Fluke molbox RFM User manual
© 1998-2007 DH Instruments, a Fluke Company
molbox™ RFM™
(Ver 1.10 and Higher)
Reference Flow Monitor
Operation and Maintenance Manual
© 1998-2007 DH Instruments, a Fluke Company
High pressure liquids and gases are potentially hazardous. Energy stored in these liquids and gases
can be released unexpectedly and with extreme force. High pressure systems should be assembled
and operated only by personnel who have been instructed in proper safety practices.
©1998 - 2007 DH Instruments, a Fluke Company All rights reserved.
Information in this document is subject to change without notice. No part of this document may be reproduced or transmitted in any
form or by any means, electronic or mechanical, for any purpose, without the express written permission of DH Instruments, a
Fluke Company 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.
DH Instruments makes sincere efforts to ensure the accuracy and quality of its’ published materials; however, no warranty,
expressed or implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages
resulting from the use of the information in this manual or products described in it. Mention of any product does not constitute an
endorsement by DH Instruments of that product. This manual was originally composed in English and was subsequently translated
into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict between the English version and other
language versions, the English version predominates.
Products described in this manual are manufactured under international patents and one or more of the following U.S. patents:
5,142,483, 5,257,640, 5,331,838, 5,445,035. Other U.S. and international patents pending.
DH Instruments, DH, DHI, molbox, molbox RFM, molbloc, molbloc-L, molbloc-S and CalTool are trademarks, registered and
otherwise, of DH Instruments, a Fluke Company.
LabVIEW is registered trademark of National Instruments Corporation.
Swagelok is a registered trademark of the Swagelok Company.
Document No. 550107f
050512
Printed in the USA.
TABLE OF CONTENTS
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TABLE OF CONTENTS...............................................................I
TABLES..................................................................................V
FIGURES................................................................................VI
ABOUT THIS MANUAL ............................................................VII
1. INTRODUCTION .................................................................1
1.1 PRODUCT OVERVIEW.................................................................................................................................................................1
1.1.1 MOLBLOC FLOW ELEMENTS ........................................................................................................................................................... 1
1.1.1.1 MOLBLOC-L FLOW ELEMENT....................................................................................................................................................... 1
1.1.1.2 MOLBLOC-S FLOW ELEMENT...................................................................................................................................................... 1
1.2 SPECIFICATIONS.........................................................................................................................................................................2
1.2.1 GENERAL SPECIFICATIONS............................................................................................................................................................. 2
1.2.2 REFERENCE PRESSURE TRANSDUCER (RPT) SPECIFICATIONS.............................................................................................. 2
1.2.2.1 UPSTREAM AND DOWNSTREAM RPTS...................................................................................................................................... 2
1.2.2.2 DIFFERENTIAL RPT (MICRORANGE OPTION)............................................................................................................................ 3
1.2.3 TEMPERATURE MEASUREMENT SPECIFICATIONS...................................................................................................................... 3
1.2.4 FLOW MEASUREMENT SPECIFICATIONS....................................................................................................................................... 3
1.2.4.1 MOLBLOC-L .................................................................................................................................................................................... 3
1.2.4.1.1 MOLBLOC-L FLOW MEASUREMENT SPECIFICATIONS, MICRORANGE OPTION............................................................. 4
1.2.4.1.2 MOLBLOC-L PRESSURE DEPENDENT CALIBRATION TYPES............................................................................................. 4
1.2.4.1.3 MOLBLOC-L RANGES WITH LOW PRESSURE CALIBRATIONS........................................................................................... 6
1.2.4.1.4 MOLBLOC-L RANGES WITH HIGH PRESSURE CALIBRATIONS.......................................................................................... 7
1.2.4.1.5 MOLBLOC-L DIMENSIONS....................................................................................................................................................... 8
1.2.4.2 MOLBLOC-S.................................................................................................................................................................................... 9
1.2.4.2.1 MOLBLOC-S RANGES............................................................................................................................................................... 9
1.2.4.2.2 MOLBLOC-S PRESSURE DEPENDENT CALIBRATION TYPES.......................................................................................... 11
1.2.4.2.3 MOLBLOC-S DIMENSIONS.....................................................................................................................................................12
1.2.5 FRONT AND REAR PANELS............................................................................................................................................................ 13
1.2.5.1 FRONT PANEL.............................................................................................................................................................................. 13
1.2.5.2 REAR PANEL................................................................................................................................................................................ 14
2. INSTALLATION ................................................................ 15
2.1 UNPACKING AND INSPECTION ...............................................................................................................................................15
2.1.1 REMOVING FROM PACKAGING...................................................................................................................................................... 15
2.1.2 INSPECTING CONTENTS................................................................................................................................................................. 15
2.2 SITE REQUIREMENTS...............................................................................................................................................................15
2.3 INITIAL SETUP............................................................................................................................................................................16
2.3.1 PREPARING FOR OPERATION ....................................................................................................................................................... 16
2.3.2 POWER CONNECTION..................................................................................................................................................................... 16
2.3.3 MOLBOX RFM TO MOLBLOC CONNECTION................................................................................................................................. 16
2.3.4 GAS SUPPLY AND FLOWPATH CONNECTIONS........................................................................................................................... 17
2.3.5 VACUUM SUPPLY (MOLBLOC-S ONLY)........................................................................................................................................ 18
2.3.6 COMMUNICATIONS CONNECTIONS .............................................................................................................................................. 18
2.4 POWER UP AND VERIFICATION..............................................................................................................................................18
2.4.1 POWER UP......................................................................................................................................................................................... 18
2.4.2 CHECK PROPER PRESSURE MEASUREMENT OPERATION .......................................................................................... 19
2.4.3 CHECK PROPER TEMPERATURE MEASUREMENT OPERATION.......................................................................................... 19
2.4.4 LEAK CHECK..................................................................................................................................................................................... 19
2.4.5 CHECK/SET SECURITY LEVEL....................................................................................................................................................... 20
2.5 ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING FLOW MEASUREMENTS .......................................................20
2.6 SHORT TERM STORAGE...........................................................................................................................................................20
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page II
3. OPERATION..................................................................... 21
3.1 GENERAL OPERATING PRINCIPLES ......................................................................................................................................21
3.1.1 MOLBLOC-L AND MOLBLOC-S OPERATION................................................................................................................................ 21
3.1.2 MOLBLOC-S BPR LIMITS................................................................................................................................................................. 21
3.1.3 FLOW READY/NOT READY INDICATION....................................................................................................................................... 22
3.1.3.1 MOLBLOC-L OPERATION............................................................................................................................................................ 22
3.1.3.2 MOLBLOC-S OPERATION............................................................................................................................................................ 22
3.1.4 SOFT [ON/OFF] KEY......................................................................................................................................................................... 23
