Angst+Pfister PFLOW5001 Series User manual

Mass Flow Meter + Controller
Model PFLOW5001 / PFLOWC5001
VA.1
1 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

2
PFLOW5001/ PFLOWC5001 User Manual
MEMS Mass Flow Controller
PFLOW5001 / PFLOWC5001 Series
User Manual
Document No. 01-2023-OEMAP EN
Issue date: 2023.1
Revision: VA.1
2 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

3
PFLOW5001/ PFLOWC5001 User Manual
Attention!
Use with caution!
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles, as
particles may be accumulated inside the flow channel
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
•Do not apply for any unknown or non-specified gases that may
damage the product.
3 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

4
PFLOW5001/ PFLOWC5001 User Manual
Table of Contents
1. Overview.................................................................................................. 6
2. Receipt / unpack of the products ................................................................ 7
3. Knowing the products ............................................................................... 8
3.1 Product description.............................................................................................8
3.2 Power and data pinout description .......................................................................8
3.2.1 PFLOW5001 - RS232 TTL .....................................................................................8
3.2.2 PFLOW5001 - RS232 EIA ......................................................................................9
3.2.3 PFLOW5001 - RS485 Half-duplex .........................................................................9
3.2.4 PFLOW5001 - RS485 Full-duplex ........................................................................ 10
3.2.5 PFLOWC5001 - RS232 TTL ................................................................................. 10
3.2.6 PFLOWC5001 - RS232 EIA .................................................................................. 11
3.2.7 PFLOWC5001 - RS485 Half-duplex ..................................................................... 11
3.2.8 PFLOWC5001 - RS485 Full-duplex ...................................................................... 12
3.3 Mechanical dimensions...................................................................................... 13
4. Installation..............................................................................................15
5. Basic operation........................................................................................16
5.1 RS232 communication protocol..........................................................................16
5.1.1 Serial port settings............................................................................................16
5.1.2 Command format..............................................................................................16
5.1.3 Response format...............................................................................................16
5.1.4 Command to read/write variables....................................................................... 17
5.1.5 Read flow rate .................................................................................................. 17
5.1.6 Read serial number ...........................................................................................18
5.1.7 Select input mode .............................................................................................18
4 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

5
PFLOW5001/ PFLOWC5001 User Manual
5.1.8 Setpoint ...........................................................................................................19
5.1.9 Exhaust value ................................................................................................... 20
5.1.10 Offset calibration ........................................................................................ 20
5.1.11 P Gain and D Gain........................................................................................ 20
5.1.12 Firmware version......................................................................................... 21
5.1.13 Filter depth................................................................................................. 21
5.1.14 Gas temperature ......................................................................................... 21
5.2 RS485 Modbus communication protocol............................................................. 22
5.2.1 Hardware connection ........................................................................................ 22
5.2.2 Communication parameters .............................................................................. 22
5.2.3 Frame............................................................................................................... 23
5.2.4 Function codes.................................................................................................. 23
5.2.5 Registers .......................................................................................................... 23
5.3 Analog output and control.................................................................................26
6. Product selection.....................................................................................27
7. Product performance .............................................................................. 28
Appendix I: Document history........................................................................29
5 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

6
PFLOW5001/ PFLOWC5001 User Manual
1. Overview
This manual provides essential information for the operation of the PFLOW5001 / PFLOWC5001
series of gas mass flow controllers for general-purpose gas flow monitor and control applications.
The products have a full-scale mass flow rate from 0.05 to 20 SLPM (higher flow models are available
by request) and both analog and digital interfaces. The product performance, maintenance,
troubleshooting, information for product orders, technical support, and repair are also included.
PFLOW5001 / PFLOWC5001 products provide the standard or manifold configuration for the
mechanical connections. Optionally it can also be offered with a manifold body with customized
piping. It can be applied to instrumentation, medical and other applications. The series covers a wide
dynamic flow range with a working pressure rating of up to 1.0 MPa (10 bar or 150 PSI) and a
compensated temperature ranging from -5 to 50°C.
The sensing elements are manufactured with MEMS (micro-electro-mechanical systems) thermal
mass flow sensing technologies that measure the flow medium's calorimetry and diffusivity. The
sensor surface is passivated with silicon nitride ceramic materials and water/oilproof nanomaterials
coating for performance and reliability. Compared to the conventional calorimetric flow sensing
technology, this unique sensing approach offers better linearity, removes gas sensitivity for gases
with similar thermal diffusivities, and improves temperature performance. It can also auto-recognize
pre-programmed gases with significant differences in thermal diffusivity. It is the first in the industry
that senses the mass flow with multiple gases without a manual gas conversion factor. As such, it
facilitates and simplifies customer applications while ensuring high precision for gas measurements
with cost-effective air calibration.
6 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

