Mitutoyo MF Series User manual

Measuring Microscope
MF series
Measuring Microscope
MF series
User’s Manual
(Hardware Guide)
Read this User’s Manual thoroughly
before operating the instrument. After reading,
retain it close at hand for future reference.
No. 99MB
A
091
A
2
SERIES No. 176

No. 99MBA091A
i
CONVENTIONS USED IN THIS MANUAL
Safety Precautions
To ensure that instruments are operated correctly and safely, Mitutoyo manuals use
various safety symbols (Signal Words and Safety Alert Symbols) to identify and warn
against hazards and potential accidents.
The following signs indicate general warnings:
DANGER
Indicates an imminently hazardous situation which, if not avoided, will result in serious
injury or death.
WARNING
Indicates a potentially hazardous situation which, if not avoided, could result in serious
injury or death.
CAUTION
Indicates a potentially hazardous situation which, if not avoided, may result in minor or
moderate injury or property damage.
The following signs indicate specific warnings or prohibited actions, or indicate a
mandatory action:
Alerts the user to a specific hazardous situation. The given example means “Caution,
risk of electric shock”.
Prohibits a specific action. The given example means “Do not disassemble”.
Specifies a required action. The given example means “Ground”.

No. 99MBA091A
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CONVENTIONS USED IN USER’S MANUAL
Various Types of Notes
The following types of notes are provided to help the operator obtain reliable
measurement data through correct system operation.
IMPORTANT • An important note is a type of note that provides information essential to the completion
of a task. You cannot disregard this note to complete the task.
• An important note is a type of precaution, which if neglected, could result in a loss of
data, decreased accuracy or instrument malfunction/failure.
NOTE A note emphasizes or supplements important points of the main text. A note supplies
information that may only apply in special cases (e.g., Memory limitations, equipment
configurations, or details that apply to specific versions of a program).
TIP A tip is a type of note that helps the user apply the techniques and procedures
described in the text to their specific needs.
It also provides reference information associated with the topic being discussed.
Mitutoyo assumes no liability to any party for any loss or damage, direct or indirect, caused by
use of this instrument not conforming to this manual.
Information in this document is subject to change without notice.
2009 Mitutoyo Corporation. All rights reserved.

No. 99MBA091A
iii
Notes on LED Safety
An LED is integrated into the illuminator in this measuring microscope, MF/MF-U series.
Please observe the following to use the product in a safe manner. Operations other than
described in the manual may result in dangerous radiant exposure.
CAUTION
1) The JIS (JIS C 6802, established in 2005) and the International Standard (IEC60825-1,
established in 2001) are the safety standards for LED devices.
2) The LED device is classified as “Class 1 LED product” in the JIS and IEC standards.
3) Do not look into LED light.
(Never look into LED light even when light is not emitted.)
4) Do not look at laser light directly with an optical instrument (light condensing device
such as a magnifying glass).
5) Skin exposure to LED light causes no problem.

No. 99MBA091A
iv
Precautions for Use
●This instrument is a measuring machine.
Do not use this instrument for any purpose other than such measurement.
●This instrument is a precision machine.
Exercise great care when handling this machine. Never bump or apply excessive force
to any of the parts during operation.
●Rectify the installation environments.
(For detailed information, refer to “Installation Environments”.)
•Close to 20°C in ambient temperature.
•Free of extreme humidity.
•Free of dust and dirt.
•Free of vibration.
●Gently fix a workpiece on the stage.
If the stage glass or top face is subject to large impact, it could be damaged. Exercise
sufficient care in fixing a workpiece or a jig.
Particularly, pay attention so as not to apply an impact to the stage glass.
●Turn off the power during connection and maintenance.
To avoid accidents or electric shock due to malfunction of the machine under operation,
be sure to turn off the power before performing connection or maintenance.
● Please do not carry the measurement thing of 18kg or more alone.
Please do not carry the measurement thing to exceed 18kg alone for safety though
the maximum authorized freight mass of the stage is 20kg.
●Power supply
Observe the following precautions regarding the power supply.
•As a rule, the power distribution method should be a single-phase, two wire system
with one wire grounded. (Pay due attention to the polarity.)
•Be sure to ground the system. (Protective grounding) (Class D grounding) * Consult a
qualified electrician or someone with equivalent knowledge for the power supply
arrangement and construction.
●Turn the power switch ON or OFF along the order
The counter may display error messages (E51,E52,E53) by the order which turns the
power supply of the microscope main unit and the peripheral equipment such as
personal computer on or off in the connection with some peripheral equipment, when
the peripheral equipment is being connected with the counter unit at RS232C.
Be sure to perform at the following order, when turning the power switch ON or OFF.
・For ON ･･････ Peripheral equipment →Microscope main unit
・For OFF ･････ Microscope main unit →Peripheral equipment

