HEIDELBERG MLA150 User manual

User Guide
MLA150
Maskless Aligner

MLA150
ii User Guide
Doc. No.: DWL-HI-062
Revision: 1 (July 2016)
Copyright © 2016 by Heidelberg Instruments

MLA150
Table of Contents
User Guide i
Table of Contents
Table of Contents ...........................................................................................................i
List of Figures...............................................................................................................iv
List of Tables ................................................................................................................iv
1Introduction...........................................................................................................1
1.1 About this User Guide.............................................................................................1
1.2 Contact....................................................................................................................2
1.3 Related Documentation...........................................................................................3
2Safety .....................................................................................................................5
2.1 Intended Use and Limitations..................................................................................5
2.2 Conventions............................................................................................................6
2.3 Laser Safety............................................................................................................6
2.4 Electrical Safety ......................................................................................................8
2.5 Other Risks during Operation..................................................................................9
2.6 Interlock ..................................................................................................................9
2.7 Labels ...................................................................................................................10
3System Description.............................................................................................13
3.1 Lithography Main Unit ...........................................................................................14
3.1.1 Flowbox...................................................................................................14
3.1.2 System Components ...............................................................................17
3.1.3 Optics System .........................................................................................20
3.2 Electronics Rack ...................................................................................................22
3.3 Orientation of Stage and Design...........................................................................23
4Wizard Description..............................................................................................25
4.1 Overview: Exposure Wizard..................................................................................25
4.2 Static Wizard Elements.........................................................................................27

MLA150
Table of Contents
ii User Guide
4.2.1 Menu Bar.................................................................................................27
4.2.2 Tab Section..............................................................................................27
4.2.3 Info Section..............................................................................................28
4.3 Substrate Representation......................................................................................31
5System Startup....................................................................................................33
5.1 Powering Up..........................................................................................................33
5.2 Powering Down.....................................................................................................34
6Job Setup.............................................................................................................35
6.1 Select Job..............................................................................................................36
6.2 Select Substrate Template....................................................................................37
6.3 Load Design..........................................................................................................38
6.3.1 Standard: First Exposure .........................................................................38
6.3.2 Standard: Alignment ................................................................................39
6.3.3 Series.......................................................................................................40
6.4 Convert Design......................................................................................................41
6.5 Load Substrate......................................................................................................43
6.6 Draw Structures.....................................................................................................46
6.6.1 Draw Image .............................................................................................47
6.6.2 Draw Line or Polygon...............................................................................48
6.6.3 Expose Crosses in Draw Mode................................................................49
6.7 Setup Overlay Alignment.......................................................................................50
6.8 Expose Design......................................................................................................54
6.8.1 First Exposure Procedure........................................................................54
6.8.2 Overlay Exposure Procedure...................................................................55
6.8.3 Series Exposure Procedure.....................................................................57
6.8.4 Draw Mode Exposure Procedure.............................................................59
6.9 Unload Substrate...................................................................................................60
7System Utilities and Tools..................................................................................63

MLA150
Table of Contents
User Guide iii
7.1 Control Panel ........................................................................................................63
7.2 Camera Window....................................................................................................65
7.3 Optimizing Alignment and Exposure Results ........................................................66
7.3.1 Unsatisfying Alignment Measurements....................................................66
7.3.2 Unsatisfying Exposure Results................................................................67
7.4 Back Side Alignment.............................................................................................68
7.4.1 Overview of BSA Marker Zones ..............................................................68
7.4.2 BSA Exposure Preparation......................................................................70
8Operator Maintenance and Troubleshooting....................................................71
8.1 Operator Maintenance ..........................................................................................71
8.2 Troubleshooting ....................................................................................................72
8.3 TeamViewer Software...........................................................................................73

MLA150
List of Figures
iv User Guide
List of Figures
Figure 1: System components..............................................................................13
Figure 2: Elements of the laminar flow box...........................................................15
Figure 3: Temperature control readout .................................................................15
Figure 4: System support......................................................................................17
Figure 5: Operator Panel ......................................................................................17
Figure 6: Stage system with optics plane..............................................................19
Figure 7: Interferometer function...........................................................................21
Figure 8: E-rack components................................................................................22
Figure 9: Orientation of stage and design.............................................................23
Figure 10: Machine-related design rotation...........................................................23
Figure 11: Rotation of coordinate system on chuck..............................................24
Figure 12: Location of coordinate pairs.................................................................24
Figure 13: Wizard window overview .....................................................................25
Figure 14: Unloading options in Standard Mode and Series Mode.......................60
Figure 15: Camera window...................................................................................65
Figure 16: BSA marker zones overview................................................................69
Figure 17: Orientation on wafer for BSA...............................................................70
List of Tables
Table 1: Field of view (top side, back side)...........................................................20

