Canon ANELVA M-332MX User manual

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FT-651-059
A-NET CRYSTALION GAUGE
M-332MX
OPERATION MANUAL
5
4
3 Mar . 5 .2010
2 Dec . 28 .2009
1 Sep . 11 .2000
EDITION DATE

Copyright
©
2010 by CanonANELVA Corporation
All Rights Reserved.
If this product is exported outside Japan, please contact our sales department
for more information because a judgment based on the Foreign Exchange and
Foreign Trade Control Law is necessary. Furthermore, when this product is
transferred or disposed in Japan, please take notice of the place where it
is dealt.

FT651-059
1
Safety
If the content of this warning is not obeyed where it is shown, it is assumed
that there is a risk of causing serious or fatal injury to the user.
If the content of this warning is not obeyed where it is shown, there is a risk of
causing serious personal injury and creating situations that may damage this
instrument.
In order to operate this instrument safely and correctly, always observe the safety
precautions written below. Canon Anelva shall not accept any liability or guarantee for any
damage incurred as a result of mishandling this instrument or failure to observe these safety
precautions.
Before opening the controller case, disconnect the power supply connector.
Use an input power supply in the range of DC 22 V to 26 V. Do not reverse
the input polarity.
Before attaching or detaching the gauge head, disconnect the power supply
connector.

FT651-059
2
Vacuum Gauge Guarantee
Repair or replacement shall be made without charge if any structural or design faults are
found, or if a defect occurs due to the liability of Canon ANELVA within a period lasting
twelve months after this product is received and inspected.
This guarantee only applies when this product is used correctly according to the instructions
of this operation manual and other handling instructions. This guarantee shall not apply to
the following causes of failure.
1) Failure resulting from mishandling, incorrect use or storage.
2) Failure resulting from repair work of modifications carried out by any other party
except Canon ANELVA.
3) Failure arising from uncontrollable forces: fire, flooding, earthquake, lightening, etc.
This guarantee shall cover the repair or replacement of faulty parts for which only Canon
ANELVA is liable. If failure or fault occurs, please contact Canon Anelva’s Field Service
Division immediately.
See the last page of this manual for the contact addresses.

FT651-059
3
1 Crystal Ion Gauge M-332MX Outline
The A-NET Crystal Ion Gauge M-332MX is a transducer model
vacuum gauge that can measure pressures over a wide range from 4 x
10-8 Pa to atmospheric pressure. The vacuum gauge controller and the
gauge head are incorporated into a single body.
This vacuum gauge is a combination vacuum gauge that uses a
crystal type vacuum gauge (crystal gauge), which employs a crystal
oscillator, for measuring in the high-pressure region and a ionization
vacuum gauge (B-A gauge) for measuring in the low-pressure region.
By a combination of pressure measurements, it is possible to measure
pressures over a wide range from 4 x 10-8 Pa to atmospheric pressure
by a single vacuum gauge.
Crystal Ion Gauge M-332MX
2 Specifications
Table 1 Specifications
Item Specification
Gauge head Model name: MX1
Crystal type vacuum gauge (crystal gauge) and ionization vacuum gauge (B-A gauge)
combination gauge
Pressure measurement range 4 x 10-8 Pa to atmospheric pressure
Crystal gauge measurement range: 1 Pa to atmospheric pressure
B-A gauge measurement range: 4 x 10-8 Pa to 13 Pa
* The lower limit pressure measurement range is indicated by the soft X-ray limit.
The lower limit pressure of the effective pressure measurement range varies depending on the
gauge head connecting flange together with the pumping system configuration and pumping system
operating conditions. (As a guideline, KF flange type: 10-6 Pa, ICF flange type: 10-7 Pa)
Input power supply DC 22 to 26 V (Maximum power consumption 12 W: when filament and degas are ON)
Note: Due to the inrush current when the power is switched ON, prepare a DC power supply that has
current capacity of 1.6 Amps or higher.
Degas method Grid power ON
Input control signal ①Filament ON/OFF
②Degas ON/OFF
③Crystal gauge zero reset input
④Crystal gauge ATM reset input
B-A filament ON/OFF Controlled by the filament ON/OFF signal.
①Manual control: zero is adjusted by the switch on the rear panel.
②Remote control: zero is adjusted by external input.
Crystal gauge zero adjustment
③Auto mode: when the B-A gauge switches ON, if the B-A measurement pressure remains below
the zero reset allowing pressure (1.33 x 10-2 Pa) the zero point is automatically adjusted every 5
minutes.
Crystal gauge ATM adjustment ①Manual control: ATM is adjusted by VR on the rear panel.
②Remote control: ATM is adjusted by external input (set to the value set by VR)
Pressure measurement
gas type N2gas conversion
Analog output The crystal gauge measurement pressure and the B-A gauge measurement pressure are output by
a single analog signal.
Output: LOG output (0 to 10 V)…See Section 6 (3) for details of the analog output.
Output impedance: Approx. 100 Ω
B-A unit filament protection
operation Over range (when operating above 13 Pa) and emission error (when over ±50%) <The error is reset by switching OFF the filament control signal. >
Gauge head filament Yttoria coated iridium single filament
Gauge head flange type KF40
Display LED Crystal gauge operation
B-A gauge operation (B-A filament ON/OFF status)
Connector type D-Sub 15P
External dimensions See Page 5
Operating environment Temperature: 5 to 40℃(electronics included), humidity: 70% or lower
Gauge head only temperature resistance: 150℃maximum

