Oerlikon Leybold Vacuum IONIVAC IE 414 User manual

Part Numbers
158 66, 158 67
158 44
IONIVAC Sensors
IE 414, IE 514
and Temperature Resistant Gauge Head Cable
Operating Instructions 300265097_002_A1

Contents
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1 Description 4
1.1 Supplied Equipment 4
1.2 Ordering Information 5
1.3 Accessories 5
1.4 Technical Data 6
2 Installation 8
2.1 Conforming Utilization 8
2.2 Unpacking and Checking 8
2.3 Installation 9
2.4 Connecting the Temperature Resistant
Gauge Head Cable 10
3 Operation 14
4 Maintenance 16
4.1 Exchanging the Cathode 16
4.2 Oerlikon Leybold Vacuum Service 17
EC Declaration of Conformity 18
Original Operating Instructions

Safety Information
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Obligation to Provide Information
Before installing and commissioning the device, carefully
read these Operating Instructions and follow the infor-
mation so as to ensure optimum and safe working right
from the start.
The Oerlikon Leybold Vacuum IONIVAC sensors have
been designed for safe and efficient operation when used
properly and in accordance with these Operating
Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in
this section and throughout the Operating Instructions. The
equipment must only be operated in the proper condi-
tion and under the conditions described in the
Operating Instructions.It must be operated and maintai-
ned by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regu-
lations. Address any further safety,operation and/or main-
tenance questions to our nearest office.
DANGER indicates an imminently hazardous situation
which, if not avoided, will result in death or serious
injury.
WARNING indicates a potentially hazardous situation
which, if not avoided, could result in death or serious
injury.
CAUTION indicates a potentially hazardous situation
which, if not avoided, could result in minor or moderate
injury.
NOTICE is used to notify users of installation, operation,
programming or maintenance information that is impor-
tant, but not hazardrelated.
We reserve the right to alter the design or any data given in
these Operating Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
DANGER
WARNING
CAUTION
NOTICE
NOTICE

Described in these Operating Instructions are the UHV ioni-
sation at measurement systems IE 414 and IE 514 as well
as the temperature resistant gauge head cable.
1 Description
The IONIVAC sensor IE 414 is a Bayard-Alpert measure-
ment system and the IE 514 is an extractor measurement
system for connection to an IM 540 and IM 520 operating
unit. Operation of these passive sensors is based on the
hot cathode ionisation effect.
The temperatureresistant gauge head cable must not be
exposed to a temperature exceeding 200 °C max. (250 °C
at the flange of the sensor).
1.1 Supplied Equipment
UHV ionisation measurement systems
Part numbers 158 66 or 158 67
nInstallable UHV ionisation measurement system IE 414
or IE 514
nOperating Instructions
Temperature resistant gauge head cable
Part number 158 44
nGauge head cable with plug fitted on the equipment
side and with touch protection
nHousing with cover (supplied separately)
nIon collector cable
nMounting bolts (supplied separately)
nOperating Instructions
Description
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1.2 Ordering Information
P/N
IONIVAC sensor IE 414 158 66
IONIVAC sensor IE 514 158 67
Temperature resistant gauge head cable 200 °C 158 44
1.3 Accessories
P/N
Connection Accessories
Copper gasket (set of 10 pieces) DN 40 CF 839 43
Weld-on flange, fixed DN 40 CF 835 37
Weld-on flange, rotatable DN 40 CF 835 58
Bolts, nuts, (set of 25 pieces)
and accessories for CF flanges 839 01
Replacement Cathodes
Replacement cathode for IE 413 / IE 414 158 63
Replacement cathode for IE 511 / IE 514 158 61
Gauge head cables IE 414 / IE 514
Gauge head cable, 5 m with touch protection 158 68
Extension cable, 20 m with touch protection 158 69
Description
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1.4 Technical Data
General gauge head data IE 414 IE 514
Material of lead-in pins NiFe
Material of insulator Al203-ceramic, glazed
Material of pin sealing plate NiFe
Material of flange stainless steel
Material of cathode iridium with yttrium oxide coating
Material of anode Pt/Ir 90/10 Mo and CoNiCr
a. Mo/Pt wrapped wire
Material of collector tungsten
Material des reflector NiFe
Flange connection DN 40 CF
Electrode system configuration Bayard-Alpert Extractor system
Ambient temperature during operation 20 ... 80 °C
Max. flange temp. with gauge head cable 158 44 250 °C
Max. bake-out temperature without plug 400 °C
Storage temperature 20 ... 50 °C
Relative humidity
Annual average ≤65% (non-condensing)
On 60 days ≤ 85% (non-condensing)
Deployment Within indoor rooms only,
altitude up to 2000 meters above sea level
X-ray limit < 1·10-11 mbar < 1·10-12 mbar
Upper limit of measuring range 1·10-2 mbar 1·10-4 mbar
Lower limit of measuring range 2·10-11 mbar 2·10-12 mbar
heat resistant gauge head cable
Max. bake-out temperature 200 °C
(250 °C at the gauge head flange)
Insulation materials used PTFE, PEEK
Length 5 m
Description
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Operating characteristics when used with control unit IM 540 and IM 520
IE 414 IE 514
Collector potential 0 V
Cathode potential + 80 V + 100 V
Anode potential + 220 V + 220 V
Reflector potential -- 205 V
Emission current range 0.06 - 0.6 mA 1.6 mA
Cathode heater current 1.5 A (typ.)
Cathode heater voltage 3 V (typ.) 3.7 V (typ.)
Sensitivity for nitrogen 17 mbar (typ.) 6.25 mbar (typ.)
Max. power when baking out 90 mA / 480 V 45 mA / 480 V
Description
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69,4
33
DN 40 CF
66
25
12,8
98
58
12,8
DN 40 CF
55
90
69,4
33
Fig. 1 Dimensions in mm
IE 414 IE 514

