FALEX 430 ETR User manual

FALEX 430 ETR
** Ellipsometric Tube Rater **
Operation Manual
Version: 2.1
Falex Corporation 1020 Airpark Drive Sugar Grove, IL 60554 630.556.3669 www.falex.com

Table of Contents
2
Forward Safety and Safety Labels Description.............................................................................. 4
Section 1 General Information ……………………………………………………………………………………………………… 6
1.1 Technical Specifications …………………………………………………………………………………………………… 6
1.2 Brief Description of Equipment………………………………………………………………………………………... 6
1.3 Packing List.............................................................................................................................. 8
1.4 Initial Machine Setup ………………………………………………………………………………………………………. 8
1.5 Getting to know the Falex 430 ETR…….…………………..……………………………………………………….. 9
1.6 Laser Control Narrative.......................................................................................................... 11
1.7 Laser Safety............................................................................................................................ 12
Section 2 Typical Test................................................................................................................... 16
2.1 Overview ................................................................................................................................ 16
2.2 Heater Tube Preparation ....................................................................................................... 16
2.3 Heater Tube Installation ........................................................................................................ 16
2.4 Start Test................................................................................................................................ 17
Section 3 Detailed User Interface Features................................................................................... 20
3.1 Software Overview................................................................................................................. 20
3.2 Display Architecture............................................................................................................... 20
3.3 Functionality .......................................................................................................................... 22
3.4 Password Levels ..................................................................................................................... 23
3.5 Display Functionality.............................................................................................................. 23
3.5.1 Measurement Display..………………………………………………………………………………………… 23
3.5.2 Validation Display & Test …………………………………………………………………………………….. 27
3.5.3 File Browser Display …………………………………………………………………………………………….. 33
3.5.4 Activate Service Mode Button.…………………………………………………………………………..… 35
3.5.5 Activate Admin Mode Button...………………………………………………………………………….... 35
3.5.6 Settings Display…….…………………………………………………………………………………………..…. 36
3.5.7 Admin Mode Display………………………………………………………………………………………..….. 39
Section 4 Data Files – Measurement / Validation ......................................................................... 41
4.1 Data File Overview – Measurement / Validation .................................................................. 41

Table of Contents
3
Section 5 Maintenance / Service .................................................................................................. 44
5.1 Maintenance / Service Overview........................................................................................... 44
Warning Messages….……………………………………………………………………………………………………….. 45
Error Messages………………………………………………………………………………………………………………... 45
Specific for Validation with Falex NIST Traceable Reference Tube……………………………………. 46
Specific for FPGA Errors……………………………………………………………………………………………….…… 47
Section 6 Addendums .................................................................................................................. 48
A Parts Listing............................................................................................................................ 48
B Sample Measurement / Validation Data File......................................................................... 49
C NIST Traceable Validation Tube Care & Cleaning .................................................................. 50

Forward
4
This manual provides information and procedures to safely install, operate, and maintain the Falex
430 ETR (also known as the Falex 430 Ellipsometer). For your own safety and protection from injury, carefully
read, understand and observe the safety instructions described in this manual.
Keep this manual with the machine. If you lose this manual or need an additional copy, please contact
Falex Corporation. The information contained in this manual was based on machines in production at the
time of publication. Falex Corporation reserves the right to change any portion of this information without
notice. This operation manual is divided into sections and addenda as listed in the ‘Table of Contents’.
Safety Introduction
The following safety precautions are published for your information. This manual does not purport to
detail all of the safety concerns, if any, associated with the equipment’s use. It is the responsibility of the
operator of this equipment to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. This machine is built with operator safety in mind;
however, it can present hazards if improperly operated. Follow operating instructions carefully! If you
have questions about operating this equipment, please contact Falex Corporation.
Note: This equipment should only be operated by personnel trained by Falex or a Falex approved
distributor.
Note: This equipment is to be serviced or repaired by factory authorized personnel only! It is
recommended that for any service related issues, this equipment is to be returned to the
manufacturer.
Note: This equipment is not to be opened or modified in any way by the customer.
This manual may contain HAZARD, WARNING, and CAUTION callouts, which must be followed to reduce
the possibility of personal injury, damage to the equipment, or improper service. This machine must be
electronically grounded. Do not change the grounding requirements of the machine.
Machine Safety Labels and Manual Safety Callouts
The following are safety labels may be placed in areas on the test machine that may be hazardous to the
operator. These same symbols may be used in the manual to bring attention to safety concerns. Please
take caution and understand what these labels indicate before operating the test equipment.
ELECTRICAL SHOCK HAZARD: This symbol indicates hazardous voltage
is present. Turn main power button off and switch off the main
breaker (right side of unit) before taking sides off of unit. This unit is to
be serviced by trained personnel only.

