APPLIED MATERIALS CoolEND 0190-13674 Owner's manual

Thermo Manual P/N U00840
Rev. 06/15/04
200 kW DI Water-to-Water
Heat Exchanger for
208-Volt or 460-Volt
200mm/300mm Systems
Installation
Operation
Basic Service
0190-13674 / 0190-13675

- 1 -
Table of Contents
PREFACE
Compliance ............................................................................................ 3
After-sale support ................................................................................... 3
Unpacking .............................................................................................. 3
SECTION I
Safety
Warnings ................................................................................................ 4
Emergency Off (EMO ............................................................................ 5
Lockout/Tagout ....................................................................................... 5
Chemicals .............................................................................................. 5
Labels & Locations ................................................................................. 6
SECTION II
General Information
Description ............................................................................................. 8
Specifications ......................................................................................... 9
SECTION III
Installation
Site ......................................................................................................... 10
Facility Water Requirements................................................................... 10
Electrical Requirements .......................................................................... 12
Electrical Wiring Installation .................................................................... 13
Plumbing Requirements .......................................................................... 14
DEI Cartridge .......................................................................................... 16
Fluids ..................................................................................................... 16
Filling Requirements ............................................................................... 17
Draining .................................................................................................. 17
Microprocessor Controller ....................................................................... 18
LEDs ...................................................................................................... 19
Fault Messages ...................................................................................... 23
SECTION IV
Operation
Start Up .................................................................................................. 25
Flow Transducers ................................................................................... 26
Low Fluid Level Safety ............................................................................ 27
Autorefill ................................................................................................. 27
Variable Frequency Drive ........................................................................ 27
Emergeny Off (EMO .............................................................................. 27
Remote Interface .................................................................................... 28
Resistivity Sensor ................................................................................... 29
DeviceNet ............................................................................................... 29
DeviceNet Interface ................................................................................. 30
DeviceNet Messaging ............................................................................. 31
MODULE STATUS LED .......................................................................... 32
NETWORK STATUS LED ....................................................................... 32
Connectors ............................................................................................. 34

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SECTION V
Periodic Maintenance
Service Contracts ................................................................................... 35
Deionizing Cartridge ................................................................................ 35
Periodic Cleaning .................................................................................... 36
Heat Exchanger and Pump Lifting Procedures ........................................ 36
Waste Disposal ...................................................................................... 36
SECTION VI
Trou leshooting
Checklist ................................................................................................ 37
Displaying Software Version ................................................................... 38
Service Assistance ................................................................................. 38
SECTION VII
Diagrams
Flow Diagram .......................................................................................... 39
Unit Dimensions and Center of Gravity .................................................... 40
Seismic Tie Downs and Leveling Feet ..................................................... 41
Wiring Diagram ....................................................................................... 42
Appendix - Applied Materials LOTO Procedure

- 3 -
Preface
Compliance
Products tested and found to be in compliance with the requirements defined in
the EMC standards defined by 89/336/EEC can be identified by the CE label
on the rear of the unit. The testing has demonstrated compliance with the
following standards:
EMC Directive, 89/336/EEC
EN 61326-1:1987, +A1:1998, Class A Equipment
Low Voltage Directive, 73/23/EEC
EN61010-1:1993, +A1:1994, +A2:1995
The unit also complies with SEMI S2-0200 and F-47.
For any additional information refer to the Letter of Compliance that shipped
with the unit.
After-sale Support
Thermo Electron Corporation is committed to customer service both during and
after the sale. If you have questions concerning the operation of your unit,
contact our Sales Department. If your unit fails to operate properly, or if you
have questions concerning spare parts or Service Contracts, contact our
Customer Service Department. Before calling, please obtain the following
information from the unit's serial number label:
- BOM number _________________________
- Serial number _________________________
- Software version (see page 38) ____________
Unpacking
Retain all cartons and packing material until the unit is operated and found to
be in good condition. If the unit shows external or internal damage contact the
transportation company and file a damage claim. Under ICC regulations, this is
your responsibility.

- 4 -
Section I Safety
Warnings
Make sure you read and understand all instructions and safety precautions
listed in this manual before installing or operating your unit. If you have any
questions concerning the operation of your unit or the information in this manual,
contact our Sales Department for assistance (see Preface, After-sale Support .
Warnings are posted throughout the manual. Read and follow these important
instructions.
DANGER indicates an imminently hazardous situation which, if not avoided,
will result in serious injury or death. This signal word is limited to the most
extreme situations.
WARNING indicates a potentially hazardous situation which, if not avoided,
could result in serious injury or death.
CAUTION indicates a potentially hazardous situation which, if not avoided,
may result in minor or moderate injury. It may also be used to alert against
unsafe practices.
Performance of installation, operation, or maintenance procedures
other than those descri ed in this manual may result in a hazardous
situation and may void the manufacturers warranty.
Transport the unit with care. Sudden jolts or drops can damage the
coolant lines.
Do not attempt to defeat any of the interlock switches or safety
features uilt into the unit.
O serve, and never remove, all warning la els.
Never operate damaged or leaking equipment.
Never operate the unit without cooling fluid in the fluid reservoir.
Use lockout tag-out procedures, local or remote, prior to servicing the
unit. There is a circuit reaker mechanism on the rear of the unit. Make
sure the unit is off efore connecting or disconnecting the power cord
or other ca les.
Always disconnect power from the power source efore performing any
service or maintenance procedures, or efore moving the unit.
Always empty the fluid reservoir efore moving the unit.
Never operate equipment with damaged power cords.
Refer service and repairs to a qualified Thermo technician.
CAUTION
WARNING
DANGER

