Mitutoyo ST36 User manual

Separate Type
Linear Scale
ST36
No. 99MBE048B3
Date of publication: March 1, 2019 (1)
User's Manual
- Instructions for use -
Read this document thoroughly before operating
the product. After reading, retain it close at hand for
future reference.
*99MBE048B3*

No. 99MBE048B
Notice regarding this document
yMitutoyo Corporation assumes no responsibilities for any damage to the product, caused by its use
not conforming to the procedure described in this document.
yUpon loan or transfer of this product, be sure to attach this document to the product.
yIn the event of loss or damage to this document, immediately contact a Mitutoyo sales o󰀩ce or
your dealer.
yBefore operation of the product, thoroughly read this document to comprehend its contents.
yParticularly, for full understanding of information, carefully read "Safety Precautions" and "Precau-
tions for Use" at the outset of this document before using the product.
yThe contents in this document are based on the information current as of March 2019.
yNo part or whole of this document may be transmitted or reproduced by any means without prior
written permission of Mitutoyo Corporation.
yThe corporation, organization and product names that appear in this document are their trade-
marks or registered trademarks.
©2019 Mitutoyo Corporation. All rights reserved.
Correspondence of product names and model numbers
Product name Model number
Separate Type Linear Scale ST36

No. 99MBE048B
i
CONVENTIONS USED IN MANUALS
Conventions used in Mitutoyo’s User’s Manual are roughly divided into three types (safety reminders,
prohibited and mandatory actions, and referential information and locations). Moreover, these conven-
tions include general warnings and specic warnings. Specic warning symbols are provided with con-
crete pictograms inside of them.
Safety reminder conventions and wording warning against potential haz-
ards
DANGER
Indicates an immediately hazardous situation which, if not avoided, will result
in serious injury or death.
WARNING
Indicates a potentially hazardous situation which, if not avoided, could result
in serious injury or death.
CAUTION
Indicates a potentially hazardous situation which, if not avoided, may result in
minor injury.
NOTICE
Indicates a potentially hazardous situation which, if not avoided, may result in
property damage.
Alerts the user to a specic hazardous situation that means "Caution, risk of
electric shock".
Conventions and wording indicating prohibited and mandatory actions
Indicates concrete information about prohibited actions.
Indicates concrete information about mandatory actions.
Indicates that grounding needs to be implemented.
Conventions and wording indicating referential information or referential
locations
Tips
Indicates referential information such as that for when the operating methods and procedures which
are printed in these sentences are to be applied to specic conditions.
Indicates referential locations if there is information that should be referred to in this document or an
extraneous User's Manual.
E.g.: For further details on xxx, refer to "1.2 System Conguration and Name of Each Part" (page 1)

No. 99MBE048B
ii
Safety Precautions
Observe the following descriptions to make full use of the performance of this product:
NOTICE
• Read this document thoroughly before operating the system to use it properly.
• Before connecting this product to the machine main unit, make sure that the power for the control unit is
turned o󰀨.
• To maintain the shielding e󰀨ect, rmly tighten the screws on the connectors of each connecting cable.
• To prevent defective contacts, do not touch the connecting terminals of the connectors with bare hands.
Precautions for Use
General safety precautions
yThis product is a measuring instrument.
Do not use this product for any other purpose than measuring.
yThis is an industrial product.
Do not use this product for any other purpose than industrial use.
yThis product is a precision instrument.
Handle this product with extra care. Do not apply any strong impact or excessive force to the parts
during use.
Required environment for installation
zVibration
To install this product onto the machine main unit, select a location where there is as little vibration as
possible.
If the scale unit is used for an extended period of time on a machine where there is a substantial amount
of vibration, the built-in precision parts may be damaged, thereby adversely inuencing the performance
of the unit.
zShock, dust, water protection
To protect the scale main unit from being directly exposed to machining oil and chips, or from being
bumped by a workpiece, etc., prepare a cover that protects the entire scale main unit.
zAmbient temperature and humidity
This product should be operated in an environment where the temperature is 0 °C–40 °C and where
the relative humidity is 20 %RH–80 %RH. Do not use this product in a place where sudden changes in
temperature or humidity are observed.

