Keysight E5250A User manual

Keysight Technologies E5250A
Low Leakage Switch Mainframe
User’s Guide

Notices
Copyright Notice
© Keysight Technologies 1995-2015
No part of this manual may be reproduced in
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storage and retrieval or translation into a for-
eign language) without prior agreement and
written consent from Keysight Technologies
as governed by United States and interna-
tional copyright laws.
Manual Part Number
E5250-90000
Edition
Edition 1, October 1995
Edition 2, January 1997
Edition 3, August 1997
Edition 4, January 2000
Edition 5, May 2000
Edition 6, January 2001
Edition 7, August 2003
Edition 8, July 2005
Edition 9, May 2008
Edition 10, July 2009
Edition 11, August 2011
Edition 12, September 2015
Printed in:
Printed in Malaysia
Published by:
Keysight Technologies, Inc.
1400 Fountaingrove Parkway
Santa Rosa, CA 95403 USA
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on “Declarations of Conformity.” You can then
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and 27.405-3 and Department of Defense FAR
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User’s Guide
B2900-9001x
xxxx 201x
Edition x

COMPLIANCE WITH GERMAN NOISE REQUIREMENTS
This is to declare that this product is in conformance with the German Regulation on Noise
Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung
-3.GSGV Deutschland).
• Herstellerbescheinigung
GERÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
• Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
South Korean Class A EMC declaration
This equipment is Class A suitable for professional use and is for use in electromagnetic
environments outside of the home.

Safety Summary
The following general safety precautions must be observed during all phases of operation,
service, and repair of this instrument. Failure to comply with these precautions or with
specific warnings elsewhere in this manual may impair the protections provided by the
instrument. In addition, it violates safety standards of design, manufacture, and intended
use of the instrument. Keysight Technologies assumes no liability for customer’s failure to
comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an
option for many products. Manuals may also be available on the Web. Go to
www.keysight.com and type the product model number in the Search field at the top of the
page.
NOTE Do not use this instrument in any manner not specified by the manufacturer. The protective
features of this instrument may be impaired if it is used in a manner not specified in the
operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a
measurement category, its measurement terminals must not be connected to line-voltage
mains.
Safety of any system incorporating the equipment is the responsibility of the assembler of
the system.
WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use extreme
caution when handling, testing, and adjusting.

•DANGEROUS PROCEDURE WARNINGS
Warnings, as WARNING on the previous page, shall be complied. Procedures
throughout in this manual prevent you from potentially hazard. Their instructions
contained in the warnings must be followed.
•BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and
cabinet must be connected to an electrical ground. The power terminal and the power
cable must meet International Electrotechnical Commission (IEC) safety standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes. Operation
of any electrical instrument in such an environment constitutes a definite safety hazard.
•DO NOT REMOVE COVERS
No operator serviceable parts inside. Refer servicing to qualified personnel. To prevent
electrical shock do not remove covers.
•IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified service
personnel. Return the instrument to a Keysight Technologies sales or service office for
services and repair to ensure that safety features are maintained.
•USE ONLY THE SPECIFIC ACCESSORIES
Specific accessories satisfy the requirements for specific characteristics for using the
instrument. Use the specific accessories, cables, adapters, and so on for safety
reasons.

Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed below.
Direct current.
Alternating current.
Earth ground terminal.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have this
symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Low temperature or freezing conditions. Avoid contact. Surfaces are cold and may cause
personal injury if touched.
Caution, refer to accompanying documentation. The equipment will be marked with this
symbol when it is necessary for the user to refer to the instruction manual.
Read operator's manual. To indicate that the operator's manual or card should be read
before continuing the operation.
Affixed to product containing static sensitive devices--use anti-static handling procedures
to prevent electrostatic discharge damage to component.
IEC Measurement Category I
`
>
^

CAT I

The CE mark shows that the product complies with all applicable European Directives.
The CSA mark is a registered trademark of the Canadian Standards Association.
The RCM mark is a registered trademark of the Australian Communications Authority. This
signifies compliance with the Australian EMC Framework Regulations under the terms of
the Radio communications Act.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product. (CISPR
11)
Korea’s safety and EMC mark
China RoHS - Environmentally Green Product Label
China RoHS - Product with Toxic Substance 40 yr EPUP
The Chinese mark for paper-based packaging materials; Paperboard and Corrugated
Fiberboard
Plastic Material Coding Identification
WARNING A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice,
or the like that, if not correctly performed or adhered to, could result in personal injury or
death. Do not proceed beyond a WARNING notice until the indicated conditions are fully
understood and met.
CAUTION A CAUTION notice denotes a hazard. It calls attention to an operating procedure, practice,
or the like that, if not correctly performed or adhered to, could result in damage to the
product or loss of important data. Do not proceed beyond a CAUTION notice until the
indicated conditions are fully understood and met.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The
affixed label indicates that you must not discard this electrical/ electronic product in
domestic household waste.
Product Category: With reference to the equipment types in the WEEE directive Annex 1,
this product is classified as a “Monitoring and Control instrumentation” product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Keysight office or visit the following
website for more information.
http://about.keysight.com/en/companyinfo/environment/

