SUSS CIC1200 User manual

USER MANUAL
Constant Intensity Controller
CIC1200
Rev4.0/ 06-09
www.suss.com

DISCLAIMER AND PUBLISHING DETAILS
DISCLAIMER I
i
Disclaimer and Publishing Details
Information provided within this document is subject to change without notice, and although believed to be
accurate, SUSS MicroTec assumes no responsibility for any errors, omissions, or inaccuracies.
The information included in this manual is SUSS MicroTec Proprietary Information and is provided for the
use of SUSS MicroTec’s customers only and cannot be used for distribution, reproduction, or sale without
the express written permission of SUSS MicroTec. This information may be incorporated into the user’s doc-
umentation, however any changes made by the user to this information is the responsibility of the user.
If you have any questions or remarks about this manual, please contact:
SUSS MicroTec Lithography GmbH
Schleißheimer Str. 90
D 85748 Garching
Tel.:[phone]
Fax: [phone]
www.suss.com
This manual is available in the following formats: Cleanroom Printed and CD-ROM.
Printed in Europe.

DISCLAIMER AND PUBLISHING DETAILS
II DISCLAIMER
i

CONTENTS
CIC1200 - Contents Rev4.0 06-09 ORIGINAL DOCUMENTATION I
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CONTENTS
1. Warnings and Safety Precautions ......................................................................1
1.1. Intended Use of the CIC1200 .........................................................................1
1.2. User Requirements .........................................................................................1
1.3. Safety-Related Terms and Symbols ...............................................................1
1.4. General Electrical Safety Precautions ............................................................2
1.4.1. Fuse Replacement................................................................................2
1.5. Emergency Off and Safety Interlocks ..............................................................3
1.6. Additional Warnings and Safety Precautions...................................................4
1.6.1. Other Electrical Hazards.......................................................................4
1.6.2. Hazards Caused by High Pressure Lamps...........................................4
1.6.3. Eye and Skin Protection........................................................................6
2. Technical Specifications CIC1200 ......................................................................7
3. Program Parameters ............................................................................................9
4. Operating Procedures .......................................................................................11
4.1. CIC1200 Front Panel ....................................................................................11
4.1.1. The Annunciator Group FAILURE .....................................................12
4.2. CIC1200 Rear Panel......................................................................................13
4.3. Power Supply Stand-by .................................................................................14
4.4. Selecting the Exposure Lamp ........................................................................14
4.4.1. Reset Lamp Hours..............................................................................15
4.5. Operating Modes ...........................................................................................16
4.5.1. Operating Mode CP ............................................................................16
4.5.2. Operating Mode CH1..........................................................................16
4.5.3. Operating Mode CH2..........................................................................16
4.6. Standard Operation........................................................................................17
4.6.1. Ignition of the Exposure Lamp ............................................................17
4.6.2. Idle Mode ............................................................................................18
4.6.3. Power Setting for Exposure Lamp (CP-Mode) .................................19
4.6.4. Change Display...................................................................................20
4.7. Calibration Modes of the Power Supply.........................................................21
4.7.1. Basics .................................................................................................21
4.7.2. Calibration Procedure with the Built-in UV-Meter ...............................21
4.7.3. Calibration Procedure with External UV-Meter ...................................22
4.7.4. Additional Functions of Calibration Menu ........................................23

CONTENTS
II CIC1200 - Contents Rev4.0 06-09
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4.8. Constant Intensity Mode (CI Mode) ............................................................25
4.8.1. Set Light Intensity Level (CI Mode) .....................................................25
4.9. Calibration of the Built-In UV Intensity Meter .................................................26
4.10. Additional Functions.....................................................................................27
4.10.1. Full Reset..........................................................................................27
4.11. Switching Off the Lamp ................................................................................27
5. Maintenance and Service ...................................................................................29
5.1. Maintenance ..................................................................................................29
5.2. Error Messages .............................................................................................29
5.3. Service and Installation .................................................................................31
5.3.1. Installation...........................................................................................31
5.3.2. Service and Technical Assistance ......................................................31

