Ideal Vacuum XactGauge XGC-321 User manual

Doc. Ref. XGC-321-100119 1 V00 (2019-11)
XactGauge™
Convection-Enhanced Pirani Gauge
Sensor
XGC-321
Operating Manual
Incl. EU Declaration of Conformity

2 Doc. Ref. XGC-321-100119 V00 (2019-11)
Product Identification
In all communications with Ideal Vacuum Products, please spe-
cify the information given on the product nameplate. For conven-
ient reference copy that information into the space provided
below.
Validity
This document applies to products with part numbers:
P1010261 (ISO-KF-16)
P1010260 (ISO-KF-25)
P1010259 (ISO-KF-40)
P1010258 (CF 1.33”)
P1010257 (CF 2.75”)
P1010256 (4 VCR female)
P1010255 (8 VCR female)
P1010245 (1/8" MNPT)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with vacuum connection
DN 25 ISO-KF. They apply to the other products by analogy.
We reserve the right to make technical changes without prior
notice.

Doc. Ref. XGC-321-100119 3 V00 (2019-11)
Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will Ideal Vacuum Products be responsible or liable
for indirect or consequential damages that result from the use or
application of this equipment.
Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation, Ideal
Vacuum Products cannot assume responsibility or liability for
any actual use based on the examples and diagrams.
No patent liability is assumed by Ideal Vacuum Products with
respect to use of information circuits, equipment, or software
described in this manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols and safety messages to make
you aware of safety considerations.
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in death or serious injury, property damage,
or economic loss.

4 Doc. Ref. XGC-321-100119 V00 (2019-11)
CAUTION
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in minor or moderate injury, property damage,
or economic loss.
NOTICE
Identifies information that is critical for successful application and
understanding of the product.
SHOCK HAZARD
Labels may be located on or inside the device to alert people
that dangerous voltages may be present.

Doc. Ref. XGC-321-100119 5 V00 (2019-11)
General Safety Instructions
•
Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•
Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•
Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Ideal Vacuum Products assumes no liability and the warranty
becomes null and void if the end-user or third parties
•
disregard the information in this document
•
use the product in a non-conforming manner
•
make any kind of interventions (modifications, alterations etc.)
on the product
•
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.

6 Doc. Ref. XGC-321-100119 V00 (2019-11)
Contents
Product Identification 2
Validity 2
Important User Information 3
General Safety Instructions 5
Liability and Warranty 5
1 Introduction / General Information 7
1.1 Description 7
1.2 Specifications 8
1.3 Dimensions 9
2 Important Safety Information 10
2.1 Safety Precautions - General 10
2.2 Safety Precautions - Service and Operation 11
2.3 Electrical Conditions 12
2.3.1 Proper Equipment Grounding 12
2.3.2 Electrical Interface and Control 13
2.4 Overpressure and use with hazardous gases 13
2.5 Gases other than Nitrogen / air 14
3 Installation 15
3.1 Mechanical Installation 15
3.2 Electrical Installation 17
3.2.1 Grounding 17
4 Using the gauge with different gases 19
5 Service 23
5.1 Calibration 23
5.2 Maintenance 23
5.3 Troubleshooting 24
5.4 Contamination 26
5.5 Gauge replacement 28
6 Factory Service and Support 29
7 Returning the Product 29
8 Disposal 30
EU Declaration of Conformity 31
For cross-references within this document, the symbol (→  XY)
is used,

Doc. Ref. XGC-321-100119 7 V00 (2019-11)
1 Introduction / General Information
1.1 Description
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant tem-
perature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measur-
ing range of about 10-4 Torr to 10 Torr. By taking advantage of
convection currents that are generated above 1 Torr, convection-
enhanced Pirani gauges increase the measuring range to just
above atmosphere.
The Ideal Vacuum Products XactGaugeTM XGC-321 Convection-
Enhanced Pirani Gauge Sensor is a convection-enhanced Pirani
vacuum gauge sensor that interfaces with external controllers
such as the Ideal Vacuum Products XactGaugeTM XGC-320
controller. The XGC-321 is also a direct drop-in replacement pin-
pin compatible gauge for the MKS Instruments / Granville-
Phillips® 275 Convectron® gauge. The sensor connector has the
same pinouts and signal as the corresponding Convectron®. It is
directly interchangeable with your existing Convectron® control-
lers and cables, so you don't need to change any wiring,
hardware, or process recipes.

8 Doc. Ref. XGC-321-100119 V00 (2019-11)
1.2 Specifications
Measurement range 1.3×10-4 … 1333 mbar
1×10-4 … 1000 Torr
1.3×10-2 Pa … 133 kPa
Accuracy - N2
(typical)
1.3×10-4 … 1.3×10-3 mbar
1.3×10-3 … 530 mbar
530 …1333 mbar
0.1 ×10-3 mbar resolution
±10% of reading
±2.5% of reading
1×10-4 … 1×10-3 Torr
1×10-3 … 400 Torr
400 … 1000 Torr
0.1 mTorr resolution
±10% of reading
±2.5% of reading
Repeatability - N
2
(typical)
±2% of reading
Materials exposed to vacuum gold-plated tungsten, 304
&
316 stainless steel, glass,
nickel, Teflon
®
Internal volume 26 cm3 (1.589 in3)
Internal surface area 59.7 cm2 (9.25 in2)
Weight 3 oz. (85 g)
Permissible temperature
Operating 0 … +50 °C
Storage –40 … +70 °C
Bakeout temperature ≤150 °C (non-operating, with
electronics cable detached)
Relative humidity 0 … 95%, non-condensing
Use
Operating
altitude up to 2500 m
(8200 ft.)
Storage altitude up to 12500 m
(41000 ft.)
Mounting orientation horizontal recommended
(orientation has no effect on
measurements below
1.3 mbar (1 Torr))

Doc. Ref. XGC-321-100119 9 V00 (2019-11)
1.3 Dimensions
Fitting Dimension A
mm (inch)
DN 16 ISO-KF
33
(1.3)
DN 25 ISO-KF
33
(1.3)
DN 40 ISO-KF
33
(1.3)
DN 16 CF 1.33 27.4 (1.08)
DN 40 CF 2.75” 37.3 (1.47)
4 VCR female 47.2 (1.86)
8 VCR female 44.5 (1.75)
1/8" NPT male 25.4
(1)

10 Doc. Ref. XGC-321-100119 V00 (2019-11)
2 Important Safety Information
Ideal Vacuum Products has designed and tested this product to
provide safe and reliable service, provided it is installed and
operated within the strict safety guidelines provided in this man-
ual. Please read and follow all warnings and instructions.
WARNING
To avoid serious injury or death, follow the safety informa-
tion in this document. Failure to comply with these safety
procedures could result in serious bodily harm, including
death, and or property damage.
Failure to comply with these warnings violates the safety stand-
ards of installation and intended use of this instrument. Ideal
Vacuum Products disclaims all liability for the customer’s failure
to comply with these instructions.
Although every attempt has been made to consider most possi-
ble installations, Ideal Vacuum Products cannot anticipate every
contingency that arises from various installations, operation, or
maintenance of the module. If you have any questions about the
safe installation and use of this product, please contact Ideal
Vacuum Products.
2.1 Safety Precautions - General
WARNING! There are no operator serviceable parts or
adjustments inside the gauge sensor.