APPLIED MATERIALS CoolEND 0190-13674 Owner's manual
- 1 -
Table of Contents
PREFACE
Compliance ............................................................................................ 3
After-sale support ................................................................................... 3
Unpacking .............................................................................................. 3
SECTION I
Safety
Warnings ................................................................................................ 4
Emergency Off (EMO ............................................................................ 5
Lockout/Tagout ....................................................................................... 5
Chemicals .............................................................................................. 5
Labels & Locations ................................................................................. 6
SECTION II
General Information
Description ............................................................................................. 8
Specifications ......................................................................................... 9
SECTION III
Installation
Site ......................................................................................................... 10
Facility Water Requirements................................................................... 10
Electrical Requirements .......................................................................... 12
Electrical Wiring Installation .................................................................... 13
Plumbing Requirements .......................................................................... 14
DEI Cartridge .......................................................................................... 16
Fluids ..................................................................................................... 16
Filling Requirements ............................................................................... 17
Draining .................................................................................................. 17
Microprocessor Controller ....................................................................... 18
LEDs ...................................................................................................... 19
Fault Messages ...................................................................................... 23
SECTION IV
Operation
Start Up .................................................................................................. 25
Flow Transducers ................................................................................... 26
Low Fluid Level Safety ............................................................................ 27
Autorefill ................................................................................................. 27
Variable Frequency Drive ........................................................................ 27
Emergeny Off (EMO .............................................................................. 27
Remote Interface .................................................................................... 28
Resistivity Sensor ................................................................................... 29
DeviceNet ............................................................................................... 29
DeviceNet Interface ................................................................................. 30
DeviceNet Messaging ............................................................................. 31
MODULE STATUS LED .......................................................................... 32
NETWORK STATUS LED ....................................................................... 32
Connectors ............................................................................................. 34
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SECTION V
Periodic Maintenance
Service Contracts ................................................................................... 35
Deionizing Cartridge ................................................................................ 35
Periodic Cleaning .................................................................................... 36
Heat Exchanger and Pump Lifting Procedures ........................................ 36
Waste Disposal ...................................................................................... 36
SECTION VI
Trou leshooting
Checklist ................................................................................................ 37
Displaying Software Version ................................................................... 38
Service Assistance ................................................................................. 38
SECTION VII
Diagrams
Flow Diagram .......................................................................................... 39
Unit Dimensions and Center of Gravity .................................................... 40
Seismic Tie Downs and Leveling Feet ..................................................... 41
Wiring Diagram ....................................................................................... 42
Appendix - Applied Materials LOTO Procedure
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Preface
Compliance
Products tested and found to be in compliance with the requirements defined in
the EMC standards defined by 89/336/EEC can be identified by the CE label
on the rear of the unit. The testing has demonstrated compliance with the
following standards:
EMC Directive, 89/336/EEC
EN 61326-1:1987, +A1:1998, Class A Equipment
Low Voltage Directive, 73/23/EEC
EN61010-1:1993, +A1:1994, +A2:1995
The unit also complies with SEMI S2-0200 and F-47.
For any additional information refer to the Letter of Compliance that shipped
with the unit.
After-sale Support
Thermo Electron Corporation is committed to customer service both during and
after the sale. If you have questions concerning the operation of your unit,
contact our Sales Department. If your unit fails to operate properly, or if you
have questions concerning spare parts or Service Contracts, contact our
Customer Service Department. Before calling, please obtain the following
information from the unit's serial number label:
- BOM number _________________________
- Serial number _________________________
- Software version (see page 38) ____________
Unpacking
Retain all cartons and packing material until the unit is operated and found to
be in good condition. If the unit shows external or internal damage contact the
transportation company and file a damage claim. Under ICC regulations, this is
your responsibility.
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Section I Safety
Warnings
Make sure you read and understand all instructions and safety precautions
listed in this manual before installing or operating your unit. If you have any
questions concerning the operation of your unit or the information in this manual,
contact our Sales Department for assistance (see Preface, After-sale Support .
Warnings are posted throughout the manual. Read and follow these important
instructions.
DANGER indicates an imminently hazardous situation which, if not avoided,
will result in serious injury or death. This signal word is limited to the most
extreme situations.
WARNING indicates a potentially hazardous situation which, if not avoided,
could result in serious injury or death.
CAUTION indicates a potentially hazardous situation which, if not avoided,
may result in minor or moderate injury. It may also be used to alert against
unsafe practices.