3.1.5 MICRORANGE OPTION (OPTIONAL).............................................................................................................................................. 23
3.1.6 REFERENCE PRESSURE TRANSDUCER (RPT) OVERPRESSURE............................................................................................ 24
3.1.6.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS................................................................................................................ 24
3.1.6.2 DIFFERENTIAL RPT, MICRORANGE OPTION........................................................................................................................... 24
3.2 MAIN RUN SCREEN...................................................................................................................................................................25
3.2.1 MOLBLOC-L OPERATION................................................................................................................................................................ 25
3.2.2 MOLBLOC-S OPERATION................................................................................................................................................................ 26
3.3 MANUAL OPERATION...............................................................................................................................................................27
3.3.1 KEYPAD LAYOUT AND PROTOCOL............................................................................................................................................... 27
3.3.2 SOUNDS............................................................................................................................................................................................. 28
3.3.3 SOFT [ON/OFF] KEY......................................................................................................................................................................... 28
3.3.4 DIRECT FUNCTION KEYS SUMMARY............................................................................................................................................ 28
3.4 DIRECT FUNCTION KEYS.........................................................................................................................................................29
3.4.1 [K] ....................................................................................................................................................................................................... 29
3.4.2 [GAS].................................................................................................................................................................................................. 31
3.4.2.1 MOLBLOC-L OPERATION............................................................................................................................................................ 32
3.4.2.2 MOLBLOC-S OPERATION............................................................................................................................................................ 33
3.4.3 [UNIT].................................................................................................................................................................................................. 34
3.4.3.1 MASS FLOW VS. VOLUME FLOW............................................................................................................................................... 35
3.4.3.2 VOLUMETRICALLY BASED MASS FLOW UNITS....................................................................................................................... 36
3.4.3.3 VOLUMETRICALLY BASED MASS FLOW UNITS AT VARIOUS REFERENCE TEMPERATURES (UXXX)........................... 37
3.4.3.4 VOLUME FLOW UNITS (VLM)...................................................................................................................................................... 37
3.4.3.5 CUSTOMIZING FLOW UNITS AVAILABLE UNDER THE UNIT FUNCTION..............................................................................38
3.4.4 [TARE]................................................................................................................................................................................................ 39
3.4.4.1 <1TARE> ....................................................................................................................................................................................... 40
3.4.4.1.1 MOLBLOC-L OPERATION....................................................................................................................................................... 40
3.4.4.1.2 MOLBLOC-S OPERATION....................................................................................................................................................... 43
3.4.4.2 <2PURGE>.................................................................................................................................................................................... 44
3.4.4.3 <3LEAK CHECK>.......................................................................................................................................................................... 46
3.4.4.3.1 LEAK CHECK MOLBOX...........................................................................................................................................................47
3.4.4.3.2 LEAK CHECK SYSTEM........................................................................................................................................................... 49
3.4.4.4 <4AUTOZ>..................................................................................................................................................................................... 53
3.4.4.4.1 EDIT AUTOZ............................................................................................................................................................................. 55
3.4.4.4.2 RUN AUTOZ............................................................................................................................................................................. 56
3.4.4.5 <5BPR> (MOLBLOC-S OPERATION ONLY)...............................................................................................................................58
3.4.5 [P&T] (PRESSURE AND TEMPERATURE)...................................................................................................................................... 59
3.4.6 [DISPLAY].......................................................................................................................................................................................... 61
3.4.6.1 <1RATE> ....................................................................................................................................................................................... 62
3.4.6.2 <2AVG> (AVERAGE) .................................................................................................................................................................... 63
3.4.6.3 <3 HI/LO>.......................................................................................................................................................................................64
3.4.6.4 <4TOTAL> (TOTALIZER)..............................................................................................................................................................64
3.4.6.5 <5UNIT>......................................................................................................................................................................................... 66
3.4.6.6 <6DEV>..........................................................................................................................................................................................66
3.4.6.7 <7FREEZE>................................................................................................................................................................................... 67
3.4.6.8 <8CLEAN>..................................................................................................................................................................................... 68
3.4.7 [MICRO] (OPTIONAL)........................................................................................................................................................................ 68
3.4.8 [MOLBLOC]........................................................................................................................................................................................ 70
3.4.8.1 MOLBLOC-L AND MOLBLOC-S SIZE AND RANGE DESIGNATIONS....................................................................................... 70
3.4.9 [RES]................................................................................................................................................................................................... 71
3.5 [SETUP].......................................................................................................................................................................................72
3.5.1 <1FLOWU>......................................................................................................................................................................................... 72
3.5.2 <2PRESU>.......................................................................................................................................................................................... 73
3.5.3 <3TEMPU> ......................................................................................................................................................................................... 73
3.5.4 <4MOLBLOC>.................................................................................................................................................................................... 74
3.5.5 <5STAB>............................................................................................................................................................................................ 74
3.5.6 <6ADJ>............................................................................................................................................................................................... 75
TABLE OF CONTENTS
Page III © 1998-2007 DH Instruments, a Fluke Company
3.6 [SPECIAL]...................................................................................................................................................................................76
3.6.1 <1RESET>.......................................................................................................................................................................................... 77
3.6.1.1 <1SETS>........................................................................................................................................................................................ 78
3.6.1.2 <2UNITS>...................................................................................................................................................................................... 78