- 5 -
Emergency Off (EMO)
A guarded red mushroom shaped push-button switch with twist-to-reset is
provided in the front of the unit to turn off the unit in case of an emergency. The
button head is engraved with EMO in large white filled letters.
Activation of the EMO button will remove power from the main contactor coil
stopping operation of the unit.
Resetting of the EMO button will not restart the unit. After all hazards have
been removed and the EMO is reset, the unit must be reset by pushing the
PUMP ON button on the control panel.
Lockout/Tagout (LOTO)
Before performing heat exchanger maintenance, the energy sources associ-
ated with the chiller system must be lockout and tagged out (LOTO . Hazard
control features added to the system (e.g., safety interlocks, EMO are not a
substitute for turning off and locking out electrical or fluid energy.
Electrical LOTO is accomplished by locking the circuit breaker on the right
side of the unit in the open (0 position. Electrical LOTO can also be provided
by:
Using the unit's circuit breaker.
Using the main disconnect.
Disconnecting main power at the facility power source prior to the system.
In addition, follow all OSHA and local facility LOTO directives.
NOTE: The unit does not provide LOTO for the facility water flow. An external
customer-supplied device is required.
Chemicals
There are no hazardous chemicals associated with this unit.

- 6 -
La els and Locations
La el Quantity-Location
Caution, refer to accompanying 2-rear
documents for explanation.
Main system ground 1-inside electrical
panel
Secondary Ground 4-inside electrical
panel, behind cover
The label indicates the use of 1-top rear panel
Lockout/Tagout procedures.
This label indicates 2-rear panel,controller
Hazardous Voltage. door
This label warns the operator 1-controller door
that service must be performed
by a qualified technician.
This indicates unit power. 1-next to circuit breaker
WARNING
WARNING
1
0

- 7 -
La el Quantity-Location
Heavy Object warns the 2-pump motor, heat
operator about the weight exchanger
of the object.
These labels indicate the 8-next to facility/
direction of fluid flow with process water
respect to the unit. The box connections
represents the unit, the arrow
the direction of flow.
This label indicates the Internal plumbing
direction of fluid flow.
This label indicates 1-rear
the maximum facility
water pressure.
This label indicates the correct 1-front
fluid flow direction through the DI
cartridge as well as the
orientation of the DI cartridge
when correctly installed. The
direction of the arrows on the
cartridge must agree with the
arrows on the label. The proper flow
direction is downward. Disregard the
INSTALL THIS END UP indication
on the cartridge label.
WARNING
MAXIMUM
FACILITY WATER
PRESSURE
80 PSI (551KpA)
INSTALL DEI CARTRIDGE
WITH LABEL ORIENTED
AS SHOWN
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- 8 -
Temperature Controller
EMO
DI Cartridge
Reservoir Fill
Reservoir Overflow
Drip Pan Drain
Reservoir Drain
Facility Water Connections
uto Refill
Process Return Channels
DeviceNet Connection
Reservoir Level Indicator
Process Main and ux Supply
Main Breaker &
Lockout/Tagout
Seismic Tiedown
Power In
Section II General Information
Description
The CoolENDTM is designed to remove heat loads from liquid-cooled instru-
ments. The unit uses facility cooling or tap water as the secondary cooling
medium to remove heat from the primary fluid in the closed recirculation loop.
The unit consists of a plate heat exchanger, recirculation pump, stainless
steel reservoir, replaceable deionizing cartridge, and a microprocessor control-
ler. The controller monitors temperature, displays all fluid flows, and controls
both resistivity and pressure.
The unit has 10 return lines. The flow rate in 8 of these lines as well as the
facility flow line is monitored by flow transducers. The unit also has fluid level
sensors designed to protect the unit's pump and the application. A resistivity
sensor monitors resistivity and sends a signal to the controller when DI
cannister replacement is necessary.

- 9 -
Pressure PSI
10 20 30 40 50 60 70 80
Flow rate (gallons per minute)
Specifications
Temperature Range1,2
Cooling Capacity2,3
Pumping Capacity3
Reservoir Volume4
Gallons
Unit Dimensions5
(H x W x D)
Inches
Centimeters
Weight
Empty
Full
Shipping
Noise Level
18 to 25
53 9/16 x 32 x 32 1/8
136.0 x 81.3 x 81.6
626 pounds 284 kilogra s
1299 pounds 589 kilogra s
972 pounds 441 kilogra s
66 db(A)
+20°C to +30°C
200 Kw @ 50 gp
1. Lower limit determined by facility water temperature.
2. Specifications are for the unit operating up to 5000 feet. Contact Thermo for ratings at
higher altitudes.
3. Based on DT 8°C between process water out and facility water in.
4. Total volume, including drainback capability. Nominal run is 83 gallons.
5. For complete dimensions and CG information see pages 40 and 41.
30
25
20
15
10
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