WARNINGS AND SAFETY HAZARDS
OP CIC1200 E Rev4.0 06-09 Chapter 1 1
1
1. WARNINGS AND SAFETY PRECAUTIONS
This manual contains information
which the user must know and under-
stand to eliminate or reduce the risk of
accidental injuries.
1.1. Intended Use of the
CIC1200
The Constant Intensity Controller CIC1200 is a
smart power supply / regulator for high pressure UV
lamps intended for sole use with SUSS equipment
and machinery.
The CIC1200 must be integrated into the SUSS
equipment (see 5.2.Service and Installation) and
shall only be used with the specified lamp houses
and lamps. (see 2. Technical Specifications
CIC1200).
A variety of lamp houses with specific ignition
units specifically matched to the different lamps can
be supplied by SUSS MicroTec.
The CIC must not be operated until the final machin-
ery into which it is to be incorporated has been com-
pleted and declared as in conformity with applicable
safety provisions.
Any other use or modification of the CIC, the ignition
unit or the original SUSS lamp house has to be ver-
ified in advance with SUSS MicroTec Lithography.
Otherwise the safety of the system can not be en-
sured.
1.2. User Requirements
Safe operation and maintenance of the CIC requires
experience and training related to work with high
pressure UV exposure lamps and equipment. This
training is provided as part of the training program of
the SUSS equipment or machinery the CIC is inte-
grated in.
Additional training can be provided on request.
The CIC does not contain any user serviceable parts
(see 5.2.Service and Installation).
Maintenance is limited to calibrations and settings
on the system.
As additional precautionary notice, please be aware
of the inherent risks of UV radiation, high pressure
lamps containing mercury and high voltage as being
present in the lamp house of the SUSS equipment or
machinery.
Personnel protection equipment will be required and
shall be readily available, e.g. mechanical safety
goggles (according to EN166) or face shield for han-
dling of UV-lamps, optical safety glasses filtering
UV-radiation (according to EN170, SUSS service
technicians prefer part #185245) and skin protection
against UV light.
1.3. Safety-Related Terms and
Symbols
The terms Danger, Warning, Caution and Note are
used in these instructions to point out particular haz-
ards or important information:
•Danger indicates an imminently hazardous
situation which, if not avoided, will result in
death or severe injury as well as substantial
damage to property or the environment.
•Warning indicates a potentially hazardous
situation which, if not avoided, could result in
death or severe injury as well as substantial
damage to property or the environment.
•Cautionindicates a potentially hazardous sit-
uation which, if not avoided, could result in mi-
nor injury, moderate injury, or product or
property damage.
•Note draws attention to special technical
product information which may not be imme-
diately obvious.

WARNINGS AND SAFETY HAZARDS
2OP CIC1200E Rev4.0 06-09 Chapter 1
1
The following hazard alert label and symbols are
used:
The CIC is equipped with a rating plate on the rear
side and the warning symbol regarding electrical
shock as hazards.
1.4. General Electrical Safety
Precautions
The CIC is designed according IEC/EN/UL 61010-1.
Hazardous voltages are present at connectors and
inside the power supply as well as at the ignition unit
or inside the lamp house.
The CIC shall only be serviced by qualified SUSS
technicians. There are no user related Type 3 or
Type 4 tasks (referring to SEMI S22).
Do not attempt to open, modify or alter the CIC.
Use of unapproved components can result in fire or
electric shock.
Warning!
Never open covers of the CIC, the igni-
tion unit or the lamp house while the
power line is connected. The CIC and
ignition unit do not contain user ser-
viceable parts.
Voltage is still present to the CIC when
the host machine (e.g. mask aligner) is
deactivated but in „stand by“.
1.4.1. Fuse Replacement
Where necessary, deactivate and lock-off the host
machine and remove machine covers or panels to
access the rear of the CIC (see 4.2. CIC Rear Pan-
el).
With some of the host machines it may be necessary
to move the CIC. Disconnect the supplying appli-
ance coupler, remove clamps and fixings and where
necessary remove other connectors. Then carefully
move and lift the equipment.
Warning!
Heavy object! Never move or lift with
one person only. Get help, use proper
lifting aids and ensure safe standing
postures.
Open and remove the fuse holder clip.
Replace the fuses only of the same type and with the
same load as the replaced fuse (see 2. Technical
Specification CIC1200).
If any problem occurs with the power supply, turn the
equipment off and notify your supervisor or mainte-
nanceimmediately.
Electric Shock Hazard Warning
Intensive Light + Potential Eye and
Skin Damage Warning
Invisible Ultraviolet Light
General Warning Symbol (always
with Explanation)
Wear Appropriate Safety Goggles -
Action Symbol
Lift with Two Persons
Read Manual

