entegris A200 SMIF POD User manual

ADVANCED MATERIALS HANDLING |MANUAL
A200 SMIF POD
User manual

1
A200 SMIF POD
User Manual | Entegris, Inc.
TABLE OF CONTENTS
—
Overview ......................................................................... 2
90-Day Inspection Guidelines ................................. 2
Six-Month Inspection Guidelines ............................ 3
Annual Inspection Guidelines .................................. 3
90-Day Procedures ...................................................... 4
Pod Cleaning ............................................................... 4
Visual Inspection ......................................................... 4
Functional Inspection ................................................ 7
Six-Month Procedures .................................................. 7
Visual Inspection ......................................................... 7
Functional Inspection ................................................ 7
Annual Procedures ....................................................... 8
Periodic Replacement Parts ..................................... 8
Visual Inspection ....................................................... 10
A200 Waferlock Assembly Checklist
for Gen V Dome ....................................................... 11
A200 Waferlock Assembly Checklist
for Gen IV Dome ...................................................... 13
Limited Warranty ......................................................... 14
For More Information ................................................. 14
Terms and Conditions of Sale ................................... 14

2
A200 SMIF POD
User Manual | Entegris, Inc.
OVERVIEW
—
Preventive maintenance of the 200 mm A200
SMIF Pod includes five key actions that are per-
formed periodically to prevent larger problems
with product performance:
1. Cleaning and drying
2. Periodic replacement parts
3. Functional inspection
4. Visual inspection
5. Dimensional inspection
A brief overview is provided in the tables below.
Frequencies and times are approximate. Frequency
is recommended based on level of risk (is the failure
catastrophic for the contents?), potential frequency
of failure, and ease of inspection. Detailed information
and procedures are provided following the tables.
90-DAY INSPECTION GUIDELINES
Recommended inspections for every cleaning cycle,
every 90 days or after an incident.
ACTION TIME CRITERIA DESCRIPTION CORRECTIVE ACTION
Cleaning and
drying
Per customer
cycle
Cleanliness Verify shell and door
cleanliness
Clean pod using approved
method
Visual inspection 15 seconds Cracking or
splitting
Inspect for partial splits or breaks, or
a separation of material
Discontinue use and
consult Entegris
Scratches
(internal
shell surface)
Inspect for thin or shallow cuts,
which could potentially release
particles from the shell surface
Discontinue use due to
potential contamination
risk and review pod
handling procedures
Chipping or
broken edges
Inspect for areas where a section
of material is missing, potentially
causing a functional issue
Discontinue use and review
pod handling procedures
Alignment
tabs/pins
Inspect for pins that are bent
or broken o. Damaged pins
could allow a door to be inserted
backwards.
Discontinue use and review
pod handling procedures
Chemical
attack (crazing,
pitting)
Inspect for crazing or pitting
due to chemical attack
Discontinue use and
consult with Entegris
Gasket wear Inspect gasket for cuts and nicks.
Also verify that the gasket is seated
completely in its channel.
If cuts or nicks are
discovered, replace gasket
Cassette Hold
Down (CHD)
Inspect the cassette spring for
proper placement and signs of
degradation
Re-install CHD if
undamaged or replace
Waferlock Verify all parts are present and
installed properly
Remove from service and
determine root cause
Waferlock Verify knife edge of waferlock is free
of nicks, cuts, and damage
Remove from service and
replace
Waferlock Verify the waferlock frame is not
warped, deformed, or damaged
Remove from service and
determine root cause
Functional
inspection
15 seconds Waferlock Verify the waferlock functions
properly
Remove from service and
determine root cause

A200 SMIF POD
3User Manual | Entegris, Inc.
SIX-MONTH INSPECTION GUIDELINES
Recommended inspections for every sixth cleaning
cycle, every six months or after an incident.
ACTION TIME CRITERIA DESCRIPTION CUSTOMER ACTION
Visual inspection 15 seconds Door screws Inspect for visibly loose
(coming out) or missing screws
Tighten or replace screws
Functional
inspection
45 seconds Door closing
torque
Amount of force required to
fully lock the door mechanism.
Closed <15 in•lb
Determine root cause,
remove door from service
Door opening
torque
Amount of force required to
fully lock the door mechanism.
Open ≥2.5 in•lb
Determine root cause,
remove door from service
ANNUAL INSPECTION GUIDELINES
Recommended inspections for every 12th cleaning
cycle, every year or after an incident.
ACTION TIME CRITERIA DESCRIPTION CUSTOMER ACTION
Periodic
replacement
parts
2 minutes Gasket Replace gasket Gasket Kit (20 gaskets per
kit): P/N 9700-4246-XX
(last two numbers TBD at
order time)
1 minute Waferlock and
wheel
Replace waferlock and wheel Waferlock and Wheel
Only Kit (50 per kit):
P/N 9700-9667-01
2 minutes Cassette Hold
Down (CHD)
Replace CHD Kit number depends on
CHD style. Contact
Entegris for part number.
Visual inspection 15 seconds Automation
button (top
robotic flange,
AK handle)
Inspect for general damage and
verify tightness
Replace damaged part,
tighten loose screws
15 seconds Ergo handles,
side rails
Inspect for general damage and
verify tightness
Replace damaged part,
tighten loose screws
15 seconds Door cassette
guides
Inspect for general damage,
inspect for gap between door
cover surface and bottom of guide
Replace damaged part,
tighten loose screws
1 minute Door flatness Verify door is flat Replace door