No. 99MBE048B
iii
Electromagnetic Compatibility (EMC)
This product complies with the EMC Directive. Note that in environments where electromagnetic inter-
ference exceeds EMC requirements dened in this directive, appropriate countermeasures are required
to ensure product performance.
EMC Directive EN61326-1
Immunity test requirement: Clause6.2 Table 2
Emission limit: Class B
Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10,41469 Neuss,Germany
For the EU Directive
Export Control Compliance
This product falls into the Catch-All-Controlled Goods and/or Catch-All-Controlled Technologies (includ-
ing Programs) under Category 16 of Appended Table 1 of Export Trade Control Order or under Catego-
ry 16 of Appended Table of Foreign Exchange Control Order, based on Foreign Exchange and Foreign
Trade Act of Japan.
If you intend re-export of the product from a country other than Japan, re-sale of the product in a coun-
try other than Japan, or re-providing of the technology (including Programs), you shall observe the
regulations of your country.
Also, if an option is added or modied to add a function to this product, this product may fall under the
category of List-Control Goods, List-Control Technology (including Programs) under Category 1 - 15
of Appended Table 1 of Export Trade Control Order or under Category 1 - 15 of Appended Table of
Foreign Exchange Control Order, based on Foreign Exchange and Foreign Trade Act of Japan. In that
case, if you intend re-export of the product from a country other than Japan, re-sale of the product in a
country other than Japan, or re-providing of the technology (including Programs), you shall observe the
regulations of your country. Please contact Mitutoyo in advance.
Notes on Export to EU Member Countries
When you intend exporting of this product to any of the EU member countries, it may be required to
provide User's Manual(s) in English and EU Declaration of Conformity in English (under certain circum-
stances, User's Manual(s) in the destination country's o󰀩cial language and EU Declaration of Confor-
mity in the destination country's o󰀩cial language). For detailed information, please contact Mitutoyo in
advance.
Disposal of Products outside the European Union and
Other European Countries
Please follow the o󰀩cial instruction in each community and country.

No. 99MBE048B
iv
Disposal of Old Electrical & Electronic Equipment (Appli-
cable in the European Union and Other European Coun-
tries with Separate Collection Systems)
This symbol on the product or on its packaging is based on WEEE Directive (Directive on
Waste Electrical and Electronic Equipment), which is a regulation in EU member countries, and
this symbol indicates that this product shall not be treated as household waste.
To reduce the environmental impact and minimize the volume of landlls, please cooperate in
reuse and recycle.
For how to dispose of the product, please contact your dealer or the nearest Mitutoyo sales
o󰀩ce.
Warranty
In the event that this product should prove defective in workmanship or material, within one year from
the date of original purchase for use, it will be repaired or replaced, at Mitutoyo's option, free of charge
upon its prepaid return to Mitutoyo, without prejudice to the provisions of the Mitutoyo Software End
User License Agreement.
If this product fails or is damaged for any of the following reasons, it will be subject to a repair charge,
even if it is still under warranty.
yFailure or damage owing to fair wear and tear
yFailure or damage owing to inappropriate handling, maintenance or repair, or to unauthorized mod-
ication
yFailure or damage owing to transport, dropping, or relocation of the product after purchase
yFailure or damage owing to re, salt, gas, abnormal voltage, lightning surge, or natural disaster
yFailure or damage owing to use in combination with hardware or software other than those desig-
nated or permitted by Mitutoyo
yFailure or damage owing to use in ultra-hazardous activities
This warranty is e󰀨ective only where the product is properly installed and operated in conformance with
the instructions in this document within the original country of the installation.
EXCEPT AS SPECIFIED IN THIS WARRANTY, ALL EXPRESS OR IMPLIED CONDITIONS, REP-
RESENTATIONS, AND WARRANTIES OF ANY NATURE WHATSOEVER INCLUDING, WITHOUT
LIMITATION, ANY IMPLIED WARRANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULAR
PURPOSE, NONINFRINGEMENT OR WARRANTY ARISING FROM A COURSE OF DEALING, US-
AGE, OR TRADE PRACTICE, ARE HEREBY EXCLUDED TO THE MAXIMUM EXTENT ALLOWED BY
APPLICABLE LAW.
You assume all responsibility for all results arising out of its selection of this product to achieve its in-
tended results.