MLA150
1 Introduction
User Guide 1
The MLA150 is a high speed direct write lithography tool extended by capabilities
formerly only available on Mask Aligners. It can expose the patterns directly without
prior fabrication of a mask resulting in a significantly shorter prototyping cycle. It offers
topside alignment and backside alignment with high accuracy, and a light source which
generates sufficient dose to expose even thick and less sensitive resists. The MLA150
allows using substrates of any size and shape and provides flexible change of pattern,
distortion compensation and other software corrections. The system can produce
structures down to 1 µm. The alignment accuracy can be as good as 250 nm under
optimized conditions.
1.1 About this User Guide
This user guide gives information and instructions on how to handle the MLA150 system
properly. It is important that every person who intends to work with the system reads
this guide in order to avoid possible mishandling leading to damage to the system or to
persons. Therefore, by all means, read the safety instructions carefully before starting
work with the system. The guide assists the user in performing the exposure procedure
beginning at system startup and ending with the exposure procedure itself. The
subchapters in 6 Job Setup build a sequence of tasks that have to be executed in order
to prepare the exposure job.
Additionally, you find a description of the system and of the Exposure Wizard. Also
information about system utilities and troubleshooting are given in the final chapters.
Technical data can be found in the related document Technical Data Sheet
To facilitate following the instructions and information, a list of conventions indicating the
type of information is given here.
Note:
Indicates that additional information or advice follow to get best results.
1.
Signalizes that this is the first step of a step-by-step instruction followed by
further steps

Indicates a result which the user can see or hear. It can also just be an
intermediate result and can therefore be followed by further steps of the same
instruction.
Indicates that the following information or instruction is an alternative step e. g.,
to abort a process or to be referred to another instruction or chapter.
This symbol is used to mark a location in a figure that is related to the
instruction. The numbers in the symbol correspond to the number of the step in
the instructions.
ii
i
1

MLA150
1 Introduction
2 User Guide
1.2 Contact
Should you need assistance, please contact your local service office:
You can also reach Heidelberg Instruments via email: [email protected], or visit our site on
the internet: http://www.himt.de
China:
Europe:
Heidelberg Instruments Service China
Rm.101, Block 1, Animation Park,
Yuehai Street, Nanhai Road,
Nanshan Distr., Shenzhen 518045
China
Phone:[phone] / -2 / -7
Fax: [phone]
Email: [email protected]
Heidelberg Instruments GmbH
Service Department
Tullastraße 2
69126 Heidelberg
Germany
Phone: [phone]
Fax: [phone]
Email: [email protected]
Japan:
Korea:
Heidelberg Instruments Service Japan
Germany Center for Industry & Trade
1-18-2, Hakusan
Midori-ku, Yokohama, 226-0006
Japan
Phone:[phone]
Fax: [phone]
Email: [email protected]
Heidelberg Instruments Service Korea
#316 Expo Officetel, 381
Mannyeon-dong, Seo-gu
Deajeon, 35203
South Korea
Phone:[phone]
Fax: [phone]
Email: [email protected]
Taiwan:
USA:
Heidelberg Instruments Service Taiwan
6F-5, No. 192 DongGuang Road
Hsinchu City, 30069
Taiwan
Phone[phone]
Fax [phone]
E-Mail: [email protected]
Heidelberg Instruments Inc. USA
2807 Oregon Court, Unit E2
Torrance, CA, 90503
USA
Phone:[phone]
Fax: [phone]
Email: [email protected]

MLA150
1 Introduction
User Guide 3
1.3 Related Documentation
Heidelberg Instruments offers several further manuals related to the machine and its
operation. If you did not get one of these or need an update, please contact Heidelberg
Instruments, Germany (1.2 Contact). See the list of related documents below:
Pre-Installation Guide
Environmental and electrical
requirements, sizes and weights of
components etc.
PI- Site Inspection checklist
Checklist containing questions regarding
the conditions of the costumer’s
installation site for the system.
Safety guide
Describes necessary safety measures
during move-in, installation as well as
servicing and maintenance times.
Conversion Software Manual
Manual for the HIMT conversion software
used for data preparation and fractioning.
Design Guide
Instructions on design rules and design
creation.
Maintenance Guide
Guide for Maintenance and
Troubleshooting, as well as an overview of
typical service tasks.
Technical Data Sheet
Overview of the systems technical data.
Quick Guide
Short instructions to execute an exposure.

MLA150
1 Introduction
4 User Guide