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A200 SMIF POD
User Manual | Entegris, Inc.
90-DAY PROCEDURES
—
POD CLEANING
The SMIF Pod provides a self-contained mini environ-
ment for the protection of the product contained
inside it. It protects the product from outside contam-
ination when storing or moving the product from one
location to another. The SMIF Pod will become dirty
or contaminated during normal use by failed seals
on process tools, broken wafers, process chemical
exposure, and general handling.
General Guidelines
Frequency (est.) Every 90 days
Before each new lot of wafers
After a cleanliness event
Time to perform Variable
Required parts None
Required tools
and equipment
Pod opener, screwdriver,
cleaning equipment
Procedures
Shell Assembly
• The shell assembly may be cleaned using all avail-
able cleaning technologies. Whether wet or dry,
rotation, immersion, or spray process depends on
your specific requirements and budget priorities.
Experience has shown that in most cases, the spray
process provides sucient cleanliness.
• Entegris supports both the use of no and very low
concentrations of surfactants, followed by a pure
DI water rinse.
• All process or drying temperatures of hot DI water
and clean dry air or nitrogen shall never exceed
60°C (140°F).
• To manually separate the shell from the door,
Entegris oers a small hand tool, but there are
also more sophisticated and automatic pod
openers available.
• The shell assembly can be cleaned as one piece,
however some immersion processes may cause
water to be forced into areas where parts are
screwed to the assembly. If testing shows water
traps, drying conditions may be changed in the
tool or disassembly may be required. Certain
cleaning processes may also aect the waferlock
mechanism and require removal of the waferlock
to prevent damage.
Door Assembly
• The door assembly may be cleaned by hand. Wipe
down with isopropyl alcohol or DI water.
• The gasket should be removed prior to cleaning,
inspected for signs of wear or discoloration, and
replaced yearly. Entegris oers a special tool to
correctly and easily seat the gasket in the door
gasket grooves after the wipe down, if necessary.
• Immersion and spray washes are not recom-
mended for the door.
After cleaning of shell and door is complete, they
should be assembled together as quickly as possible
to keep the product’s internal mini environment as
clean as possible. If any residual humidity is visual, the
drying cycle shall be repeated.
VISUAL INSPECTION
Visually inspect the pod for damaged parts and
surfaces that could aect pod performance. This
inspection can easily be performed in conjunction
with pod cleaning.
General Guidelines
Frequency (est.) Every 90 days or before each
new lot of wafers
Time to perform (est.) 2 minutes, 30 seconds
Required parts None
Required tools
and equipment
None; wafer inspection light
recommended

A200 SMIF POD
5User Manual | Entegris, Inc.
Procedures
Shell Assembly
1. Visually inspect the shell surface—focusing especially
on the surfaces inside the mini environment—for
cracks, scratches, and evidence of chemical attack
such as crazing or pitting. Surface defects in the
plastic can make cleaning dicult and be a potential
source of particles sloughing o the surface of the
plastic. Crazing on the outside of the shells should
not significantly impact pod performance or lifetime.
Chemical attack/splash
Crazing on outside of shell—note how shallow the cracks are
2. Visually inspect for chipped and broken edges.
Focus on the knife edge where the door seals
and the bottom of the shell.
3. Visually inspect the CHD for warpage or improper
installation. There will be no gap between the CHD
and the shell in a proper installation. See the picture
below for an improperly installed CHD.
Cassette Hold Down (CHD) gap
4. Inspect the waferlock to ensure that all parts are
present (two PEEK screws, frame, two pivots,
waferlock, wheel). Check that the waferlock is
properly attached to both pivots and that the wheel
is properly seated.
Waferlock components

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A200 SMIF POD
User Manual | Entegris, Inc.
5. Feel the knife edge of the waferlock for nicks
and cuts. Sharp edges on the waferlock can lift
the wafers and break them on the carrier.
Waferlock pod nicks and cuts
6. Ensure that the waferlock pin is touching the dome
wall.
Waferlock pin is touching the dome wall
Door Assembly
• Visually inspect the inner door surface for cracks,
scratches, and evidence of chemical attack, such as
crazing or pitting. Surface defects in the plastic can
make cleaning dicult and be a potential source of
particles sloughing o the surface of the plastic.
• Inspect the gasket for proper installation and for
cuts and nicks that could compromise the seal.
The gasket should lay flat against the surface of
the door.
• Inspect anti-rotation pins on two corners of the
door for pins that are bent or sheared o. Missing
pins can allow doors to be inserted into the pod
backwards.