No. 99MBE048B
v
Disclaimer
IN NO EVENT WILL MITUTOYO, ITS AFFILIATED AND RELATED COMPANIES AND SUPPLIERS
BE LIABLE FOR ANY LOST REVENUE, PROFIT, OR DATA, OR FOR SPECIAL, DIRECT, INDIRECT,
CONSEQUENTIAL, INCIDENTAL, OR PUNITIVE DAMAGES HOWEVER CAUSED AND REGARD-
LESS OF THE THEORY OF LIABILITY ARISING OUT OF THE USE OF OR INABILITY TO USE THIS
PRODUCT EVEN IF MITUTOYO OR ITS AFFILIATED AND RELATED COMPANIES AND/OR SUPPLI-
ERS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES.
If, notwithstanding the foregoing, Mitutoyo is found to be liable to you for any damage or loss which
arises out of or is in any way connected with use of this product by you, in no event shall Mitutoyo's and/
or its a󰀩liated and related companies' and suppliers' liability to you, whether in contract, tort (including
negligence), or otherwise, exceed the price paid by you for the product only.
The foregoing limitations shall apply even if the above-stated warranty fails of its essential purpose.
BECAUSE SOME COUNTRIES, STATES OR JURISDICTIONS DO NOT ALLOW THE EXCLUSION
OR THE LIMITATION OF LIABILITY FOR CONSEQUENTIAL OR INCIDENTAL DAMAGES, IN SUCH
COUNTRIES, STATES OR JURISDICTIONS, MITUTOYO'S LIABILITY SHALL BE LIMITED TO THE
EXTENT PERMITTED BY LAW.

No. 99MBE048B
vi
About This Document
Positioning of this document in document map
zFor linear scale
ST36
Separate Type Linear Scale
User's Manual (This Document)
Intended readers and purpose of this document
zIntended readers
This document is intended for rst-time users of ST36 Separate Type Linear Scale.
Readers are assumed to be able to understand instructions by reading technical drawings.
zPurpose
The purpose of this document is to help you understand the ST36 Separate Type Linear Scale.

No. 99MBE048B
vii
Contents
CONVENTIONS USED IN MANUALS ……………………………………………………… i
Safety Precautions …………………………………………………………………………… ii
Precautions for Use…………………………………………………………………………… ii
Electromagnetic Compatibility (EMC) …………………………………………………… iii
Export Control Compliance ………………………………………………………………… iii
Notes on Export to EU Member Countries ……………………………………………… iii
Disposal of Products outside the European Union and Other European Countries
…………………………………………………………………………………………………… iii
Disposal of Old Electrical & Electronic Equipment (Applicable in the European
Union and Other European Countries with Separate Collection Systems) ………… iv
Warranty ………………………………………………………………………………………… iv
Disclaimer ……………………………………………………………………………………… v
About This Document ………………………………………………………………………… vi
Contents …………………………………………………………………………………………vii
1 Overview …………………………………………………………………………………… 1
1.1 Features ……………………………………………………………………………… 1
1.2 System Conguration and Name of Each Part ………………………………… 1
1.3 The Flow of Main Tasks …………………………………………………………… 3
2 Setup for Installation …………………………………………………………………… 5
2.1 Checking the Equipment Model …………………………………………………… 5
2.2 Designing the Scale Mounting Surface…………………………………………… 8
2.2.1 Mounting the Scale with the E󰀨ective Length of 10 mm–80 mm
(Adhesive Fixing Type)……………………………………………………………………… 8
2.2.2 Mounting the Scale with the E󰀨ective Length of 100 mm–3000 mm ………………… 9
2.3 Designing the Detector Bracket ……………………………………………………10
3 Installation onto the Machine Main Unit……………………………………………… 11
3.1 Checking the Package Contents ………………………………………………… 11
3.2 Mounting the Scale …………………………………………………………………12
3.3 Mounting the Detector Bracket and Detector ……………………………………15
3.4 Connecting the Feedback Cable …………………………………………………16

No. 99MBE048B
viii
3.5 Adjusting the Detector Signals ……………………………………………………17
3.5.1 Adjusting the Detector Mounting Position………………………………………………… 17
3.5.2 Adjusting the Signals ………………………………………………………………………20
3.6 Handling the Cables and Checking the Mounting State …………………………23
3.6.1 Handling the Cables …………………………………………………………………………23
3.6.2 Checking the Mounting and Adjustment States …………………………………………24
3.6.3 Putting the Protection Cover ………………………………………………………………25
4 Specications ……………………………………………………………………………27
4.1 Specications ………………………………………………………………………27
4.2 Output Circuits and Signal Waveforms ……………………………………………28
4.2.1 Main Signal Type: Type A, Type C …………………………………………………………28
4.2.2 Main Signal Type: Type B, Type C …………………………………………………………29
4.2.3 Main Signal Type: Type D …………………………………………………………………30
4.3 Pin Assignment ………………………………………………………………………32
4.3.1 Main Signal Type: Type A …………………………………………………………………32
4.3.2 Main Signal Type: Type B …………………………………………………………………32
4.3.3 Main Signal Type: Type C …………………………………………………………………33
4.3.4 Main Signal Type: Type D …………………………………………………………………33
4.4 Production of Feedback Cable ……………………………………………………34
4.5 Alarm Function ………………………………………………………………………35
4.5.1 Main Signal Type: Type A …………………………………………………………………35
4.5.2 Main Signal Type: Type B, Type C …………………………………………………………36
4.6 Adjusting the Signals Using the Check Adapter (Option) ………………………38
4.7 Removing the Detector Cable………………………………………………………40
4.8 Changing the Output Settings………………………………………………………41
4.9 Maximum Response Speed ………………………………………………………43
4.10 External View and Dimensional Drawings ………………………………………44
4.10.1 Dimensional Drawings ………………………………………………………………………44
4.10.2 Dimensional Drawings Table ………………………………………………………………45
5 Troubleshooting …………………………………………………………………………47
SERVICE NETWORK …………………………………………………………………… App-1

