PI M-687.UN User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP100E
M
-687.UN XY Stage
User Manual
Version: 1.3.0
Date: 17.03.2022
This document describes the following product:

M-687.UN
XY stage for inverted Nikon microscopes,
135 mm × 85 mm, self-locking, PILine® linear
drives, 0.1 µm resolution

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
https://www.physikinstrumente.com/en/about-pi/patents
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images, and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 17.03.2022
Document number: MP100E, CBo, Version 1.3.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Product View .............................................................................................................. 9
3.2 Product Labeling....................................................................................................... 10
3.3 Scope of Delivery...................................................................................................... 10
3.4 Suitable Controllers .................................................................................................. 11
3.5 Accessories ............................................................................................................... 11
3.6 Technical Features.................................................................................................... 12
3.6.1 Linear Encoder............................................................................................. 12
3.6.2 Limit Switches.............................................................................................. 12
3.6.3 Reference Switch......................................................................................... 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installing ...................................................................................... 15
5.2 Connecting the M-687.UN to the Protective Earth Conductor................................ 16
5.3 Mounting the M-687.UN onto a Surface.................................................................. 18
5.4 Mounting a Positioner on the M-687.UN................................................................. 19
5.5 Inserting and Removing the M-687.AP1 Universal Holder ...................................... 21
5.6 Connecting the M-687.UN to the Controller............................................................ 22
6Starting and Operating 25
6.1 General Notes on Starting and Operating................................................................ 25
6.2 Starting and Operating the M-687.UN with the C-867 Controller ........................... 28
Contents

7Maintenance 31
7.1 General Notes on Maintenance ............................................................................... 31
7.2 Doing a Maintenance Run ........................................................................................ 31
7.3 Cleaning the M-687.UN............................................................................................ 32
8Troubleshooting 33
9Customer Service 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 Data Table.................................................................................................... 37
10.1.2 Limit Switch Specifications .......................................................................... 38
10.1.3 Reference Switch Specifications.................................................................. 38
10.1.4 Maximum Ratings........................................................................................ 38
10.2 Ambient Conditions and Classifications ................................................................... 39
10.3 Influence of Downtimes on the Static Holding Force............................................... 39
10.4 Dimensions ............................................................................................................... 40
10.5 Pin Assignment ......................................................................................................... 42
11 Old Equipment Disposal 43
12 European Declarations of Conformity 45

1 About this Document
M-687.UN XY Stage MP100E Version: 1.3.0 1
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This user manual contains the information required for using the M-687.UN as intended.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.3.0 MP100E M-687.UN XY Stage
Symbol/Label Meaning
1.
2.
Action consisting of several steps with strict sequential order
 Action consisting of one or more steps without relevant sequential
order

Bullet
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product (example: socket of
the RS-232 interface)
Warning sign on the product referring to detailed information in this
manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (e. g., M-687.UN)
Electronics
Controller or amplifier that supplies the operating voltage for the
connected positioner
Controller
Electronics with sensor evaluation for closed-loop operation of
positioners (e. g., C-867 controller)
Amplifier
Electronics without sensor evaluation for open-loop operation of
positioners
Load capacity
Maximum load capacity in the vertical direction when the M-687.UN
is mounted horizontally. The contact point of the load is at the center
of the motion platform.
Linear encoder
The linear encoder is an incremental sensor for detecting changes in
position. Signals from the sensor are used for axis position feedback.
After switching the controller on, referencing must be done before
absolute target positions can be commanded and reached.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
M-687.UN XY Stage MP100E Version: 1.3.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Description Document
C-867.2U2 PILine® controller
MS231 User Manual
PIMikroMove SM148E Software Manual
PILine® positioners
MP121EK Short Instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., M-687) or the product family (e.g.,
PILine®).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
M-687.UN XY Stage MP100E Version: 1.3.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The M-687.UN is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use
and use in an environment that is free of dirt, oil, and lubricants.
According to its design, the M-687.UN is intended for positioning, adjusting, and moving loads
in two axes at different velocities in interval mode. The M-687.UN is not intended for
applications in areas where failure would be a considerable risk for people or the environment.
The M-687.UN is only intended for horizontal mounting.
It is only possible to use the M-687.UN as intended when it is completely mounted and
connected.
The M-687.UN uses PILine® ultrasonic piezo linear motors as a drive and must be operated with
a suitable controller (p. 11).
2.2 General Safety Instructions
The M-687.UN is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the M-687.UN.
Use the M-687.UN for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the M-687.UN.
2
Safety

