PI D-510 User manual

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone]
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D-510
PISeca Single-Electrode Capacitive Sensor Probe

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 12
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Contents
Product Description 3
Unpacking 3
General Considerations 4
Calibrated System 5
Mounting 5
Influence of Parallelism on Linearity 7
Influence of Temperature and Humidity 9
Technical Data 10
Specifications..................................................................................................................................................... 10
Dimensions ........................................................................................................................................................ 11
Customer Service 12
Old Equipment Disposal 12

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 3 / 12
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Product Description
Figure 1: D-510 Single-Electrode Capacitive Sensor probe with E-852.10 signal conditioner electronics
The D-510 Single-Electrode Capacitive Sensor probes are designed for non-contact
measurements of distance, position or motion against any kind of electrically conductive target.
D-510 sensor probes can be used with the following electronics provided by PI:
E-852 signal conditioner electronics. For details see the E-852 User Manual, PZ180E.
E-509.E3 position servo-control module and E-509.E03 signal conditioner module. For
details see the E-509 User Manual, PZ77E.
E-711.SE3 module for PISeca capacitive single-electrode sensors, 3 channels, for E-712
modular, digital controller system. For details see the E-712 User Manual, PZ195E.
Unpacking
D-510 Sensor probe as ordered
The cable for the connection of the sensor probe with the electronics is not included. Because
of calibration, the sensor probe and the cable should be ordered together. The following cables
are available:

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 4 / 12
Phone [phone]
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Product number Description
D-891.01E Sensor cable PISeca, 1 m
D-891.02E Sensor cable PISeca, 2 m
D-891.01A Sensor cable PISeca, right-angle connector, 1 m
D-891.02A Sensor cable PISeca, right-angle connector, 2 m
To order, contact our customer service department (p. 12).
General Considerations
The performance of a capacitive sensor depends mainly on flatness of the target, mounting
parallelism and centricity.
The sensor probe should be mounted with the utmost care in regard to parallelism and correct
mounting distance to achieve highest accuracy.
In regard to best linearity, a surface's roughness of better than N4 is suggested.
Please consider the following:
1. The PISeca system measures changes in capacitance between the sensor probe and a
conductive, grounded target surface. The target or structure under test should provide
a noise-free, low-impedance return path. To verify that a proper return path is present,
connect a ground lead directly from the target to the ground connector on the
electronics.
2. To minimize the capacitive influence of the connecting triaxial cable make the target
the moving part of the system.
3. Parallelism can influence the linearity and also the gain factor. The target ground plate
must be mounted parallel to the sensor surface.
4. The target area size should be considerably larger than the sensor area (by approx.
50%).
5. Measurement against a semi-conductor target connected to ground is also possible.
Figure 2: Definitions of "gap'" and "target"

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 5 / 12
Phone [phone]
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Figure 3: Mounting parallelism: tilt angle α(see p.7)
Calibrated System
Do not interchange electronics, connecting cable and/or sensor probe when they have been
calibrated together. Respect the assignment of the sensor probe and cable to the individual
channel of the electronics, as indicated by the serial numbers on the labels affixed to the
devices.
In the calibrated range the minimum probe-to-target gap equals 50% and the maximum gap
150% of the range value (see Fig. 6).
If not ordered otherwise the following is valid for calibration:
Environmental conditions room temperature 22°C
Parallelism probe surface to target surface tilt under 0.7 mrad
Read the user manual of the electronics for details on calibration and measurement ranges.
Differing from the standard calibration routine, the D-510.021 sensor probe is calibrated in the
1-fold range for a measurement range from 15 to 30 µm.
Mounting
The sensor can be clamped by the 8 mm shaft.
Mounting examples:

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 6 / 12
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Figure 4: Clamping: use plastic or nylon screw to avoid damage to the probe
Figure 5: Fixture with set screw
The probe fixture must have good mechanical stability and alignment, and a good connection to
ground is recommended. The fixture must hold the probe securely and keep the probe face
parallel to the target surface. Probe tilt causes measurement errors.
Motion of connecting cables has a strong influence on the results and should be avoided.
Therefore, if possible, the sensor probe should always be the part of the application that is at
rest and the target the moving part.
The probe should be mounted to meet the following important conditions:
The minimum probe-to-target gap is 50% of the selected measurement range
The minimum allowable probe-to-target gap is 10 µm. At minimum excursion, a probe-
to-target gap of 15 µm is recommended.
At maximum excursion, the probe-target gap must not exceed 150% of the full probe
range
Example: A D-510.100 was calibrated for a 200 µm measurement range. It should be mounted
with a minimum probe-to-target gap of 100 µm and a maximum gap of 300 µm.