7
PFLOW5001/ PFLOWC5001 User Manual
2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before dismantling the packing materials.
Ensure no damages during shipping. If any abnormality is observed, please contact and notify the
carrier who shipped the product and inform the distributors or sales representatives if the order is
not placed directly with the manufacturer; otherwise, the manufacturer should be informed. Please
refer to the return and repair section in this manual for any further actions.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the sensor formality per the actual order), together with the power and data cable if the order is
included, as shown below.
Please immediately check the integrity of the product and the power and data cable; if any
abnormality is identified, please notify the distributor/sales representative or manufacturer as soon
as possible. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. This user manual shall also be included in the packing box or via an online link for an
electronic version your sales agent should send. In most cases, this manual shall be made available
to the customer before the actual order.
PFLOW5001C Power and data cable (optional)
Figure 2.1: PFLOW5001 / PFLOW5001C mass flow controller and accessories
7 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

8
PFLOW5001/ PFLOWC5001 User Manual
3. Knowing the products
3.1 Product description
Figure 3.1: PFLOW5001 / PFLOWC5001 parts description
3.2 Power and data pinout description
3.2.1 PFLOW5001 - RS232 TTL
The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS232 TTL: RxD
4
RS232 TTL: TxD
5
Analog: Ground
6
N.C.
7
Analog: Flow output 0 ~ 5 Vdc
8
N.C.
9
N.C.
Control
electronics
Data/power socket
Control valve
Installation
mounting port.
Note: The manifold base port size should not be smaller than those of the flow ports on the
product.
Manifold flow
ports
Dowel pin port
Controller
body
Flow channel
in/outlet
Top view
8 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

9
PFLOW5001/ PFLOWC5001 User Manual
3.2.2 PFLOW5001 - RS232 EIA
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
3.2.3 PFLOW5001 - RS485 Half-duplex
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS232 EIA: RxD
4
RS232 EIA: TxD
5
Analog: Ground
6
Analog: Flow output 0 ~ 5 Vdc
7
N.C.
8
N.C.
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS485 Half-duplex: A (+)
4
RS485 Half-duplex: B (-)
5
N.C.
6
N.C.
7
N.C.
8
N.C.
9 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

10
PFLOW5001/ PFLOWC5001 User Manual
3.2.4 PFLOW5001 - RS485 Full-duplex
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
3.2.5 PFLOWC5001 - RS232 TTL
The electrical interface is a JST-SM09B-SRSS-TB connector (9 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS485 Full-duplex: R (+)
4
RS485 Full-duplex: R (-)
5
N.C.
6
RS485 Full-duplex: T (-)
7
RS485 Full-duplex: T (+)
8
N.C.
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS232 TTL: RxD
4
RS232 TTL: TxD
5
Analog: Ground
6
Analog: PID output 0 ~ 5 Vdc
7
Analog: Flow output 0 ~ 5 Vdc
8
Analog: Set point 0 ~ 5 Vdc
9
Analog: Valve override 0 ~ 5 Vdc
Top view
10 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

11
PFLOW5001/ PFLOWC5001 User Manual
3.2.6 PFLOWC5001 - RS232 EIA
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
3.2.7 PFLOWC5001 - RS485 Half-duplex
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS232 EIA: RxD
4
RS232 EIA: TxD
5
Analog: Ground
6
Analog: Flow output 0 ~ 5 Vdc
7
Analog: Set point 0 ~ 5 Vdc
8
Analog: Valve override 0 ~ 5 Vdc
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS485 Half-duplex: A (+)
4
RS485 Half-duplex: B (-)
5
Analog: Ground
6
Analog: Flow output 0 ~ 5 Vdc
7
Analog: Set point 0 ~ 5 Vdc
8
Analog: Valve override 0 ~ 5 Vdc
11 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

