RHK Technology R9 User manual

R9 Control System User Guide v5.5

R9 Control System User Guide v5.5
RHK Technology
Publication date 13 October 2015
Copyright © 2012-2015 RHK Technology, Inc

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Table of Contents
About This Quick Start Guide .....................................................................................................................xiv
Significant Changes in R9s 3.0...................................................................................................................xvi
Significant Changes in R9s 4.0.................................................................................................................xviii
Significant Changes in R9s 4.2................................................................................................................... xx
Significant Changes in R9s 5.0..................................................................................................................xxii
Significant Changes in R9s 5.2.................................................................................................................xxiv
Chapter 1. Prepare Your SPM System.........................................................................................................1
1.1 Check the Hardware for Damage..................................................................................................1
1.2 Configure the Power .....................................................................................................................1
1.3 Connecting the Ethernet ...............................................................................................................2
1.3.1 Ethernet Connection .............................................................................................................3
1.3.2 Using more than one Ethernet Communications Link...........................................................3
1.4 Start and try the R9 Control System Software (R9s) ....................................................................3
1.4.1 Opening R9 Software (R9s)..................................................................................................4
1.4.2 Understand IHDL™ and the R9 Software Components .......................................................4
1.4.3 Open a Preconfigured IHDL™ File .......................................................................................5
1.4.4 Workbench User Interface Component Overview.................................................................8
1.4.5 Components of Interest.........................................................................................................9
1.5 Initial Testing of the R9 Controller...............................................................................................11
1.5.1 Initial Tests ..........................................................................................................................14
1.5.2 Measuring Preamplifier Noise and Adjusting Input Circuit Parameters..............................16
1.5.3 Adjusting Bias Voltage Parameters.....................................................................................19
1.5.4 Further Testing....................................................................................................................22
Chapter 2. Connect Your Microscope.........................................................................................................23
Chapter 3. Approach...................................................................................................................................24
3.1 Approach Settings.......................................................................................................................24
3.2 Feedback Settings ......................................................................................................................25
3.3 Fast In .........................................................................................................................................27
3.4 Slow Approach............................................................................................................................27
3.5 Adjusting the Position with Single Steps.....................................................................................28
3.6 Operating Mode Switching..........................................................................................................29
Chapter 4. Acquire an Image......................................................................................................................31
4.1 Verify the Available Signals.........................................................................................................31
4.2 Configure Scan Settings .............................................................................................................32
4.2.1Multi-height Imaging............................................................................................................35
4.3 Begin Image Acquisition..............................................................................................................36
4.4 Optimizing Feedback and Scanning Parameters........................................................................38
4.5 Drift Correction............................................................................................................................39
4.5.1 Automatic Drift Correction...................................................................................................41
4.5.2 Manual Drift Correction .......................................................................................................41
4.6 Image+Spectroscopy Mode ........................................................................................................41
4.6.1 Points ..................................................................................................................................41
4.6.2 Line......................................................................................................................................42
4.6.3 Region.................................................................................................................................43
4.6.4 Line Spectroscopy with Image Line Verification .................................................................43
Chapter 5. Display and Analyze your Image...............................................................................................44
5.1 Browser.......................................................................................................................................44
5.2 Basic Image Processing..............................................................................................................45
5.2.1 Background Removal..........................................................................................................45
5.2.2 Filtering................................................................................................................................46
5.3 Displaying SPM Images..............................................................................................................46
5.3.1 Image Manipulation.............................................................................................................46

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5.3.2 Display Image in 3D Format................................................................................................47
5.3.3 Export the SPM Image........................................................................................................48
5.4 Displaying Spectral Data on an Image........................................................................................48
5.5 Locating SM4 Data Files.............................................................................................................50