A200 SMIF POD
7User Manual | Entegris, Inc.
FUNCTIONAL INSPECTION
Inspect the performance of the waferlock to confirm
proper operation.
General Guidelines
Frequency (est.) Every 90 days
Before each new lot of wafers
After a waferlock performance
event
Time to perform (est.) 30 seconds
Required parts None
Required tools
and equipment
None
Procedures
Cycle the waferlock slowly three times by hand. Feel
for catching and hitching as you push the waferlock
up to the closed position. Slowly lower the waferlock
and make sure it does not hang up or bind in the
closed position.
SIX-MONTH PROCEDURES
—
VISUAL INSPECTION
Inspect the pod to do a quick visual check for
damaged parts and surfaces that could aect
pod performance. This inspection can easily be
performed in conjunction with pod cleaning.
General Guidelines
Frequency (est.) Approximately every 6 months
Time to perform (est.) 30 seconds
Required parts None
Required tools
and equipment
Philips head screwdriver
Procedures
Door Assembly
• Visually inspect door bottom for loose, protruding,
or missing screws. Run a hand over the bottom of
the door to feel for protruding screws. If less than
two screws are found to be loose or missing, they
can be tightened or replaced with a screwdriver.
If more than two screws have a problem, the door
should be removed from service.
FUNCTIONAL INSPECTION
Check the performance of the pod door to make
sure that it is unlikely to fail and cause a door drop
incident. Door torque is a good indication of wear
of door mechanisms.
General Guidelines
Frequency (est.) Approximately every 6 months
Time to perform (est.) 2 minutes
Required parts None
Required tools
and equipment
Snap-on Tools Torqometer®
or equivalent (model number
TEC1FUA)
Modified manual pod opener
(base part number M200-0050)
Procedures
Door Assembly
• If measured door opening torque is below
2.5 in•lb or closing torque is above 15 in•lb,
it is likely there is something wrong with the
door and it should be removed from service.
• With the door in the shell, slowly and steadily
close or open the door using the manual opener
and torqometer. Swift movement of the torque
meter may give erroneous readings.

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A200 SMIF POD
User Manual | Entegris, Inc.
ANNUAL PROCEDURES
—
PERIODIC REPLACEMENT PARTS
Some wear parts need periodic replacement. Ideally
parts should be replaced before they start causing
performance problems, not after wear and perfor-
mance degradation has been observed.
General Guidelines
Procedure Gasket installation Cassette hold down installation Waferlock and wheel installation
Frequency (est.) Approximately once
every year
Approximately once every year Approximately once every year
Time to perform (est.) 2 minutes 1 minute 2 minutes
Required parts Gasket kit:
P/N 9700-4246-XX
Waferlock and wheel kit:
P/N 9700-9667-01
CHD kit: P/N 9701-0167-XX
Required tools
and equipment
Gasket installation tool:
P/N M200-0070
None CHD installation tool
Rubber or dead strike mallet
Procedures
Gasket Installation Procedure
1. Place the seal on the pod door matching the two
notches on each of two sides of the seal with the
mating slots on the two sides of the pod door.
This ensures correct orientation of the seal on
the pod door.
2. Ensuring that the notches in the seal are properly
aligned with the mating features in the pod door,
press the seal into the groove around the perimeter
of the pod door. It is generally recommended to
start with the four corners, then do the middle of
each side, and then press the rest of the gasket into
the groove.
3. Lightly push on the gasket roller tool while run-
ning the roller over the seal along the inside edge
of the seal. First roll the straight sides, then the four
corners. Ensure that the outer edge of the seal does
not hang over the flange of the door. The seal
should be inside the flange.
4. Inspect the seal for uniform installation and proper
fit into the pod door groove. The top surface of the
seal must be even and smooth.

