Wyko NT3300 User manual

OPERATING INSTRUCTIONS
FOR
Wyko NT3300
Optical 3D Profiling System
UCLA Nanoelectronics Research Facility
420 Westwood Plaza
14-131A Engineering IV Building
Los Angeles, CA 90095 Rev. 01/28/05

Primary Contacts: Email: Extension:
Steve Franz [email protected] ×68923
Joe Zendejas [email protected] ×65528
Superusers: Email: Extension:
I. Introduction:
The automated Wyko NT3300 is a system intended for measuring a wide variety of surfaces
and samples, from optical-quality glass to microactuators. The Wyko is a relatively safe and
simple machine that can provide measurements for all types of samples in great detail. In
this procedure you will find all the instructions necessary to successfully acquire and
interpret your measured data.
System
The automated Wyko NT3300 system consists of two parts, an operator control station and a
motorized sample station (figure on the front cover). The sample station houses the optical
lenses, translation motors, and computer. The operator control tray shown in Fig. 1 has a
joystick for controlling the x-y motorized stage and the motorized microscope head tilt. A
centrally located control knob is used for the z-axis motorized focusing of the microscope
head.
Figure 1. Operator Control Tray
Z-Axis
Control
TrackballKeyboard
Tip/Tilt Button Grounding Strap
Connectors
Stage Control Joystick
Fast Button
(Z-Axis control)

VSI Measurements (160nm < Step height)
Vertical Scanning Interferometry (VSI) uses the interference of light to map the surface
of your sample. VSI is used for relatively rough surfaces (Ragreater than 0.1 µm) or
surfaces with discontinuities or steps greater than 160 nm (λ/4). In VSI mode, the optics
physically scan through the focus of the objective while obtaining “snapshots”, called
frames, from the camera inside the Integrated Optics Assembly (IOA). These frames are
used to reconstruct a map of the surfaces of the sample.
PSI Measurements (Step height < 160nm)
Phase Shifting Interferometry (PSI) uses the interference of light to produce information
on the surface of a sample. PSI is used for extremely smooth samples like mirrors or
optics. In PSI mode, a piezoelectric transducer (PZT) within the IOA head precisely
shifts the interference pattern six times; each shift is captured to produce one frame of
data. These frames are then reconstructed to form a topographical map of the measured
surface.
II. Starting the Wyko:
1. Check the logbook to verify that there are no documented problems with the Wyko.
2. Make sure to sign the logbook BEFORE every use.
3. If the instrument is already ON, you may only need to turn ON the CRT monitor.
Otherwise, to turn ON the Wyko, gently pull the red emergency-power-down switch
until it pops out, and then press the green lighted Start button. Next, turn on the CPU
located behind the cabinet door and also turn ON the CRT screen.
4. Start the Vision 3.43 software.
5. If the Wyko has just been turned ON, it will need to be recalibrated with the
appropriate calibration standard (Fig. 2).
Fig 2. Calibration Standards
A B
PSI calibration standard VSI calibration standard

III. VSI – Mode (Vertical Scanning Interferometry):
VSI – Calibration:
1. Select the MEASUREMENT OPTIONS icon from the toolbar.
2. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
3. Select VSI from the measurement type box and verify the following settings:
Resolution = Full
Objective = 5X
FOV = 1.0X
4. Raise the objective by turning the “Z-Axis” control knob clockwise while holding
down the “Fast” button.
5. Place the VSI calibration sample (Fig. 2B) on the stage.
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER →PSI LOW MAG.
7. Focus on the edge of the glass by slowly lowering the objective (You may need to
translate the stage to locate this edge). DO NOT allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). Once you have focused on the edge of the glass, find the
best focus at the TOP of the feature/step, dark fringes should now be visible on this
surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to orient 3-4 fringes
perpendicular to the step.
10. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER →VSI, then readjust your final focus and intensity. The
intensity should be set to just below the saturation limit of the CCD camera.
11. Select the CALIBRATE box from the Measurement Options window.
12. Select the AUTO CALIBRATE option.
13. Type in the STEP HEIGHT VALUE that is written on the calibration standard
(9.898 µm) then press OK and wait for the Wyko to finish calibrating.
14. Select OK to complete the calibration.
15. Repeat steps 6-13 to calibrate any remaining objectives that will be used.
16. When calibration is complete, raise the objective and carefully remove the calibration
standard and place it back into its container.
VSI – Measurements:
1. Place your sample in the center of the table. If your sample is small and requires
stabilization, turn on the vacuum located on the floor and verify that the switchbox
located on top of the CRT monitor is set to position “A”
2. If the Measurements Options window isn’t already open, open it by clicking on the
MEASUREMENT OPTIONS icon from the toolbar.

3. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
4. Select VSI from the measurement type box and set the following settings to your
desired field of view. (The field of view for several optics combinations are in Table 1)
Resolution =
Objective =
FOV =
5. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER →PSI LOW MAG.
6. Focus on your sample by carefully lowering the objective. DO NOT allow the
objective to contact any surface.
7. Adjust the intensity as needed to avoid saturation using the slidebar. Once you find
the best focus at the TOP of the feature/step, dark fringes should now be visible on
this surface.
8. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to orient 3-4 fringes
perpendicular to the step.
9. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER →VSI, then readjust your final focus and intensity.
10. After you have found the best focus and intensity, click on the VSI Options tab in
order to adjust additional parameters such as the following:
Speed of Measurement =
Back scan =
Length of Scan =
Modulation Threshold =
11. After setting all options, select OK from the Measurement Options window.
12. Close the intensity window.
13. To measure your sample, Select NEW.