1
1 Overview
No. 99MBE048B
1 Overview
This chapter describes the features of this product, the names and functions of the parts, and the ow
of the main tasks to use this product.
1.1 Features
The optical separate type linear scale detects changes in the amount of light using light emitting ele-
ments and light receiving elements based on the glass scale grids and outputs the amount of chang-
es.
This can precisely measure moving amounts of various instruments including an aligner, wire bonding,
and stage for semiconductor manufacturing.
This product is a high-precision separate type linear scale with indication accuracy ±0.5 μm (e󰀨ective
length of up to 300 mm). With successful reduction in Detector thickness to 11.5 mm and support for
the maximum e󰀨ective length of 3000 mm, it can be used even for large machines. It is also equipped
with the LED Display function for signal errors.
The following four output signal types are available in this product:
yTwo-phase sine wave
yTwo-phase square wave
yTwo-phase square wave/two-phase sine wave
yDi󰀨erential 1 Vpp sine wave
1.2 SystemCongurationandNameofEachPart
The system conguration and the name of each part are shown below.
Output connector (accessory)
Control unit
ST36 (main scale, Detector, I/F Box) Feedback cable and control unit
(prepared by user)

2
1 Overview
No. 99MBE048B
①
②
③
④
⑤
⑥
⑦
⑧
⑨⑩
No. Name
①Main scale (e󰀨ective length: 10 mm–80 mm)
②Main scale (e󰀨ective length: 100 mm–3000 mm)
③Scale retaining spring
④Detector
⑤Detector cable
⑥I/F Box
⑦Output connector
⑧Gap spacer
⑨S.UP light
⑩POWER light

3
1 Overview
No. 99MBE048B
1.3 The Flow of Main Tasks
The following chart shows the ow of preliminary preparation and installation onto the machine main
unit as tasks to use this product.
Preliminary preparation
Checking the Equipment Model "2.1 Checking the Equipment Model" (page 5)
Designing the Scale Mounting
Surface "2.2 Designing the Scale Mounting Surface"
(page 8)
Designing the Detector Bracket "2.3 Designing the Detector Bracket" (page 10)
Installation onto the machine main unit
Checking the Package Contents "3.1 Checking the Package Contents" (page 11)
Mounting the Scale "3.2 Mounting the Scale" (page 12)
Mounting the Detector Bracket
and Detector "3.3 Mounting the Detector Bracket and Detector"
(page 15)
Connecting the Feedback Cable "3.4 Connecting the Feedback Cable" (page 16)
Adjusting the Detector Signals "3.5 Adjusting the Detector Signals" (page 17)
Handling the Cables and
Checking the Mounting State "3.6 Handling the Cables and Checking the Mounting
State" (page 23)

4
1 Overview
No. 99MBE048B
MEMO

5
2 Setup for Installation
No. 99MBE048B
2 Setup for Installation
This chapter describes the preliminary preparation for installing this product onto the machine main
unit.
2.1 Checking the Equipment Model
The ST36 model number is determined based on the main signal output type, e󰀨ective length, scale
origin, resolution/minimum edge-to-edge interval/response speed, direction, alarm output type, Detec-
tor cable length, and special code.
Make sure that your scale unit model satises desired specications.
ST36□-□□□□□-□□□-□-□
Main signal output type Special code
E󰀨ective length
Scale origin
Resolution/
Minimum edge-to-
edge interval/
Response speed
Direction
Alarm output type
Detector cable length
Main signal output type
Symbol Output
A Two-phase sine wave
B Two-phase square wave + external reset input
C Two-phase square wave + two-phase sine wave
DDi󰀨erential 1 Vpp sine wave
E󰀨ective length
Symbol E󰀨ectivelength(mm) Symbol E󰀨ectivelength(mm)
0010 10 0400 400
0025 25 0500 500
0050 50 0600 600
0075 75 0700 700
0080 80 0800 800
0100 100 0900 900
0150 150 1000 1000
0200 200 1100 1100
0250 250 1200 1200
0300 300 1300 1300
0350 350 1400 1400