Chapter 6. Acquire Spectroscopy Data.......................................................................................................51
6.1 Configuring the I/V Ramp Spectroscopy Settings.......................................................................51
6.2 Starting an IV Spectroscopy Procedure......................................................................................54
6.3 dI/dV Spectroscopy Measurements............................................................................................56
6.3.1 Background for dI/dV measurement ...................................................................................59
Chapter 7. Analyze Spectroscopy Data......................................................................................................63
7.1 Analyzing Spectroscopy Data.....................................................................................................63
7.1.1 Display and Analyze your Spectroscopy Data....................................................................63
7.1.2 Exporting your Spectroscopy Data......................................................................................64
Appendix A. IHDL Element Details .............................................................................................................66
A.1. Overview of a Hardware Item..........................................................................................................66
A.2. Hiding Dashboard Panels to Ribbon ...............................................................................................67
A.3. Overview of an R9 Control ..............................................................................................................68
A.4. User-Configurable Max/Min Ranges on Data Entry........................................................................70
A.5. Adding Procedure Panel to Hardware Composites on the Dashboard...........................................71
A.6. Configure Measure Items ................................................................................................................71
Appendix B. Hardware Space Components ...............................................................................................73
B.1. Channel 1 Drive and Channel 2 Drive.............................................................................................73
B.1.1. Hardware Space.......................................................................................................................73
B.1.2. Block Diagram of Output Circuitry............................................................................................74
B.1.3. Property Panel in Hardware Space..........................................................................................74
B.2. Channel 1 Input and Channel 2 Input..............................................................................................77
B.2.1. Hardware Space.......................................................................................................................77
B.2.2. Block Diagram of Input Circuitry...............................................................................................78
B.2.3. Property Panel in Hardware Space..........................................................................................78
B.3. Channel 3 Input and Channel 4 Input..............................................................................................80
B.3.1. Hardware Space.......................................................................................................................80
B.3.2. Block Diagram of Input Circuitry...............................................................................................80
B.3.3. Property Panel in Hardware Space..........................................................................................81
B.4. CH5 Input.........................................................................................................................................82
B.5. STM Bias .........................................................................................................................................82
B.6. Lock-in Amplifiers ............................................................................................................................83
B.6.1. Hardware Space.......................................................................................................................83
B.6.2. Using the Lock-in Amplifier as a Low Pass Filter.....................................................................84
B.6.3. Using the Lock-in Amplifier for dI/dV Measurements...............................................................85
B.6.4. Lock-in Amplifiers Operating Independent of the High Speed Inputs ......................................85
B.7. Feedback Loops..............................................................................................................................86
B.7.1. Auxiliary PI Feedback Controller ..............................................................................................89
B.7.2. Kelvin PI Feedback Controller..................................................................................................90
B.8. Filters for High Speed Inputs...........................................................................................................91
91
B.9. Transient Recorder..........................................................................................................................91
B.10. Scan Processor .............................................................................................................................92
B.10.1. Slope Compensation Range...................................................................................................93
B.11. Internal Piezo Modulation..............................................................................................................93
B.12. High Voltage Amplifiers .................................................................................................................95
B.13. Status ADCs ..................................................................................................................................98
B.14. Pulse Counting ..............................................................................................................................98
B.15. TTL Inputs and Outputs.................................................................................................................99
B.16. Forth Scripts ................................................................................................................................100
B.17. Description...................................................................................................................................100
B.18. Measure Item...............................................................................................................................101

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B.18.1. Data Channels have User-Configurable Names..................................................................102
B.19. External Hardware Devices.........................................................................................................102
B.19.1. Preamps ...............................................................................................................................102
B.19.1.1. External Control Support for FEMTO Preamps.............................................................103
B.19.2. PMC100 (Piezo Motor Controller) ........................................................................................104
B.19.3. PPC200 Approach Interface Module....................................................................................104
B.19.4. Z Scan Input added to the Piezo Tube Item.........................................................................105