Performance of installation, operation, or maintenance procedures
other than those descri ed in this manual may result in a hazardous
situation and may void the manufacturers warranty.
Transport the unit with care. Sudden jolts or drops can damage the
coolant lines.
Do not attempt to defeat any of the interlock switches or safety
features uilt into the unit.
O serve, and never remove, all warning la els.
Never operate damaged or leaking equipment.
Never operate the unit without cooling fluid in the fluid reservoir.
Use lockout tag-out procedures, local or remote, prior to servicing the
unit. There is a circuit reaker mechanism on the rear of the unit. Make
sure the unit is off efore connecting or disconnecting the power cord
or other ca les.
Always disconnect power from the power source efore performing any
service or maintenance procedures, or efore moving the unit.
Always empty the fluid reservoir efore moving the unit.
Never operate equipment with damaged power cords.
Refer service and repairs to a qualified Thermo technician.
CAUTION
WARNING
DANGER
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Emergency Off (EMO)
A guarded red mushroom shaped push-button switch with twist-to-reset is
provided in the front of the unit to turn off the unit in case of an emergency. The
button head is engraved with EMO in large white filled letters.
Activation of the EMO button will remove power from the main contactor coil
stopping operation of the unit.
Resetting of the EMO button will not restart the unit. After all hazards have
been removed and the EMO is reset, the unit must be reset by pushing the
PUMP ON button on the control panel.
Lockout/Tagout (LOTO)
Before performing heat exchanger maintenance, the energy sources associ-
ated with the chiller system must be lockout and tagged out (LOTO . Hazard
control features added to the system (e.g., safety interlocks, EMO are not a
substitute for turning off and locking out electrical or fluid energy.
Electrical LOTO is accomplished by locking the circuit breaker on the right
side of the unit in the open (0 position. Electrical LOTO can also be provided
by:
Using the unit's circuit breaker.
Using the main disconnect.
Disconnecting main power at the facility power source prior to the system.
In addition, follow all OSHA and local facility LOTO directives.
NOTE: The unit does not provide LOTO for the facility water flow. An external
customer-supplied device is required.
Chemicals
There are no hazardous chemicals associated with this unit.
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La els and Locations
La el Quantity-Location
Caution, refer to accompanying 2-rear
documents for explanation.
Main system ground 1-inside electrical
panel
Secondary Ground 4-inside electrical
panel, behind cover
The label indicates the use of 1-top rear panel
Lockout/Tagout procedures.
This label indicates 2-rear panel,controller
Hazardous Voltage. door
This label warns the operator 1-controller door
that service must be performed
by a qualified technician.
This indicates unit power. 1-next to circuit breaker
WARNING
WARNING
1
0
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La el Quantity-Location
Heavy Object warns the 2-pump motor, heat
operator about the weight exchanger
of the object.
These labels indicate the 8-next to facility/
direction of fluid flow with process water
respect to the unit. The box connections
represents the unit, the arrow
the direction of flow.
This label indicates the Internal plumbing
direction of fluid flow.
This label indicates 1-rear
the maximum facility
water pressure.
This label indicates the correct 1-front
fluid flow direction through the DI
cartridge as well as the
orientation of the DI cartridge
when correctly installed. The
direction of the arrows on the
cartridge must agree with the
arrows on the label. The proper flow
direction is downward. Disregard the
INSTALL THIS END UP indication
on the cartridge label.
WARNING
MAXIMUM
FACILITY WATER
PRESSURE
80 PSI (551KpA)
INSTALL DEI CARTRIDGE
WITH LABEL ORIENTED
AS SHOWN
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- 8 -
Temperature Controller
EMO
DI Cartridge
Reservoir Fill
Reservoir Overflow
Drip Pan Drain
Reservoir Drain
Facility Water Connections
uto Refill
Process Return Channels
DeviceNet Connection
Reservoir Level Indicator
Process Main and ux Supply
Main Breaker &
Lockout/Tagout
Seismic Tiedown
Power In
Section II General Information
Description
The CoolENDTM is designed to remove heat loads from liquid-cooled instru-
ments. The unit uses facility cooling or tap water as the secondary cooling
medium to remove heat from the primary fluid in the closed recirculation loop.
The unit consists of a plate heat exchanger, recirculation pump, stainless
steel reservoir, replaceable deionizing cartridge, and a microprocessor control-
ler. The controller monitors temperature, displays all fluid flows, and controls
both resistivity and pressure.