12
PFLOW5001/ PFLOWC5001 User Manual
3.2.8 PFLOWC5001 - RS485 Full-duplex
The electrical interface is a Micromatch (8 pole).
DO NOT connect or disconnect the cable when the external power is on!! It may damage
the electronic chipsets of the product!
Note: 1. Power supply: The PFLOW5001 / PFLOWC5001 requires a power supply of 8 ~ 24 Vdc (max 26
Vdc). No particular requirements for the external power supply, but standard industrial power
cautions should be applied.
2. The analog outputs 0 ~ 5 Vdc correspond to the specified full-scale flow range at the time of order.
If the analog option is not selected, this pin output could be NULL.
3. For PFLOWC5001 - RS232 TTL, RS232 EIA and RS485 Half-duplex, the analog valve override
feature overrules all other commands. The thresholds of valve override is 0.2Vdc.
0.0 ~ 0.2 Vdc: valve close
4.8 ~ 5.0 Vdc: valve forced open
Pin
Definition
1
Power, 8 ~ 24 Vdc
2
Power common / Ground
3
RS485 Full-duplex: R (+)
4
RS485 Full-duplex: R (-)
5
N.C.
6
RS485 Full-duplex: T (-)
7
RS485 Full-duplex: T (+)
8
N.C.
12 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

13
PFLOW5001/ PFLOWC5001 User Manual
3.3 Mechanical dimensions
Figure 3.2: PFLOW5001 (up to 3 SLPM) manifold mechanical dimensions.
13 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

14
PFLOW5001/ PFLOWC5001 User Manual
Figure 3.3: PFLOWC5001 (up to 7.5 SLPM) manifold mechanical dimensions.
14 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

15
PFLOW5001/ PFLOWC5001 User Manual
4. Installation
Do not open or alter any part of the product, which would lead to malfunction and irrecoverable
damage. Please pay special attention to ESD and other electrical device handling precautions since
this unit is an OEM version without external protection of the PCB etc. The system design should
consider electromagnetic compatibility and related standards. Do not install this device for
processes involving personal injury or other unsafe applications.
Ensure the connections leakage proof and all electrical precautions are applied for the installation.
Please make sure the electrical cable is engaged correctly. It should be noted that the performance
of a flow meter or controller will depend on system flow stability, although a flow conditioner is
installed in the product. The system design would be necessary for flow stability and related flow
noises.
To prevent over-forced installation, the mounding torque applied should be within 0.35±0.03 N·m.
Sealing O-ring is recommended to be the ones that comply with ISO 3601/1; the mounting screw is
specified for M3x20mm by ISO 14583; the dowel pin dimension is specified in the mechanical
dimension section.
Please properly align the products with your gas manifold block, and no excessive force should be
applied during installation. If the product is not calibrated for bi-directional operation, please follow
the flow direction arrow and ensure the flow direction is correct.
15 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

16
PFLOW5001/ PFLOWC5001 User Manual
5. Basic operation
5.1 RS232 communication protocol
5.1.1 Serial port settings
RTU
Baud rate (Bits per second)
57600 bps
Data bits
8
Stop bits
1
Parity
Odd
Flow control
No handshake
Level
TTL / EIA 232
Note: The maximum data writing rate is 100 Bytes/sec. Do not write when the device is active.
5.1.2 Command format
A one-character code is required at the beginning of any request. If the request is more than one
byte, a checksum that sums all the preceding bytes values, truncated to the last 8 bits of the results,
must be added at the end of the request.
5.1.3 Response format
The response must repeat the requested code, followed by data, ending with a checksum. The
STOP request has no response.
16 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

17
PFLOW5001/ PFLOWC5001 User Manual
5.1.4 Command to read/write variables
Please note: Channels 1 and 2 are reserved and not available. All read/write variables coded with 1
byte are MSB first. Continuous writing to persistent variables is not recommended, as it may
impact the memory's lifetime.
Hex
Command
Parameter
Access
Note
0x61
Read_VAR_INT16
Variable ID
0x62
Write_VAR_INT16
Variable ID+ Value of 2
bytes (higher first)
0x63
Read_VAR_CHAR
Variable ID
0x64
Write_VAR_CHAR
Variable ID+ Value of 1
byte (higher first)
5.1.5 Read flow rate
Hex
Command
Parameter
Access
Note
0x31
Send_ONE_DATA
None
R/W
Single request, 1 flow value
0x32
Send_N_DATA
Nx 1byte
R/W
N flow value
0x33
Send_CONTINOUS
None, terminate with
stop
Flow values (each 3.5 msec)
0x34
STOP
None
R/W
No response
The digital flow measure range (forward only) is (0…10000) = (0x0000…0x2710) = (0...100 %) F.S.
The maximum reading value is 11000 = 0x2AF8 = 110 % F.S.
Real_flow = digital_flow / 10000 * max_flow
17 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