Installation
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2 Installation
2.1 Conforming Utilization
The IONIVAC sensors may only be used for the measure-
ment of total pressures in vacuum systems and this only in
connection with the specified operating units given in
Section 1.4.
2.2 Unpacking and Checking
Unpack the IONIVAC sensor immediately after delivery,
even if it is to be put into operation at a later date.
Before doing so, examine the shipping container for any
extenal damage.
Then remove all the packaging materials.
The shipping container and packaging materials must be
kept in the event of complaints about damage.
Check for completeness and carry out a careful visual
examination.
If any damage is discovered, report it immediately to the
forwarding agent and insurer. If the damaged part has to be
replaced, please get in touch with the orders department.

Installation
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2.3 Installation
As a rule, all ionisation measurement systems must only
be operated in connection with a properly earthed
pump system.
Installation and mounting may only be carried out with
the operating unit switched off.
When connecting the vacuum gauges to the vacuum
system it must be strictly observed that during operation
the gauges are not subjected to mechanical oscillations,
impact or vibrations.
The mounting position of the gauge heads has no influence
on proper operation. It is not permissible to install a venting
valve in the immediate vicinity. The then suddenly occurring
air flow may result in mechanical damage to the sensitive
cathode.
When installing several gauge heads at one common com-
ponent (T-piece or cross for example) an optical separation
is required. The gauge heads may not directly “see” each
other. Interactions may cause incorrect measurements.
Humidity at the insulators (2/14) caused by condensing
water for example , can give rise to incorrect measure-
ments due to leakage currents.
Connecting the gauge head cable and the exten-
sion cable
Do not use force to connect the plug. When plugging in
make sure first that all pins are lined up in parallel and are
straight. Otherwise the current feedthrough can suffer
damage.
Live Voltages
If during operation the IM 540 suffers a malfunction then
alive voltage may be present at the gauge head cable
connection (CH 1, CH 2).
Affix the touch protection component at the IM 540
(BNC plug). The touch protection component is sup-
plied together with the gauge head cable.
CAUTION
DANGER
NOTICE