3.6.1.3 <3COM>.........................................................................................................................................................................................79
3.6.1.4 <4CAL>.......................................................................................................................................................................................... 79
3.6.1.5 <5ALL>...........................................................................................................................................................................................79
3.6.2 <2LEVEL> .......................................................................................................................................................................................... 80
3.6.2.1 SECURITY LEVELS...................................................................................................................................................................... 80
3.6.3 <3UL> ................................................................................................................................................................................................. 83
3.6.3.1 UPPER LIMIT ALARM AND SEQUENCE..................................................................................................................................... 84
3.6.4 <4CAL>............................................................................................................................................................................................... 84
3.6.5 <5PREFS>.......................................................................................................................................................................................... 84
3.6.5.1 <1SCRSVR>.................................................................................................................................................................................. 85
3.6.5.2 <2SOUND>.................................................................................................................................................................................... 85
3.6.5.3 <3TIME>......................................................................................................................................................................................... 86
3.6.5.4 <4ID>.............................................................................................................................................................................................. 86
3.6.5.5 <5LOG>.......................................................................................................................................................................................... 87
3.6.6 <6REMOTE>....................................................................................................................................................................................... 87
3.6.6.1 COM1 AND COM2.........................................................................................................................................................................88
3.6.6.2 IEEE-488........................................................................................................................................................................................ 88
3.6.6.3 RS232 SELF-TEST........................................................................................................................................................................ 88
3.6.7 <7MICRO>.......................................................................................................................................................................................... 89
3.6.8 <8HEAD>............................................................................................................................................................................................ 90
3.6.9 <9BPR>............................................................................................................................................................................................... 91
4. REMOTE OPERATION ....................................................... 95
4.1 OVERVIEW..................................................................................................................................................................................95
4.2 INTERFACING.............................................................................................................................................................................95
4.2.1 RS232 INTERFACE ........................................................................................................................................................................... 96
4.2.1.1 COM1............................................................................................................................................................................................. 96
4.2.1.2 COM2............................................................................................................................................................................................. 96
4.2.2 IEEE-488 (GPIB)................................................................................................................................................................................. 97
4.3 COMMANDS................................................................................................................................................................................97
4.3.1 COMMAND SYNTAX......................................................................................................................................................................... 97
4.3.2 COMMAND SUMMARY..................................................................................................................................................................... 98
4.3.3 ERROR MESSAGES.......................................................................................................................................................................... 99
4.3.4 COMMAND DESCRIPTIONS........................................................................................................................................................... 101
4.3.4.1 IEEE STD. 488.2 COMMON AND STATUS COMMANDS......................................................................................................... 101
4.3.4.2 MOLBOX RFM COMMANDS......................................................................................................................................................104
4.4 STATUS SYSTEM.....................................................................................................................................................................129
4.4.1 STATUS REPORTING SYSTEM..................................................................................................................................................... 129
4.4.1.1 STATUS BYTE REGISTER.........................................................................................................................................................129
4.4.1.2 STANDARD EVENT REGISTER................................................................................................................................................. 131
5. MAINTENANCE, ADJUSTMENTS AND CALIBRATION...........133
5.1 PRODUCT OVERVIEW.............................................................................................................................................................133
5.2 CALIBRATION OF REFERENCE PRESSURE TRANSDUCERS (RPTS)..............................................................................134
5.2.1 PRINCIPLE....................................................................................................................................................................................... 134
5.2.1.1 PA AND PM COEFFICIENTS......................................................................................................................................................135
5.2.2 EQUIPMENT REQUIRED................................................................................................................................................................. 135
5.2.2.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS.............................................................................................................. 135
5.2.2.2 DIFFERENTIAL (MICRORANGE) RPT.......................................................................................................................................136
5.2.3 SET-UP AND PREPARATION......................................................................................................................................................... 136
5.2.3.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS.............................................................................................................. 136
5.2.3.2 MICRORANGE DIFFERENTIAL RPT......................................................................................................................................... 136
5.2.4 VIEWING AND EDITING RPT READINGS AND CALIBRATION INFORMATION........................................................................ 137
5.2.4.1 VIEWING RPT OUTPUTS........................................................................................................................................................... 138
5.2.4.2 VIEWING AND EDITING RPT PA, PM AND CALIBRATION DATE........................................................................................... 140
5.2.5 RPT CALIBRATION/ADJUSTMENT PROCEDURE WITHOUT USING CALTOOL FOR RPTS SOFTWARE ............................ 141
5.3 OHMIC MEASUREMENT SYSTEM VERIFICATION................................................................................................................142
5.4 RELOADING EMBEDDED SOFTWARE INTO MOLBOX RFM FLASH MEMORY.................................................................143
5.5 RELOADING MOLBLOC EEPROM FILE.................................................................................................................................144
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
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5.6 OVERHAUL...............................................................................................................................................................................144
5.6.1 INTERNAL VIEW.............................................................................................................................................................................. 145
5.6.1.1 UPSTREAM ABSOLUTE RPT .................................................................................................................................................... 146
5.6.1.2 DOWNSTREAM ABSOLUTE RPT.............................................................................................................................................. 146
5.6.1.3 DIFFERENTIAL MICRORANGE RPT (OPTIONAL)...................................................................................................................146