No. 99MBA091A
v
●Power cord
Use only the power cord supplied with this product. Please contact us if an abnormality
is observed on the power cord or power connector.
●Removing the cover and disassembling the machine
This machine is precisely adjusted, and is comprised of high-voltage parts. In order to
prevent accident and to maintain the performance, do not absolutely remove the cover
on the machine.
●Danger prevention
In order to prevent danger, do not use the machine in locations where volatile gases
could be generated.
●Maintenance
Gently wipe off dirt from the machine using a lint-free and soft cloth. If the dirt is difficult
to remove, wipe it clean with a cloth soaked in neutral detergent, then wipe lightly with
a dry cloth or a cloth well-wrung after soaking in water. Do not use organic solvents
such as thinner or benzine.
●Take special shielding measures when using the machine in the following
locations:
•Where noise is generated due to static electricity
•Near strong electric fields
•Where power source lines pass nearby
•Where there is a risk of radioactivity
•Where the machine could be subject to corrosive gasses

No. 99MBA091A
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Installation Environments
Temperature
This measuring microscope has been assembled and adjusted in the
temperature-controlled room at 20°C. To use the microscope at the rated measuring
accuracy in the specification, the temperature at the installation site should be close to
20°C with minimum temperature fluctuation. (The ideal temperature is standard
temperature condition level 1, 20°C ± 1°C, that is specified as “Standard Condition of
Precision Measurement Environments” in JMAS5011.) Also, the temperature gradient
should be 2°C as reference for 8 hours. If this temperature environment is worse than the
above condition, the microscope may not meet the specified measuring accuracy. Even if
the specified accuracy is temporarily obtained by adjustment, uncertain measurements will
be displayed at 20°C.
Humidity
Humidity is not directly related to the measuring microscope accuracy. If the ambient
humidity is high, rust will easily form on important machined surfaces and may affect
electronic parts adversely. Efforts should be made to retain humidity between 55 and 65%.
Dust and dirt
The measuring microscope consists of high-precision parts such as guide ways, linear
scale units, and optical units that are apt to be easily damaged by dust and dirt. Use the
microscope at a site free of dust and dirt.
Grounding
To operate the measuring microscope properly, be sure to connect the GND terminal to
the earth terminal with a grounding resistance of 100Ωor less (conforming to Class 3
grounding construction). Also, if a system is to be configured along with other instruments,
make sure all the instruments are properly grounded at the power supply with a complete
ground terminal, and then connect the signal cables between them.
System Environments
Place The indoor use
Use altitude 2000m or less
Use temperature 5～40℃
Use humidity 80％or less（There must not be be dewy.）
Preservation environments
Preservation temperature -10～50℃
Preservation humidity 80％or less（There must not be be dewy.）

No. 99MBA091A
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WARRANTY
This measuring microscope has been manufactured under Mitutoyo’s rigorous quality
control system. In the event that this instrument should fail within one year from the
original date of purchase through normal use, we will repair or replace it at our option, free
of charge, upon its prepaid return to Mitutoyo. Contact your dealer or the nearest Mitutoyo
Service Center.
However, the following failure or damage may be subject to a repair charge even within
the warranty period:
1Unit failure or damage arising from improper handling, or unauthorized retrofit or
repair by the user.
2Unit failure or damage as the result of moving, dropping, or transporting after
purchase.
3Unit failure or damage due to fire, salt, gas, abnormal voltage, or natural catastrophe.
This Warranty is valid only in the country of original purchase.
Notes on Overseas Transfer
This product is controlled by the Export Control Regulations. Please contact Mitutoyo
before transferring it abroad.
Before exporting this product confirm the final purpose of use at the export destination to
prevent the product from being used for developing weapons of mass destruction or
military affairs.
Disposal of Old Electrical & Electronic Equipment
(Applicable in the European Union and other European
countries with separate collection systems)
This symbol on the product or on its packaging indicates that this product shall not be
treated as household waste. To reduce the environmental impact of WEEE (Waste
Electrical and Electronic Equipment) and minimize the volume of WEEE entering
landfills, please reuse and recycle.
For further information, please contact your local dealer or distributors.