The unit has 10 return lines. The flow rate in 8 of these lines as well as the
facility flow line is monitored by flow transducers. The unit also has fluid level
sensors designed to protect the unit's pump and the application. A resistivity
sensor monitors resistivity and sends a signal to the controller when DI
cannister replacement is necessary.
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Pressure PSI
10 20 30 40 50 60 70 80
Flow rate (gallons per minute)
Specifications
Temperature Range1,2
Cooling Capacity2,3
Pumping Capacity3
Reservoir Volume4
Gallons
Unit Dimensions5
(H x W x D)
Inches
Centimeters
Weight
Empty
Full
Shipping
Noise Level
18 to 25
53 9/16 x 32 x 32 1/8
136.0 x 81.3 x 81.6
626 pounds 284 kilogra s
1299 pounds 589 kilogra s
972 pounds 441 kilogra s
66 db(A)
+20°C to +30°C
200 Kw @ 50 gp
1. Lower limit determined by facility water temperature.
2. Specifications are for the unit operating up to 5000 feet. Contact Thermo for ratings at
higher altitudes.
3. Based on DT 8°C between process water out and facility water in.
4. Total volume, including drainback capability. Nominal run is 83 gallons.
5. For complete dimensions and CG information see pages 40 and 41.
30
25
20
15
10
5
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CAUTION
CAUTION
Facility Water PSID
25.0
20.0
15.0
10.0
5.0
Facility Water Flow Rate GPM
15 20 25 30 35 40 45 50 55 60
Section III Installation
Site
The unit should be placed in a location with easy access to a facility cooling
water and a drain. For proper ventilation, a ini u clearance of 6 inches
(15 centi eters) at the rear of the unit is necessary.
Ensure there is enough clearance on the right side of the unit to access
the power disconnect reaker.
Never place the unit in a location where excessive heat, moisture, or
corrosive materials are present.
A bient te peratures should be between 20°C and 30°C, relative hu idity
less than 80%.
Facility Water
Requirements
Use the following graphs to deter ine the facility water require ents. If the
facility water does not eet these require ents, the cooling capacity will be
reduced.
Minimum Recommended Facility Water Pressure Differential *
(@ 20°C Facility entry water temperature)
* Unrestricted pressure delivered at the unit connections.
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Estimated Cooling Capacity (kW)
Cooling Capacity kW
400
350
300
250
200
150
100
50
Facility Water Flow Rate GPM
50 40 30 20
B
C
D
EFacility Water Entering
= 24°C
B = 22°C
C = 20°C
D = 18°C
E = 15°C
Nominal process side delivery of 50 GPM @ 30°C
Deduct approximately 2.2 kW for 3HP pump
*nominal rating point (200kW)
Estimated Cooling Capacity (BTUH)
B
C
D
E
Facility Water Entering
= 24°C
B = 22°C
C = 20°C
D = 18°C
E = 15°C
Nominal process side delivery of 50 GPM @ 30°C
Deduct approximately 7632 BTUH for 3HP pump
*nominal rating point (682427 BTUH)
Cooling Capacity BTUH
1,400,000
1,200,000
1,000,000
800,000
600,000
400,000
200,000
Facility Water Flow Rate GPM
50 40 30 20
*
*
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WARNING
WARNING
Electrical Requirements
and Ratings
The unit construction provides protection against the risk of electric
shock y grounding appropriate metal parts. The protection may not
function unless the unit is properly grounded. It is the users responsi il-
ity to assure a proper ground connection is provided to the main ground
connection point of the unit marked with the green . The ground
connection is to the ground stud.
Refer to the serial nu ber label on the side of the unit for the specific electrical
require ents of your unit.
Volts 200-208 380-400 460
Hertz 50/ 60±1% 50±1% 60±1&
Phase 3Ø 3Ø WYE 3Ø WYE
Amperes 10 5 5
For high-voltage units, ensure the terminal lock (4TB), located in the
electrical enclosure, is configured in the correct position to meet the
power source rating. 4L1 is shipped in position 4TB1. For 60Hz opera-
tion reposition 4L1 to 4TB2, for 50Hz operation reposition it to 4TB3.
Make sure the voltage of the power source agrees with the units voltage and
frequency rating. The unit is designed to tolerate deviations of ±10% fro the
rated line voltage.
Ensure your power cable eets the electrical require ents of the unit and all
applicable codes.
If using an external Main Power Disconnect, we reco end locating the
switch or circuit-breaker near the equip ent.
