Aerotech ANT20G Series User manual

Revision: 1.01.00
ANT20G Hardware Manual

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PC-to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs
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customer order number available before you call or include it in your email.
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Phone: [phone]
Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015-2017, Aerotech, Inc., All rights reserved.

ANT20G Hardware Manual Table of Contents
Table of Contents
ANT20G Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Vacuum Operation 13
Chapter 2: Mechanical Specifications and Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 20
2.4. Attaching the Payload to the Stage 21
Chapter 3: Electrical Specifications and Installation 23
3.1. Motor and Feedback Connectors 24
3.2. Motor and Feedback Wiring 26
3.3. Motor and Feedback Specifications 27
3.4. Limits, Marker, and Machine Direction 29
3.5. Motor and Feedback Phasing 30
Chapter 4: Maintenance 33
4.1. Service and Inspection Schedule 33
4.2. Cleaning and Lubrication 34
4.3. Troubleshooting 36
Appendix A: Warranty and Field Service 37
Appendix B: Revision History 39
Index 41
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Table of Contents ANT20G Hardware Manual
List of Figures
Figure 1-1: Step and Settle Performance 12
Figure 2-1: Shipping Clamps 15
Figure 2-2: ANT20G-050 Dimensions 16
Figure 2-3: ANT20G-090 Dimensions 17
Figure 2-4: ANT20G-110 Dimensions 18
Figure 2-5: ANT20G-160 Dimensions 19
Figure 2-6: Mounting Hole Pattern 20
Figure 3-1: Motor and Feedback Wiring 26
Figure 3-2: Machine Direction 29
Figure 3-3: Hall Phasing 30
Figure 3-4: Analog Encoder Phasing Reference Diagram 31
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ANT20G Hardware Manual Table of Contents
List of Tables
Table 1-1: ANT20G Model Numbering System 9
Table 1-2: Environmental Specifications 10
Table 1-3: ANT20G Series Specifications (-050 and -090) 11
Table 1-4: ANT20G Series Specifications (-110 and -160) 12
Table 2-1: Stage to Mounting Surface Hardware 20
Table 3-1: Motor and Feedback Pinouts 25
Table 3-2: Feedback Specifications 27
Table 3-3: Motor Specifications 28
Table 3-4: Encoder Specifications 28
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Table of Contents ANT20G Hardware Manual
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ANT20G and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ANT20G stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ANT20G stage. Lifting or transporting the ANT20G stage
improperly can result in injury or damage to the ANT20G.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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ANT20G Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT20G
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which
it is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e., as a whole, including the equipment
referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln
Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
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Table of Contents ANT20G Hardware Manual
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ANT20G Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT20G Model Numbering System
ANT Series Vertical Travel Stage
Radius of Rotation (Required)
-050 50 mm radius of rotation
-090 90 mm radius of rotation
-110 110 mm radius of rotation
-160 160 mm radius of rotation
Metrology (Required)
-PL1 Base performance
-PL2 High-accuracy performance, PLUS
Accessories (To be Ordered as a Separate Line)
ALIGN-PA10 XY assembly; 10 arc sec orthogonality
ALIGN-PA5 XY assembly; 5 arc sec orthogonality
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Overview ANT20G Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ANT20G stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ANT20G. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ANT20G
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ANT20G is mounted.
Contact the factory for more details.
The accuracy specification of ANT20G series stages is measured at the center of rotation with the stage in
an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
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ANT20G Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT20G Series Specifications (-050 and -090)
Model -050 -090
Rotation Angle 20° 20°
Accuracy(1) ±90 µrad (±18 arc sec) ±50 µrad (±10 arc sec)
Resolution (Minimum Incremental Motion) 0.25 µrad (0.05 arc sec) 0.25 µrad (0.05 arc sec)
Bidirectional Repeatability(1) ±18 µrad (±4 arc sec) ±10 µrad (±2 arc sec)
Unidirectional Repeatability ±5 µrad (±1 arc sec) ±5 µrad (±1 arc sec)
Tilt Error Motion ±90 µrad (±18 arc sec) ±50 µrad (±10 arc sec)
Maximum Speed 150 degrees per second
Maximum Acceleration 1200 rad/s2500 rad/s2