A200 SMIF POD
9User Manual | Entegris, Inc.
Cassette Hold Down Installation Procedure
1. Place shell upside-down on a cushioned
or nonabrasive surface so the shell is not
scratched during this procedure.
2. Remove existing CHD. This can be done by
hand or with a pair of needle nose pliers. This
may require “rocking” the CHD gently as you
pull on it. Be careful not to pull too hard as the
CHD can break o and leave material in the
installation hole.
If the CHD is broken during installation, the
remaining material in the installation hole can
be removed with a hand drill.
3. Place new CHD over the installation holes and push
in by hand as far as possible. Using a CHD installa-
tion tool, pound the CHD into the holes.
4. Make sure new CHD is fully installed. It is fully
installed when the shoulder on the CHD is flush
with the installation hole.
Correct: There is no gap
between the CHD and the shell
Incorrect: Notice the gap
between the CHD and the shell
Waferlock and Wheel Installation Procedure
1. Turn pod on its side with the opening facing you
and the waferlock hanging from the top.
2. Grasp the sides of the waferlock—watching out for
the sharp edges—and pull straight out of the pod. It
should pull o of the pivots in one smooth motion.
3. Install the new waferlock and wheel assembly.
CHD attachment post Shell attachment boss
Press here

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A200 SMIF POD
User Manual | Entegris, Inc.
VISUAL INSPECTION
Inspect the pod to do a quick visual check for
damaged parts and surfaces that could aect
pod performance. This inspection can easily
be performed in conjunction with pod cleaning.
General Guidelines
Frequency (est.) Approximately once per year
Time to perform (est.) 2 minutes
Required parts None
Required tools and
equipment
None
Procedures
Shell Assembly
• Inspect tightness of AK flange installation if one is
installed on the pod. Inspect the flange for damage
or excessive wear.
• Inspect tightness of side handle installation. Inspect
the handles for damage or excessive wear.
Door Assembly
• Inspect door cassette guides for damage or wear.
Make sure they are installed tightly to the door by
looking for a gap around the bottom.
• Inspect door flatness. Place door on a granite
table and using a 0.020" feeler gauge inspect
the edges of the door. Doors that allow the
feeler gauge under them should be removed
from service.

A200 SMIF POD
11User Manual | Entegris, Inc.
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN V DOME
—
Check item and visual aid Result
1. Hand pull the waferlock frame
to make sure it is fully seated and
tightly attach on dome
Lift the pivot and make sure the
retainer moves freely. Perform
three cycles. Rotate the wheel
and make sure it can spin freely.
Waferlock Frame:
oTight oLoose
Pivot:
oMoves freely oStuck
Wheel:
oSpins freely oJammed
Remarks:
2. Make sure the waferlock frame edge is fully
positioned in the dome rib slot
Correct Incorrect
Waferlock Frame Edge:
oSlot in oSlot out
Remarks:
3. Make sure the waferlock leg is fully inserted
into dome boss hole with no gap
Correct: no gap Incorrect: gap
Waferlock Leg:
oNo gap oGap
Remarks:

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A200 SMIF POD
User Manual | Entegris, Inc.
Check item and visual aid Result
4. Make sure the waferlock frame is not
dislodged from dome
Waferlock Frame:
oNot oDislodged
dislodged
Remarks:
5. Make sure the waferlock O-ring is present Waferlock O-ring:
oPresent oMissing
Remarks:
6. Make sure the waferlock screw is fully torqued Screw Torque:
oNo gap oGap
Remarks:
Screw torqued at 6 in•lbf
7. Make sure the waferlock pod dowel pin
touches the dome wall
Waferlock dowel pin:
oTouching oGap
Remarks:
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN V DOME (CONTINUED)
—

A200 SMIF POD
13User Manual | Entegris, Inc.
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN IV DOME
—
Check item and visual aid Result
1. Hand pull the waferlock frame to
make sure it is fully seated and tight,
and check the screw to make sure
it is straight
Lift the pivot and make sure the
retainer moves freely. Perform three
cycles. Rotate the wheel and make
sure it can spin freely.
Waferlock Frame:
oTight oLoose
oStraight oTilted
Screw:
oTight oLoose
Retainer:
oMoves freely oStuck
Wheel:
oSpins freely oJammed
Remarks:
Screw torqued at 3 in•lbf
2. Make sure the waferlock lock is not tilted
(<0.06") by using the feeler gauge. The
gauge must not go through.
Feeler Gauge:
oPass oFail
Remarks:

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LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any
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FOR MORE INFORMATION
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Visit entegris.com and select the Contact Us link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
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visit entegris.com and select the Terms & Conditions link in the footer.
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User Manual
Check item and visual aid Result
3. Make sure the waferlock frame touches the
dome wall. No gap is allowed.
Waferlock Pin:
oTouching oGap
Remarks:
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN IV DOME (CONTINUED)
—