© ICSPI Corp. 2007-2021 nGauge AFM User Manual 2.0 2
Table of Contents
1. Introduction..........................................................................................................................4
2. Safety and Precautions........................................................................................................4
3. Overview..............................................................................................................................7
3.1. AFM Basics...................................................................................................................7
3.2. MEMS AFM or AFM-on-a-Chip.....................................................................................7
3.3. nGauge AFM Components ...........................................................................................8
3.4. nGauge AFM Capabilities.............................................................................................8
4. Setup.................................................................................................................................10
4.1. Location......................................................................................................................10
4.2. Basic Set-up ...............................................................................................................11
4.3. Software Installation....................................................................................................12
5. Basic Operation .................................................................................................................13
5.1. Start-up.......................................................................................................................13
5.2. Chip Installation and Sample Placement.....................................................................14
5.3. Software Overview......................................................................................................17
5.4. Sweep.........................................................................................................................17
5.5. Approach ....................................................................................................................19
5.6. Scan ...........................................................................................................................23
5.7. Scanning Recommendations ......................................................................................29
5.8. Improving Performance...............................................................................................33
5.9. Advanced Scan Features............................................................................................36
6. Post-Processing.................................................................................................................38
6.1. Gwyddion....................................................................................................................39
6.2. Calibration...................................................................................................................40
7. Troubleshooting.................................................................................................................42
7.1. Set-up Troubleshooting...............................................................................................42
7.2. Sweep Troubleshooting ..............................................................................................44
7.3. Approach Troubleshooting..........................................................................................48
7.4. Scan Troubleshooting.................................................................................................52
8. Advanced Controls.............................................................................................................55
8.1. Sweep Advanced Controls..........................................................................................55
8.2. Approach Advanced Controls......................................................................................57