BRONKHORST EL-FLOW Prestige series User manual

Doc. no.: 9.17.084G Date: 16-03-2018
ATTENTION
Pleaseread this Instruction Manual carefully beforeinstalling and operating theinstrument.
Not following the guidelines could resultin personalinjury and/or damageto the equipment.
EL-FLOW® Prestige series
Thermal Mass Flow Meters/Controllers
Instruction Manual

Bronkhorst®
Instruction Manual EL-FLOW® Prestige 9.17.084G2
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is
assumed for inaccuracies. The material in this manual is for information purposes only.
Copyright
© 2018 Bronkhorst High-Tech B.V.
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to
change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its
products and modify the contents without being obliged to inform any particular persons or organizations. The device
specifications and the contents of the package may deviate from what is stated in this document.
Symbols
Important information. Disregarding this information could cause injuries to people or damage to the instrument or
installation.
Helpful information. This information will facilitate the use of the instrument and/or contribute to its optimal
performance.
Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside package box for damage incurred during shipment. If the box is damaged, then the local carrier must be
notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales
representative.
Carefully remove the equipment from the box. Verify that the equipment was not damaged during shipment. Should the
equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same
time a report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items within the scope of delivery.
Do not discard spare or replacement parts with the packaging material and inspect the contents for damage.
Refer to Removal and return instructions about return shipment procedures.
Equipment storage
The equipment should be stored in its original package in a cupboard warehouse or similar. Care should be taken not to
subject the equipment to excessive temperatures or humidity.

Bronkhorst®
Instruction Manual EL-FLOW® Prestige9.17.084G 3
Warranty
Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date
of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
See also section 9 (Guarantee) of the Conditions of sales:
www.bronkhorst.com/about/conditions-of-sales/
The warranty includes all initial and latent defects, random failures, and indeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock
etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to
our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping
methods/carriers are paid by the customer.
General safety precautions
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables for cracks or breaks before each use.
The equipment and accessories must be used in accordance with their specifications and operating instructions, otherwise
the safety of the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. There are no repairable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech B.V.
One or more warning signs may be present on different parts of the product. These signs have the following meaning:
Consult the instruction manual for handling instructions
Surface may get hot during operation
Shock hazard; electrical parts inside
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard
fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are
not safety related may be obtained from other suppliers, as long as they are equivalent to the original component. Selected
parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsure
about the relevance of a replacement component, contact Bronkhorst for information.

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Instruction Manual EL-FLOW® Prestige 9.17.084G4

Bronkhorst®
Instruction Manual EL-FLOW® Prestige9.17.084G 5
Table of contents
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Introduction 1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this manual
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.3 Product description
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.4 Other documents
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.5 Model key
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Starting up 2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.1 Functional properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.2 Operating conditions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.3 Piping requirements
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.4 Mounting
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.5 Leak check
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.6 Electrical connection
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122.7 Analog / digital communication
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Analog / local communication 2.7.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Digital RS232 communication 2.7.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Digital RS485 / fieldbus communication 2.7.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122.8 Micro switch operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.9 Powering up and powering down
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.10 Purging before use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.11 Zeroing before use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.12 Calibration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.13 Maintenance
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Basic operation 3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143.1 Mass flow measurement and control
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Changing fluid set, range or operating conditions 3.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Valve Safe State 3.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163.2 Communication interfaces
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Using multiple interfaces 3.2.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173.3 Analog operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Cabling 3.3.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173.4 Basic RS232 operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Cabling 3.4.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19FlowDDE 3.4.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Software (DDE applications) 3.4.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Baud rate setup 3.4.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213.5 Basic RS485 operation (FLOW-BUS/Modbus)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Cabling 3.5.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Software 3.5.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Baud rate, node address and parity setup 3.5.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243.6 Other fieldbus configurations
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Baud rate, node address and parity setup 3.6.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253.7 LED indications
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263.8 Micro switch functions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Normal operating functions 3.8.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Power-up functions 3.8.2