Settling Time Refer to Figure Figure 1-1
In-Position Stability(2) ±0.4 µrad (±0.08 arc sec) ±0.2 µrad (±0.04 arc sec)
Nominal Radius of Rotation 50 mm 90 mm
Height from Tabletop to Rotation Point 19.1 mm 57.5 mm
Maximum Torque (Continuous) 0.40 N·m 0.85 N·m
Load Capacity Axial 1.5 kg 2.0 kg
Moment 60 kg·mm 80 kg·mm
Stage Mass 0.55 kg (1.2 lb) 1.1 kg (2.4 lb)
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent.
Consult factory for multi-axis or non-standard applications.
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Overview ANT20G Hardware Manual
Table 1-4: ANT20G Series Specifications (-110 and -160)
Model -110 -160
Rotation Angle 20° 20°
Accuracy(1) ±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Resolution (Minimum Incremental Motion) 0.25 µrad (0.05 arc sec) 0.25 µrad (0.05 arc sec)
Bidirectional Repeatability(1) ±10 µrad (±2 arc sec) ±10 µrad (±2 arc sec)
Unidirectional Repeatability ±5 µrad (±1 arc sec) ±5 µrad (±1 arc sec)
Tilt Error Motion ±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Maximum Speed 150 degrees per second
Maximum Acceleration 375 rad/s2250 rad/s2
Settling Time Refer to Figure Figure 1-1
In-Position Stability(2) ±0.2 µrad (±0.04 arc sec) ±0.15 µrad (±0.03 arc sec)
Nominal Radius of Rotation 110 mm 160 mm
Height from Tabletop to Rotation Point 76.2 mm 120.4 mm
Maximum Torque (Continuous) 1.00 N·m 2.40 N·m
Load Capacity Axial 2.0 kg 3.5 kg
Moment 80 kg·mm 140 kg·mm
Stage Mass 1.2 kg (2.6 lb) 1.6 kg (3.5 lb)
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent.
Consult factory for multi-axis or non-standard applications.
Figure 1-1: Step and Settle Performance
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ANT20G Hardware Manual Overview
1.4. Vacuum Operation
Aerotech can specially prepare the ANT20G for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
To ensure that the ANT20G will continue to perform well in the vacuum environment, follow the guidelines
listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
1. Do not remove the ANT20G from the sealed bag until it is ready for use.
2. Always handle the ANT20G in a clean environment and use powder-free polyethylene gloves to prevent
any contaminants from adhering to the surface of the ANT20G.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the ANT20G.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease
or a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers
bake out vacuum systems when first installing them in the vacuum chamber.
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Overview ANT20G Hardware Manual
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ANT20G Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ANT20G installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ANT20G. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ANT20G. Use care when
moving the ANT20G.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ANT20Gfrom its protective shipping container. Gently set the ANT20G on a smooth,
flat, and clean surface.
Before operating the ANT20G, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each ANT20G has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Clamps
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion and potential
damage from occurring during shipment. The brackets must be removed before the ANT20G can be
operated. Retain the brackets and hardware for future use.
Figure 2-1: Shipping Clamps
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Mechanical Specifications and Installation ANT20G Hardware Manual
2.2. Dimensions
Figure 2-2: ANT20G-050 Dimensions
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ANT20G Hardware Manual Mechanical Specifications and Installation
Figure 2-3: ANT20G-090 Dimensions
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Mechanical Specifications and Installation ANT20G Hardware Manual
Figure 2-4: ANT20G-110 Dimensions
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ANT20G Hardware Manual Mechanical Specifications and Installation
Figure 2-5: ANT20G-160 Dimensions
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Mechanical Specifications and Installation ANT20G Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ANT20G must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ANT20G stage. When it is mounted to a non-flat surface, the stage can be distorted as
the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm.
N O T E : The ANT20G is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT20G. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
When the stage is centered, the tabletop will block access to the mounting holes. With the power
disconnected, gently move the stage to either end of travel to expose the mounting holes.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M4 Socket Head Cap Screws (4 places) 2.0 N·m
Figure 2-6: Mounting Hole Pattern
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