This unit should not be powered fro an Uninterruptable Power Supply (UPS)
or other source of non-linear voltage and current. Doing so y result in nui-
sance trips of the ain circuit protector.
Transient overcurrent protection is category II. The pollution degree is 2.
- 13 -
Electrical Wiring Installation
The following should e performed only y a qualified technician.
Re ove the Lockout/Tagout (LOTO) asse bly.
Re ove the yellow plastic cover on the circuit breaker (CB).
Route the power cable through the strain relief and into the unit.
Connect the pri ary ground to the ain ground stud located near
the CB.
Connect the L1, L2, and L3 power leads as shown on the yellow plastic cover.
Place the yellow plastic cover back on the CB.
Reinstall the LOTO asse bly.
WARNING
L3 L2 L1
ROUTE FIELD WIRING OUTWARD TOWARD
THIS SIDE OF BREAKER THEN DOWNWARD
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Plum ing
Requirements
Facility water supply should not exceed 80 psi. Facility water supply
should not exceed 75 gpm.
Flexible tubing, if used, should be of heavy wall or reinforced construction. The
FACILITY WATER IN is subjected to the axi u pressure of the facility
cooling water. Hose connections should be securely cla ped and rated to
withstand the axi u pressure of the syste .
The plu bing connections are located on the right side of the unit and are
labelled: FACILITY WATER SUPPLY (2"FPT), FACILITY WATER RETURN
(2"FPT), MAIN PROCESS SUPPLY (2"FPT), AUX PROCESS SUPPLY 1 - 2
(1"FPT), PROCESS RETURN LINES 1 - 8 (1"FPT), AUXILIARY RETURN
LINES 1 - 2 (1"FPT), and AUTO REFILL FLUID SUPPLY (½" FPT). See
illustration on page 8.
In order to isolate the flow of facility water for lockout/tagout, user-supplied
isolation valves ust be installed on the supply and return lines to the
CoolENDTM.
Before installing the unit to an instru ent that previously used tap water as a
cooling fluid, flush the instru ent several ti es to re ove any rust or scale
that has built up.
The units pump is capa le of generating up to 40 psi. The SUPPLY
plum ing should e rated to withstand that pressure.
Connect the MAIN PROCESS SUPPLY line to the inlet of your application.
Connect the eight MONITORED RETURN LINES and the two UNMONITORED
AUXILIARY RETURN LINES to the applicable lines ( onitored or un onitored).
Connect the FACILITY WATER SUPPLY to the cooling water supply and the
FACILITY WATER RETURN to the cooling water drain or return.
If substantial lengths of cooling lines are required, they should be pre-filled with
cooling fluid before connecting the to the unit.
Avoid running tubing near radiators, hot water pipes, etc. If substantial tubing
lengths are necessary, insulation ay be required to prevent loss of cooling
capacity.
It is i portant to keep the distance between the unit and the instru ent being
cooled as short as possible, and to use the largest dia eter tubing practical.
Tubing should be straight and without bends. If dia eter reductions ust be
ade, they should be ade at the inlet and outlet of the instru ent being
cooled, not at the unit.
CAUTION
CAUTION
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Table 1 Facilities Requirements
Facilities Type Fitting Size Fitting Type Material Pressure Flow Comments
Monitored return 1" FPT Stainless Steel ~5 psi 2 -10 gp at <15psi Per channel
Auxiliary return 1" FPT Stainless Steel ~5 psi
Main Supply 2" FPT Stainless Steel 25 psi ax 50gp at <21psi
at supply anifold*
Auxiliary supply 1" FPT Stainless Steel 25 psi ax
Facility water In 2" FPT Stainless Steel 80 psi ax** 50gp ax Higher pressures-
consult Ther o
Facility water Out 2" FPT Stainless Steel 80 psi ax** 50gp ax Higher pressures-
consult Ther o
Autorefill ½" FPT Stainless Steel 80 psi ax Unregulated Higher pressures-
consult Ther o
Reservoir Drain ½" FPT Stainless Steel At ospheric N/A
Reservoir Overflow 1 FPT Stainless Steel At ospheric N/A
AC Power Input Custo er N/A N/A N/A N/A
Supplied
*Flow at main supply may be reduced is auto supply connections are used.
**Minimum pressure differential between facility water supply and return should be at least 20 psid.
- 16 -
Tubing and insulation are available fro Ther o. Contact our Sales Depart ent
for ore infor ation (see Preface, After-sale Support).