Forward
5
CAUTION OR WARNING SYMBOL: This symbol indicates a general warning or caution. A
caution is important for protecting the equipment and performance. A warning is
important to protecting yourself, others, and the equipment. Used in manual to bring
attention to an important note or comment.
Caution: Use of controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.

1: General Information
6
1.1 Technical Specifications
Machine Weight: approximately 55 pounds (25 kg)
Machine Footprint (with display up): 22” high ×12” wide ×17” deep (56 cm x 30 cm x 43 cm)
Recommended Working Space: The Falex 430 ETR requires bench space of 24” wide x 30” deep (61
cm x 76 cm) to comfortably operate the test machine. The table should be reasonably level (1/32 in.
per foot) and should be able to support the test equipment, while being free from any external
vibrations.
Utilities Requirements: The Falex 430 ETR requires a 4 amp, 100 - 240 Volt, single phase, 50/60-Hertz
power source.
Wiring to test machine should follow federal, state and local wiring codes.
Product Classification: The Falex 430 ETR is a Class 1 laser product.
Note: Removal of any panels is to be done by factory trained personnel. Before removing any
panels, disconnect from power.
Caution: Use of controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
1.2 Brief Description of Equipment
The Falex 430 ETR test machine is designed to offer consistent, precise, analytical measurement of
ASTM D3241 heater tube deposits. It incorporates a laser light source optical detection system for
measuring the ellipsometric parameters, a tube handling assembly with an automatic alignment
system and computer driven software for analyzing the ellipsometric data for ASTM D3241 heater
tube rating.
The following safety features are incorporated into the machine:
•The laser and all laser paths are fully enclosed in a protective housing designed to prevent
human body exposure from the laser path or collateral radiation by beam or reflection
exposure to laser emissions.
•Wired and software interlocks to prevent operator exposure to laser emissions.
•Complies with 21 CFR 1040.10 and 1040.11 except for deviations pursuant to Laser notice
No. 50.

1: General Information
7
Falex 430 ETR functionality consists of three (3) main areas (figure 1-1).
Figure 1-1 - Areas of Machine
1. User Interface – PC utilizing touchscreen functionality for configuration, control and
monitoring of the test.
2. Control Panel – consists of measurement process start/stop push-buttons, machine status
indicators and data transfer USB port.
3. Protective Housing – designed to prevent human body exposure from the laser path or
collateral radiation by beam or reflection exposure to laser emissions. Consists of a front,
back and two (2) side covers.
User Interface
Protective Housing
Control Panel

1: General Information
8
1.3 Packing List
Unpack the machine and verify it contents. Each machine comes equipped with a startup kit, which
includes all the necessary items required to run the machine. Unpack the startup kit and verify its
contents with the listing shown below.
QTY
PART #
DESCRIPTION
PICTURE
1 n/a Manual / CD or USB drive
1 650-030-161 Power Cord, 120V
1 431-103-001 External Power Supply
1.4 Initial Machine Setup
Carefully uncrate the unit and select an appropriate level bench space. The unit comes fully
assembled. The user interface is folded down during shipping to protect it. Once the unit is placed in
position on the bench, raise the user interface and adjust it to an angle that allows the operator to
view the displays easily and is free from glare.
External Power Supply Installation -Plug the external power supply into the ‘Power’ connector
located on the back of the machine.
Note: Only connect the external power supply delivered with the unit to the Falex 430 ETR. The
use of any other external power supply may damage the Falex 430 ETR and void the
warranty. For a replacement external power supply, contact your local Falex Corp.
representative.

1: General Information
9
Power Cord Installation -Plug the appropriate power cord into the external power supply and then
into an outlet appropriate for the plug (120V, 60Hz for North America, 230V 50Hz for Europe). Electrical
source must have a good ground or an isolated power with ground.
Note: The AC power cord connects the external power supply to the wall socket. The plug at the
end of the power cord that connects to your electrical outlet can be of two types. The plug
type depends on the country where the Falex 430 ETR will be used.
Printer Installation (optional) - Printing functionality exists, if a printer (sold separately) is connected
and has been configured. It is recommended that a printer be purchased through Falex Corporation.
If the machine was shipped with a printer, the user interface is already configured for the printer. If
the machine was not shipped with a printer then the printer has to be configured. It is recommended
that the printer it to be connected to the back USB port (figure 1-4). This allows the front USB port to
be available for data transfer to a flash drive.
1.5 Getting to know the Falex 430 ETR
Figure 1-2 – Cabinet (front)
Control Panel
Heater Tube Inlet
User Interface