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Instruction Manual EL-FLOW® Prestige 9.17.084G6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Control mode - readout/change 3.8.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Network settings - readout/change 3.8.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303.9 Basic parameters and properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30General 3.9.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Measurement and control (basic) 3.9.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Device identification 3.9.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Alarms and counter 3.9.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323.10 Adjusting zero point
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Manual procedure 3.10.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33Digital procedure 3.10.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Advanced operation 4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344.1 Sealing material compatibility
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354.2 Advanced parameters and properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Measurement and control (advanced) 4.2.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36Special parameters 4.2.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37Fluid set 4.2.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41Alarms 4.2.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Counter 4.2.5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44Network configuration 4.2.6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45Master/slave configuration (FLOW-BUS) 4.2.7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 464.3 Special features
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46Customized I/O options (pin 5) 4.3.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48Changing default control mode 4.3.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Troubleshooting and service 5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495.1 Errors and warnings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495.2 Restoring factory settings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505.3 Common issues
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 515.4 Service
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Removal and return instructions 6

Bronkhorst®
Instruction Manual EL-FLOW® Prestige9.17.084G 7
1Introduction
1.1 Scope of this manual
This manual covers the EL-FLOW® Prestige series mass flow meters/controllers for gases. This manual includes product
information, installation instructions, operation, maintenance and troubleshooting tips.
1.2 Intended use
EL-FLOW® Prestige instruments are designed to accurately measure and/or control gas flow rates of a specified gas at
conditions noted on the instrument label. The gas in the pressurized system in which the instrument is mounted has to be
clean and dry. The instruments are suited for general purpose indoor (dry) applications, like laboratories and in well
protected (OEM) housings. The instruments can be used for either (fast) switching gas flow or for controlling a constant
flow rate (mass flow controllers only).
The end user is considered to be familiar with the necessary safety precautions, and to comply with the appropriate
protective measures as described in the Material Safety Data Sheets of the media to be used in the system (if applicable).
The wetted materials incorporated in the EL-FLOW® Prestige are compatible with media and conditions (e.g. pressure,
temperature) as specified at ordering time. If you are planning to use the product (including any third party components
supplied by Bronkhorst, such as pumps or valves) with other media and/or other conditions, always be sure to check the
wetted materials (including seals) for compatibility. See the technical specifications of the product and consult third party
documentation (if applicable) to check the incorporated materials.
Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and corrosion resistance of the
used materials against the applied media lies solely with the end user. Bronkhorst High-Tech B.V. cannot be held liable for
any damage resulting from improper use, use for other than the intended purpose or use of other media and/or conditions
than specified on the purchase order.
1.3 Product description
EL-FLOW® Prestige is the next generation of Bronkhorst® Mass Flow Meters/ Controllers using the latest, highly accurate,
thermal by-pass sensor technology and featuring excellent control characteristics. Thanks to the advanced sensor
technology in combination with a state-of-the-art printed circuit board, the instruments feature improved long-term
stability as well as an unsurpassed temperature stability. Furthermore, due to a power efficient microprocessor, the power
consumption of the instrument is reduced. The mass flow meters and controllers can be supplied in full scale ranges from
0,7 mln/min up to 20 ln/min Air-equivalent at max. 64 or 100 bar (1000 or 1500 psi) pressure rating.
EL-FLOW® Prestige offers high flexibility due to the multi-gas/multi-range functionality. This function, now extended to 25
gases and mixtures thereof, is easily accessible via the FlowTune™ software or PLC; there is no need to disconnect the
instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by
means of our free, online software tool FLUIDAT® on the Net. Users of EL-FLOW® Prestige instruments can rescale their
instruments on site, saving time and money for dismounting and recalibration.