WARNINGS AND SAFETY HAZARDS
OP CIC1200 E Rev4.0 06-09 Chapter 1 3
1
1.5. Emergency Off and Safe-
ty Interlocks
SUSS lamp houses and machinery (e.g. mask align-
ers) are equipped with safety related interlocks ac-
cording to there inherent risks.
Such interlocks may consist of door locks, door
switch, flow monitoring device and EMO functions.
These interlocks can switch off the CIC and / or con-
trol the CIC status using signal or power line connec-
tions to the CIC. The EMO of the host machine shall
switch of the power line to the CIC via contactor or
safety relay.
A sample of a safety circuit is shown below. For fur-
ther details refer to the manuals of the host machine
or contact SUSS service.
Lamp House Door Interlock
Sample from SUSS MA/BA8:
Opening the lamp house door will immediately open
the door switch, effectively turning off the CIC power
supply the same way as by activation of the EMO
button. The EMO-relay K6.3 will switch off the CIC
main power.
Warning!
Never defeat safety interlocks or EMO
between
the CIC and the lamp house or ma-
chine!
L1
power supply
24VDC 10Amp
for detail information
see schematic diagram
sheet 6
L1
+-
-T2.1
10A
-F2.1
2AT
-F5.1
CIC
A1
S11 S12 S34 S33
EMO Relay
-K6.3
21
22
+11
-S6.1
13
14
Interlock connector CIC
N
PE
CIC 1200
23
24
-K6.3
33
34
1
2
3
4
5
6
-K5.1
1
2
3
4
5
6
-K5.2

WARNINGS AND SAFETY HAZARDS
4OP CIC1200E Rev4.0 06-09 Chapter 1
1
1.6. Additional Warnings and
Safety Precautions
These additional warnings and safety precautions
are related to hazards originated by the host ma-
chine (e.g. mask aligner). The CIC is intended to be
incorporated into. They shall be regarded as a short
form and general information only.
Warning!
For details refer to the manuals of the
specific host machine.
Fail to comply with safety precautions
stated in those manual may result in se-
vere injury as well as substantial dam-
age to property!
1.6.1. Other Electrical Hazards
Protection against electrical hazards is provided by
closed, grounded cabinets for the electrical devices.
The CIC, the ignition unit inside the Lamp House and
the lamp house shall only be serviced by qualified
SUSS technicians.
User related Type 3 or Type 4 tasks may be involved
(referring to SEMI S22).
The voltages and currents required to run a high
pressure lamp are hazardous. The ignition voltage
generated in the ignition unit of the lamp house rises
up to 20-30KV and the open circuit potential can
range to some 100V.
When performing any maintenance on the UV-lamp
or lamp house, always make sure that the power line
is disconnected and locked-off at the energy isola-
tion device.
The voltage applies to the lamp must comply with
the lamp manufacturers recommendations, other-
wise an explosion may occur. Also correct lamp ori-
entation is crucial (see lamp data sheets and SUSS
machine manuals for proper lamp orientation).
Warning!
The ignition unit is a complex electrical
component producing high voltage
pulses for lamp ignition. Repair must
be done by SUSS trained experts only.
Using unapproved parts can result in
fire or electrical shock.
Never open covers of the CIC, the igni-
tion unit or the lamp house while the
power line is connected.
Danger!
High voltage! The lamp operates
(starts) under high voltage. Voltage is
still present to the CIC when the host
machine (e.g. mask aligner) is switched
off, but in „stand by“.
All power to the systems must be com-
pletely disconnected before servicing
CIC or the lamp house.
1.6.2. Hazards Caused by High
Pressure Lamps
Special precautions must be taken when working
with these high-pressure mercury lamp lamps.
1.6.2.1. Safe Handling of the UV Lamp
The UV lamp has a limited life time and is sensitive
to rough handling. Therefore it is seen as a consum-
able.
Lamp exchange can be done by qualified and
trained users, when working at a fully de-energized
„electrical cold“ equipment.
Due to the mercury content, used lamps must be re-
garded as hazardous waste and shall be disposed
off accordingly (following local rules and law for Hg
waste).
Refer to the specific lamp data sheet and safety in-
structions (a sample is attached at the end of this
manual).
Lamps may fail because of improper cooling, im-
proper settings of the power supply, usage outside
the manufacturer’s guidelines, temperature shocks
and others.
The CIC power supply is equipped with an operating
hour meter to control the lamp lifetime. Lamp duty
overrun will cause not only degradation of lamp per-

