Brooks Automation PFC-552HC User manual

Polycold Fast Cycle (PFC)
Water Vapor Cryopump
Operation Manual
825160-00, revision B

PFC Operation Manual
825160-00, revision B
Information provided within this document is subject to change without notice, and although
believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions,
or inaccuracies.
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Automation. This information may be incorporated into the user’s documentation, however any
changes made by the user to this information is the responsibility of the user.
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Chelmsford, MA 01824
Phone [phone]
Fax [phone]
For emergencies, contact Technical Support 1-800-FOR-GUTS (800-367-4887)
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PFC Operation Manual 1. Introduction
Contents
1. Introduction ............................................................................................................................. 3
Description and Applications...................................................................................................... 3
PFC Versions............................................................................................................................... 6
PFC Performance Specifications................................................................................................. 7
Using this Manual ....................................................................................................................... 9
2. Safety..................................................................................................................................... 10
Overview ................................................................................................................................... 10
Safety Alerts Defined ................................................................................................................ 11
Safety Precautions for the PFC ................................................................................................. 13
Safety Guidelines ...................................................................................................................... 16
Equipment Guidelines............................................................................................................... 17
Standard Symbols on the Equipment ........................................................................................ 19
Safety Labels on the PFC.......................................................................................................... 20
Safety and Operational Interlocks............................................................................................. 36
General Hazards ........................................................................................................................ 37
Electrical Hazards ..................................................................................................................... 40
Lockout/Tagout (LOTO)........................................................................................................... 43
Gas Hazards............................................................................................................................... 45
Vacuum Hazards ....................................................................................................................... 46
Fire and Explosion Hazards ...................................................................................................... 47
Recycling................................................................................................................................... 48
Chemical Hazards ..................................................................................................................... 48
Emergency Conditions .............................................................................................................. 49
Emergency Contact Information ............................................................................................... 49
Material Safety Data Sheets ...................................................................................................... 50
3. Operation ............................................................................................................................... 51
Controls and Indicators ............................................................................................................. 51
Modes of Operation................................................................................................................... 54
Operating the PFC with a Cryocoil........................................................................................... 56
Operating the PFC with a Cryobaffle........................................................................................ 59
4. Appendix ............................................................................................................................... 61
Cryosurface Temperature Versus Water Vapor Partial Pressure.............................................. 61
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1. Introduction PFC Operation Manual
This Page left Intentionally Blank
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PFC Operation Manual 1. Introduction
1. Introduction
Description and Applications
WARNING
Do not attempt to perform any installation, operation, or maintenance
procedures on the PFC until you have thoroughly read and understood the
information in the Safety section of this Manual. Failure to heed this warning
can result in serious injury or death.
Primary Definitions:
Refrigeration Unit: The enclosure that cools and pumps the refrigerant through the
refrigerant line and cryosurface.
Refrigerant Line: In this manual, this term refers to the insulated bundle that contains two
lines (supply and return) that conducts a refrigerant between the PFC refrigeration unit and the
cryosurface.
Cryosurface: This is the cooling surface that is installed in the customer's vacuum chamber. It
is usually shaped either as a coil (for water vapor capture), or as a ring of baffles (for capturing
backstreaming oil).
In this manual, the Polycold Fast Cycle (PFC) water vapor cryopump is referred to as the “PFC.”
The PFC is a cryogenic refrigeration system that captures volatile molecules by freezing them
onto a cold surface. The PFC consists of a refrigeration unit, refrigerant lines (supply and return),
and a cryosurface with cryogenic feedthrough. The refrigeration unit can pump cold or hot
refrigerant (for defrost) in a continuous loop through the refrigerant lines and cryosurface. The
refrigerant is a proprietary mixture of refrigerants made by Brooks Polycold Systems Inc.
Within the refrigeration unit, heat absorbed by the refrigerant is transferred to water that is
supplied by the customer.
Primary application: Capture water vapor in a vacuum chamber after opening the high vacuum
valve. Water vapor is usually the most reactive contaminant in a high-vacuum system, and
comprises 65% to 95% of the residual gas in such systems.
For this application, the cryosurface is normally a coil. The coil can be quickly cooled and
defrosted to correspond with vacuum chamber cycles. See Figure 1.
