entegris Chemlock Guide

Chemlock®
Filter Manifold
Installation and use manual
MICROCONTAMINATION CONTROL |MANUAL

2
CHEMLOCK FILTER MANIFOLD
Installation and Use Manual | Entegris, Inc.
TABLE OF CONTENTS
—
Introduction ...................................................................... 3
Mounting Procedure ....................................................... 4
Plumbing Instructions .................................................... 5
Bowl and Filter Installation ............................................ 8
Limited Warranty .............................................................. 8
For More Information ...................................................... 8
Terms and Conditions of Sale........................................ 8

CHEMLOCK FILTER MANIFOLD
3Installation and Use Manual | Entegris, Inc.
INTRODUCTION
—
Entegris’ Chemlock®filter manifold is a dual filtration
head made on the same PTFE chassis for a large array
of chemistries, Figure 1. This revolutionary manifold
allows multiple bowl assemblies to occupy less space
compared to the same number of individual Chem-
lock PFA head/bowl assemblies. It is intended to be
used retroactively with existing Chemlock PFA filtra-
tion systems. The design allows for expansion and
reduction, and can be modified easily to meet
customer-specific filtration needs. Contact Entegris
for more information.
Figure 1. Chemlock filter manifold saves space and is easy to modify.
Our manifold oering includes 2-Up, 4-Up, and 6-Up
configurations, Figures 2a, 2b, 2c. Each is available in a
series or parallel plumbing orientation. This installation
and use manual is for all Chemlock filter manifolds.
Follow the instructions for your specific setup and skip
ahead when instructed to do so.
Figure 2a. 2-Up manifold uses two Chemlock bowls and filters.
Figure 2b. 4-Up manifold uses four Chemlock bowls and filters.
Figure 2c. 6-Up manifold uses six Chemlock bowls and filters.

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CHEMLOCK FILTER MANIFOLD
Installation and Use Manual | Entegris, Inc.
MOUNTING PROCEDURE
—
1. Orient the manifold with the Entegris logo facing
upward as shown in Figures 2a, 2b, and 2c.
2. Mount the manifold using the four holes at the
corners of each chassis. Figure 3a, 3b, and 3c
provide mounting hole locations and dimensions.
Figure 3a. Mounting hole dimensions for 2-Up configuration.
Figure 3b. Mounting hole dimensions for 4-Up configuration.
Figure 3c. Mounting hole dimensions for 6-Up configuration.
3. The four mounting holes are predrilled for ⁄”
diameter socket head cap screws. The holes are
recessed for the cap screw to sit below the top
surface and allow clearance for the Chemlock
torque wrench.
NOTE: Use a ⁄” Allen wrench to install the ⁄” screw.
4. If mounting the manifold on a Chemlock filter
manifold rack system, see Figure 4a. The system
pivots to allow easy installation and access to the
plumbing, Figure 4b.
Figure 4a. Manifold mounting rack system for 6-Up manifold.
Figure 4b. Manifold rack system pivot feature allows easy access.
5. If using a rail or frame mount, the minimum
clearance between the inner face of the rails to
allow access for plumbing installation is 29.2 cm
(11.5”).
317.5 mm (12.5”)
127.0 mm
(5.0”)
317.5 mm (12.5”)
177.8 mm
(7.0”)
127.0 mm
(5.0”)
317.5 mm (12.5”)
482.6 mm
(19.0”)
177.8 mm
(7.0”)

CHEMLOCK FILTER MANIFOLD
5Installation and Use Manual | Entegris, Inc.
6. If using an Entegris rack system, the mounting
holes will be predrilled and threaded for ⁄”-16
(course) socket head cap screws.
NOTE: Entegris recommends using stainless steel screws
to avoid corrosion. We also recommend 2.25” to 3.5”
bolts to provide a minimum 1” engagement to the
manifold rack and a maximum that will not protrude
from the rack.
7. Secure and level the racking/mounting surface with
sucient capacity to hold 250 lbf of vertical load.
8. Always install the farthest manifold first, followed
by the next nearest manifold, etc. until all manifolds
are installed.
a. Begin by inserting a single bolt into one of the
four holes and aligning with the mounting hole/
rail. Do not tighten fully to allow wiggle room to
install the other three bolts.
b. Leave all manifold mounting bolts slightly loose
to ease plumbing installation.
c. Leave all bowls and filters o until plumbing is
mounted to the manifolds’ inlet and outlet ports.
9. If using the Chemlock filter manifold rack system,
pivot the rack upwards, Figure 4b, and proceed to
plumbing instructions.
PLUMBING INSTRUCTIONS
—
1. To ensure correct plumbing installation, carefully
review the general plumbing layout based on the
number of manifolds and the flow path chosen.
It is important to make sure the plumbing chosen
matches a configuration shown in Figures 5-10. If
not, please contact Entegris.
a. The plumbing assemblies can be oriented as
shown Figure 5-10, or rotated exactly 180° to
face the opposite direction, however, if rotated,
both inlet and outlet must flip, or they will
interfere with each other.
b. When rotating the plumbing, disconnect the
plumbing from the Chemlock filter manifold(s)
and reinstall 180° from the original orientation.
c. All manifold inlet and outlets are ¾” PrimeLock®
connections. All plumbing main inlets are 1¼”
PrimeLock connections.
Outlet
Inlet
Figure 5. 2-Up filter manifold with parallel plumbing.
OutletInlet
Figure 6. 2-Up filter manifold with series plumbing.
Outlet
Inlet
Figure 7. 4-Up filter manifold with parallel plumbing.