5.6.1.4 DISPLAY......................................................................................................................................................................................146
5.6.1.5 POWER SUPPLY........................................................................................................................................................................146
5.6.1.6 MICRO BOARD........................................................................................................................................................................... 146
5.6.1.7 VALVING MODULE..................................................................................................................................................................... 146
5.6.1.8 MAIN BOARD .............................................................................................................................................................................. 147
5.6.1.9 COOLING FAN............................................................................................................................................................................ 147
6. TROUBLESHOOTING .......................................................149
6.1 OVERVIEW................................................................................................................................................................................149
7. APPENDIX ......................................................................155
7.1 CONVERSION OF NUMERICAL VALUES...............................................................................................................................155
7.1.1 PRESSURE ...................................................................................................................................................................................... 155
7.1.2 TEMPERATURE............................................................................................................................................................................... 155
7.1.3 FLOW................................................................................................................................................................................................ 156
7.2 WARRANTY STATEMENT.......................................................................................................................................................159
8. GLOSSARY.....................................................................161
TABLES & FIGURES
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Table 1. molbloc-L Pressure Dependent Calibration Types........................................................................5
Table 2. molbloc-L Ranges with Low Pressure Calibrations.......................................................................6
Table 3. molbloc-L Ranges with High Pressure Calibrations ......................................................................7
Table 4. molbloc-S Flow at Various molbloc Upstream Pressures ...........................................................10
Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures ..............10
Table 6. molbloc-S Calibration Types........................................................................................................11
Table 7. molbox RFM Parts List.................................................................................................................15
Table 8. Summary of molbox RFM Direct Function Key Operations.........................................................29
Table 9. Available molbloc-L Gases ..........................................................................................................32
Table 10. Available molbloc-S Gases........................................................................................................33
Table 11. Available Flow Units...................................................................................................................39
Table 12. Flow Units and Corresponding Total Mass or Volume Units.....................................................65
Table 13. molbloc-L Size and Nominal Range Designations ....................................................................71
Table 14. molbloc-S Size Designation and Pressure to Flow Conversion Ratio (KF)................................71
Table 15. Pressure Units of Measure Available.........................................................................................73
Table 16. Security Levels - Functions NOT Executed Per Function/Level................................................81
Table 17. Security Levels - Functions NOT Executed Per Function/Level (Continued)............................82
Table 18. COM1 and COM2 Available Settings ........................................................................................88
Table 19. COM1 DB-9F Pin Designation...................................................................................................96
Table 20. COM2 DB-9M Pin Designation..................................................................................................97
Table 21. Command Summary..................................................................................................................98
Table 22. Error Messages........................................................................................................................100
Table 23. Status Byte Register................................................................................................................129
Table 24. Standard Event Register..........................................................................................................131
Table 25. Troubleshooting Checklist .......................................................................................................149
Table 26. Pressure Unit Conversions......................................................................................................155
Table 27. Temperature Unit Conversion..................................................................................................155
Table 28. Conversions From kg/s To sccm At 0 °C For Various Gases .................................................156
Table 29. Conversions From sccm At 0 °C To Other Volumetrically Based Flow Units .........................156
Table 30. Conversions From Volumetrically Based Flow Units At 0 °C To
Corresponding Units At Another Temperature (uxxx)...........................................................157
Table 31. Conversions From kg/s To mole/s For Various Gases............................................................157
Table 32. Conversion From mole/s To pccm...........................................................................................158
Table 33. Conversion From sccm At 0 °C to Volume Flow Units At Another Pressure
And Temperature...................................................................................................................158
Table 34. Authorized Service Providers ..................................................................................................159
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
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Figure 1. molbox RFM Front Panel............................................................................................................13
Figure 2. molbox RFM Rear Panel ............................................................................................................14
Figure 3. molbox RFM Internal Pneumatic Schematic – MICRORANGE OPTION RPT
ACTIVE/INACTIVE..................................................................................................................23
Figure 4. Keypad Layout............................................................................................................................27
Figure 5. molbox RFM Internal Pneumatic Schematic – TARING, UPSTREAM
molbloc-L OPERATION...........................................................................................................41
Figure 6. molbox RFM Internal Pneumatic Schematic – TARING molbloc-S OPERATION.....................44
Figure 7. molbox RFM Internal Pneumatic Schematic – PURGING .........................................................45
Figure 8. molbox RFM Internal Pneumatic Schematic – LEAK CHECK molbox.......................................48
Figure 9. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –
CHECKING OFFSET AND STABILITY molbloc-L operation..................................................50
Figure 10. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –
CHECKING OFFSET AND STABILITY molbloc-S operation .................................................52
Figure 11. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR ON..................92
Figure 12. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR OFF................92
Figure 13. Status Byte Register...............................................................................................................130
Figure 14. molbox RFM Internal Pneumatic Schematic – RUN UPSTREAM OR DOWNSTREAM
ABSOLUTE RPT CALIBRATION..........................................................................................139
Figure 15. molbox RFM Internal Pneumatic Schematic – RUN MICRORANGE DIFFERENTIAL
RPT CALIBRATION ..............................................................................................................139
Figure 16. molbox RFM Internal View......................................................................................................145
Figure 17. molbox RFM Valving Assembly Schematic............................................................................147
ABOUT THIS MANUAL
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This manual provides the user with the information necessary to operate a molbox RFM, Reference Flow
Monitor. It also includes a great deal of additional information provided to help you optimize molbox RFM
use and take full advantage of its many features and functions.
Before using the manual, take a moment to familiarize yourself with the Table of Contents structure: All first
time molbox RFM users should read Section 2. Section 3 provides a comprehensive description of general
molbox RFM operating principles. Section 4 is for remote operation from an external computer. Section 5
provides maintenance and calibration information. Section 6 is a quick troubleshooting guide. Use it to
troubleshoot unexpected molbox RFM behavior based on the symptoms of that behavior.
Certain words and expressions have specific meaning as they pertain to molbox RFM. Section 8 is useful as
a quick reference for exact definition of specific words and expressions as they are used in this manual.
For those of you who “don’t read manuals”, go directly to section 2.3, initial setup, to set up your
molbox RFM. Then go to section 2.4, power up and verification. This will get you running quickly with
minimal risk of causing damage to yourself or your molbox RFM. THEN… when you have questions or
start to wonder about all the great features you might be missing, get into the manual!
Manual Conventions
(CAUTION) is used in throughout the manual to identify user warnings and cautions.
(NOTE) is used throughout the manual to identify operating and applications advice and
additional explanations.
[ ] indicates direct function keys (e.g., [RANGE]).
< > indicates molbox RFM screen displays (e.g., <1yes>).