1: General Information
10
Figure 1-3 – Control Panel
Figure 1-4 – Cabinet (back)
The Falex 430 ETR has the following features:
User Interface: A touch screen computer is located on the top of the electronic cabinet and is used
as the user interface for configuration, control, and monitoring of the test.
Automatic Tube Alignment: Internal positioning allows for consistent heater tube alignment and
also compensates for warped or slightly bent tubes.
Heater Tube Inlet: Allows access to heater tube loading assembly for positioning of the heater tube.
Control Panel: Consists of measurement process start/stop push-buttons, machine status indicators
and data transfer USB port.
Power On/Off Switch
USB Port
External Power
Supply Connection
Main Fuse
Network
Connection
USB Port
Status Indicators
Measurement Start
Measurement Stop

1: General Information
11
Start Button: Initiates the measurement process.
Stop Button: Stops measurement process and stops all other heater tube positioning movements
(after operation confirmation on popup display).
On Indicator: Indicates main power switch is turned on and 24VDC is supplied to the machine.
Ready/Running Indicator: When ‘on’, indicates machine is waiting for operator interaction. When
‘blinking’, indicates machine is measuring, referencing, inserting or ejecting a heater tube.
Error Indicator: Indicates an error occurred.
Laser On Indicator: Indicates when laser emission is active.
USB Port: Two (2) USB ports exist on the machine. One (1) is located on the front control panel of
the machine and one (1) is located on the back of the machine.
Power (ON/OFF) Switch: Provides power to the entire test machine, including the user interface.
Network Connection: RJ45 Ethernet connection for standard network file transfer. The Ethernet
connection can be used for network connectivity. Any network configuration should only be made
by a network administrator and after consulting with your Falex Representative.
External Power Supply Connection:Connection for external power supply. The proper power cord
(120 or 230 VAC) is then to be connected to the external power supply.
Main Fuse:A 10 amp fuse is located on the back of the machine.This provides protection of the
internal electronic components against overcurrent.
1.6 Laser Control Narrative
Initiating Laser Control
In order for the laser beam emission to be turned on, various conditions and sequences must first be
satisfied. These conditions and sequences are a combination of operator actions, wired safety
interlocks and software interlocks designed to prevent operator exposure to laser emissions. The
laser control process is explained below.
1. Measurement Process Initiation
A series of operator actions initiate the measurement process, which lead to laser emission. First,
a heater tube is to be successfully inserted into the machine. Then, the ‘Measurement’ display
button is to be selected on the user interface (which switches the application software into the
measurement mode). Finally, the ‘Start’ button, located on the Falex 430 ETR front control panel,
is to be pressed. Once pressed, a series of interlocks are verified.

1: General Information
12
2. Laser Emission Interlocks
There are both wiring and software safety interlocks incorporated into the Falex 430 ETR laser
system that must be satisfied in order to achieve a laser interlock ‘Ok’ status. They are:
a. Wiring Safety Interlock
A proximity switch is wired into the control system to detect that the heater tube inlet shutter
door is closed. If not detected, laser emission will not be allowed. If a proximity switch wire
becomes disconnected or broken, the proximity switch will not detect the shutter door
closure and the interlock cannot be satisfied providing a fail-safe design.
b. Software Safety Interlock
As discussed in the previous section, the heater tube inlet shutter door proximity switch must
indicate the shutter door is closed. When the proximity switch detects that the shutter door
is closed, a digital input is turned on within the machine control system. The machine control
system then interprets the ‘on’ state of the digital input as the shutter door being ‘closed’ and
allows other software sequences to occur. Therefore, if the proximity switch does not detect
that the shutter door is closed, the software application shutter door ‘closed’ condition
cannot be satisfied.
3. Initiate Laser Emission
Once the above conditions have been satisfied, laser emission is initiated. At this time the
operator will be provided a visual ‘Laser On’ LED indication on the control panel. Laser emission
will remain active until the measurement process is interrupted by test completion, test error,
loss of power, or the operator presses the ‘stop’ button on the control panel.
1.7 Laser Safety
The Falex 430 ETR incorporates a laser diode that is CE certified. This Laser Product is designated as
Class 1 during all procedures of operation. This section will discuss safety details when operating the
laser.
Overview
Laser Parameters:
•Wavelength: 1550nm
•Output power: 8mW
•Operating voltage: 1.4 VDC
•Operating current: 80 mA
•Beam diameter: 9µm
•Divergence: <7 ° (half angle)
•Mode of operation: CW (continuous wave)