B.19.5. External Hardware Item for AFM Cantilevers.......................................................................105
B.20. Microscopes.................................................................................................................................106
Appendix C. Connecting the Microscope..................................................................................................108
C.1. RHK UHV300/700 - STM Beetle ...................................................................................................108
C.2. RHK UHV350/750 - AFM/STM Beetle...........................................................................................110
C.3. RHK UHV900 - Pan STM..............................................................................................................111
Appendix D. R9 Connector Pinouts ..........................................................................................................114
D.1. R9 Preamp I/O 44-Pin Female Connector ....................................................................................114
D.2. R9 DC Power Output 9-Pin Female Connector ............................................................................115
D.3. R9 Laser I/O 26-Pin Female Connector........................................................................................116
D.4. R9 High Voltage Output 10-Pin Female Connector ......................................................................117
D.5. R9 Rear Panel BNCs.....................................................................................................................118
D.6. R9 Low Voltage Outputs 15-Pin Female Connector.....................................................................119
D.7. R9 Digital I/O 25-Pin Female Connectors (2)................................................................................120
D.8. R9 Preamp I/O Cable 44-pin to 15-pin..........................................................................................121
Appendix E. Configuring the High Voltage Block......................................................................................122
E.1. RHK UHV300/700 STM Beetle......................................................................................................123
E.2. RHK UHV350/750 AFM/STM Beetle.............................................................................................123
E.3. RHK UHV900 STM Pan.................................................................................................................124
Appendix F. Approach...............................................................................................................................125
F.1. RHK STM Beetle - UHV300/700....................................................................................................126
F.1.1. Confirm Connections to Microscope.......................................................................................126
F.1.2. Check Approach and Feedback Settings ...............................................................................127
F.2. RHK AFM/STM Beetle - UHV350/750...........................................................................................127
F.2.1. Confirm Connections to Microscope.......................................................................................127
F.2.2. Check Approach and Feedback Settings ...............................................................................127
F.2.2.1. Beetle Single Step In .......................................................................................................128
F.2.2.2. Beetle Single Step Out.....................................................................................................129
F.2.2.3. Beetle Fast In...................................................................................................................129
F.2.2.4. Beetle Fast Out................................................................................................................130
F.2.2.5. *Z Beetle Approach Slow* ...............................................................................................130
F.3. RHK Pan - UHV900.......................................................................................................................130
F.3.1. Confirm Connections to Microscope.......................................................................................130
F.3.2. Check Approach and Feedback Settings ...............................................................................131
Appendix G. Feedback Modes..................................................................................................................132
G.1. PI Controller Gain Values..............................................................................................................132
G.2. Z PI Controller Linearization..........................................................................................................132
G.3. STM Mode.....................................................................................................................................133
Appendix H. Helpful Hints.........................................................................................................................134
Appendix I. Details on an IHL File's Construction.....................................................................................135
I.1. Scan Processor...............................................................................................................................135
I.2. Scan Heads.....................................................................................................................................137
I.3. Preamplifiers ...................................................................................................................................137
I.4. Input Channels................................................................................................................................137
I.5. Lock-in Amplifiers............................................................................................................................137
I.6. Z PI Loop.........................................................................................................................................138
I.6.1. Each Feedback Mode Remembers Gain.................................................................................138
I.7. Channel 1 Drive ..............................................................................................................................139

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I.8. Bias Setting.....................................................................................................................................139
I.9. Z Offset............................................................................................................................................139
I.10. PPC200.........................................................................................................................................139
I.11. Measure Items ..............................................................................................................................139
I.12. Scan Area Window........................................................................................................................140
I.13. Ramp Spectroscopy Settings........................................................................................................140
I.14. Hardware Watchers ......................................................................................................................140
I.15. Fast Sweep Aborts........................................................................................................................141
I.15.1. Fast Sweep Abort Setup........................................................................................................141