Secondary application: The PFC can also be used to minimize backstreaming (see Figure 2).
Backstreaming is a phenomenon where oil diffusion pumps are used. Some of the hot oil from
the diffusion pump migrates into the vacuum chamber, where it condenses onto surfaces,
contaminating the system. For this application, the cryosurface is a baffle. “Fast Cycle” refers to
the fast interchange between the cold and defrost states. However, quick cooling and defrosting
is not normally required or desired for this application. Continued on next page
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1. Introduction PFC Operation Manual
4 825160-00, revision B
Description and Applications, Continued
Figure 1. PFC Used to Capture Water Vapor
Legend:
A. Refrigeration Unit
B. Refrigerant line
C. Cryogenic feedthough
D. Vacuum chamber wall
E. Cryosurface
Continued on next page

PFC Operation Manual 1. Introduction
825160-00, revision B 5
Description and Applications, Continued
Figure 2. PFC Used to Minimize Backstreaming
Legend:
A. Refrigeration Unit
B. Refrigerant line
C. High vacuum valve
D. Cryobaffle
E. Oil diffusion pump

1. Introduction PFC Operation Manual
PFC Versions
The PFC is manufactured in a number of different models and configurations to fit a variety of
applications. Table 1 below shows the currently manufactured PFC models.
Table 2 describes the nomenclature used in the PFC model numbering system.
Table 1. Current PFC Models
552 HC
672 HC
1101 LT
1102 HC
Table 2. PFC Model Nomenclature
Configuration Explanation
HC High capacity: increased heat-removal capacity
LT Low temperature: the cryosurface achieves a lower temperature
Model number ends in “2”, for
example “1102”
Designed for European application and bearing the CE mark,
these units have refrigerants compliant with EC 1005/2009 the
Montreal protocol, and the U.S. EPA/SNAP
PFC/PFC Has two refrigerant circuits with combined heat-removal
capacity of a standard model with one circuit. Each circuit
serves a separate cryosurface, and both cryosurfaces can be
quickly defrosted.
PFC/P Like the PFC/PFC, the PFC/P has two refrigerant circuits.
However, the second refrigerant circuit does not have the quick
defrost function.
Note: If the PFC includes the following options, please reference the table below:
Description Addendum Number
DTS communication 825147-01
Lifting Eyes 825153-00
If viewing the manual on CD, see the Addendums folder for PDF copies.
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PFC Operation Manual 1. Introduction
825160-00, revision B 7
PFC Performance Specifications
Table 3 compares the performance specifications of four models of the PFC. This table is
intended to be representative of the PFC product family. For more information about specific
PFC models, contact Brooks Automation Polycold Systems.
Table 3. PFC Models Performance Specifications
Performance1 1101-LT 552HC 672HC 1102HC
Maximum load
(watts at warmest temperature)
800 1,000 1,500 3,600
Theoretical maximum pumping
speed (l/sec) 2
74,5000 74,5000 104,300 298,000
Conservative pumping speed, in
chamber (l/sec) 2
50,000 50,000 70,000 200,000
Ultimate operating pressure, torr
(mbar) 3
2X10‐12
(3X10‐12)
2 X 10-9
(3 X 10-9)
5 X 10-9
(7 X 10-9)
3 X 10-8
(4 X 10-8)
Maximum pump start pressure,
(atm)4
11 1 1
Time to defrost, minutes54.0 4.0 4.0 7.0
Total cryocoil surface area m2 (ft2) 0.5 (5.4) 0.5 (5.4) 0.7 (7.5) 2.0 (21.6)
Refrigerant Lines and Cryocoils
Standard line length, m (ft) 2.44(8) 2.44 (8) 2.44 (8) 2.44 (8)
Single-circuit Tube O.D., mm (in) 12 (1/2) 12 (1/2) 16 (5/8) 16 (5/8)
Single-circuit Tube length, m (ft) 13.3 (41.1) 13.3 (41.1) 14 (46) 40 (132)
Dual-circuit Tube O.D., mm (in) 10 (3/8) 10 (3/8) 12 (1/2) 16 (5/8)
Dual-circuit Tube length per coil,
m (ft)
7.96 (27.4) 7.96 (27.4) 9.28 (29) 20 (66)
Continued on next page
Footnotes:
1Standard conditions for performance testing:
Cryocoil environment at 20°C
Recommend cryocoils and line lengths
Cooling water temperature between 25° and 28°C
Operation at 60 Hz
2Larger cryocoils may give greater pumping speeds, and can be used in some applications. Contact your
sales representative or the factory for application details.