In This Manual
This manual is a user’s guide for Keysight E5250A, and consists of the following chapters.
1. "Introduction"
Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10×12
Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.
2. "Installation"
Describes requirements to install the E5250A and tasks for installation.
3. "Executing Self-Test and Leak Test"
Describes how to execute the three Self-Test items (Controller Test, Front Panel
Interface Test, and Relay Test) and the Leak Test.
4. "Setting up Measurement Environment"
Explains how to connect your instruments to the E5250A input, and how to connect the
E5250A output to your wafer prober or test fixture.
5. "Controlling the E5250A"
Introduces several methods for controlling the E5250A, gives basic information for
controlling the relay switches on the plug-in cards, and describes how to use Virtual
Front Panel (VFP) utility furnished with the E5250A.
6. "Programming the E5250A"
Describes how to create programs that contain SCPI commands to control the E5250A.
7. "Command Reference"
Describes the SCPI commands available to operate the E5250A via GPIB interface and
the status reporting structure.
8. "VXIplug&play Driver"
Introduces the VXIplug&play driver available for the E5250A.
9. "Executing Sample Programs"
Explains how to execute and modify the sample programs stored in the program disk
that is furnished with the E5250A.

10. "Error Messages"
Lists and describes the error messages for the E5250A.
11. "SCPI Command Summary"
This is a quick reference for the SCPI subsystem commands available for the E5250A.
NOTE For the specifications of the E5250A/E5252A/E5255A, see Data Sheet.
To get the latest Data Sheet, go to www.keysight.com/find/swm and click “Technical
Support” and “Specifications”.
Text Conventions
The following text conventions are used in this manual:
Screen Text Represents text that appears on screen of the controller.
Italic Refers to a related document, or is used for emphasis.

Contents
Keysight E5250A User’s Guide, Edition 12
1. Introduction
Keysight E5250A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Front Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Rear Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Keysight E5252A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Keysight E5255A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
2. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
To Inspect the E5250A and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
Installing the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
To Install Plug-in Card. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
To Install Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
To Configure E5255A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
E5255A Configuration Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-17
To Connect GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-17
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18
Performance Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18

Keysight E5250A User’s Guide, Edition 12
Contents
3. Executing Self-Test and Leak Test
Executing Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
To Execute Self-Test (Standalone) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
To Execute Self-Test using External Controller . . . . . . . . . . . . . . . . . . . . 3-6
Using the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
To Start the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
To Execute Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
To Execute Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
4. Setting up Measurement Environment
Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Connector Plates for the E5252A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Connector Plates for E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Blank Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Connecting 8-Channel Shielded Coaxial Cable . . . . . . . . . . . . . . . . . . . . . . 4-5
Mounting Connectors Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
To Connect Connectors to DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Connecting the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
To Connect Instruments to Input Connectors . . . . . . . . . . . . . . . . . . . . . 4-15
To Connect Bias Source to the E5255A Bias Input . . . . . . . . . . . . . . . . . 4-18
To Connect GNDU to the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Connecting the E5250A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
To Connect the E5252A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
To Connect the E5255A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

Contents
Keysight E5250A User’s Guide, Edition 12
5. Controlling the E5250A
Methods for Controlling the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
Creating Your Own Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
Modifying a Sample Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Using the Virtual Front Panel (VFP) Utility . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Switch Control Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Channel List and Channel Configuration . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Couple Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13
E5252A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-15
E5255A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Using Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-25
Functions of Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . .5-26
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27
Starting the Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27
Confirming the E5250A Card Configurations . . . . . . . . . . . . . . . . . . . . . .5-28
Changing the VFP Setup Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-29
Defining Labels for the E5250A Input Ports . . . . . . . . . . . . . . . . . . . . . . .5-31
Making Connections and Changing the Setup Data . . . . . . . . . . . . . . . .5-33
Saving/Loading the Setup Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-42
6. Programming the E5250A
SCPI Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
Controlling E5250A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Creating a Control Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Defining Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
Defining Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8

Keysight E5250A User’s Guide, Edition 12
Contents
Defining Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Using Couple Port (for E5252A only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Controlling Relay Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Channel Creation Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Bias Mode Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
Couple Port Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Using the VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Using the Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . 6-28
Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29
Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32
7. Command Reference
Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Common Commands for E5250A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
*CLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
*ESE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
*ESR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
*OPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