1: General Information
13
Cabinet Housing Construction:
The Falex 430 ETR is designed as a laboratory instrument and will be used within a laboratory
controlled environment. The cabinet housing is constructed of high strength injection molded
plastic, stainless steel and aluminum alloy that is resistant to rust and corrosion. Specifications
of cabinet housing materials are as follows:
•Injection molded plastic
Located on front of instrument
High impact plastic (PX 223HT)
3 – 5 mm thick
•Stainless steel
Located on left side, right side and top of instrument
304 grade
1 mm thick
•Aluminum
Located on back of instrument
5 mm thick
•Aluminum
Located on bottom of instrument
8 mm thick
The Falex 430 ETR is a stationary instrument and once it is placed within the laboratory it should
not be moved. The cabinet housing is not subject to any movable parts and is constructed with
overlapping recessed edges, so when assembled, laser reflected emissions are prevented. The
cabinet housing is completely closed, so that no laser emissions are accessible during operation.
An automatic mechanical shutter is used to close the tube inlet before laser emission. If the
shutter is not closed, laser emission is not allowed. As part of the quality control testing that is
conducted, full functionality of the instrument is tested and associated safety features are
verified. The instrument is inspected prior to shipment for any misaligned cabinet housing
panels and corrected if any alignment problems are found.
Note: The laser is never to be operated if the unit shows signs of a defect or if the cabinet
housing is damaged. Should you have any safety concerns, please contact Falex
Representative or Compass Service.
Operation
Testing
When the system is used to perform typical application testing, the operator will not have direct
exposure to the beam. When all inputs to the software are in their correct state (indicating that
the machine is ready), laser emission is initiated.The desired test can then be initiated using the
software application.

1: General Information
14
Calibration Check
Calibration is not required since the positions of the optical parts are fixed. However, a
verification check can be performed to verify that the laser system is functioning accurately.
Obtain a Falex NIST Traceable Reference Tube (p/n 430-200-002) to verify accurate functionality.
This reference tube comes with one specially designed aluminum tube with two silicon glass
wafers. These wafers are NIST (National Institute of Standards and Technology) certified in the
thickness range of 60nm & 100nm. This tube is housed in a specially designed stainless steel
tube that provides a dust-free environment when the tube is not in use. The tube comes with
two NIST certificates, one for each wafer that has the certified thickness in Angstroms, these
certificates are individually serial numbered, as well as the NIST Traceable Reference Tube. The
stainless steel tube also has a permanent sticker on the outside with this information. The
determined maximum average thickness should be within ±5% of the known value. If it is not,
contact your local Falex Corp representative. It may be determined that your Falex 430 ETR is
due for a Calibration, this is performed by your Falex Corp representative or Compass
Instruments service technician.
Note: Service/Calibration is to be done only by a trained technician.
Laser Safety
Caution: Use of controls, making adjustments or following procedures other than those specified
herein may result in hazardous radiation exposure.
Modifications that affect any aspect of the product’s performance or intended functionality will
require re-certification and re-identification of the product in accordance with the provisions of
21CFR 1040.10 and 1040.11. A copy of 21CFR 1040.10 and 1040.11 can be found in FDA website:
http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/CFRSearch.cfm?FR=1040.10
http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/CFRSearch.cfm?FR=1040.11
Labeling
Explanatory Label
Note: The Explanatory label does not appear on the machine. The contents of this label are
included within the Identification/Certification label.

1: General Information
15
Identification / Certification Label
Located on the lower right
side panel of the housing

2: Typical Test
16
2.1 Overview
Note: The following is a general outline to be used along with the ASTM D3241 test method. Some
steps may not pertain to the conducted test.
The following is a general description of a typical test process to be used. More detail on each step
can be found in the steps that follow.
1. Prepare the heater tube for installation into the Falex 430 ETR (refer to section 2.2).
2. Install the heater tube into the heater tube assembly (refer to section 2.3).
3. Using the user interface, configure and start a test (refer to section 2.4).
Caution: Use of controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
2.2 Heater Tube Preparation
Note: Handle the heater tube by the ends only. Do not touch the center section of the heater tube
where the deposit is located. Doing so will contaminate the deposit.
1. Visually inspect the heater tube that is to be tested for any foreign substance (such as dust or lint).
If a foreign substance is noticed, gently blow off with clean dry air.
Note: Do not clean the center section of the heater tube with any cleaner or wipe it with a cloth.
Doing so will contaminate or damage the deposit. [Refer to ASTM D3241 for proper
cleaning procedure of the heater tube after testing per 11.8 ‘Disassembly’ 11.8.2.2]. No
additional cleaning of the tube is required before testing with the Falex 430 ETR.
2.3 Heater Tube Installation
Note: Falex 430 ETR must be powered on, the touchscreen application visible and the self-check
must be finished.The self-check takes approximately 2 minutes.
1. On the user interface, select the ‘Insert’ icon located in the display header.
2. A message will appear, alerting the operator to wait while internal devices are positioning.
3. The tube inlet shutter door will open.
4. A pop-up window will appear (figure 2-1), alerting the operator to ‘Insert the tube’.