Bronkhorst®
Instruction Manual EL-FLOW® Prestige 9.17.084G8
Numerous input/output options can be installed through the programmable sub-D 9-pin connector (from factory). In
addition to the various analog signal options and the standard RS232 communication, there are such options as RS485
communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output.
Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNet™, PROFIBUS DP, Modbus RTU/ASCII, EtherCAT®,
PROFINET and FLOW-BUS.
1.4 Other documents
Basic instructions
Dimensional drawings
Document 9.17.083
Quick installation guide EL-FLOW Prestige
Document 7.15.176
Dimensional drawing FG-110C
Document 7.15.177
Dimensional drawing FG-111B
Document 7.15.178
Dimensional drawing FG-200CV / FG-210CV
Document 7.15.179
Dimensional drawing FG-201CV / FG-211CV
Document 7.15.180
Dimensional drawing FG-201CS
Advanced instructions
Hook-up diagrams
Document 9.17.027
Instruction manual RS232 interface
Document 9.16.119
Hook-up diagram LAB MBC3 RS232 and Analog
Document 9.17.024
Instruction manual FLOW-BUS interface
Document 9.16.120
Hook-up diagram LAB MBC3 FLOW-BUS
Document 9.17.025
Instruction manual PROFIBUS DP interface
Document 9.16.121
Hook-up diagram LAB MBC3 PROFIBUS DP
Document 9.17.026
Instruction manual DeviceNetTM interface
Document 9.16.122
Hook-up diagram LAB MBC3 DeviceNetTM
Document 9.17.035
Instruction manual Modbus interface
Document 9.16.123
Hook-up diagram LAB MBC3 Modbus
Document 9.17.063
Instruction manual EtherCAT® interface
Document 9.16.124
Hook-up diagram LAB MBC3 EtherCAT®
Document 9.17.095
Instruction manual PROFINET interface
Document 9.16.147
Hook-up diagram LAB MBC3 PROFINET
Document 9.16.118
Hook-up diagram LAB MBC3 Custom bus & IO
configurations
These documents can be downloaded from http://www.bronkhorst.com/en/downloads

Bronkhorst®
Instruction Manual EL-FLOW® Prestige9.17.084G 9
1.5 Model key
The model key on the product label contains information about the technical properties of the instrument as ordered. The
specific properties can be retrieved with the diagram below.
See secti on Customized I/O options (pin 5) for more information about the pin-5 configuration options.

Bronkhorst®
Instruction Manual EL-FLOW® Prestige 9.17.084G10
2Starting up
2.1 Functional properties
Before installing the EL-FLOW® Prestige, check the label on the rear side of the
instrument to see if the functional properties match your requirements:
·Flow rate
·Media to be used in the instrument
·Input and output signal (see also section Electrical connection)
·Upstream and downstream pressure(s)
·Operating temperature
·Valve type (NC = Normally Closed, NO = Normally Opened)
2.2 Operating conditions
Test pressure
Bronkhorst® instruments are pressure tested to at least 1.5 times the specified working process
conditions and outboard leak tested to at least 2 * 10-9 mbar l/s Helium. The tested pressure is specified
on the instrument with a red sticker. If this sticker is missing or if the specified pressure is insufficient,
the instrument must not be used and should be returned to the factory.
Before installation, make sure that the tested pressure is in accordance with the safety factor of your application. The tested
pressure must always be higher than the maximum operating pressure.
Disassembling the instrument and/or replacing parts of it will invalidate the pressure test specification.
Sealing material compatibility
The EL-FLOW® Prestige is fitted with specific sealing material(s), compatible with the media specified at ordering time. Be
sure that the sealing materials are compatible with the media and conditions used in the system. Bronkhorst High-Tech
B.V. cannot be held responsible for any damage resulting from the use of other media and/or conditions than specified on
the purchase order.
See secti on Sealing material compatibility for a compatibility list for the most commonly used media.
Ambient conditions
EL-FLOW® Prestige instruments are suitable for use in conditions between -10 and 70 °C and relative humidity of 10 to 90 %
RH, unless specified otherwise. Please note that EL-FLOW® Prestige instruments have an ingress protection of IP-40,
implying that the electronics housing and electrical connection do not offer any protection against moist environments.
Make sure that process gases do not condensate in the instrument due to (changing) environmental conditions, condensed
process fluids may seriously harm the instrument's functionality! E.g. do not use moist air as process gas at low
temperatures.
2.3 Piping requirements
For reliable performance, make sure the fluid stream is uncontaminated.If necessary,
use filters to assure a moisture, oil and particle free gas stream ()recommended pore
size: 5 µm). If back flow can occur, the use of a downstream filter and check valve is
also recommended. Select a suitable filter size, to avoid a too high pressure drop.
Do not install small diameter piping on high flow rates and avoid abrupt angles or other disturbances within a distance of
10 pipe diameters from the inlet or outlet of the device.
Do not install pressure regulators within a distance of 25 pipe diameters.