Contents
Keysight E5250A User’s Guide, Edition 12
*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-13
*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14
*WAI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14
:DIAGnostic Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15
:DIAGnostic Command Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15
:DIAGnostic:TEST:CARD:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16
:DIAGnostic:TEST:CARD[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16
:DIAGnostic:TEST:CARD:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17
:DIAGnostic:TEST:FRAMe:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17
:DIAGnostic:TEST:FRAMe[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18
:DIAGnostic:TEST:FRAMe:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-19
:ROUTe Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-20
:ROUTe Command Tree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-20
[:ROUTe]:BIAS:CHANnel:DISable:CARD . . . . . . . . . . . . . . . . . . . . . . . . .7-22
[:ROUTe]:BIAS:CHANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . .7-22
[:ROUTe]:BIAS:CHANnel:DISable[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . .7-23
[:ROUTe]:BIAS:CHANnel:ENABle:CARD . . . . . . . . . . . . . . . . . . . . . . . . . .7-24
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . .7-25
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . .7-26
[:ROUTe]:BIAS:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27
[:ROUTe]:BIAS:PORT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28
[:ROUTe]:BIAS[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29
[:ROUTe]:BIAS[:STATe]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-30
[:ROUTe]:CLOSe:CARD? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-30
[:ROUTe]:CLOSe[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31
[:ROUTe]:CLOSe[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31
[:ROUTe]:CONNection:RULE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-32
[:ROUTe]:CONNection:RULE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-32
[:ROUTe]:CONNection:SEQuence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-33
[:ROUTe]:CONNection:SEQuence? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-34
[:ROUTe]:COUPle:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-35

Keysight E5250A User’s Guide, Edition 12
Contents
[:ROUTe]:COUPle:PORT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36
[:ROUTe]:COUPle[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37
[:ROUTe]:COUPle[:STATe]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
[:ROUTe]:FUNCtion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
[:ROUTe]:FUNCtion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
[:ROUTe]:OPEN:CARD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40
[:ROUTe]:OPEN[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40
[:ROUTe]:OPEN[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41
:SYSTem Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
:SYSTem Command Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
:SYSTem:CCONfig? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43
:SYSTem:CDEScription? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
:SYSTem:CPON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
:SYSTem:CTYPe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46
:SYSTem:ERRor? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47
:SYSTem:VERSion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47
Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
Status Reporting Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50
Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52
Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53
Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . 7-54
Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55
8. VXIplug&play Driver
System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Driver Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
hpe5250a_biasChanCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7
hpe5250a_biasChanList . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

Contents
Keysight E5250A User’s Guide, Edition 12
hpe5250a_biasChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8
hpe5250a_biasPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
hpe5250a_biasState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9
hpe5250a_close. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10
hpe5250a_closeCard_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10
hpe5250a_closeList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-11
hpe5250a_closeList_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-12
hpe5250a_cmd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-12
hpe5250a_cmdData_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13
hpe5250a_cmdInt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13
hpe5250a_cmdInt16Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14
hpe5250a_cmdInt16_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14
hpe5250a_cmdInt32Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-15
hpe5250a_cmdInt32_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-15
hpe5250a_cmdReal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16
hpe5250a_cmdReal64Arr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16
hpe5250a_cmdReal64_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-17
hpe5250a_cmdString_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-17
hpe5250a_compenC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-18
hpe5250a_connRuleSeq . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-19
hpe5250a_couplePort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-20
hpe5250a_coupleState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-21
hpe5250a_dcl. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-21
hpe5250a_error_message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-22
hpe5250a_error_query. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-22
hpe5250a_errorQueryDetect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-23
hpe5250a_errorQueryDetect_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-23
hpe5250a_esr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
hpe5250a_func . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
hpe5250a_init . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25
hpe5250a_opc_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25
hpe5250a_openCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-26

Keysight E5250A User’s Guide, Edition 12
Contents
hpe5250a_openList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26
hpe5250a_openList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27
hpe5250a_readStatusByte_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27
hpe5250a_reset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28
hpe5250a_revision_query. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28
hpe5250a_selectCompenFile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-29
hpe5250a_self_test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
hpe5250a_testClear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
hpe5250a_testExec_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31
hpe5250a_timeOut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31
hpe5250a_timeOut_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31
9. Executing Sample Programs
Vth and Capacitance Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . 9-7
Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9
Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
HCI Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17
Adding the Bias Source Control Routine . . . . . . . . . . . . . . . . . . . . . . . . . 9-23
Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . 9-24
Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35
10. Error Messages
Standard SCPI Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Command Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7
Device-Dependent Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8
Query Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9