3Standard cryocoil at 25% of maximum pumping speed
4Recommended cryopump start pressure is near normal “crossover.” Mechanical roughing pumps and
blowers are generally more effective for moisture above 1 torr.
5Estimated time depending upon cryocoil mass.

1. Introduction PFC Operation Manual
PFC Performance Specifications, Continued
Table 4. PFC Models Performance Specifications, Continued
Parameter 1101 LT 552 HC 672 HC 1102 HC
Utilities
Cooling water flow rate, l/min. (gal/min.)
At 13 C (55 F) 11.6 (3.1) 4.9 (1.3) 6.8 (1.8) 13.6 (3.6)
At 26 C (79 F) 29.2 (7.7) 12.3 (3.2) 17.3 (4.6) 33.8 (8.9)
At 29 C (85 F) 46.7 (12.3) 19.7 (5.2) 27.6 (7.3) 54.1 (14.3)
Power input at max. load, kW 15.8 6.0 8.3 19.2
Nominal power requirements5200/3/50/60
230/3/60
380/3/50
400/3/50
460/3/60
480/3/60
Max. operating sound level,
dB(A) 6
73 71 72 73
Min. room volume, m3(ft. 3)7 13 (460) 13 (460) 16 (570) 27 (955)
Footnotes:
5For nominal power requirements not on the table, please contact the factory. Please refer to the manual
for operating voltage ranges. For 480 volt operation, the maximum voltage is 506 VAC.
6Units were tested in a manufacturing environment while under maximum load in the COOL mode.
7To comply with the Safety Code for Mechanical Refrigeration, ANSI/ASHRAE-125-1994, the following
units should be located in a room no smaller than listed.
7.0 minute maximum defrost is for a 2 m2coil. Most applications use smaller coils and achieve shorter
defrost times. A 1 m2coil with standard refrigerant lines will defrost in less than 4 minutes.
Note: All units have cryocoils that may be decoupled from the refrigerant lines and remote control
capability with built-in remote connector. Maximum angle of inclination for shipping or handling all units
is forty-five degrees (45°).
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PFC Operation Manual 1. Introduction
825160-00, revision B 9
Using this Manual
This Operation Manual contains operation, safety, and specifications information for the PFC,
While this document covers specific information and adjustments for the PFC, there is
installation, maintenance, troubleshooting, and repair information in other manuals which can
affect the settings or operating mode of the PFC and attached components.
This is especially true for PFCs that are part of a complete system. In such cases, the PFC may
be set to system specifications and acceptance tested with the system. Before adjusting or
changing settings on a PFC that is part of a system, consult all appropriate system
documentation.
Pressures are stated as gauge (i.e., psig) not absolute. Psig is pounds per square inch gauge and
kPa is Kilopascals gauge.
kPa = 6.895 x Psig
bar = Psig ÷ 14.5
All documents cited in this manual are the latest revision, as of the publication date of this
manual. This manual is intended to provide information about a wide variety of PFC
configurations and options. It may contain references to items not installed on a specific system.

2. Safety PFC Operation Manual
2. Safety
Overview
This chapter describes safety guidelines, alerts, and labels for the PFC. All personnel involved in
the operation or maintenance of the PFC must be familiar with the safety precautions outlined in
this section.
These safety recommendations are basic guidelines. If the facility where the PFC is installed has
additional safety guidelines, they should be followed as well, along with the applicable national
and international safety codes.
If any additional safety-related upgrades or newly identified hazards associated with the PFC are
identified, the Technical Support group will notify the owner of record with a Technical Support
Bulletin (TSB).
The PFC has been designed to conform to all known safety requirements applicable to our
products. Under normal operation the PFC presents no hazard to its operator or other personnel.
Access panels require tools for their removal, thus shielding operators and other personnel
working in the area of the equipment from the operation or possible failure of the components of
the PFC.