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
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1. INTRODUCTION
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1.1 PRODUCT OVERVIEW
molbox RFM is a support unit for making low mass flow measurements using molbloc mass
flow elements. molbox RFM reads calibration data off the molbloc EEPROM and measures molbloc
upstream and downstream pressure using built-in high accuracy Reference Pressure
Transducers (RPTs). An ohmic measurement system reads the resistance of the molbloc platinum
resistance thermometers from which molbloc temperature is calculated. Using the molbloc calibration
data, pressures, temperature and gas properties stored in memory, the flow rate of the gas flowing
through the molbloc is calculated. A microrange option is available to increase resolution and accuracy
below 10 % FS of the molbloc-L flow range.
Internal molbox RFM valving supports on-board PRESSURE TRANSDUCER TARING, LEAK TESTING
and SELF PROTECTION functions as well as a gas purge routine.
molbox RFM provides a local user interface via a front panel key pad and display and includes advanced
on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.
molbox RFM is intended for applications in which a highly compact presentation, high range ability and
lower cost are the primary considerations. A second model, molbox1, is available for applications where
higher accuracy is the most important requirement.
1.1.1 MOLBLOC FLOW ELEMENTS
Two different types of molblocs may be used with molbox RFM; molbloc-L (laminar) and
molbloc-S (sonic).
1.1.1.1 MOLBLOC-L FLOW ELEMENT
molbloc-L is the original molbloc laminar flow element. molbloc-L covers the
lower portion of the molbloc/molbox system flow range. The key molbloc-L
measurement is the differential pressure across the element, which is roughly
proportional to the mass flow rate through it. molbloc-L elements are calibrated
to be used at an absolute pressure that remains nearly constant, while the
differential pressure varies with flow rate. Different operating pressure options
and their effect on molbloc flow range are described in Section 1.2.4.1.2.
1.1.1.2 MOLBLOC-S FLOW ELEMENT
molbloc-S elements use critical (sonic) flow venturi nozzle technology to
measure flows, which overlap with the higher molbloc-L ranges and extend the
high end of the molbloc/molbox RFM system flow range. The mass flow rate
through a molbloc-S element is roughly proportional to the upstream absolute
pressure when the flow is “choked”, so the molbloc-S operating pressure can
vary widely as the mass flow rate is changed throughout the flow range. The
limits of molbloc-S operating pressure and flow ranges are defined by the
molbloc-S calibration type, described in Section 1.2.4.2.2.
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 2
1.2 SPECIFICATIONS
1.2.1 GENERAL SPECIFICATIONS
Power Requirements 85 to 264 VAC, 47 to 440 Hz, 18 VA max. consumption
Fuse 1A/250V, slow blow, 5x20mm, NSN: 5920008930491
Operating Temperature Range 15 to 35 °C
Storage Temperature Range -20 to 70 °C
Vibration Meets MIL-T-28800D
Weight 2.55 kg (5.6 lb) max.
Dimensions 8 cm H x 22.5 cm W x 20 cm D
(3.1 in. x 8.9 in. x 7.9 in.) approx.
Microprocessor Motorola 68302, 16 MHz
Communication Ports RS232 (COM1), RS232 (COM2), IEEE-488
Reference Pressure Transducers
(RPTs) Standard: 2 x 600 kPa (87 psia) calibrated range piezoresistive silicon
Microrange option: 12.5 kPa (1.8 psid) piezoresistive silicon
Ohmic Measurement System Resolution: 0.004 Ω
Accuracy: ±0.02 % of reading
Accuracy of 100 and 110 Ωreference resistors: ±0.01 %
Stability of 100 and 110 Ωreference resistors: ±0.005 % per three years
Gases Supported With molbloc-L Nitrogen (N2), Air, Argon (Ar), Butane (Butn), Carbon
Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2),
Carbon Tetrafluoride (CF4), Octofluorocyclobutane (C4F8), Ethane
(C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6),
Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8),
Sulfur Hexafluoride (SF6), Xenon (Xe)
With molbloc-S Nitrogen (N2), Air (dry and humid)
Pressure Connections Quick connectors equivalent to Swagelok QM Series (-QM2-B200)
Pressure Limits Maximum working pressure 600 kPa absolute (87 psia)
Maximum pressure without damage 800 kPa absolute (115 psia)
NOTE: The microrange option includes a 12.5 kPa (1.8 psi) differential
RPT which may be damaged by differential pressure greater than 100
kPa (15 psi).
Flow Ranges See Sections 1.2.4.1.3, 1.2.4.1.4and 1.2.4.2.1
CE Conformance Available. Must be specified.
1.2.2 REFERENCE PRESSURE TRANSDUCER (RPT)
SPECIFICATIONS
1.2.2.1 UPSTREAM AND DOWNSTREAM RPTS
Type Piezoresistive silicon
Range 0 to 600 kPa absolute (0 to 87 psia)
Resolution 6.0 Pa (0.0009 psi)
Repeatability ±0.01 % FS
Accuracy Absolute measurements: ±0.05 % FS for one year
Differential measurements: ±(20 Pa + 0.05 % ΔΡ). Taring sequence eliminates zero
error on measurement of difference between the two RPTs.
1. INTRODUCTION
Page 3 © 1998-2007 DH Instruments, a Fluke Company
1.2.2.2 DIFFERENTIAL RPT (MICRORANGE OPTION)
Type Piezoresistive silicon
Range 0 to 12.5 kPa differential (0 to 1.8 psid)
Resolution 0.14 Pa (0.00002 psi)
Repeatability ±0.01 % FS
Accuracy ±0.05 % FS for one year. Taring sequence eliminates zero error.
1.2.3 TEMPERATURE MEASUREMENT SPECIFICATIONS
Specifications are for molbloc mounted Platinum Resistance Thermometers (PRT) combined
with molbox RFM resistance measurement system and temperature calculation.
Range 0 to 40 °C
Accuracy ±0.05 °C
Resolution 0.01 °C
The molbox RFM internal resistance measurement system is automatically calibrated using
reference 100 and 110 Ω(±0.01 %) resistors (see Section 5.3).