18
PFLOW5001/ PFLOWC5001 User Manual
Example:
Data direction
Hex data
Flow
Remark
Rx
31
32 02 34
33
34
Depends on the flow
Select desired input for set point,
0Hex = digital input, 1Hex= analog
input
Tx
31 XX XX YY
32 HH LL YY 32 HH LL YY
33 XX XX YY
None
Depends on the flow
YY = Checksum. Translate the Hex
value in the Dec value and apply the
decoding formula to get the actual
flow measure
0x33 returns measured flow
continuously each 3.5 ms
STOP the continuous reading
5.1.6 Read serial number
Hex
Command
Parameter
Access
Note
0x68
Read_Serial_Number
None
R
Serial number
5.1.7 Select input mode
Hex
Command
Data type
Access
Note
0x1F
Select input mode
UINT8
R/W
Select input mode for set
point, 0 = digital input, 1=
analog input
Example 1: Check the input mode
Data direction
Hex data
Flow
Remark
Rx
63 1F 82
-
request –variable ID –checksum
Tx
63
-
The device sends back the request
18 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

19
PFLOW5001/ PFLOWC5001 User Manual
Example 2: Change the input mode
Data direction
Hex data
Flow
Remark
Rx
64 1F 00 83
64 1F 01 84
Last value independent of
the previous mode
Set point according to
analog value present at the
input pin
Set the digital input mode
Set the analog input mode
Tx
64
64
The device sends back the
request
Tx
5.1.8 Setpoint
Hex
Command
Parameter
Access
Note
0x14
CtrlNominal
None
R/W
Set point mass flow
The digital set point range is (0…65535) = (0x0000…0xFFFF) = (0%...100%) F.S.
Example:
Data direction
Hex data
Flow
Remark
Rx
62 14 00 00 76
62 14 02 90 08
62 14 80 00 F6
62 14 FF FF 74
0 % F.S.
1 % F.S.
50 % F.S.
100 % F.S.
Zero flow
Cut off limit value if present (on
request)
Flow set at 50 % of the F.S.
Flow set at 100 % of the F.S.
Tx
62
The device sends back the
request
The device sends back the request
Example with a 250 sccm F.S. device and a set point of 110 sccm:
set point = 110 [sccm] / 250 [sccm] * 65535 = 28835 = 0x70A3
19 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623

20
PFLOW5001/ PFLOWC5001 User Manual
5.1.9 Exhaust value
Hex
Command
Data type
Access
Note
0x1E
Exhaust value
UINT16
R/W
Exhaust value for open-loop
control
Exhaust value is type uint16, the two bytes full range are (0…65535)= (0x0000…0xFFFF)
A value range between (0…4,095) allows direct control of the valve position from 0 corresponding
to a closed valve to 4,095 corresponding to a fully open valve. Any value in between corresponds to
a valve position, the resulting flow will be a nonlinear function of this value and a consistent offset is
necessary to obtain a flow.
Setting the value to 32,768 (0x8000) enables PID control using either a digital or analog setpoint
according to the selected mode.
Other values are not used.
5.1.10 Offset calibration
Hex
Command
Data type
Access
Note
0x03
Offset_zero
UINT8
R/W
Read:
0 –completed; 3 –error.
Write 0 –none; 2 –reset.
5.1.11 P Gain and D Gain
Hex
Command
Data type
Access
Note
0x17
P Gain
UINT16
R/W
Available valve: 0 ~ 9999.
The default value is 15.
0x19
D Gain
UINT16
R/W
Available valve: 0 ~ 9999.
The default value is 25.
20 PFLOW5001-PFLOW5001C_1610-21914-0070-E-0623