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 7 / 12
Phone [phone]
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Figure 6: Relation of measurement range and probe-to-target gap; measurement range and
mid-range distance have identical values
Before performing a measurement, ensure that the probe and target under test are clean and
free of contamination.
Influence of Parallelism on Linearity
Figure 7: Mounting parallelism: influence of the tilt angle α on the linearity. α is given in µrad in
the graphs below
The following graphs show the influence of angular misalignment of the sensor plate on the
linearity of the output signal as a percentage of output voltage over full travel range. "Range 2x
/ 5x" refers to the measurement extension factors (see the user manual of the electronics for
more information).

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 8 / 12
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Figure 8: D-510.021: influence of tilt on the output signal
Figure 9: D-510.051: influence of tilt on the output signal

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 9 / 12
Phone [phone]
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Figure 10: D-510.101: influence of tilt on the output signal
Influence of Temperature and Humidity
Temperature variations cause changes of sensor probe dimensions. This results in a change of
the probe-to-target gap size and thereby also changes the measurement results.
Measurements of the increase in sensor probe thickness give 53 nm/K (D-510.051).
Condensation must be avoided: the measurement values are otherwise no longer reliable

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 10 / 12
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Technical Data
Specifications
D-510.021 D-510.051 D-510.101
Sensor type Single electrode,
capacitive
Single electrode,
capacitive
Single electrode,
capacitive
Measurement accuracy D-510.021 D-510.051 D-510.101
Nominal measuring range* 20 µm 50 µm 100 µm
Smallest measuring gap in the nominal
measuring range* 10 µm 25 µm 50 µm
Largest measuring gap in the 5-times
extended measuring range* 150 µm 375 µm 750 µm
Static resolution** <0.001 % of the
measuring range (RMS)
<0.001 % of the
measuring range (RMS)
<0.001 % of the
measuring range (RMS)
Dynamic resolution** <0.002 % of the
measuring range (RMS)
<0.002 % of the
measuring range (RMS)
<0.002 % of the
measuring range (RMS)
Linearity error*** <0.2 % <0.1 % <0.1 %
Mechanical properties D-510.021 D-510.051 D-510.101
Sensor active diameter 3.8 mm 6 mm 8.4 mm
Sensor active area 11.2 mm² 27.9 mm² 56.1 mm²
Sensor diameter 8 mm 12 mm 20 mm
Sensor area 50.3 mm² 113.1 mm² 314.0 mm²
Mounting shaft diameter 8 mm 8 mm 8 mm
Miscellaneous D-510.021 D-510.051 D-510.101
Operating temperature range -20 to 100 °C -20 to 100 °C -20 to 100 °C
Material Stainless steel Stainless steel Stainless steel
Mass 8 g (±5 %) 10 g (±5 %) 16 g (±5 %)
Suitable connecting cable D-891.01x, D-891.02x D-891.01x, D-891.02x D-891.01x, D-891.02x
Recommended electronics
E-852.10, E-852.10A1, E-
711.SE3, E-509.E03, E-
509.E3
E-852.10, E-852.10A1, E-
711.SE3, E-509.E03, E-
509.E3
E-852.10, E-852.10A1, E-
711.SE3, E-509.E03, E-
509.E3
* Extended measuring range available with E-852.10, two measuring ranges are calibrated respectively. Extension factors: 1, 2, 2.5, 5.
** Static: Bandwidth 10 Hz, dynamic: Bandwidth 10 kHz, with E-852 evaluation electronics
***Linearity error in the nominal measuring range

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 11 / 12
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Dimensions
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Dimensions of the D-510.021, D-510.051, and D-510.101

User Manual
D510T0001, valid for D-510
BSc, BRo, 2/26/2020
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 12 / 12
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an email ([e-mail]).
If you have questions concerning your system, have the following information ready:
−Product and serial numbers of all products in the system
−Firmware version of the controller (if present)
−Version of the driver or the software (if present)
−Operating system on the PC (if present)
If possible: Take photographs or make videos of your system that can be sent to our
customer service department if requested.
Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed of in EU
member states via the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and
regulations.
In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH &
Co. KG undertakes environmentally correct disposal of all old PI equipment made available on
the market after 13 August 2005 without charge.
Any old PI equipment can be sent free of charge to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstr. 1
D-76228 Karlsruhe, Germany