1.2.4 FLOW MEASUREMENT SPECIFICATIONS
molbox RFM measures the flow through molbloc flow elements. There are two different
types of molblocs, molbloc-L (laminar) (see Section 1.1.1.1) and molbloc-S (sonic) (see
Section 1.1.1.2). Flow measurement specifications, calibration types, ranges and dimensions
are detailed separately for each molbloc type in Section 1.2.4.1 and 1.2.4.2.
1.2.4.1 molbloc-L
The flow range, useable operating pressure and absolute and differential
pressure associated with molbloc-L operation depend on the molbloc used and
its pressure-dependent calibration options (see Section 1.2.4.1.2).
Measurement Update Rate 1 second
Range 0 to molbloc full scale depending on gas and molbloc
pressure dependent calibration type
(see Section 1.2.4.1.2).
Resolution 0.01 % FS
Linearity ±0.23 % of reading from 10 to 100 % FS,
±0.023 % FS under 10 % FS
Repeatability ±0.1 of reading from 10 to 100 % FS,
±0.01 % FS under 10 % FS
Precision1±0.25 % of reading from 10 to 100 % FS,
±0.025 % FS under 10 % FS
Stability2
(1 year) ±0.15 % of reading from 10 to 100 % FS,
±0.015 % FS under 10 % FS
Measurement Uncertainty 3
(1 year, N2 and any molbox RFM
supported gas for which the molbloc
in use is calibrated)
±0.5 % of reading from 10 to 100 % FS,
±0.05 % FS under 10 % FS
1 Precision: Combined linearity, hysteresis, repeatability.
2 Stability: aximum change in zero and span over specified time period for typical molbox RFM and
molbloc used under typical conditions. As stability can only be predicted, stability for a specific
molbox RFM should be established from experience.
3 Measurement Uncertainty (Accuracy): Maximum deviation of the molbox RFM flow indication from
the true value of the flow through the molbloc including precision, stability and DHI calibration
standard measurement uncertainty.
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 4
1.2.4.1.1 molbloc-L FLOW MEASUREMENT
SPECIFICATIONS, MICRORANGE OPTION
The microrange option (see Section 1.2.2.2) improves molbloc-L flow
measurement specifications below 10 % FS of the molbloc range. With the
microrange option, the affected measurement specifications below 10 % FS
become:
Resolution 0.01 % of 10 % FS (0.001 % FS)
Linearity ±0.23 % of reading from 1 to 10 % FS
Repeatability ±0.1 % of reading from 1 to 10 % FS
Precision1±0.25 % of reading from 1 to 10 % FS
Stability2
(1 year) ±0.15 % of reading from 1 to 10 % FS
Measurement Uncertainty3
(1year, N2and any molboxRFM
supportedgas forwhich the molblocin
useis calibrated)
±0.5 % of reading from 1 to 10 % FS
1 Precision: Combined linearity, hysteresis, repeatability.
2 Stability: Maximum change in zero and span over specified time period for typical molbox RFM and
molbloc used under typical conditions. As stability can only be predicted, stability for a specific
molbox RFM should be established from experience.
3 Measurement Uncertainty (Accuracy): Maximum deviation of the molbox RFM flow indication from
the true value of the flow through the molbloc including precision, stability and DHI calibration
standard measurement uncertainty.
1.2.4.1.2 molbloc-L PRESSURE DEPENDENT CALIBRATION
TYPES
See your molbloc’s Calibration Report to determine the calibration type of
the molbloc you are using.
Different pressure dependent calibration options for molbloc-L elements determine
the range of operating pressures over which a molbloc can be used within its
mass flow measurement specifications. The calibration option also affects the
molbloc flow range and the differential pressure associated with the flow range.
Measurement uncertainty (accuracy) specifications for molbloc-L are valid only
for gases with which the molbloc has been calibrated. All molbloc-L elements
are calibrated for N2. Calibrations with other gases are optional. DHI calibration
capability is not maintained at all times for all gases on all molbloc designations.
Check for availability before ordering calibrations.
1. INTRODUCTION
Page 5 © 1998-2007 DH Instruments, a Fluke Company
The molbloc-L pressure dependent calibration types are summarized in Table 1.
Table 1. molbloc-L Pressure Dependent Calibration Types
NOMINAL DIFFERENTIAL
PRESSURE AT MAX. FLOW
CALIBRATION TYPE
OPERATING PRESSURE
1E5
MOLBLOC ALL OTHER
MOLBLOCS
Full mod,
low pressure 200 to 325 kPa absolute
(29 to 48 psia)
upstream of molbloc
5 kPa
(.725 psi) 50 kPa
(7.5 psi)
Full mod,
high pressure 325 to 525 kPa absolute
(48 to 76 psia)
upstream of molbloc
Not available 50 kPa
(7.5 psi)
Downstream Atmospheric pressure (95 to
105 kPa, 13.8 to 15.2 psia)
downstream of molbloc
12.5 kPa
(1.8 psi) 80 kPa
(12 psi)
Single P,
low pressure
(non-N2 gases only)
Any specified single molbloc
upstream pressure between
200 and 325 kPa absolute (29
to 48 psia)
5 kPa
(.725 psi) 50 kPa
(7.5 psi)
Single P,
high pressure
(non-N2 gases only)
Any specified single molbloc
upstream pressure between
325 and 525 kPa absolute (48
to 76 psia)
Not available 50 kPa
(7.5 psi)
Differential pressure values are nominal and may vary by up to 15 % with the
actual molbloc used.
