HEIDELBERG MLA150 User manual

User Guide
MLA150
Maskless Aligner

MLA150
ii User Guide
Doc. No.: DWL-HI-062
Revision: 1 (July 2016)
Copyright © 2016 by Heidelberg Instruments

MLA150
Table of Contents
User Guide i
Table of Contents
Table of Contents ...........................................................................................................i
List of Figures...............................................................................................................iv
List of Tables ................................................................................................................iv
1Introduction...........................................................................................................1
1.1 About this User Guide.............................................................................................1
1.2 Contact....................................................................................................................2
1.3 Related Documentation...........................................................................................3
2Safety .....................................................................................................................5
2.1 Intended Use and Limitations..................................................................................5
2.2 Conventions............................................................................................................6
2.3 Laser Safety............................................................................................................6
2.4 Electrical Safety ......................................................................................................8
2.5 Other Risks during Operation..................................................................................9
2.6 Interlock ..................................................................................................................9
2.7 Labels ...................................................................................................................10
3System Description.............................................................................................13
3.1 Lithography Main Unit ...........................................................................................14
3.1.1 Flowbox...................................................................................................14
3.1.2 System Components ...............................................................................17
3.1.3 Optics System .........................................................................................20
3.2 Electronics Rack ...................................................................................................22
3.3 Orientation of Stage and Design...........................................................................23
4Wizard Description..............................................................................................25
4.1 Overview: Exposure Wizard..................................................................................25
4.2 Static Wizard Elements.........................................................................................27

MLA150
Table of Contents
ii User Guide
4.2.1 Menu Bar.................................................................................................27
4.2.2 Tab Section..............................................................................................27
4.2.3 Info Section..............................................................................................28
4.3 Substrate Representation......................................................................................31
5System Startup....................................................................................................33
5.1 Powering Up..........................................................................................................33
5.2 Powering Down.....................................................................................................34
6Job Setup.............................................................................................................35
6.1 Select Job..............................................................................................................36
6.2 Select Substrate Template....................................................................................37
6.3 Load Design..........................................................................................................38
6.3.1 Standard: First Exposure .........................................................................38
6.3.2 Standard: Alignment ................................................................................39
6.3.3 Series.......................................................................................................40
6.4 Convert Design......................................................................................................41
6.5 Load Substrate......................................................................................................43
6.6 Draw Structures.....................................................................................................46
6.6.1 Draw Image .............................................................................................47
6.6.2 Draw Line or Polygon...............................................................................48
6.6.3 Expose Crosses in Draw Mode................................................................49
6.7 Setup Overlay Alignment.......................................................................................50
6.8 Expose Design......................................................................................................54
6.8.1 First Exposure Procedure........................................................................54
6.8.2 Overlay Exposure Procedure...................................................................55
6.8.3 Series Exposure Procedure.....................................................................57
6.8.4 Draw Mode Exposure Procedure.............................................................59
6.9 Unload Substrate...................................................................................................60
7System Utilities and Tools..................................................................................63

MLA150
Table of Contents
User Guide iii
7.1 Control Panel ........................................................................................................63
7.2 Camera Window....................................................................................................65
7.3 Optimizing Alignment and Exposure Results ........................................................66
7.3.1 Unsatisfying Alignment Measurements....................................................66
7.3.2 Unsatisfying Exposure Results................................................................67
7.4 Back Side Alignment.............................................................................................68
7.4.1 Overview of BSA Marker Zones ..............................................................68
7.4.2 BSA Exposure Preparation......................................................................70
8Operator Maintenance and Troubleshooting....................................................71
8.1 Operator Maintenance ..........................................................................................71
8.2 Troubleshooting ....................................................................................................72
8.3 TeamViewer Software...........................................................................................73