No. 99MBA091A
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CONTENTS
CONVENTIONS USED IN THIS MANUAL........................................................................................................ i
Notes on LED Safety ...................................................................................................................................... iii
Precautions for Use........................................................................................................................................ iv
Installation Environments .............................................................................................................................. vi
System Environments .................................................................................................................................... vi
Preservation environments ........................................................................................................................... vi
WARRANTY .................................................................................................................................................... vii
Notes on Overseas Transfer ......................................................................................................................... vii
Disposal of Old Electrical & Electronic Equipment
(Applicable in the European Union and other European countries with separate collection systems) .. vii
1Overview ................................................................................................................................................ 1-1
1.1 Outline ............................................................................................................................................ 1-1
1.2 Name and Function of Each Part ................................................................................................. 1-2
1.2.1 Optical tube unit..................................................................................................................... 1-4
1.2.2 Cross-travel stage unit .......................................................................................................... 1-5
1.2.3 Illuminator unit ....................................................................................................................... 1-6
1.2.4 DRO counter unit ................................................................................................................... 1-8
1.2.5 Illuminator unit ..................................................................................................................... 1-15
2Installation and Setup........................................................................................................................... 2-1
2.1 Installation...................................................................................................................................... 2-1
2.2 Remove the Fixing Plate ............................................................................................................... 2-2
2.2.1 Removing the fixing plate for cross-travel stage ............................................................... 2-2
2.2.2 Removing the fixing plate for optical tube unit .................................................................. 2-3
2.3 Moving the Table on the Cross-Travel Stage .............................................................................. 2-4
2.3.1 When a great and quick travel of the table is required ...................................................... 2-4
2.3.2 When a fine travel of the table is required........................................................................... 2-4
2.4 Moving the Optical Tube Unit ....................................................................................................... 2-5
2.4.1 When a great and quick travel of the unit is required........................................................ 2-5
2.4.2 When a fine travel of the unit is required ............................................................................ 2-5
2.5 Leveling the Main Unit .................................................................................................................. 2-6
2.6 Mounting (Replacing) the Eyepiece Unit..................................................................................... 2-7
2.6.1 Mounting the binocular unit.................................................................................................. 2-7
2.6.2 Mounting the monocular unit ............................................................................................... 2-7
2.6.3 Mounting other eyepiece unit (protractor eyepiece).......................................................... 2-7
2.7 Mounting the Lenses..................................................................................................................... 2-8
2.7.1 Mounting the objective..........................................................................................................2-8
2.7.2 Mounting the eyepieces ........................................................................................................ 2-8
2.7.2.1 For the binocular unit..................................................................................................... 2-8

No. 99MBA091A
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2.7.2.2 For the monocular unit .................................................................................................. 2-8
2.8 Installation of the Illuminators ..................................................................................................... 2-9
2.8.1 For LED illuminator ............................................................................................................... 2-9
2.8.2 For halogen illuminator....................................................................................................... 2-10
2.9 Changing the Counter Mounting Angle and Position...............................................................2-11
2.10 Connecting Each Part ................................................................................................................. 2-12
3Measurement Setup.............................................................................................................................. 3-1
3.1 Connection Check......................................................................................................................... 3-1
3.2 Turning the Power Supply On ...................................................................................................... 3-1
3.3 Confirming the Filament Position of the Halogen Illuminator .................................................. 3-2
3.3.1 Confirming the filament position of the halogen vertical reflected illuminator .............. 3-2
3.3.2 Confirming the filament position of the halogen transmitted illuminator ....................... 3-2
3.4 Adjusting the Aperture for Transmitted Illumination................................................................. 3-3
3.5 Adjusting the Aperture for Reflected Illumination ..................................................................... 3-5
3.6 Setting Up a Workpiece ................................................................................................................ 3-6
3.7 Selecting the Illumination Method...............................................................................................3-8
3.7.1 Transmitted illumination ....................................................................................................... 3-8
3.7.2 Vertical reflected illumination............................................................................................... 3-8
3.7.3 Simultaneous use of transmitted and vertical reflected illumination .............................. 3-8
3.7.4 Oblique reflected illumination（Optional oblique reflected illuminator is required）... 3-9
3.8 Selecting a Filter.......................................................................................................................... 3-10
3.9 Adjusting the Pupil Distance （The case in which the binocular unit is mounted）...........3-11
3.10 Adjusting the Diopter of Eyepiece............................................................................................. 3-12
3.11 Replacing the Reticle .................................................................................................................. 3-12
3.12 Dimensional Measurement.........................................................................................................3-13
4Maintenance .......................................................................................................................................... 4-1
4.1 Cleaning External Parts ................................................................................................................ 4-1
4.2 Maintaining the Lens..................................................................................................................... 4-1
4.3 Replacing Consumables............................................................................................................... 4-2
4.3.1 Replacing halogen bulbs ...................................................................................................... 4-2
4.3.2 LED illuminator replacement................................................................................................ 4-4
4.3.3 Replacing the stage glass..................................................................................................... 4-5
4.3.4 Replacement of conston spring........................................................................................... 4-6
5Troubleshooting.................................................................................................................................... 5-1
5.1 Main Unit ........................................................................................................................................ 5-1
5.2 Counter Unit................................................................................................................................... 5-2
5.3 Illuminator and Concerned Matters............................................................................................. 5-3
5.4 Error Messages and Remedies .................................................................................................... 5-4
5.4.1 Counter and concerned matters .......................................................................................... 5-4
5.4.2 Illuminator and concerned matters...................................................................................... 5-5
6Specifications........................................................................................................................................ 6-1