IV. PSI – Mode (Phase Shifting Interferometry):
PSI – Calibration:
1. Select the MEASUREMENT OPTIONS icon from the toolbar.
2. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
3. Select PSI from the measurement type box and verify the following settings:
Resolution = Full
Objective = 5X
FOV = 1.0X
4. Raise the objective by turning the “Z-Axis” control knob clockwise while holding
down the “Fast” button.
5. Place the PSI calibration sample (Fig. 2) on the stage.
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER →PSI LOW MAG.
7. Focus on the edge of the mirror by slowly lowering the objective (You may need to
translate the stage to locate this edge). DO NOT allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). After focusing on the edge of the mirror, change the
objective to 20X and find the best focus on the mirrors surface. Dark fringes should
now be visible on this surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to display 3-4 fringes.
10. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER →PSI HIGH MAG, then readjust your final focus and
intensity. The intensity should be set to just below the saturation limit of the CCD
camera.
11. Select the CALIBRATE box from the Measurement Options window.
12. Select the AUTO CALIBRATE option.
13. Select OK to complete the calibration.
14. To accept the new calibration number, Select OK.
15. Repeat steps 6-13 to calibrate any remaining objectives that will be used.
16. When calibration is complete, raise the objective and carefully remove the calibration
standard and place it back into its container.
PSI – Measurements:
1. Place your sample in the center of the table. If your sample is small and requires
stabilization, turn on the vacuum located on the floor and verify that the switchbox
located on top of the CRT monitor is set to position “A”
2. If the Measurements Options window isn’t already open, open it by clicking on the
MEASUREMENT OPTIONS icon from the toolbar.

3. Select the INTENSITY box from the Measurement Options window. Arrange both
windows side by side.
4. Select PSI from the measurement type box and set the following settings to your
desired field of view. (The field of view for several optics combinations are in Table 1)
Resolution = Full
Objective = 5X
FOV = 1.0X
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE →FILTER →PSI LOW MAG.
7. Focus onto the edge of your sample by slowly lowering the objective (You may need
to translate the stage to locate this edge). DO NOT allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). After focusing on the edge of the mirror, change the
objective to 20X and find the best focus on the surface. Dark fringes should now be
visible on this surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to display 3-4 fringes.
10. Now setup the hardware for the final focusing by going under
HARDWARE →FILTER →PSI HIGH MAG, then readjust your final focus and
intensity. The intensity should be set to just below the saturation limit of the CCD
camera.
11. Change any PSI Options: at this time. For multiple measurements, under Averaging
check the ON box. For Modulation Threshold (see definitions).
11. After setting all options, Select OK from the Measurement Options window.
12. Close the intensity window.
13. To measure your sample, Select NEW.
Analyzing your data
In order the analyze your measurement data to return particular results about the test part,
several display analysis options are available. The following procedures include the
commands available on the Analysis menu.
2D Display
2D Analysis displays profile slices taken from the surface height data. You can adjust the
locations and size of the region from which the slices are taken. To access the 2D Plot
choose ANALYSIS →PROCESSED →2D PROFILE, by choosing
ANALYSIS →OTHER →OPTIONS →2D PLOT.
3D Plot
3D Plot will create a 3-dimensional rendering of the surface area. Choose
ANALYSIS →PROCESSED →3D. Right click on the graphic display to access plot
and analysis options. These options will allow you to change the view angle, highlights,
shading and/or to add perspectives to the plot.

IV. Stitching
Stitching is an option that will allow for you to measure samples that are larger than a
single field of view. Several measurements are taken and “stitched” together to form one
dataset. Stitching properties are found in the Stitching tab in the measurements options
window.
1. To use stitching, select the Enable Stitching check box.
2. Select the desired Starting Options
Use Current Location: Allows you to set the measurement location before each
measurement.
Use Fixed Location: Will take a measurement at the same location each time.
(This location is set by clicking the Set Start button, then
moving the stage to the desired start location and clicking
OK once again.
3. Set the desired area to be measured using the Stitching Dimensions box. You may
either enter the desired dimensions or you may train the Wyko by marking the
measurement boundaries.
4. To verify your dimensions are correct, click Test. Click OK to continue through all
four corners of your desired area to be measured. Click Finish when done.
5. You may have to re-enter or re-Teach the dimensions of your die, if any part of the
measurement area was outside the corners of the test pattern.
IV. Turning off the Wyko
If you will not be using the Wyko within the next hour or the time is after 5pm, please
shut down the machine as follows.
1. Close Wyko Vision 3.22.
2. Close windows XP by selecting Start>>Shutdown.
3. Turn off the monitors.
4. Turn off the power to the main system by pushing in the main power switch.
IV. Measurements Tips
1. Check the limitations and resolution section of the reference page to determine which
measurement is best for your sample.
2. Transparent materials (i.e. PDMS, PMMA, Parylene, etc.) must be placed on top of a
reflective material (i.e. wafer, glass with metal, mirror, etc.)
3. The limitations for transparent materials, i.e. Silicon dioxide and Silicon Nitride, are a
minimum of 2 µm for measuring the step height.
Trouble Shooting
1. If the tilt head becomes stuck and will not tilt in any direction, the entire system
must be reset, including the power reset switch located in the back of the machine.

Download Veeco Vision 3.43- www.nanolab.ucla.edu/downloads/vision.zip