Only qualified service personnel are authorized to open or remove the panels and must work in
accordance with the safety instructions presented in this chapter and throughout this manual. In
service and repair operations, the following hazards may exist:
Electrical shock
Hazardous Materials
Lifting Hazards
Cold Surfaces
Hot Surfaces
The information and instructions provided in this chapter and throughout this manual are
intended to help service personnel work with the equipment in a safe, effective, and efficient
manner. The emergency and safety procedures are provided to help service personnel develop
safe practices and establish safe conditions for working with the PFC.
Brooks Automation assesses the safety of each product we manufacture. The safety issues
generated during the PFC assessment are discussed in this manual. The complete Safety
Analysis is available upon request.
Only qualified personnel are permitted to transport, assemble, operate, or maintain the PFC.
Properly qualified personnel are those who have received certified training and have the
appropriate qualifications for their jobs, according to local standards.
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PFC Operation Manual 2. Safety
825160-00 revision B 11
Safety Alerts Defined
Danger, Warning, and Caution alerts are integral parts of this manual and are also located on,
and in, the PFC. Danger, Warning, and Caution alerts must be read carefully, understood
thoroughly, and observed at all times. If this equipment is used in a manner not specified, the
protection provided by the equipment may be impaired. Pictorial hazard alerts affixed to the PFC
are in accordance with ANSI, FDA, SEMI, and (where applicable) IEC standards. Pictorial
hazard alerts follow the format shown in Figure 3.
Table 5 describes what the different safety alerts look like.
Figure 3. Description of a Hazard Alert
WARNING
ELECTRICAL HAZARD
High Voltage can cause severe injury or death.
Disconnect power before removing access panels
Table 5. Warning Label Legend
DANGER - White Lettering / Red Background
(Safety Red: per ANSI Z535.4 - 15 parts Warm
Red, 1 part Rubine Red, 1/4 part Black)
White Triangle / Red Exclamation Point
WARNING - Black Lettering / Orange
Background (Safety Orange: per ANSI Z535.4
- 13 parts Yellow, 3 parts Warm Red, 1/4 part
Black)
Black Triangle / Orange Exclamation Point
CAUTION - Black Lettering / Yellow
Background (Safety Yellow: per ANSI Z535.4
- Pantone 108C)
Black Triangle / Yellow Exclamation Point
Continued on next page
Pictogram (icon) depicting nature of hazard
Hazard keyword level
Text describing how to avoid the
hazard
Text describing consequences of hazard

2. Safety PFC Operation Manual
Safety Alerts Defined, Continued
Preview and understand the safety alerts used in this manual before operating or performing any
work on the PFC. Safety warnings are provided in this manual before each step that may involve
hazards to personnel. See the following safety alert icons and text for information on icons,
which identify potentially hazardous situations/consequences of not avoiding the hazard. Safety
alerts used in the manual and on the equipment follow ANSI Z535 and use the signal words
DANGER, WARNING or CAUTION.
Table 6. Safety Alerts Defined
Alert Description
Note: A note provides additional or explanatory information. No
pictorial is used.
CAUTION
CAUTION without a safety alert symbol indicates a
potentially hazardous situation which, if not avoided, could
result in property damage.
CAUTION indicates a potentially hazardous situation which,
if not avoided, may result in minor or moderate injury. It may
also be used to alert against unsafe practices.
WARNING indicates a potentially hazardous situation which,
if not avoided, could result in serious injury or death.
DANGER indicates an imminently hazardous situation which,
if not avoided, will result in serious injury or death. This alert
is limited to the most extreme situations.
RISK OF ELECTRIC SHOCK
FIRE HAZARD
Continued next page
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PFC Operation Manual 2. Safety
Safety Precautions for the PFC
General Safety Precautions
The following safety alerts apply specifically to the PFC. Read and understand them before
performing any adjustments or service on the PFC.
WARNING
GENERAL HAZARD
Failure to review this manual could result in death or serious injury. Review this
manual before performing any procedure including routine operation of Brooks
Polycold PFC.
CAUTION
GENERAL HAZARD
United States federal law requires a certified refrigeration technician (Type 2,
High Pressure) for any procedure that could release refrigerant to the atmosphere.
This includes installing the cryopump, some inspection procedures, disconnecting
the refrigerant lines, some troubleshooting procedures, repair, and disposal of the
unit. A qualified refrigeration technician must do all refrigeration work.