2: Typical Test
17
Figure 2-1 – Insert Tube Pop-up
5. Holding the heater tube that is to be measured by the serial number end, carefully insert the
heater tube end without the serial number into the tube inlet. (a gentle push of the heater tube may
be neccesary to aid in the activation of the tube clamping process)
6. The heater tube will automatically be pulled into the Falex 430 ETR and properly positioned.
7. The tube inlet shutter door will close.
8. The ‘Insert the tube’ pop-up window will disappear.
9. The heater tube has now successfully loaded.
2.4 Start Test
Note: Before starting a test, install the heater tube per the instructions found in the previous
sections, review this manual and the method. This section gives a general overview of using
the software to run a test. Detailed explanation of the individual application software
displays is found in later sections of this manual.
1. On the user interface, select the ‘Measurement’ display button at the bottom of the display (which
switches the application software into the measurement mode).
2. Press the ‘Start’ button located on the Falex 430 ETR front control panel.
3. The safety interlocks are verified. If they are satisfied, the laser will be turned on as indicated on
the Falex 430 ETR front control panel ‘Laser on’ indicator light.
4. The installed heater tube serial number will automatically be captured.
5. The ‘Measurement Information’ display will appear (figure 2-2). Fill in the associated test
information. It is mandatory that something be entered in the Tube Name, Operator, Tube SN and
Description fields. All other fields are optional.

2: Typical Test
18
Figure 2-2 – Measurment Information display
6. Select the ‘Start’ button located at the bottom of the ‘Measurement Information’ display. This will
initiate the measurement process. The measurement test takes approximately 18 minutes to
complete.
7. The measurement progress can be monitored from the ‘Measurement’ display (figure 2-3) by
referring to the 3D graph, the associated progress bar and the remaining time status.
Figure 2-3 – Measurment display
8. The ‘Ready/Running’ indicator light on the Falex 430 ETR control panel will be blinking during the
measurement process.
9. When the measurement process is complete, a ‘Measurement Result’ pass or fail pop-up window
(figure 2-4) will appear on the user interface to let the operator know the test result.

2: Typical Test
19
Figure 2-3 – Measurment Result display
10. Select the ‘OK’ button to close the ‘Measurement Result’ pop-up window.
11. The measurement data is automatically saved to a data file that is stored.
12. On the user interface, select the ‘Eject’ icon located in the display header. The tube inlet shutter
door will open and the heater tube will be ejected.
13. Carefully remove the heater by holding it by the end and store it for future reference. The tube
inlet shutter door will close.
Note: The allowable time to remove the tube is one (1) minute. If the tube has not been removed
within this time duration, the tube will automatically be re-inserted into the machine and the
shutter door closed.
14. The measurement process is now complete.
Note: The measurement process can be interrupted at any time by pressing the ‘Stop’ button located
on the Falex 430 ETR front control panel. This will disable the laser and stop the test (after
operation confirmation on popup display).

3: Detailed User Interface Features
20
3.1 Software Overview
The Falex 430 ETR user interface makes testing easy to setup, repeat and control. It utilizes
touchscreen functionality that allows items to be selected by simply touching the item with one’s
finger, stylus, or mouse pointer (if a USB mouse is connected). During testing, test data is displayed
both numerically and graphically.
Software functionality captures data points and their values are saved into a data file. The data file
created is saved in a format that can be opened with a standard spreadsheet or document
application, once transferred to an external PC.
The user interface software application is automatically started when the machine is powered up.
Should the display go to sleep, it can be reawakened by touching somewhere on the touchscreen
surface. The software configuration is defaulted for ASTM D3241 testing.
3.2 Display Architecture
The displays are made up of three (3) areas (figure 3-1), with each area having special functionality.
The various display areas are:
•Header
•Main display area
•Display selection buttons
Figure 3-1 - Display Component Areas
Header
Main
Display
Area
Display Selection