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CHEMLOCK FILTER MANIFOLD
Installation and Use Manual | Entegris, Inc.
d. Before installing any plumbing assembly, ensure
each port on the bottom of all the Chemlock
filter manifolds has a PrimeLock connection
verification ring.
NOTE: Without a PrimeLock connection verification
ring, a fitting can be installed incorrectly, allowing
potential leaks. Visit our web site for a PrimeLock
fitting introduction, https://www.entegris.com/en/
home/resources/reference-materials/videos/
av-primelock-fitting-introduction.html
InletOutlet
Figure 8. 4-Up filter manifold with series plumbing.
Figure 9. 6-Up filter manifold with parallel plumbing.
Outlet
Inlet
Figure 10. 6-Up filter manifold with series plumbing.
OutletInlet

CHEMLOCK FILTER MANIFOLD
7Installation and Use Manual | Entegris, Inc.
e. Install the plumbing components starting with
the outer most pipe assembly, Figures 11 and 12.
NOTE: The piping order is the same for 2-Up, 4-Up,
and 6-Up configurations.
Figure 11. Assembly order for parallel plumbing configuration,
left to right.
Figure 12. Assembly order for series plumbing configuration,
left to right.
f. Firmly insert each connection into its correspond-
ing mate on the manifold and begin hand starting
each PrimeLock fitting at each port to ensure no
cross-threading occurs (approximately ½ to 1
rotation).
NOTE: The Chemlock filter manifolds should not be
anchored/tightened to the rack/rail system yet to
allow some movement/wiggle room for installing the
plumbing assemblies. Once the plumbing assemblies
are fully installed, then the Chemlock filter manifolds
can be secured tightly to their rack/rail system.
g. Hand tighten each fitting evenly, alternating
ports during installation, i.e., approximately one
turn at a time to avoid fully connecting any single
PrimeLock fitting before starting another on the
same plumbing assembly, Figure 13.
NOTE: Installing the plumbing assembly evenly
avoids putting unnecessary stress on the pipe
and connections.

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©2022 Entegris, Inc. |All rights reserved. |Printed in the USA |4411-12261ENT-1022
129 Concord Road
Billerica, MA 01821
USA
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LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any
failure in the case of customers using unapproved foreign components.
FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms & Conditions link in the footer.
www.entegris.com
Installation and Use Manual | Entegris, Inc.
h. Repeat the cycle as follows: one turn fitting 1,
one turn fitting 2, one turn fitting 3, one turn
fitting 4, one turn fitting 5, and one turn fitting 6.
Repeat until all the fittings are appropriately
installed.
Figure 13. PrimeLock fitting installation example.
i. Use the corresponding PrimeLock wrench
(PWR-KIT), tighten the fittings until the
PrimeLock connection verification rings are
engaged. The manifold to plumbing ports are
¾” PrimeLock and the plumbing to machine
ports are 1¼” PrimeLock connections.
j. Repeat the plumbing installation steps for the
remaining plumbing assemblies.
k. After all plumbing is installed, proceed to bowl
and filter installation.
BOWL AND FILTER INSTALLATION
—
To ensure a leak-free seal, it is vital you follow the
instructions from the Chemlock housing installation
manual to properly finish this installation. https://
author-entegris-prod4.adobemsbasic.com/editor.
html/content/entegris-blueprint/en/home/resources/
technical-information/chemlock-filter-housing-tech-
nical-information/chemlock-filter-housing-bowl-in-
stallation.html
Congratulations on successfully installing the Chemlock
filter manifold. Contact Entegris if you have questions.
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