No. 99MBA091A
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6.1 Common Specifications................................................................................................................ 6-1
6.2 Standard accessories.................................................................................................................... 6-2
6.2.1 Standard accessories for measuring microscope main unit ............................................ 6-2
6.2.2 Standard accessories for illuminator................................................................................... 6-2
6.3 List of Consumable ....................................................................................................................... 6-3
6.4 Optional accessories .................................................................................................................... 6-4
6.5 Objectives, Eyepieces Specification Table ................................................................................. 6-5
6.6 Layout of the Optical System ....................................................................................................... 6-6
6.7 Serial Data Output Specifications of the Counter ...................................................................... 6-7
6.7.1 Connector specifications ...................................................................................................... 6-7
6.7.2 Control signal ......................................................................................................................... 6-7
6.7.3 Data output operation............................................................................................................ 6-9
6.7.4 Connecting Micropak........................................................................................................... 6-11
6.7.5 Connecting DPU-414 (Printer) ............................................................................................ 6-12
6.7.6 Connecting QM-Data 200..................................................................................................... 6-14
6.8 External Dimensions ................................................................................................................... 6-15
6.8.1 Main unit ............................................................................................................................... 6-15
6.8.2 Control unit........................................................................................................................... 6-18
6.8.3 Cross-travel stage................................................................................................................ 6-19
SERVICE NETWORK

No. 99MBA091A 1-1
1 Overview
This chapter describes the system configuration, and the name and
function of each part on the MF series Measuring Microscope.
1.1 Outline
The Mitutoyo MF series Measuring Microscope is a multi-purpose measuring microscope
for factory inspection use. It can perform precision measurement of workpiece dimensions,
contours and surface features. The MF series can be used in a wide range of applications
in combination with a variety of accessories. It is possible to improve the system according
to a specific purpose.
The MF series has the following features.
zTwisted roller is incorporated in the quick release mechanism. It allows smooth
operation and eliminates the impact when switching coarse / fine feed.
zThe cross-travel stage with a maximum stroke of 400 X 200mm is available as an
option.
zBoth right and left side of the optical tube unit is equipped with the coaxial fine / feed
focusing wheels. This makes focusing operation easy.
zHigh-resolution measurement is supported using the counter with a resolution of
0.1µm (selectable from 0.1/0.5/1µm).
zSelect either the LED type or halogen type for the illuminator.
(Either of the illuminators is a requisite selection option.)
zThe LED illuminator has a long operating life (approx. 30,000 hours) and provides
clear object views because lighting adjustment of the LED illuminator does not create
any change in color temperature.
NOTE To use the measuring microscope safely, read "Safety Precautions" in this
manual prior to use and observe the precautions.
1

No. 99MBA091A
1-2
1.2 Name and Function of Each Part
（17）Swivel knob
（6）Coarse/fine focusing wheel
（16）Y-axis
zero-set switch
（13）X-axis
zero-set switch
（12）X-axis coarse-feed wheel
（14）Y-axis fine feed wheel
（19）Control panel
（4）Reflected illumination
switching knob
（3）Reflected illumination
aperture diaphragm knob
（Eyepiece）
（23）DRO counter
（11）X-axis fine feed wheel
（18）Swivel clamp screw