7.1.3 ...........................................................................................................................................141
I.16. ‘Yes/No’ Message Box ..................................................................................................................142
I.17. Multiple R9 Controls in a State .....................................................................................................143
I.17.1. Sweep Options in R9 Controls...............................................................................................143
Appendix J. Details on Procedure Space Constructions ..........................................................................145
J.1. Constructing Procedures................................................................................................................145
J.2. Connecting Components in Hardware Space and Procedure Space............................................147
J.3. Rearranging Connecting Lines.......................................................................................................147
J.4. Deleting a Connecting Line............................................................................................................148
J.5. Example Procedure........................................................................................................................149
J.6. Setting Parameters as Reference or Value....................................................................................153
J.7. Naming a Procedure ......................................................................................................................154
J.8. Validating the Procedure................................................................................................................155
J.9. Running the Procedure ..................................................................................................................159
J.9.1. From Hardware Space............................................................................................................159
J.9.2. From a Procedure Panel.........................................................................................................160
J.10. Stopping the Procedure................................................................................................................160
J.11. Adding Loops to Procedures........................................................................................................161
J.11.1. Accidental Deletion of a State or Loop..................................................................................165
J.12. Adding Conditionals to Procedures..............................................................................................165
J.12.1. A “Script Conditional” Item ....................................................................................................166
J.13. Configuring Startup and Shutdown Procedures...........................................................................166
Appendix K. Reference Guide ..................................................................................................................168
K.1. Scan Area Window........................................................................................................................168
K.1.1. Main Panel..............................................................................................................................168
K.1.2. Advanced Panel .....................................................................................................................172
K.1.3. Save Panel .............................................................................................................................174
K.1.4. Save - dataSAFE....................................................................................................................176
K.1.5. Navigation Config. ..................................................................................................................176
K.2. XY Graph Windows .......................................................................................................................178
K.2.1. XY Graph Toolbar ......................................178
K.2.1.1. Select Curve ....................................................................................................178
K.2.1.2. Zoom ........................................................................................................................179
K.2.1.3. Cursor Mode .............................................................................................................180
K.2.1.3.1 Statistics ...............................................................................................181
K.2.1.4. Autoscale ..................................................................................................................181
K.2.1.5. Pan ...........................................................................................................................182
K.2.1.6. Curve Groups ............................................................................182
K.2.2. Settings Tab ....................................................................................................................183

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K.2.2.1. Curves Tab ........................................................................................................183
K.2.2.1.1 Show..........................................................................................................................184
K.2.2.1.2 Preprocessing Modes................................................................................................184
K.2.2.1.3 Display Modes...........................................................................................................185
K.2.2.1.4 Curve Attributes .............................................................................................185
K.2.2.2. Layout Tab .........................................................................................................186
K.2.2.3. Cursor Mode Tab .......................................................................................187
K.2.3. Context Menu .........................................................................................................................187
K.3. Oscilloscope ...........................................................................................................................188
K.3.1. Settings...................................................................................................................................188
K.4. Spectrum Analyzer .................................................................................................................189
K.4.1. Settings...................................................................................................................................190
K.4.2. Common Usage......................................................................................................................190
K.5. Monitor ...................................................................................................................................191
K.5.1. Controls ..................................................................................................................................192
K.6. Transient Recorder and Transient Recorder FFT .........................................................................193
Appendix L. Power Supply Wiring.............................................................................................................196
Appendix M. Graphically Configured Oscillators and Lock-in Amplifiers..................................................197
M.1. Typical Example............................................................................................................................197