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 6
1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations
Table 2. molbloc-L Ranges with Low Pressure Calibrations
- full mod, low pressure
- full mod, downstream
- single P, low pressure
molbloc-L SIZE AND FULL SCALE FLOW (sccm)
GASES SIZE
1E1 SIZE
5E1 SIZE
1E2 SIZE
2E2 SIZE
5E2 SIZE
1E3 SIZE
5E3 SIZE
1E4 SIZE
3E4 SIZE
1E5
Nitrogen N210 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Argon Ar
10 50 100 200 500 1 000 5 000 10 000 25 000 80 000
Helium He
10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Sulfur Hexafluoride SF610 50 100 200 500 1 000 2 000
500 6 000
1 000 6 000
4 000 ---
---
INERT
Xenon XE
10 40 80 150 400 800
3 500
500 8 000 11 000
3 000 30 000
20 000
Butane C4H10 20 100 130
30 270
50 670
140 2 300 2 200
1 400 7 000
3 000 ---
--- ---
---
Ethane C2H620 100 200 400 1
000 2 000 6 000
1 000 18 000
2 000 18 000
6 000 60 000
50 000
Ethylene C2H416 80 160 320 800 1 600 7 000
1 000 16 000 20 000
5 000 70 000
40 000
Hydrogen H220 100 200 400 1
000 2 000 10
000 20 000 60 000 200 000
Methane CH416 80 160 320 800 1 600 8 000 16 000
40 000
5 000 120 000
40 000
FLAMMABLE
Propane C3H820 100 200 400 1
000 2 000 3 000
1 000 10 000
2 000 10 000
7 000 ---
---
Carbon
Tetrafluoride CF410 50 100 200 500 1 000 4 000
600 10 000 12 000
3 000 36 000
25 000
Hexafluorethene C2F610 50 100 200 500 1 000 2 000
600 6 000
1 200 6 000
4 000 ---
---
FLUORO-
CARBONS
Trifluoromethane CHF310 50 100 200 500 1 000 4 000
600 10 000 12 000
4 000 38 000
30 000
Air Air
10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Carbon Dioxide CO210 50 100 200 500 1 000 5 000 10 000
20 000
4 000 60 000
30 000
Carbon Monoxide CO 10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Nitrous Oxide N2O 10 50 100 200 500 1 000 5 000 10 000
20 000
4 000 60 000
30 000
Octafluorocyclobutane[1] C
4F815 60
9 65
17 130
34 330
85 1 100
175 1 050
840 3 400
1 700 --- ---
OTHER
Oxygen O210 50 100 200 500 1 000 5 000 10 000 30 000 80 000
A bold value indicates that the maximum flow is limited by the maximum Reynolds number value of 1 200 which is reached
before the normal differential pressure range is reached. In that case, the second value gives the minimum flow for which
relative accuracy is ±0.5 % of the measured value. With the microrange option, this value is divided by 10 (see Section
1.2.2.2).
Where there is no value in the field (--), this indicates that the maximum Reynolds number is reached before the differential
pressure reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful.
[1] Due to low vapor pressure, only downstream calibration type is available.
1. INTRODUCTION
Page 7 © 1998-2007 DH Instruments, a Fluke Company
1.2.4.1.4 molbloc-L Ranges with High Pressure Calibrations
Table 3. molbloc-L Ranges with High Pressure Calibrations
- full mod, high pressure
- single P, high pressure
molbloc-L SIZE AND FULL SCALE FLOW (sccm)
GASES SIZE
1E1 SIZE
5E1 SIZE
1E2 SIZE
2E2 SIZE
5E2 SIZE
1E3 SIZE
5E3 SIZE
1E4 SIZE
3E4 SIZE
1E5
Nitrogen N220 100 200 400 1 000 2 000 10 000 20 000 40 000
7 500 N/A
Argon Ar
20 100 200 400 1 000 2 000 10 000 17 000 35 000
6 000 N/A
Helium He
20 100 200 400 1 000 2 000 10 000 20 000 65 000 N/A
Sulfur Hexafluoride SF625 100
15 120
30 250
50 600
150 2 000
300 2 000
1 400 6 200
2 800 --
-- N/A
INERT
Xenon XE
20 100 150 350 650 1 700 3 350
950 11 000
1 900 11 000
5 700 N/A
Butane[2] C
4H10 * * * * * * * * * N/A
Ethane C2H640 200 350
50 700
100 1 800
200 4 000 6 000
2 300 20 000
4 500 20 000
13 000 N/A
Ethylene C2H440 200 350 700 2 000 4 000 7 000
2 000 22 000
4 000 22 000
12 700 N/A
Hydrogen H240 200 400 900 2 000 4 500 22 000 45 000 130 000 N/A
Methane CH435 175 350 700 1 700 3 500
13 000
2 000 33 000 42 000
12 000 N/A
FLAMMABLE
Propane C3H850 200
25 200
50 400
100 1 000
250 3 500
500 3 500
2 600 11 000
5 400 --
-- N/A
Carbon
Tetrafluoride CF420 100 200 400 1 000 2 000 3 700
1 200 12 000
2 400 12 000
7 300 N/A
Hexafluorethene C2F625 100
15 120
30 250
50 600
150 2 000
300 1 800
1 500 6 000
3 000 --
-- N/A
FLUORO-
CARBONS
Trifluoromethane CHF325 125 240
30 450
60 1 200
150 2 500 4 000
1 500 12 000
3 000 12 000
8 800 N/A
Air Air
20 100 200 400 1 000 2 000 10 000 20 000 40 000
7 200 N/A
Carbon Dioxide CO225 125 250 500 1 250 2 500 6 600
1 400 20 000
2 500 20 000
8 800 N/A
Carbon Monoxide CO 20 100 200 400 1 000 2 000 10 000 20 000 40 000
7 500 N/A
Oxygen O220 100 200 400 1 000 2 000 10 000 20 000 40 000
6 500 N/A
Octafluorocyclobutane[2] C
4F8* * * * * * * * * N/A
OTHER
Nitrous Oxide N2O 25 125 250 500 1 250 2 500
11 000
1 500 20 000
3 000 20 000
9 000 N/A
A bold value indicates that the maximum flow is limited by the maximum Reynolds number value of 1 200 which is reached before
the normal differential pressure range is reached. In that case, the second value gives the minimum flow for which relative accuracy
is ±0.5 % of the measured value. With the microrange option, this value is divided by 10 (see Section 1.2.2.2).
Where there is no value in the field (--), this indicates that the maximum Reynolds number is reached before the differential pressure
reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful.
[2] The operating pressure range is greater than the vapor pressure value for the gas.