WARNING
GENERAL HAZARD
When installing or servicing the PFC outside of the United States, comply with all
applicable local laws and regulations regarding this type of equipment.
WARNING
ELECTRICAL
Failure to have a qualified electrician perform all of the electrical work on the PFC
can result in death or serious injury. A qualified electrician must perform all of the
electrical work on the PFC.
Do not reach inside the refrigeration unit after the unit has been connected to an
electrical power source.
Continued on next page
825160-00 revision B 13

2. Safety PFC Operation Manual
Safety Precautions for the PFC, Continued
General Safety Precautions, Continued
DANGER
GENERAL HAZARD
Do not bypass or change the setting of any protective devices. Resetting of a
protective device may void the warranty and, if not avoided, may cause death or
serious injury.
Review this manual before performing any procedure including routine operation
of Polycold’s Cool Solutions ® Fast Cycle Water Vapor Cryopump. Observe the
following.
Also, reset protective devices only as defined throughout this manual.
Specific Hazards and how to Avoid Them
WARNING
FLAMMABLE MATERIAL (PFC 1101 ONLY)
Do not open the refrigerant circuit to the atmosphere. Do not change the settings of
the valves or loosen any fittings. Opening the refrigerant circuit or changing valve
settings along with the failure to following instructions in this manual could result
in death or serious injury.
Review this manual before performing any procedure including routine operation
of the PFC. Inspect the refrigerant circuit and change valve settings only as
defined throughout this manual.
CAUTION
GENERAL HAZARD
Do not connect the refrigeration unit to an existing cryosurface unless it meets
specifications for this interconnection. Doing so could cause minor or moderate
injury.
Continued on next page
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PFC Operation Manual 2. Safety
Safety Precautions for the PFC, Continued
Specific Hazards and how to Avoid Them, Continued
Refrigerant is harmful to the environment and to human health. Refrigerant in 1101 models may
also be flammable.
WARNING
CHEMICAL HAZARD
Do not release refrigerant to the atmosphere. Opening the refrigerant circuit or
changing valve settings along with the failure to following instructions in this
manual could result in death or serious injury.
Review this manual before performing any procedure including routine
operation of Polycold’s Cool Solutions ® Fast Cycle Water Vapor Cryopump.
Do not release refrigerant to the atmosphere.
CAUTION
GENERAL HAZARD
Failure to review this manual may result in minor or moderate injury.
See the enclosed Material Safety Data Sheet (MSDS) section for additional
information and protective measures for Polycold’s Cool Solutions ® Fast Cycle
Water Vapor Cryopump.
CAUTION
EXTREME TEMPERATURES EXIST
Extreme temperatures (cold and hot) exist while the refrigeration unit is
operating and for at least an hour after the unit is turned off. Contact with a cold
or hot surface may result in minor or moderate injury.
Do not touch any uninsulated part of the refrigerant circuit when the unit is
operating. This includes the solenoid and hand valves, any uninsulated part of
the refrigerant line or feedthrough, and the cryosurface. Also, do not reach
inside Polycold’s Cool Solutions ® Fast Cycle Water Vapor Cryopump’s
refrigeration unit.
CAUTION
GENERAL HAZARD EXISTS
Moving or repositioning the refrigerant line may result in minor or moderate
injury.
Do not attempt to move or position the refrigerant line. The insulation hardens
when cold and may crack.
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2. Safety PFC Operation Manual
Safety Guidelines
Safe use and service of the PFC requires that operators and service people observe the following:
Service personnel should understand the operation of process-related hardware interlocks,
and the sequences of hardware operation that are executed automatically, as explained in
this manual.
The PFC should not be used without assuring correct operation of all connected facilities,
especially fugitive emissions exhaust.
Service personnel should always assume that high voltage is present unless they have
personally turned it off and locked it out.
The equipment should not be operated without all guards and safety devices in place.
The equipment should be shutdown, locked-out, and not be operated while it is being
maintained.
Users should not attempt to defeat, modify, or disable any of the equipment's safety interlock
switches.
Only Polycold Systems trained service personnel should perform installation, assembly,
operation, disassembly, service, or maintenance of the PFC.
All safety related incidents or near misses should be reported to a supervisor or to Brooks
Polycold Systems Inc.