M.2. Advanced Example.......................................................................................................................198
Appendix N. Phase-Locked Loop (PLL)....................................................................................................200
N.1. PSD Alignment Window ................................................................................................................200
N.2. Frequency Sweeps........................................................................................................................201
N.2.1. Coarse Sweep........................................................................................................................202
N.2.2. Measure Peak ........................................................................................................................203
N.2.3. Set Frequency........................................................................................................................203
N.2.4. Unwrap Phase........................................................................................................................203
N.2.5. Procedures.............................................................................................................................204
Appendix O. Inventor SDK........................................................................................................................204

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List of Figures
Figure 1.1. Check the R9 for damage...........................................................................................................1
Figure 1.2. Location of Power, Frequency, Voltage and Serial Number Information ...................................2
Figure 1.3. Ethernet Connection Diagram ....................................................................................................3
Figure 1.4. R9 Dashboard.............................................................................................................................4
Figure 1.5. Opening a preconfigured IHDL™ ...............................................................................................6
Figure 1.6. Selecting the Workbench tab......................................................................................................6
Figure 1.7. RHK UHV300 Preconfigured STM Hardware Workbench..........................................................7
Figure 1.8. UHV 300 STM Hardware Workbench Overview.........................................................................8
Figure 1.9. Hardware Space.......................................................................................................................10
Figure 1.10. Save the IHDL with a New Name...........................................................................................12
Figure 1.11. Auto-backup IHDL Files..........................................................................................................12
Figure 1.12. Workbench - Testing UHV 300.ihl ..........................................................................................13
Figure 1.13. R9s Testing Screen using the Testing UHV 300 ihl ...............................................................14
Figure 1.14. Oscilloscope - Topography and Current.................................................................................16
Figure 1.15. Testing the Input Offset ..........................................................................................................17
Figure 1.16. Spectrum Analyzer Result at Full Bandwidth .........................................................................18
Figure 1.17. Spectrum Analyzer Result with 2 kHz Filter with 48 dB rolloff................................................19
Figure 1.18. Bias Voltage and CH1 Drive Settings.....................................................................................20
Figure 1.19. Bias Modulation through the Tunneling Gap Simulator..........................................................21
Figure 3.1. Open the Approach Procedures Panel.....................................................................................25
Figure 3.2. Typical Dashboard for STM......................................................................................................26
Figure 3.3. Camera View of the Tip and Sample........................................................................................27
Figure 3.4. Z Feedback Bar ........................................................................................................................29
Figure 3.5. Mode Switching.........................................................................................................................29
Figure 4.1. Checking the Available Signals ................................................................................................31
Figure 4.2. Scan Area Window Main Panel ................................................................................................32
Figure 4.3. Scan Area Window - Advanced, Save......................................................................................34
Figure 4.4. Scan Area Window –Tip Standby Position..............................................................................34
Figure 4.5. Scan Area Window - Nav Config., Image Settings...................................................................35
Figure 4.6. Multi-height Imaging .................................................................................................................36
Figure 4.7. Open an Image Window...........................................................................................................37
Figure 4.8. Open an Image Line .................................................................................................................37
Figure 4.9. Scan Area Window - Drift Settings ...........................................................................................39
Figure 4.10. Automatic Drift Correction.......................................................................................................40
Figure 4.11. Image+Spectroscopy - Points.................................................................................................42
Figure 4.12. Image+Spectroscopy - Line....................................................................................................42
Figure 4.13. Image+Spectroscopy - Region ...............................................................................................43
Figure 5.1. File Explorer View.....................................................................................................................44
Figure 5.2. Shadow style Artifact from X Offset Subtract ...........................................................................45
Figure 5.3. Image Manipulation ..................................................................................................................46
Figure 5.4. Pre-processing Data Mode and Color Map Mode....................................................................47
Figure 5.5. Interactive 3D............................................................................................................................48
Figure 5.6. Image+Spectroscopy - Display Spectral Data..........................................................................49
Figure 5.7. Locating SM4 Data Files...........................................................................................................50
Figure 6.1. Dashboard View of the IV Ramp Spectroscopy Settings .........................................................52
Figure 6.2. Spectroscopy - Alternate Scan Direction: Disabled..................................................................53
Figure 6.3. Spectroscopy - Alternate Scan Direction: Enabled...................................................................53