1. Overview
No. 99MBA091A 1-3
（20）Vertical reflected illuminator
(Requisite selection option)
* This illustration represents
an LED illuminator.
（7）TV port
（21）Transmitted
illumination device
(Requisite selection
option)
* This illustration
represents an LED
illuminator.
（5）Reticle
（9）Cross-travel stage （10）Linear scale
（Column）
（Spare hole for
mounting the
counter）
（2）Binocular or monocular unit
（both are optional）
（1）Objective
（15）Y-axis
coarse-feed wheel （22）Rear connector panel
（8）Z-axis zero-set switch
(24) LED control unit
or
(25) Halogen control unit
(Requisite selection option)

No. 99MBA091A
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1.2.1 Optical tube unit
1）Objective：A 3X lens is mounted as standard. Various types of lenses ranging from
1X to 100X are also available as options. Selects according to the application.
2）Binocular or monocular unit (both are optional)：A 10x eyepiece is mounted on
both units. A relay lens system is used in which a broken cross-hair reticle is installed
in optical tube. The cross-hair in the tube is not shifted even by the pupil distance
adjustment when using the binocular unit.
3）Reflected illumination aperture diaphragm knob：Adjusts the numerical aperture
of the illumination system by pulling or pushing the knob.
TIP What is Aperture diaphragm?･････A diaphragm for controlling the light beam of
an illumination system. The resolution, contrast, and depth of focus of an optical
system are dependent on this aperture diaphragm. Adjust the diaphragm to the
appropriate numerical aperture.
NOTE For information about adjusting the aperture diaphragm, refer to the instructions
given in "3.5 Adjusting the aperture for reflected illumination".
4）Reflected illumination switching knob：Switches the optical path from one of the
following sources ; the vertical reflected illuminator and the oblique illuminator
(option order No.176-351-6)
5）Reticle：Loosen the cross recessed truss-head screws and remove the cover. You
will see the broken cross-hair reticle with the standard line width of 5µm is mounted
inside.
6）Coarse/fine focusing wheel：This focusing wheel allows coarse or fine vertical
travels of the optical tube for focusing. The travel range and adjustments are given
below.
・Vertical travel range：150 mm（for MF-＊505C，MF-＊1010C and MF-＊2010C）
220 mm（for MF-＊2017C，MF-＊3017C and MF-＊4020C）
・Coarse adjustment：30 mm per knob rotation
・Fine adjustment：0.2 mm per knob rotation
7）TV port：Used for mounting optional accessories (e.g. TV camera or Focus Pilot).
8）Z-axis zero-set switch（only for three axes specification）：A switch for zero-setting
a Z-axis display value on the counter.
IMPORTANT 1. When operating this switch, do not touch it with wet hand. A trouble may result.
This is true for the X-axis and Y-axis zero-set switches.
2. A magnet is attached to the bottom surface of the Z-axis zero-set switch. It is
possible to remount the switch with a single touch on a location where the
switch can be operated easily.
TIP A magnet is attached to the bottom surface of the Z-axis zero-set switch. Therefore,
the switch can be moved to an operator-friendly position with a single motion.

1. Overview
No. 99MBA091A 1-5
1.2.2 Cross-travel stage unit
IMPORTANT The stage glass is made of glass to transmit the transmitted illumination light.
Do not bump the stage glass when installing a workpiece on it. If placing a heavy
workpiece with protrusions on the stage glass, exercise attention so as not to
scratch the glass.
9）Cross-travel stage ：Mounts a workpiece on the XY stage; its stroke varies
depending on the MF model.
・MF-＊505C 50mmX 50mm
・MF-＊1010C 100mmX100mm
・MF-＊2010C 200mmX100mm
・MF-＊2017C 200mmX170mm（with swivel table）
・MF-＊3017C 300mmX170mm（with swivel table）
・MF-＊4020C 400mmX170mm（with swivel table）
TIP The MF-＊505C，MF-＊1010C，and MF-＊2010C models have no table rotating
mechanism on the cross-travel stage. If necessary, use the fine-feed rotary table
(A) (No.176-305) from the optional accessories. The fine-feed rotary table (B)
(No.176-306) is also available as an option accessory for the MF-＊2017C，MF-＊
3017C，and MF-＊4020C models.
10）Linear scale：Three pieces of Linear scale are mounted on each of the X- and
Y-axes of the XY stage and the Z-axis column.（The Linear scale may not be
mounted on the Z axis of some models.）The displacement of the stage and optical
tube unit is displayed on the DRO counter.
11）X-axis fine feed wheel：Used to finely move the cross-travel stage along the X-axis
direction.
12）X-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
X-axis direction.
13）X-axis zero-set switch：A switch for zero-setting a X-axis display value on the
counter.
14）Y-axis fine feed wheel：Used to finely move the cross-travel stage along the Y-axis
direction.
15）Y-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
Y-axis direction.
16）Y-axis zero-set switch：A switch for zero-setting a Y-axis display value on the
counter.
17）Swivel knob（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to swivel the
XY stage up to ±5° or ±3° .（This knob is not provided for the MF-＊505C，MF-
＊1010C and MF-＊2010C models.）