The user should carefully review and understand manufacturer provide material safety data
sheets (MSDS) for materials used by this equipment.
If hazardous materials will be present, users must observe the proper safety precautions and
ensure that the material used is compatible with those from which the PFC is fabricated.
Provide detection of unwanted chemical or gaseous releases.
Determine if the PFC will be employed in an earthquake-prone environment and install the
equipment accordingly.
Do not place the PFC’s facilities connections (power and communications cables and vacuum
lines) where they could cause a trip hazard.
Do not place the PFC in a location where it may be subject to physical damage.
Ensure that the power connection to the PFC is properly grounded.
Ensure that the PFC receives unhindered air flow for cooling.
Do not remove safety labels or equipment identification labels.
Turn OFF power before inserting or removing power cables.
Be aware of the hazardous points of the PFC as described in this chapter.
Use of the PFC for any purpose other than as a compact cooler is not recommended and may
cause damage to the PFC or the equipment it is connected to.
Whenever power is applied to the compressor unit, the fans operate. Take care when working
inside the compressor unit when it is energized.
Always operate the PFC with the covers in place.
Do not install or operate the PFC if it has been dropped, damaged, or is malfunctioning.
Do not immerse cables or connectors in liquid.
Keep cables and connectors away from heated surfaces.
16 825160-00, revision B

PFC Operation Manual 2. Safety
Equipment Guidelines
The following guidelines are provided to aid in the use and service of the PFC.
Brooks Automation Technical Support will issue a Technical Support Bulletin (TSB) to notify
the owners of record of any field retrofits.
Contact Brooks Automation Customer Support for information regarding repair and
maintenance service policies, both during the production of the PFC and after production is
discontinued.
Any user-caused damage during integration of the PFC into their equipment is the user’s
responsibility.
Brooks Automation’s responsibility for work performed by Brooks authorized technicians or
for equipment transported or resold by the owner of record is determined on a case-by-case
basis by Brooks Automation Technical Support.
Any parts being returned to Brooks Automation should be packaged according to the
instructions provided with the replacement part. Packing instructions for shipping the PFC
are provided in the Appendix.
Brooks Automation provides training for the Polycold PFC. Only qualified, properly trained
persons should perform any procedures on the PFC. Damage resulting from improperly
performing a procedure or not following cautions is not covered under warranty or service
agreements.
Continued on next page
825160-00 revision B 17

2. Safety PFC Operation Manual
Equipment Guidelines, Continued
Personnel Safety Guidelines
The PFC may provide several direct safety hazards to personnel if not properly installed or
operated. Adhere to the following safety guidelines:
Persons operating the PFC should be properly trained.
Know the location of the following:
Fire extinguisher
First Aid Station
Emergency eyewash and/or shower
Emergency exit
Use the following safety equipment (if necessary), according to the manufacturer’s
instructions, prior to installing, operating, or servicing the PFC:
Eye protection
Safety Shoes; shoes with protective toes should be worn to protect feet from dropping
tools or parts.
Observe the facility guidelines pertaining to loose clothing while working around or operating
the PFC.
Read and understand the Material Safety Data Sheets (MSDS) for the refrigerant used with
the PFC.
It may be recommended that the use of hazardous materials, such as cleaning fluids, be
used during routine maintenance procedures. Read and understand the facility’s MSDS
(provided by the manufacturer) for each substance.
Ergonomic hazards may exist with certain operations pertaining to the PFC.
SEMI S2-0200 Electrical Work Types
For the purpose of classifying the safety level of working on semiconductor electrical equipment,
SEMI safety standard S2-0200 defines the following four levels:
Type 1- Equipment is fully de-energized.
Type 2- Equipment is energized. Energized circuits are covered or protected.
Note: Type 2 work includes tasks where the energized circuits are or can be measured by
placing probes through suitable openings in the covers or insulators.
Type 3- Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4
volts peak, 60 volts dc or 240 volt-amps in dry locations.
Type 4- Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are greater than 30 volts rms, 42.4
volts peak, 60 volts dc or 240 volt-amps in dry locations. Potential exposures to radio-frequency
currents exist; refer to SEMI S2-0200, Table A5-1 of Appendix 5 for a listing of these values.
18 825160-00, revision B