6
2 Setup for Installation
No. 99MBE048B
Symbol E󰀨ectivelength(mm) Symbol E󰀨ectivelength(mm)
1500 1500 2400 2400
1600 1600 2500 2500
1700 1700 2600 2600
1800 1800 2800 2800
2000 2000 3000 3000
2200 2200
Scale origin
Symbol E󰀨ectivelengthof10mm–80mm
BCenter point
ZSpecial point specication
Symbol E󰀨ectivelengthof100mm–3000mm
A50-mm pitch
BCenter point
ZSpecial point specication
Tips
• For the e󰀨ective length of 10 mm–80 mm, the default scale origin is B (center point).
• For the e󰀨ective length of 100 mm–3000 mm, the default scale origin is A (50-mm pitch).
Resolution/minimum edge-to-edge interval/response speed
Minimum edge-to-edge
interval (ns)
Resolution(μm)
125 250 500 1000
0.01 A: 72 B: 36 C: 18 D: 9
0.02 E: 144 F: 72 G: 36 H: 18
0.05 J: 360 K: 180 L: 90 M: 45
0.1 N: 720 P: 360 Q: 180 R: 90
−
Z: When the main signal output type is A (two-phase sine wave) or D (dif-
ferential 1 Vpp sine wave), the maximum response speed is 1200 mm/s
at sine wave decreasing of -3 dB.
Tips
• The number each for symbols A–R represents the maximum response speed (mm/s).
• The minimum edge-to-edge interval varies within the range between 0% and -10 % depending on the oper-
ating condition.

7
2 Setup for Installation
No. 99MBE048B
Direction
Symbol Description
1 Forward: PA phase advance
2 Reverse: PB phase advance
Z When the main signal output type is A (two-
phase sine wave) or D (di󰀨erential 1 Vpp sine
wave), the direction is not set.
Alarm output type
Symbol Description
SAlarm signal
HHigh impedance
Z When the main signal output type is A (two-
phase sine wave) or D (di󰀨erential 1 Vpp sine
wave), the alarm output type is not set.
Detector cable length
Symbol Length
A1 m (high exibility specication)
B0.5 m (high exibility specication)
ZSpecial length specication (maximum: 2.5 m)
Special code
Symbol Description
None Standard selection specication
ZSpecial specication

8
2 Setup for Installation
No. 99MBE048B
2.2 Designing the Scale Mounting Surface
If ambient light enters the main scale from the back side, it causes a malfunction. Design the main
scale mounting area to prevent ambient light as shown in the gure below.
Ambient light
Main scale
Detector
2.2.1 Mounting the Scale with the E󰀨ective Length of 10 mm–
80 mm (Adhesive Fixing Type)
Mount the main scale with the e󰀨ective length of 10 mm–80 mm (adhesive xing type) by xing with
adhesives.
Design the main scale mounting area as shown in the gure below according to "4.10.1 Dimen-
sional Drawings" (page 44).
Scale mounting
reference surface
Main scale
G machine guide
Adhesive application
area

9
2 Setup for Installation
No. 99MBE048B
Tips
If you may need to mount the main scale with the e󰀨ective length of 10 mm–80 mm (adhesive xing type) again
for maintenance, attach the main scale to the scale bracket shown in the gure below and x it with bolts.
2.2.2 Mounting the Scale with the E󰀨ective Length of 100 mm–
3000 mm
Mount the main scale with the e󰀨ective length of 100 mm–3000 mm by xing with scale retaining
springs.
Secure working space for tightening the scale retaining spring A and scale retaining spring B accord-
ing to "4.10.1 Dimensional Drawings" (page 44).
Scale retaining spring A
Scale retaining spring B Scale retaining spring B

10
2 Setup for Installation
No. 99MBE048B
2.3 Designing the Detector Bracket
• Design the Detector bracket according to the gure below. Its shape must allow adjustment of the
Detector position (moire/gap). It is recommended that the Detector xing screw holes should be
long holes to make it easier to adjust the Detector position.
M3 (bolt length = bracket thickness t + 4 mm)
M3 (bolt length = bracket thickness t + 4 mm)
t (6 or more)
t (6 or more)
3.4 (reference
value)
Moire
direction
Gap direction
3.4 (reference
value)
1 (reference
value)
1 (reference
value)
5 or more
5 or more
32
32
Parallelism of the scale mounting surface against the
Detector mounting surface
• Design it so that the parallelism of the Detector mounting surface against the scale mounting sur-
face is within 0.03 mm.