2 Safety
6 Version: 1.3.0 MP100E M-687.UN XY Stage
Piezo motors are driven by piezo actuators. Piezo actuators can remain electrically charged for
several hours after disconnecting the electronics. Temperature changes can also induce charges
in piezo actuators. Touching the contacts in the connection sockets of the M-687.UN (or in the
connectors of the connected cables) could lead to minor injuries from electric shock. In
addition, the piezo actuators could be destroyed by an abrupt contraction.
Do not open the M-687.UN.
Do not touch the contacts in the connection sockets of the M-687.UN.
If an adapter or connecting cable is connected to the M-687.UN, do not touch the
contacts in the connector.
Do not pull the connectors out of the electronics during operation. If possible, use
screws to secure the connectors against being pulled out of the electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the M-687.UN in the case of malfunction or failure of the system. If there are touch
voltages, touching the M-687.UN can result in minor injuries from electric shock.
Connect the M-687.UN to a protective earth conductor (p. 16) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the M-687.UN to the protective earth conductor before
restarting.
Mechanical forces can damage or misalign the M-687.UN.
Avoid impacts that affect the M-687.UN.
Do not drop the M-687.UN.
Do not exceed the maximum permissible stress and load capacities (p. 37).

2 Safety
M-687.UN XY Stage MP100E Version: 1.3.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the M-687.UN.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the M-687.UN to a third party, include this user manual as well as other
relevant information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the M-687.UN only after you have read and understood this user
manual.
Personnel qualification
The M-687.UN may only be installed, started, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.

3 Product Description
M-687.UN XY Stage MP100E Version: 1.3.0 9
In this Chapter
Product View.................................................................................................................................. 9
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 10
Suitable Controllers ..................................................................................................................... 11
Accessories................................................................................................................................... 11
Technical Features ....................................................................................................................... 12
3.1 Product View
Figure 1: M-687.UN product view
1Lower platform (X axis)
2Upper platform (Y axis)
3Base body
4000029788 adapter plate (110 mm × 160 mm)
5Protective earth connection
6Connection socket for controller cable (Y axis)
7Connection socket for controller cable (X axis)
X: Directions of motion of the X axis
Y: Directions of motion of the Y axis
3
Product Description

3 Product Description
10 Version: 1.3.0 MP100E M-687.UN XY Stage
3.2 Product Labeling
Labeling Description
M-687.UN
Product number (example), the digits after the period refer to
the model
123456789
Serial number (example), individual for each M-687.UN
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 43)
Country of origin: Germany
Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
PILine®
Brand name
Symbol for the protective earth conductor, marks the protective
earth connector of the M-687.UN (p. 16)
Axis X
Connection socket for controller cable (X axis)
Axis Y
Connection socket for controller cable (Y axis)
3.3 Scope of Delivery
Product number Quantity Description
M-687.UN 1
XY stage for inverted Nikon microscopes, 135 mm × 85 mm, self-
locking, PILine® linear drives, 0.1 µm resolution
000036450
1
M4 screw set for protective earth, consisting of:
One flat-head screw with cross recess, M4x8, ISO 7045
2 lock washers
2 flat washers
000031657
1
Screw set for mounting the M-687.UN, consisting of:
5 socket head screws, M5×35 ISO 4762
1 hex key
000029788
1
Adapter plate, 110 mm × 160 mm, with spring and M2x5
threaded pin, preassembled
MP121EK
1
Short instructions for PILine® positioners

3 Product Description
M-687.UN XY Stage MP100E Version: 1.3.0 11
Also included in the scope of delivery when the M-687.UN is part of the U-780.DNS system:
Product number Quantity Description
C-867.2U2
1
Piezo motor controller for PILine® systems, 2 axes, USB, RS-232,
TCP/IP, SPI, I/O, analog or digital joystick, networkable via daisy
chain (for scope of delivery, refer to the documentation for the
controller)
U-600.AMD
2
PILine® adapter cable MDR 14 (m) to D-sub 15 (m), 1.5 m, for
connecting the XY stage to the controller
C-819.JD
1
Digital joystick for 2 axes, 3 programmable buttons
3.4 Suitable Controllers
Product number Description
C-867.2U2
Piezo motor controller for PILine® systems, 2 axes, USB, RS-232, TCP/IP, SPI,
I/O, analog or digital joystick, networkable via daisy chain
To order, contact our customer service department (p. 35).
3.5 Accessories
Order number Description
P-561, P-562,
P-563
PIMars XYZ nanopositioner with up to 300 μm travel range
P-541.2, P-542.2
Flat XY nanopositioner with large aperture
P-541.Z
Flat nanopositioner Z stage with large aperture
P-545.2R8S
PInano® XY piezo system, clear aperture for microscope slides, 200 µm ×
200 µm, piezoresistive sensors, with USB digital controller
P-545.3R8S
PInano® XYZ piezo system, clear aperture for microscope slides, 200 µm ×
200 µm × 200 µm, piezoresistive sensors, with USB digital controller
P-736.ZCN2S
PInano® Z piezo scanner system with clear aperture for microtiter plates, for
inverted Nikon microscopes, 220 µm, capacitive sensors, with USB digital
controller
P-736.ZRN2S
PInano® Z piezo scanner system with clear aperture for microtiter plates, for
inverted Nikon microscopes, 220
µm, piezoresistive sensors, with USB digital
controller
P-737.1SL
PIFOC® nanofocus positioner for microscope sample holders, 100 µm, DMS,
LEMO connector
P-737.2SL
PIFOC® nanofocus positioner for microscope sample holders, 250 µm, DMS,
LEMO connector
M-687.AP1
Universal holder for microscope slide and Petri dishes for PI stages with
160 mm × 110 mm clear aperture
You can find more information about accessories in our BRO70E brochure "Microscope Stage
Configurator" (https://www.physikinstrumente.com/stage-configurator).
To order, contact our customer service department (p. 35).