FT651-059
4
3 Part Names and Functions
1
2
34
5
6
Table 2 Part Names and Functions
No. Name Function
①D-Sub 15P connector D-Sub 15-pin connector used for power supply and input-output signals
②Crystal LED Indicates the operating status of the crystal gauge
③B-A LED Indicates the operating status of the B-A gauge
④ATM Trimmer volume control used for adjusting atmospheric pressure (ATM)
⑤Zero Push switch used for adjusting the pressure zero point setting (zero
adjustment)
⑤Controller Electronics unit
⑥MX-1 Gauge head
The crystal LED and B-A LED operate as follows.
Table 3 LED Operation
LED LED Operation Content Cause of Error
Green flashing Operating normally
OFF Not operating No power input, circuit failure
Red illuminated Controller internal hardware error Circuit failure
Red flashing 1 Note 1 Crystal unit gauge head error Gauge head not connected, gauge head failure
Crystal
Red flashing 2 Note 2
Zero adjustment or ATM
adjustment error (the error is
output continuously until
corrected)
Error when adjusting zero:
Zero adjusted at a pressure of 10-2 Pa or above, or
gauge head contamination
Error when adjusting ATM:
Adjustment is outside of the ATM adjustment range, or
gauge head contamination
OFF Filament OFF
Green illuminated Filament ON
Green flashing Filament and Degas ON
Red illuminated
Emission current error
(The emission current has drifted
±50% from the standard emission
current)
Filament has blown-out
B-A
Red flashing Filament protection due to over
range The pressure has exceeded the measurement range

FT651-059
5
4 Part Dimensions
50
70
11543
Dsub15P Connector
NW40 flange
Unit[mm]
φ34
40
Figure 1 Crystal Gauge M-322XG Dimensions
5 Unpacking and Checking
When you receive this product, immediately open the packaging and check all components
are included. Inspect the outside for any external damage.
Components
Crystal gauge M-332MX main unit (with gauge head) 1
D-Sub connector HDAB-15S (Hirose Denki) 1
Plug case HAD-CTH (Hirose Denki) 1
Operation Manual 1

FT651-059
6
6 Connecting to External Instruments
（1） Remote I/O Connector Pin Layout and Function
Table 4 D-Sub Connector Pin Layout
Pin No. Function Remarks
1 DC Input (22 to 26 VDC)
2 DC Input common (Note 1)
3 Control signal Vcc IN (24V DC) Control signal power supply input (Note 2)
4 Control signal Vcc common
5 Filament ON/OFF input See Section 6 (2) for the control method.
6 Degas ON/OFF input
7 Crystal gauge ATM input
8 Crystal gauge zero input
9 Not in use (NC)
10 Not in use (NC)
11 Analog output See Section 6 (3) for details
12 Analog GND
13 Not in use (NC)
14 Not in use (NC)
15 Not in use (NC)
Note 1: Connected to the controller case or the chamber by the gauge head.
Note 2: Control signal power supplies
The control signal Vcc IN can be connected in parallel to the controller power supply.
However, if the control signal voltage differs from the controller drive voltage, or if the
control signal power supplies are to be insulated from the controller drive power supply, or
if the effects of noise are to be considered, connect the control signal Vcc IN to a separate
power supply.
（2） Remote Control Input
①Function
Table 5 Remote Control Input Functions
Signal Name Pin No. Function
B-A filament inhibit input 5 Prohibits the filament switching ON. (The filament can be forcible switched
OFF.)
B-A degas ON/OFF input 6 Switches the B-A gauge degas ON/OFF. However, this function is only
enabled when the B-A filament is ON.
Crystal gauge ATM set input 7 Adjusts the crystal gauge ATM. Pay attention that this is set to the pressure
value adjusted by VR for ATM adjustment.
Crystal gauge zero set input 8
Sets the crystal gauge zero point.
* Sets the zero point by switching OFF →ON →OFF (switching ON for
0.5 to 1 second). (This is the same operation as switching the zero point set
switch.)
② Input Electrical Specifications
Input type: Contact input
Current: Approx. 6 mA (when Ext Vcc = 24 V)