2.4 Connecting the Temperature Resistant
Gauge Head Cable
Switch the IONIVAC off first before working at the
gauge cable. After switching off, wait for at least 15
seconds.
Disassembling the gauge head for connecting the
temperature resistant gauge head cable
Remove the plug guide (2/4) by unscrewing the cylinder
head screws (2/5 and 2/6) from the gauge head (2/1).
The gauge head IE 514 has been designed in accordance
with the VDE regulations with a greater distance between
gauge head flange (2/1) and plug guide (2/4).
For this reason three spacers have been fitted between
gauge head flange (2/1) and the plug guide (2/4).
Positioning of the plug guide is defined through the different
bolt diameters on the gauge head (2/1).
Notice: the temperature resistant gauge head cable may
also be connected after the gauge head has already been
installed.
Connecting the temperature resistant gauge head
cable to the flange on the gauge head
nVia the high-temperature cable pull the housing (2/13)
over the connection plugs so that these may thereafter
be screwed back onto the gauge head flange (2/1).
Installation
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CAUTION

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11 10 9 8 7
5
12
6
13
5
3
2
6
5
4
321
14
Fig. 2 Connection of the gauge head
1Gauge head
2 Spacer for M 4 screw
3 Spacer for M 5 screw
4 Plug guide
5 Cylinder head screw M 4
6 Cylinder head screw M 5
7 Ion collector cable (coax.)
8 Countersunk screws (M 3 x 15)
9 Lid
10 Strain relief
11 Temperature resistant gauge head cable
12 Cable groove
13 Housing
14 Insulators (10 pcs.)
Installation

nNow the ion collector cable (2/7) can be
inserted at the centre of the gauge head.
nSecurethe cover (2/9) with the bolts
(2/8).
nConnect the temperature resistant
gauge head cable to the gauge head as
depicted in fig. 3. The individual wires of
the gauge head cable are colour-coded.
nBolt the housing (2/13) onto the gauge
head flange (2/1) again with the bolts
(2/5 and 2/6) and the 3 spacers. Secure
the entire cable with the strain relief
(2/10).
Installation
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Installation
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Fitting the gauge head including the temperature
resistant gauge head cable
nThe gauge head including the temperature resistant
gauge head cable can be now inserted into the vacuum
chamber and bolted on.
Before connecting, we recommend to pump down the
system and if possible run a vacuum test or a direct leak
search.
For removing or replacing the gauge head proceed in the
reverse order. The plug must be unlocked in the gauge
head housing, and for this reason unscrew the cover (2/9)
first.
Especially note the pin assignment. Provide the connec-
tion with great care. Do not subject the pin contacts to
any bending forces! (Risk: damaging of the current
feedthrough/leak)
Live Voltages
If during operation the IM 540 suffers a malfunction then
alive voltage may be present at the gauge head cable
connection (CH 1, CH 2).
Affix the touch protection component to the IM 540
(BNC plug). The touch protection component is sup-
plied together with the gauge head cable.
NOTICE
DANGER

3 Operation
Calibration
Each IE 414 / IE 514 gauge head has been individually cali-
brated in the course of final factory testing. This ensures a
high accuracy of the pressure readout.
In order to calibrate making use of the calibration factor
given on the sticker in the Operating Instructions, it is requi-
red to set the IM 540 operating unit to “CAL”. The calibrati-
on process is described in Operating Instructions GA09419
for the IM 540.
Operation
In the presence of halogen gases like fluorine, chlorine,
bromine and iodine and their compounds, the yttrium
oxide coating will suffer rapid wear. As a result of this,
the cathodes will burn out.
Operation
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NOTICE
Abb. 3 View onto the gauge head
Color IE 514 IE 414
ye / green LP2) LP2)
grey jumper –1)
blue reflector –1)
red anode anode
brown cathode cathode
white cathode cathode
pink jumper –1)
1) Function not available for IE 414
but must be connected
2) LP (longest pin) = protective earth con-
ductor (for facilitating installation)
blau rot
braun
weiß
rosa
grau
gelb/grün
IE 414 / lE 514
brown
white
pink
red
blue
grey
yellow / green