No. 99MBA091A
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18）Swivel clamp screw（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to
fix the XY stage up swiveled. （This screw is not provided for the MF-＊505C，MF-
＊1010C and MF-＊2010C models.）
NOTE 1. Do not turn the swivel knob by force with the swivel clam screw tightened up.
A trouble may result.
2. If a workpiece and optional accessories are interfered with the swivel clamp
screw, replace the swivel clamp screw with the button head screw which is
the attachment.
1.2.3 Illuminator unit
19）Control panel: Consists of the switch to start the main unit and the knobs to control
illumination and the aperture of transmitted illumination.
TIP Aperture diaphragm: A pencil of rays in the light system is controlled, which is
associated with the resolving power, contrast, and focal depth of the optical
system. Adjust the diaphragm to the optimal numerical aperture.
NOTE 1. For information about adjusting the aperture diaphragm, refer to the
instructions given in "3.4 Adjusting the aperture for transmitted illumination".
2. Even when the auxiliary power switch is turned off, feeble power is
consumed.
If you do not use the product for a long time, please turn off the main power
of the control unit.
20）Vertical reflected illuminator (requisite selection option): Lighting device for
measurement of workpiece surface. According to your choice, either the LED
illuminator or halogen illuminator is placed.
・For the LED illuminator, plug into the connector that indicates “SURFACE”on
the rear panel. Two filters can be attached to the illuminator.
Transmitted illumination knob
Vertical reflected illumination knob
Aperture diaphragm knob for transmitted illumination Auxiliary power switch

1. Overview
No. 99MBA091A 1-7
・For the halogen illuminator, plug into the connector that indicates “SURFACE”
of the illuminator (control unit). Two filters can be attached to the illuminator.
21）Transmitted illuminator (requisite selection option): Lighting device for
measurement of workpiece contour. According to your choice, either the LED
illuminator or halogen illuminator is placed.
・For the LED illuminator, plug into the connector that indicates “CONTOUR”on
the rear panel. Two filters can be attached to the illuminator.
・For the halogen illuminator, plug into the connector that indicates “CONTOUR”
of the illuminator (control unit). Two filters can be attached to the illuminator.
NOTE 1. For information about replacing halogen bulbs, refer to the instructions given
in "4.3.1 Replacing halogen bulbs".
2. For information about replacing LED bulbs, refer to the instructions given in
"4.3.2 Replacing LED bulbs".
22）Rear panel: Consists of the connectors to be connected to the control unit,
transmitted illuminator, and reflected illuminator.
ａ）Connector for control cable
This connector is used to connect this unit and the cable connected to the control unit.
ｂ）Connector for vertical reflected illuminator (LED)
This connector is used to connect an LED type vertical reflected illuminator. (To
connect a halogen type vertical reflected illuminator, this connector is not used.)
ｃ）Connector for transmitted illuminator (LED)
This connector is used to connect an LED type transmitted illuminator. (To connect a
halogen type transmitted illuminator, this connector is not used.)
b) Connector for vertical reflected
illuminator (LED)
c) Connector for transmitted
illuminator (LED)
a) Connector for control cable

No. 99MBA091A
1-8
1.2.4 DRO counter unit
23）Counter ：The displacement of cross-travel stage and optical tube unit is displayed
on this counter.
①Front view of the counter
ａ）Display unit
Displays the displacement of cross-travel stage and optical tube.
Resolution: 0.001/0.0005/0.0001mm (.0001/.00005/.00001”)（switchable）
ｂ）Zero-set button
Zeroes the display value at any position.
Pressing the button makes the buzzer sound.
ｃ）mm/E or indicator LEDs
Indicates the unit (mm or E) currently used.
A value in units of E is displayed by dividing a displacement in units of mm by 25.4.
a）Display unit
c）mm/E indicator LEDs
b）Zero-set button