Figure 6.4. Graphical Representation of Ramp Spectroscopy Timings......................................................54
Figure 6.5. Scan Area Window access to Spectroscopy Procedures.........................................................55
Figure 6.6. The Preconfigured UHV300 ihl.................................................................................................56
Figure 6.7. Dashboard for UHV300.ihl........................................................................................................57

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Figure 6.8. Example I/V Spectroscopy Measurement on a Pair of Back to Back FETs.............................57
Figure 6.9. Spectroscopy Settings and Circuit Diagram for the Trial dI/dV Spectroscopy .........................58
Figure 6.10. Modification to Pre-configured UHV300 Dashboard...............................................................58
Figure 6.11. The 'dI' Oscilloscope Trace for 2mV Oscillation Amplitude shown above and a series
resistance of 200 Meg Ohms...............................................................................................................59
Figure 6.12. I/V and dI/dV Spectroscopy Plots...........................................................................................60
Figure 6.13. Pictorial representation of dI/dV..............................................................................................61
Figure 6.14. Interferometer Feedback ........................................................................................................62
Figure 7.1. Spectroscopy............................................................................................................................64
Figure 7.2. Two different kinds of file export format, picture file and ASCII file..........................................65
Figure A.1. Hardware Space Properties .....................................................................................................66
Figure A.2. Hiding Dashboard Controls ......................................................................................................67
Figure A.3. Hiding Dashboard Panels to Ribbon........................................................................................68
Figure A.4. Showing Panels on the Ribbon ................................................................................................68
Figure A.5. R9 Controls...............................................................................................................................69
Figure A.6. Ramping R9 Controls...............................................................................................................69
Figure A.7. User-Configurable Limits on Data Entry...................................................................................70
Figure A.8. Settings for User-configurable Limits .......................................................................................70
Figure A.9. Adding Procedure Panels to composites on the Dashboard ...................................................71
Figure A.10. Preconfigured STM Measure Items........................................................................................72
Figure B.1. Channel 1 Drive - Hardware Space..........................................................................................73
Figure B.2. Block Diagram of Drive 1 and Drive 2 Output Circuitry............................................................74
Figure B.3. Channel 1 Drive - Property Panel in Hardware Space.............................................................74
Figure B.4. Hardware Space - Channel 1 Input..........................................................................................77
Figure B.5. Block Diagram of Channel 1 and Channel 2 Input Circuitry.....................................................78
Figure B.6. Property Panel in Hardware Space..........................................................................................78
Figure B.7. Hardware Space - Channel 3 Input..........................................................................................80
Figure B.8. Block Diagram of Channel 3 and Channel 4 Input Circuitry.....................................................80
Figure B.9. Property Panel in Hardware Space..........................................................................................81
Figure B.10. CH5 input in Hardware Space................................................................................................82
Figure B.11. STM Bias................................................................................................................................82
Figure B.12. Lock-in Amplifier - Hardware Space.......................................................................................83
Figure B.13. Lock-in Amplifier - Low Pass Filter.........................................................................................84
Figure B.14. Lock-in Amplifier used for dI/dV .............................................................................................85
Figure B.15. Lock-in Amplifier operating independent of the inputs...........................................................86
Figure B.16. Feedback Loop Controllers ....................................................................................................87
Figure B.17. Feedback Loop Connections..................................................................................................87
Figure B.18. Auxillary PI Feedback Controller............................................................................................89
Figure B.19. Aux PI Input in Hardware Space............................................................................................89
Figure B.20. Aux PI Input Settings..............................................................................................................90
Figure B.21. Kelvin PI Feedback Controller................................................................................................90
Figure B.22. Kelvin PI input in Hardware Space.........................................................................................90
Figure B.23. Kelvin PI input Settings ..........................................................................................................91
Figure B.24. Filters for High Speed Inputs..................................................................................................91
Figure B.25. Transient Recorder.................................................................................................................92
Figure B.26. Scan Processor......................................................................................................................93
Figure B.27. Slope Compensation..............................................................................................................93
Figure B.28. Internal Piezo Modulation.......................................................................................................94
Figure B.29. Internal Piezo Modulation Output...........................................................................................95
Figure B.30. High Voltage Amplifiers..........................................................................................................95
Figure B.31. High Voltage X Scan Signal Output Examples ......................................................................96
Figure B.32. Status A/D Inputs....................................................................................................................98
Figure B.33. Pulse Counting.......................................................................................................................98
Figure B.34. TTL Output .............................................................................................................................99