Operation
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Humidity at the insulators (2/14) caused by condensing
water for example , can give rise to incorrect measure-
ments due to leakage currents.
NOTICE

Maintenance
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4 Maintenance
4.1 Exchanging the Cathode
The cathode is supplied on a plate under a cover. The
cathode must only be exchanged in a room which is
free of dust. Wearing of clean gloves is mandatory.
Preparation
nSwitch off the operating unit.
nDetach the gauge head cable from the gauge head.
nRemove the gauge head from the vacuum system.
nAfter loosening the hex screws at both terminals
remove the faulty cathode.
nOpen the transport packaging, remove the replacement
cathode in the same way and install it in the place of
the old cathode.
The required 0.89 mm screwdriver is included with the
replacement cathode.
NOTICE
Fig. 4 View onto the gauge head
Anode
Katode
Klemme
Innensechs-
kantschraube
Anode
Katode
Klemme
Innensechs-
kantschraube
IE 514 IE 414
Anode
Cathode
Terminal
Hex screw
Anode
Cathode
Terminal
Hex screw

The cathode should be positioned as parallel as possible
with respect to the anode. The initially applicable calibration
values do not apply any longer after exchanging the catho-
de. Deviations up to 15 % may occur.
4.2 Oerlikon Leybold Vacuum Service
Whenever you send us in equipment, indicate whether the
equipment is contaminated or is free of substances which
could pose a health hazard. If it is contaminated, specify
exactly which substances are involved. You must use the
form we have prepared for this purpose.
Acopy of the form has been reproduced at the end of
these Operating Instructions: “Declaration of Contamination
for Compressors, Vacuum Pumps and Components”.
Another suitable form is available from
www.oerlikon.com/leyboldvacuum →Documents →
Download Documents.
Attach the form to the equipment or enclose it with the
equipment.
This statement detailing the type of contamination is requi-
red to satisfy legal requirements and for the protection of
our employees.
Wemust returnto the sender any equipment which is not
accompanied by a contamination statement.
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Maintenance

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17200001_002_A1 © Oerlikon Leybold Vacuum
Declaration of Contamination of Compressors, Vacuum Pumps and Components
The repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed declaration has
been submitted. Non-completion will result in delay.The manufacturer can refuse to accept any equipment without a declaration.
Aseparate declaration has to be completed for each single component.
This declaration may be completed and signed only by authorized and qualified staff.
Customer/Dep./Institute :Reason for return: applicable please mark
Address : Repair: chargeable warranty
Exchange: chargeable warranty
Exchange already arranged / received
Person to contact: Return only: rent loan for credit
Phone : Fax: Calibration:DKD Factory-calibr.
End user : Quality test certificate DIN 55350-18-4.2.1
A. Description of the product: Failure description:
Material description :
Catalog number: Additional parts:
Serial number: Application-Tool:
Type of oil (ForeVacuum-Pumps) : Application- Process:
B. Condition of the equipment No1) Yes No Contamination :No1) Yes
1
1. . Has the equipment been used toxic
2. Drained (Product/service fluid) corrosive
3. All openings sealed airtight flammable
4. Purged explosive 2)
If yes, which cleaning agent radioactive 2)
and which method of cleaning microbiological 2)
1) If answered with “No”, go to D. other harmful substances
C. Description of processed substances (Please fill in absolutely)
1. What substances have come into contact with the equipment ?
Trade name and / or chemical term of service fluids and substances processed, properties of the substances
According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive)
XTradename: Chemical name:
a)
b)
c)
d)
No Yes
2. Are these substances harmful ?
3. Dangerous decomposition products when heated ?
If yes, which ?
2) Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted without written
evidence of decontamination.
D. Legally binding declaration
I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.
Name of authorized person (block letters) :
Date signature of authorized person firm stamp

Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: [phone]
Fax: [phone]
[email protected]
www.oerlikon.com/
leyboldvacuum