Connect the reservoir and drip pan overflows to a suitable DI drain. NOTE: To
re ain co pliant to SEMI S2-0200, the drip pan drain ust be connected at
all ti es.
To drain the unit's tank re ove the right side panel. The valve is located at the
botto of the unit. Connect the fitting to an appropriate drain and then open the
valve.
DEI Cartridge
The De-ionization (DEI) cartridge is shipped in a sealed plastic bag. The DEI
hose with quick disconnects (QD) ships separately. Open the plastic bag,
re ove the DEI cartridge.
The cartridge must be installed according to the instruction label on the unit.
Install the hose with QD onto the inlet end of the cartridge. Secure the hose to
the cartridge by tightening the provided hose cla p to approxi ately four inch-
pounds.
Fluids
For day-to-day operation the unit is designed to use DEI water, up to 0.8
egoh .
The unit is not designed to run with resistivity a ove 3 megohm for
extended periods of time, ut higher resistivity fluid, up to 18 megohms
can e added during start-up or via the auto refill.
The DEI cartridge is intended for aintaining resistivity only. Filling the syste
with high purity DEI water will increase the life of the DEI Cartridge. If tap water
is used the cartridge ay beco e depleted during start-up and ay require
pre ature replace ent.
CAUTION
- 17 -
Filling Requirements
Consult Applied Materials for filling procedure.
The unit is not designed to run with resistivity a ove 3 megohm for
extended periods of time, ut higher resistivity fluid, up to 18 megohms
can e added during start-up or via the auto refill.
For initial fill press and hold the up arrow key on the controller for 10 seconds.
The controller will display MANUAL FILL IN PROGRESS PRESS ANY KEY
TO STOP. Filling will auto atically stop once it fluid reaches the full level or
after the auto refill echanis has run for 20 inutes of continuous operation.
NOTE: Continuous operation of the auto refill echanis for periods of 20
inutes or ore generally indicates a proble .
The reservoir must e filled with a minimum of 14 gallons to ensure the
pump head remains su merged.
The unit has a no inal evaporation rate of up to 2.5 gallons per day. Ensure
the autorefill syste is installed. Autorefill activates if the level is below 20
gallons and deactivates above 25 gallons.
The total reservoir capacity is 83 gallons (including shutdown and floodback).
To prevent siphoning, all tank return lines are located at the top of the tank.
The FLUID RESERVOIR FILL PORT located on the right side of the unit is
available for anually filling the reservoir.
Draining
Connect the reservoir and drip pan drains, both located on the right hand side
of the unit, to a suitable DI drain.
NOTE: In order to drain the DEI and auto refill solenoids you ust press and
hold the up arrow key on the controller for 10 seconds. The controller will
display MANUAL FILL IN PROGRESS PRESS ANY KEY TO STOP. Vacuu
the fluid out of the lines through the process supply and auto refill fittings.
CAUTION
CAUTION
- 18 -
Microprocessor
Controller
An alphanu eric LCD display presents nu eric readings of various operating
conditions within the chiller. Display function is selected by pressing the
appropriate keys to ove through a enu of available infor ation.
The controller has two different loops: Operator's and Setup. The controller
loops allow the operator to display and/or alter different para eters of the
controller. When the controller is first powered up it goes through a short self
test sequence and then enters the Operator's Loop, displaying the reservoir
fluid te perature.
In the Setup Loop, the YES key incre ents the value and the NO key decre-
ents the value. Pressing either key for over three seconds accelerates the
changing value. The display will flash as soon as any value is changed, and will
continue to flash until the ENTER key is pressed to accept the new value. The
new value will not be used by the controller until the ENTER key is depressed
and the display stops flashing.
If the NEXT key is pressed while the value is flashing, the new value will not be
accepted. The display will stop flashing and the original value will be displayed.
In this case the NEXT key can be used to abort data entry. The display will not
sequence unless the NEXT key is depress again.
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LEDs
The bicolor NETWORK STATUS LED indicates the status of the co unica-
tion link. Reference page 32 for DeviceNet LED status.
The bicolor MODULE STATUS LED indicates whether or not the device has
power and is operating properly. Reference page 32 for DeviceNet LED status.
The yellow REPLACE DEI CART indicates the resistivity is below the setpoint.
The yellow TROUBLE indicates a unit fault. The LCD display will indicate the
specific fault, see Fault Messages on page 23.
The green DEI CART GOOD indicates the resistivity is above the low level
setpoint.
This manual suits for next models
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