Figure B.35. Forth Scripts.........................................................................................................................100
Figure B.36. Description............................................................................................................................100

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Figure B.37. Measure Item........................................................................................................................101
Figure B.38. Property Panel Configuration...............................................................................................102
Figure B.39. External Hardware Devices - Preamps................................................................................102
Figure B.40. External Control Support for FEMTO Preamps....................................................................103
Figure B.41. PMC100................................................................................................................................104
Figure B.42. PPC200................................................................................................................................105
Figure B.43. A –Z Scan Added to the Piezo Tube Item............................................................................105
Figure B.44. External Hardware Item for AFM Cantilevers.......................................................................105
Figure B.45. Microscopes .........................................................................................................................106
Figure B.46. Piezo Sensitivity Selector.....................................................................................................106
Figure B.47. Show/Hide Items from Hardware Composites .....................................................................107
Figure C.1. RHK STM Beetle - Connections Block Diagram....................................................................108
Figure C.2. R9 Connection Diagram for the RHK UHV300 Beetle STM ..................................................108
Figure C.3. Combined Bias and Preamp Cable........................................................................................109
Figure C.4. RHK AFM/STM Beetle - Connections Block Diagram ...........................................................110
Figure C.5. RHK STM Pan - Connections Block Diagram........................................................................111
Figure C.6. Combined Bias and Preamp Cable........................................................................................112
Figure D.1. R9 Preamp I/O 44-Pin Female Connector.............................................................................114
Figure D.2. DC Power Output 9-Pin Female Connector...........................................................................115
Figure D.3. R9 Laser I/O 26-Pin Female Connector.................................................................................116
Figure D.4. R9 High Voltage Output 10-Pin Female Connector...............................................................117
Figure D.5. R9 High Voltage Output Defaults for RHK Microscopes........................................................117
Figure D.6. R9 Rear Panel BNCs .............................................................................................................118
Figure D.7. R9 Low Voltage Outputs 15-Pin Female Connector..............................................................119
Figure D.8. R9 Digital I/O 25-Pin Connectors...........................................................................................120
Figure D.9. R9 Preamp I/O Cable 44-pin to 15-pin...................................................................................121
Figure E.1. Common Scan Head Designs................................................................................................122
Figure E.2. RHK UHV300/700 High Voltage Block...................................................................................123
Figure E.3. RHK UHV350/750 High Voltage Block...................................................................................123
Figure E.4. RHK UHV900 High Voltage Block..........................................................................................124
Figure F.1. The Approach Procedure Panel .............................................................................................126
Figure F.2. STM Beetle Approach Procedure Panel ................................................................................127
Figure F.3. AFM/STM Beetle Approach Procedure Panel........................................................................128
Figure F.4. Beetle Single Step In Procedure ............................................................................................129
Figure F.5. Beetle Slow Approach Procedure...........................................................................................130
Figure I.1. RHK UHV300 STM IHL ...........................................................................................................135
Figure I.2. Scan Processor Connection to High Voltage Block.................................................................136
Figure I.3. Setting Gain in Feedback Mode ..............................................................................................138
Figure I.4. Hardware Watcher in PLL........................................................................................................140
Figure I.5. Fast Sweep Abort ....................................................................................................................141
Figure I.6. Settings for Fast Sweep Abort.................................................................................................141
Figure I.7. 'Yes/No' Message Box.............................................................................................................142
Figure I.8. Play a Sound with Message Box Notification ..........................................................................143
Figure I.9. Simplified R9 Controls .............................................................................................................144
Figure J.1. Creating a Procedure..............................................................................................................145
Figure J.2. New Procedure Space............................................................................................................146
Figure J.3. Connecting Components in Hardware Space and Procedure Space.....................................147
Figure J.4. Selecting a Wire......................................................................................................................148
Figure J.5. Using the Arranging Pins ........................................................................................................148
Figure J.6. Deleting a Wire........................................................................................................................149
Figure J.7. Pulse Tip template ..................................................................................................................149
Figure J.8. Pulse Tip - set first Activate to CH1 Drive...............................................................................149
Figure J.9. Pulse Tip - CH1 Drive Properties............................................................................................150
Figure J.10. Pulse Tip - Hiding CH1 Drive Properties ..............................................................................151
Figure J.11. Pulse Tip - Setting the CH1 Drive Pulse Rise.......................................................................152
Figure J.12. Pulse Tip - Setting the Pulse Duration..................................................................................152