION
The sensor head can be installed in any appropriate location in the vacuum chamber, preferably more than
10 inches from the evaporation source. The internal (vacuum) cable, supplied with a sensor kit, connects the

Telemark Model 851 Thickness Monitor Instruction Manual
14 INSTALLATION
sensor head to the electrical feedthrough, to which the oscillator is attached. The cable length from sensor
head to feedthrough connection should be 30 inches. Shield the sensor cable in the most expedient way
possible to protect it from radiation heat released from the evaporation source or the substrate heater.
The water cooling tube connects to the feedthrough by brazing or vacuum couplings. If necessary, both cable
and water lines may be wrapped in aluminum foil to extend their useful life. Water cooling of the sensor head
should always be provided during depositions.
Use a shutter to shield the sensor during initial soak periods to protect the crystal from any sputtering that
may occur. If a small droplet of molten material hits the crystal, the crystal may be damaged and oscillation
may cease.
SENSOR OSCILLATOR
Figure 2-5, Oscillator and Cables
The sensor oscillator is designed to be used with industry standard 5 or 6 megahertz sensor crystals. The
oscillator’s characteristics enable it to obtain maximum life from the sensor crystal.
The oscillator is supplied with a 6-inch coaxial cable and a RJ45 shielded twisted pair 25-foot cable. The 6-
inch cable interconnects the oscillator and the feedthrough. The 25-foot cable interconnects the oscillator and
the 851. Cables of varying lengths are available upon request for replacing the 25-foot cable.
The standard 6-inch coaxial cable is fine for most installations, but the total cable length from crystal head to
oscillator must be between 24 to 48 inches. Many UHV and multi crystal head installations will require a
custom coaxial cable. Please contact the factory for custom cables. For installations where the crystal head to
oscillator must be greater than 48 inches, the 851-0500-2 oscillator should be used.
CAUTION
Always use the cables supplied by Telemark to make the connections. Failure to make this
connection correctly will create a mismatch in the impedance of the oscillator circuit.
INSTRUMENTATION FEEDTHROUGH
Telemark has a wide selection of O-Ring and CF flange feedthroughs available to pass the cooling water and
coaxial signal in to the chamber.

Telemark Model 851 Thickness Monitor Instruction Manual
15 INSTALLATION
SENSOR CRYSTAL REPLACEMENT
The Telemark Sensor Head is especially designed for easy sensor crystal replacement and reliable
operation. Removal and replacement of sensor crystals should be performed in a clean environment. An
isolated clean work bench is recommended for crystal replacement. To prevent crystal contamination, use
clean lab gloves or plastic tweezers when handling the crystal and keep the new crystals in a closed plastic
case.

Telemark Model 851 Thickness Monitor Instruction Manual
16 PROGRAMING CONTROLS
3
PROGRAMING CONTROLS
PROGRAM BUTTONS
Figure 3-1, Program Menu
Press the Program button to enter the programming mode from the main screen. Pressing one of the five
buttons will get you to the next level.
Material –Material setup (see chapter 4)
Results –Run history (see below)
Run Number –Set the next run number
USB –USB menu for transferring files, it is only active when an USB drive is inserted in the 851 (see below)
Setup –System configuration setup (see chapter 4)

Telemark Model 851 Thickness Monitor Instruction Manual
17 PROGRAMING CONTROLS
RESULTS
Figure 3-2 shows the results screen. It can display the history of the last 16 runs. Items displayed are: Run
number, Name, Date and time and Status (Normal or Aborted).
Figure 3-2, Results Screen
USB
A standard USB drive (some drives larger than 32GB may not work) may be inserted in the front panel to
back up and restore settings and data from the 851.
The USB button on the Program menu is inactive and darken if no USB drive is inserted. Once a USB drive is
inserted in to the front panel it will take several seconds before the USB drive is active. It will be active when
the button is no longer darkened.
After selecting USB from the Program menu the USB menu is displayed.
Figure 3-3, USB Menu screen
1. System
Backing up of the system settings is done by touching the gray “Save System Data” button. To restore all the
system settings from the USB drive select one of the listed system data sets. Note Restore will replace all
the settings, materials on the current system with the values from the USB drive.

Telemark Model 851 Thickness Monitor Instruction Manual
18 PROGRAMING CONTROLS
Figure 3-4, USB System Backup/Restore
2. Material
Material copying is for saving archives and to copy to other 851 systems. The left column shows what is
stored on the 851. The right column shows what is stored on the USB drive.
Figure 3-5, USB Material Backup/Restore
Touch item on the 851 column to copy it to the USB drive.
Figure 3-6, Copy 851 System Data to USB
Touch an item on the USB column to copy it to the 851 or delete it from the USB drive.

Telemark Model 851 Thickness Monitor Instruction Manual
19 PROGRAMING CONTROLS
Figure 3-7, Copy System Data from USB to 851
3. Run Data
Pressing this button will save a text file with the last 16 runs to the USB drive. It will be saved with a file name
with the current time and date in the folder \851\results\. The format is shown below, fields are separated by
commas.
Run
Number
Status
Start
Date Time
Stop
Date Time
Data
Points/Min
Material
Number
Material
Name
Example:
25,Stopped,12/15/2015 10:33:51,12/15/2015 10:34:09,600, 1, Al
26,Stopped,12/15/2015 11:06:16,12/15/2015 11:06:53,600, 3, Ba
4. Software
The 851 system software can be updated via USB drive with software provided by Telemark. Select software
version from the displayed list of available on the USB drive. The update should not affect the system settings
and materials, but a system back up should be done before the installation just in case. The 851 will ask for
confirmation before installing the new software.
RIGHT SIDE BAR BUTTONS
LOCK/UNLOCK BUTTON
The lock/unlock button allows the material and system settings to be password protected with a single
password.
The system can be either locked or unlock. In locked mode materials can be run and all settings can be
viewed. In unlocked mode all settings can be changed. Pressing the lock icon brings up the Lock dialog
window where the system can be locked/unlocked or the password can be changed. The default password is
0000.

Telemark Model 851 Thickness Monitor Instruction Manual
20 PROGRAMING CONTROLS
Figure 3-8, Password screen
SYSTEM INFORMATION BUTTON
Pressing the system information button will display the screen that shows what cards are installed in the 851
and the software version.
RETURN BUTTON
Pressing the return button will make the system go back to the previous screen.
ENTERING ALPHA CHARACTERS
Figure 3-9, Keyboard
The on-screen keyboard is provided to enter upper and lower case alpha characters and numbers.