FT651-059
7
③ Input Signal Use Example
PS2501
(
k
)
6.8k
Controller internal circuit
３
４
D-Sub connector
＋
－＋24V
External circuit
Ｅｘｔ Ｖｃｃ ＩＮ
Ｅｘｔ Ｖｃｃ ＣＯＭ
ＦＩＬ ＯＮ／ＯＦＦ ＩＮＰＵＴ
５
FIL ON/OFF input use example
Figure 2 Input Signal Use Example
（3） Analog Output
When the B-A gauge is OFF, the crystal gauge outputs the measured pressure value
(however, when the B-A gauge protection is operating, an error is output). When the B-A
gauge is ON, it outputs the measured pressure value.
 Analog signal pressure conversion equation
Pressure unit = Pa
Vout = 0.6 x Log10 (Press/133.33) + 6.875 ←→Press/133.33 = 10 ((Vout-6.875)/0.6)
 Conversion table
Analog Output Vout [V] Error Content
< 0.4 Sensor error
> 9.5 Sensor error (at crystal gauge failure or when B-A gauge protection is
operating)
The lowest voltage output during pressure measurement (except when an error occurs) is
the value of the measured pressure lower limit value of each gauge (crystal gauge or B-A
gauge).
7 Replacing the Gauge Head
When replacing the gauge head, make sure that electric power is
stopped supplying or the remote connector is disconnected. There is a
risk of damaging the controller unit.
（1） Detaching the Gauge Head
Loosen this M3 screw to
detach the gauge head

FT651-059
8
By removing the M3 screw locking the crystal gauge M-332MX gauge head as shown in
the above figure, the gauge head can be pulled away and detached.
When pulling away the gauge head, be certain to pull it straight. If stress
is applied to the pins of the gauge head, there is a risk of a leak
occurring at the gauge head pins.
（2） Attaching the Gauge Head
Gauge head insertion guide Gauge head insertion guide
Check the M3 gauge head locking screw is loose and the gauge head pins are all standing
perpendicular. Align the gauge head insertion guides on the gauge head side and the
controller side and then insert the gauge straight.
After inserting, tighten the M3 gauge head locking screw to lock the gauge head securely to
the controller. If the gauge head is not inserted cleanly into the controller, do not force it.
Re-check the M3 screw and gauge head pins and then try again.
When inserting the gauge head, be certain to insert it straight. If stress
is applied to the pins of the gauge head, there is a risk of a leak
occurring at the gauge head pins. Also, if it is forcibly inserted, the
gauge head and the controller may be damaged.

FT651-059
9
8 Adjusting the Crystal Gauge Unit
By adjusting the crystal gauge, measurements of greater accuracy can be obtained. Adjust
the zero point and ATM as follows.
（1） Zero Adjustment
If foreign material becomes stuck to the sensor, the high vacuum pressure reading may drift
higher. In this situation, operate the zero point set switch to adjust the zero point.
Procedure:
①Pump down the inside of the vacuum vessel and check the pressure is at 10-2 Pa or
below.
If the zero point drifts greatly due to insufficient base pressure, the
pressure reading will also drift greatly.
② Press the zero set switch on the controller for 1 second or longer. Or, input an ON
signal for 1 second or longer by operating from the remote I/O.
The pressure range in which the zero point can be set is where the drift
is within approximately 10 Pa compared to when the sensor was new. If
this range is exceeded, a zero set error will occur. If the gauge is
operating at the correct pressure, the sensor has expired and needs
replacing. See Section 7 for the method of replacing the sensor.
③ Automatic Zero Adjustment
In addition to operation ②written above, the zero can be adjusted automatically in
conjunction with the B-A gauge.
When the B-A gauge is ON, if the B-A measurement pressure remains below the
zero reset allowing pressure (1.33 x 10-2 Pa), the zero point is automatically adjusted
every 5 minutes.
（2） ATM Adjustment
When the gauge head has been replaced, if the pressure reading is different compared to
other gauges, adjust the ATM pressure.
When adjusting the ATM pressure, also adjust the zero point again.
 Procedure:
①Attach a standard vacuum gauge that can measure atmospheric pressure (ionization
vacuum gauge, etc.) to the vacuum vessel together with the crystal gauge.
②Pump down the inside of the vacuum vessel and then introduce N2gas into the
vacuum vessel until the pressure is at atmospheric pressure.
③Turn the ATM volume control and adjust the pressure signal output until the
pressure reading is the same as the one of the standard vacuum gauge.
④When the ATM pressure has been adjusted by method ③above and is to be
re-adjusted to the same pressure, it can be set by the remote control input.

FT651-059
10
9 Troubleshooting
For the methods of troubleshooting, see Table 6 below.
Table 6 Troubleshooting
LED Display Course of Action
LED OFF Check the power is supplied to the crystal gauge. If not restored even if the power is
supplied, contact Canon Anelva.
Red illuminated Contact Canon Anelva
Red flashing 1 Note 1 Check the gauge head is properly connected to the controller. If there is no connection error, the crystal oscillator may have stopped oscillating inside the gauge head due to
broken wiring, etc. Replace the gauge head.
Crystal
Red flashing 2 Note 2
Error when adjusting zero:
Adjust the zero at a pressure of 10-2 Pa or below.
If there is no improvement, replace the gauge head.
Error when adjusting ATM:
Adjust the ATM pressure in the adjustment range.
If there is no improvement, replace the gauge head.
Red illuminated The B-A gauge filament may be broken. Replace the gauge head.
B-A Red flashing The measurement may have exceeded the B-A gauge measurement range. Check the
pressure.
Red flashing 1
(sensor error)
Red flashing 2
(zero adjustment error)
(Note 1)
(Note 2)
Figure 3 Crystal LED Error Flashing

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