3 Product Description
12 Version: 1.3.0 MP100E M-687.UN XY Stage
3.6 Technical Features
3.6.1 Linear Encoder
The M-687.UN is equipped with one optical linear encoder per axis. For the encoder resolution,
refer to the table in the "Specifications" section (p. 37).
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
influence the measurement of the position.
3.6.2 Limit Switches
The M-687.UN is equipped with noncontact, Hall effect limit switches.
Each limit switch sends an overrun signal on a dedicated line to the controller. The controller
then stops the motion. If the controller does not stop the motion in time, the XY stage runs into
the hard stop.
Refer to "Limit Switch Specifications" (p. 38) for more information.
3.6.3 Reference Switch
The M-687.UN is equipped with one direction-sensing reference switch per axis. The switch is
located at about the midpoint of the travel range. This sensor transmits a TTL signal that
indicates whether the axis is on the positive or negative side of the reference switch.
Refer to the controller user manual and/or associated software manuals for the commands that
make use of the reference point signal.
Refer to "Reference Switch Specifications" (p. 38) for more information.

4 Unpacking
M-687.UN XY Stage MP100E Version: 1.3.0 13
NOTICE
Platform slips and hits the hard stop!
When the M-687.UN is aligned vertically, the platforms can slip and hit the hard stop. The
impact of a platform on the hard stop could cause damage to the M-687.UN.
Make sure that the M-687.UN is always horizontal.
If the M-687.UN must be brought to a vertical position during installation, secure the
platforms against slipping.
1. Unpack the M-687.UN with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 35) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
M-687.UN XY Stage MP100E Version: 1.3.0 15
In this Chapter
General Notes on Installing ......................................................................................................... 15
Connecting the M-687.UN to the Protective Earth Conductor ................................................... 16
Mounting the M-687.UN onto a Surface ..................................................................................... 18
Mounting a Positioner on the M-687.UN .................................................................................... 19
Inserting and Removing the M-687.AP1 Universal Holder.......................................................... 21
Connecting the M-687.UN to the Controller ............................................................................... 22
5.1 General Notes on Installing
CAUTION
Dangerous voltage and residual charge in piezo actuators!
Piezo motors are driven by piezo actuators. Piezo actuators can remain electrically charged for
several hours after disconnecting the electronics. Temperature changes can also induce
charges in piezo actuators. Touching the contacts in the connection sockets of the M-687.UN
(or in the connectors of the connected cables) could lead to minor injuries from electric shock.
In addition, the piezo actuators could be destroyed by an abrupt contraction.
Do not open the M-687.UN.
Do not touch the contacts in the connection sockets of the M-687.UN.
If an adapter or connecting cable is connected to the M-687.UN, do not touch the contacts
in the connector.
Do not pull the connectors out of the electronics during operation. If possible, use screws
to secure the connectors against being pulled out of the electronics.
NOTICE
Lubricants, dirt, condensation!
Dirt, oil, lubricants and condensation will render the motor/drive inoperable.
Make sure that the piezo motors of the M-687.UN do not come into contact with
lubricants.
Keep the M-687.UN free from dirt and condensation.
5
Installation

5 Installation
16 Version: 1.3.0 MP100E M-687.UN XY Stage
NOTICE
Heating up of the M-687.UN during operation!
The heat produced during operation of the M-687.UN can affect your application.
Install the M-687.UN so that your application is not affected by the dissipating heat.
NOTICE
Unsuitable cables!
Unsuitable cables can cause damage to the controller and affect the performance of the
M-687.UN.
Only use genuine PI parts to connect the M-687.UN to the controller.
If you need longer cables, contact our customer service department (p. 35).
INFORMATION
When moving the platform in a power off state manually, differences in the holding force may
be noticeable across the travel range.
There are mechanical reasons for fluctuations in the holding force and they have no influence
on the function of the XY stage.
5.2 Connecting the M-687.UN to the Protective Earth Conductor
INFORMATION

Pay attention to the applicable standards for connecting the protective earth conductor.
INFORMATION

If there is any vibration in your application, secure the screw connection for the protective
earth conductor in a suitable manner (e.g., with conductive liquid adhesive) to prevent it
from unscrewing by itself. If this is not possible, check the screw connection at regular
intervals and retighten the screw if necessary.