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 8
1.2.4.1.5 molbloc-L DIMENSIONS
molbloc-L SIZES [mm(in.)]
5E3 AND LOWER 1E4, 3E4 1E5
A 58.50 (2.303) 74.50 (2.933) 74.50 (2.933)
B 16.00 (0.630) 24.00 (0.945) 24.00 (0.945)
C 32.00 (1.260) SQ 48.00 (1.890) SQ 48.00 (1.890) SQ
D 68.84 (2.750) 80.00 (3.150) 80.00 (3.150)
E 19.06 (0.750) 28.00 (1.102) 28.00 (1.102)
F 124.00 (4.881) 157.00 (6.181) 164.00 (6.458)
G 1/4 in. VCR M 1/4 in. VCR M 1/2 in. VCR M
1. INTRODUCTION
Page 9 © 1998-2007 DH Instruments, a Fluke Company
1.2.4.2 molbloc-S
The flow range and operating pressure associated with molbloc-S operation
depend on the molbloc used and its calibration options (see Section 1.2.4.2.2)
Measurement Update
Rate 1 second
Range Depends on molbloc-S pressure dependent calibration type
(see Section 1.2.4.2.2)
Resolution 0.01 % of FS
Linearity ±0.25 % of reading
Repeatability ±0.10 % of reading
Precision1±0.30 % of reading
Predicted Stability2
(1 year)
±0.2 % of reading
Measurement
Uncertainty3
With SP molbloc-S
calibration
±0.5 % of reading from 50 to 500 kPa
Measurement
Uncertainty3
With LP molbloc-S
calibration
±0.5 % of reading from 50 to 200 kPa
±0.5 % of 50 kPa flow from 20 to 50 kPa
1 Precision: Combined linearity, hysteresis, repeatability.
2. Stability: Maximum change in zero and span over specified time period for typical molbox RFM
and molbloc used under typical conditions. As stability can only be predicted, stability for a
specific molbloc and molbox RFM should be established from experience.
3. Measurement uncertainty (accuracy): Maximum deviation of the molbox RFM flow indication
from the true value of the flow through the molbloc including precision, stability and DHI
calibration standard measurement uncertainty.
1.2.4.2.1 molbloc-S RANGES
molbloc-S flow ranges are defined by the molbloc’s Pressure to Flow Conversion
Ratio, KF, the absolute pressure that can be delivered upstream of molbloc-S, the
downstream pressure and the acceptable back pressure ratio (see Section
3.1.2). KFis expressed in units of sccm/kPa and defines the relationship
between mass flow and the absolute upstream pressure delivered to the
molbloc-S. molbloc-S sizes are defined by the nominal KFof the molbloc-S
nozzle, using scientific notation, for example a 1E3 molbloc-S has a KF1 000
sccm/kPa. To differentiate from molbloc-L size designations, this molbloc size is
designated 1E3-S.
The molbox RFM pressure range, the molbloc-S calibration type (see Section
1.2.4.2.2) and the back pressure ratio (BPR) requirements (see Section 3.1.2)
limit the pressures, and flows, over which a molbloc-S can be used within known
measurement uncertainty limits. In practice, the usable range of a molbloc-S in a
given application also may depend on the available gas supply pressure, the presence
and flow capacity of a vacuum pump downstream or the allowable back pressure
on an upstream DUT.
The flow ranges for each molbloc-S size at various typical operating pressures
are summarized in Table 4 and the BPR limits are in Table 5.
molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 10
Table 4. molbloc-S Flow at Various molbloc Upstream Pressures
FLOW [slm @ 0°C] WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]
molbloc-S
DESIGNATO
R KF
[sccm/kPa]
20 kPa
(3psia) 50 kPa
(7 psia) 100 kPa
(15 psia) Minimum
without
vacuum[3
]
150 kPa
(22 psia) 200 kPa
(30 psia) 250 kPa
(36 psia) 500 kPa
(70 psia)
5E1-S 50 1 2.5 5 7.7 7.5 10 12.5 25
1E2-S 100 2 5 10 15 15 20 25 50
2E2-S 200 4 10 20 28 30 40 50 100
5E2-S 500 10 25 50 67 75 100 125 250
1E3-S 1 000 20 50 100 129 150 200 250 500
2E3-S 2 000 40 100 200 248 300 400 500 1 000
5E3-S 5 000 100 250 500 596 750 1 000 1 250 2500
1E4-S 10 000 200 500 1 000 1 173 1 500 2 000 2 500 5 000
[1] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7% higher when expressed in slm @ 20°C. Flow values at a given pressure may vary by up to
2% due to flowpath machining tolerances.
[2] Flow values in table are valid only when critical flow is established.
[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)
downstream of molbloc-S (no vacuum).
Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures
MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH molbloc DOWNSTREAM PRESSURE OF:[1]
molbloc-S
DESIGNATO
R
≤5
kPa
(0.7
psia)
10
kPa
(1.5
psia)
25
kPa
(3.5
psia)
50
kPa
(7
psia)
100
kPa
(15
psia)
110
kPa
(16
psia)
125
kPa
(18
psia)
150
kPa
(22
psia)
200
kPa
(30
psia)
250
kPa
(36
psia)
300
kPa
(44
psia)
5E1-S 1[2] 1.7 3.4 4.7 7.7 8.4 9.4 11 14 17 20
1E2-S 2[2] 3.4 5.9 8.4 15 16 18 21 27 33 38
2E2-S 4[2] 5.9 9.8 16 28 31 34 40 51 63 74
5E2-S 10[2] 12 20 37 67 72 80 95 122 149 179
1E3-S 20[2] 20[2] 39 69 129 139 154 184 239 294 349
2E3-S 40[2] 40[2] 73 131 248 268 298 358 468 578 687
5E3-S 100[2] 100[2] 173 317 596 646 746 871 1 145 1 420 1 694
1E4-S 200[2] 200[2] 347 615 1 173 1 273 1 442 1 741 2 240 2 789 3 338
[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to
2 % due to flowpath machining tolerances.
[2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio.
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