PI D-510 User manual
User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 12
Phone +49 721 4846
Contents
Product Description 3
Unpacking 3
General Considerations 4
Calibrated System 5
Mounting 5
Influence of Parallelism on Linearity 7
Influence of Temperature and Humidity 9
Technical Data 10
Specifications..................................................................................................................................................... 10
Dimensions ........................................................................................................................................................ 11
Customer Service 12
Old Equipment Disposal 12
User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 3 / 12
Phone +49 721 4846
Product Description
Figure 1: D-510 Single-Electrode Capacitive Sensor probe with E-852.10 signal conditioner electronics
The D-510 Single-Electrode Capacitive Sensor probes are designed for non-contact
measurements of distance, position or motion against any kind of electrically conductive target.
D-510 sensor probes can be used with the following electronics provided by PI:
E-852 signal conditioner electronics. For details see the E-852 User Manual, PZ180E.
E-509.E3 position servo-control module and E-509.E03 signal conditioner module. For
details see the E-509 User Manual, PZ77E.
E-711.SE3 module for PISeca capacitive single-electrode sensors, 3 channels, for E-712
modular, digital controller system. For details see the E-712 User Manual, PZ195E.
Unpacking
D-510 Sensor probe as ordered
The cable for the connection of the sensor probe with the electronics is not included. Because
of calibration, the sensor probe and the cable should be ordered together. The following cables
are available:
User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 4 / 12
Phone +49 721 4846
Product number Description
D-891.01E Sensor cable PISeca, 1 m
D-891.02E Sensor cable PISeca, 2 m
D-891.01A Sensor cable PISeca, right-angle connector, 1 m
D-891.02A Sensor cable PISeca, right-angle connector, 2 m
To order, contact our customer service department (p. 12).
General Considerations
The performance of a capacitive sensor depends mainly on flatness of the target, mounting
parallelism and centricity.
The sensor probe should be mounted with the utmost care in regard to parallelism and correct
mounting distance to achieve highest accuracy.
In regard to best linearity, a surface's roughness of better than N4 is suggested.
Please consider the following:
1. The PISeca system measures changes in capacitance between the sensor probe and a
conductive, grounded target surface. The target or structure under test should provide
a noise-free, low-impedance return path. To verify that a proper return path is present,
connect a ground lead directly from the target to the ground connector on the
electronics.
2. To minimize the capacitive influence of the connecting triaxial cable make the target
the moving part of the system.
3. Parallelism can influence the linearity and also the gain factor. The target ground plate
must be mounted parallel to the sensor surface.
4. The target area size should be considerably larger than the sensor area (by approx.
50%).
5. Measurement against a semi-conductor target connected to ground is also possible.
Figure 2: Definitions of "gap'" and "target"
User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 5 / 12
Phone +49 721 4846
Figure 3: Mounting parallelism: tilt angle α(see p.7)
Calibrated System
Do not interchange electronics, connecting cable and/or sensor probe when they have been
calibrated together. Respect the assignment of the sensor probe and cable to the individual
channel of the electronics, as indicated by the serial numbers on the labels affixed to the
devices.
In the calibrated range the minimum probe-to-target gap equals 50% and the maximum gap
150% of the range value (see Fig. 6).
If not ordered otherwise the following is valid for calibration:
Environmental conditions room temperature 22°C
Parallelism probe surface to target surface tilt under 0.7 mrad
Read the user manual of the electronics for details on calibration and measurement ranges.
Differing from the standard calibration routine, the D-510.021 sensor probe is calibrated in the
1-fold range for a measurement range from 15 to 30 µm.
Mounting
The sensor can be clamped by the 8 mm shaft.
Mounting examples:
Table of contents