WARNINGS AND SAFETY HAZARDS
OP CIC1200 E Rev4.0 06-09 Chapter 1 5
1
formance but will increase the risk for lamp explo-
sion (see section „Reset Lamp Hours“ for proper use
of this hour meter).
Caution!
When changing the type of lamp ensure
that the proper type will be selected at
the CIC.
The lamp becomes extremely hot dur-
ing operation and needs time and con-
tinued cooling to cool down when
switched off.
UV exposure lamps are under high pressure, rup-
tures or explosions could occur resulting in potential
injury from fragments and exposure to mercury.
Some high pressure lamps, even when cold, are still
above atmospheric pressure and must be handled
with protective goggles or face shields and gloves.
Warning!
Fragments of an exploding UV lamp
could severely injure eyes or body
parts.
An UV lamp not enclosed in the original
manufacturer’s box must be handled
only with gloves and face shield or by
mechanical safety goggles!
Harsh handling of the lamp or prema-
ture opening of the hot lamp house may
result in lamp explosion.
Safety instructions of the lamp manu-
facturer must be followed (see also re-
spective instructions in SUSS machine
manuals and in lamp data sheets)
1.6.2.2. In Case of Lamp Explosion
The UV lamp contains a small amount of toxic mer-
cury (Hg) (for lamps from 200W to 1000W the con-
tent may be between 0,1 g and 1,0 g Hg).
If an UV lamp breaks or bursts it spills mercury, liq-
uid when cold and vaporized when hot.
After lamp breakage immediate decontamination is
mandatory, because mercury represents a potential
serious threat to health and pollutes the environ-
ment.
Follow recommended standard procedures for de-
contamination and cleanup.
If an explosion of a hot lamp happens, the mercury
content will be blown away as vapor. Ensure proper
exhaust and ventilation and follow recommended
standard procedures.
All debris as well as the materials used in the clean-
up may classify as hazardous waste and shall be
disposed off accordingly (following local rules and
law for Hg waste).
Warning!
Mercury is very toxic. Incorporated
mercury can result in chronic heavy
disease. Incorporation is typically pos-
sible by extended exposure to mercury
vapors, which will be a result of spilled
and then hidden mercury.
1.6.2.3. Cooling and Exhaust Require-
ments
UV lamps generate extensive heat as well as ozone.
Ventilation, cooling and exhaust must be ensured.
Especially the lamp sockets are susceptible to over-
heating. Socket cooling by a directed flow of nitro-
gen is required for 350W and higher.
Lamps of 500W and higher wattage must be ex-
hausted using exhaust pipes or ducts with forced
ventilation.
A small amount of ozone can be produced by the in-
teraction of UV radiation with the oxygen of the air.
Under normal operating conditions remains well be-
low the acceptable threshold limit value (MAC/TLV).
Nevertheless lamps up to 350W power shall only be
operated in well ventilated areas. Higher wattage
lamps must be exhausted for cooling purposes,
ozone concentrations are also limited by this ex-
haust.

WARNINGS AND SAFETY HAZARDS
6OP CIC1200E Rev4.0 06-09 Chapter 1
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1.6.3. Eye and Skin Protection
The high energy of the ultraviolet (UV) light pro-
duced by these lamps can cause severe eye dam-
ages, skin burns and skin cancer. Unprotected
exposure to strong visible or infrared light may
cause injuries as well.
Every SUSS machine (e.g. mask aligner) is
equipped with light guards, enclosing UV lamp and
exposure path. The equipment shall not be operated
unless all of these protective covers and devices are
in place.
Personnel entrusted with the adjustment of the UV
lamp should wear eye and skin protection against
UV radiation during such work.
Warning!
Invisible high energy UV light may se-
verely
damage your eyes or skin.
Do not work with UV light if shielding
covers of the light beam are detached -
or wear UV protecting goggles (see
section Personal Safety Equipment)
and cover your skin.

TECHNICAL SPECIFICATIONS
OP CIC1200 E Rev4.0 06-09 Chapter 2 7
2
2. TECHNICAL SPECIFICATIONS CIC1200
Operating Mode: Single channel constant power
Independent dual channel constant intensity. Remote control
Output Power: LH200 or NFH: 200W; LH350: 750W;
LH1000/ LH1500: 1200W maximum continuous.
Output Voltage: 380V DC open circuit (max)
Output
Regulation:
+/- 1% over selected mains input range
Lamp Ignition: 20kV start with automatic shut down following ignition.
Active current limit during warm-up.
Remote start unit with polarity switch. Single pulse ignition.
Mains Input: 230V +/- 10% 50/60 Hz; L+N+PE or L1+L2+PE
max. power: 1600W
Exchangeable fuses in rear panel: 2x 10A slow-blow, 5x20 mm.
Optical Sensor:
(for CI-mode)
Dual channel using silicon photodiodes with thin film dielectric or selected glass
absorption filters for 220, 240, 320, 365 and 405 nm wavelengths.
Optical Control:
(for CI-mode)
Digital meter: 0 - 100mW/cm2 front panel channel selected. Front panel level
set and UV-probe calibration.
Size:
without remote start unit
Length: 540 mm [21,25“]
Width: 260 mm [10,25“]
Height: 152 mm [6,0“]
Weight:
without remote start unit
21 kg (46 lbs)
Ambient Conditions • Preferred application in clean room class 10000 or better
• Environmental limits: indoor use only,
Temperature range: +5°C to +40°C (storage and transport condition: -10°C
to +50°C)
Relative humidity: max. 80% non-condensing, up to 31°C, diminishing to 50%
at 40°C,
• Altitude max. 2000 m

TECHNICAL SPECIFICATIONS
8OP CIC1200E Rev4.0 06-09 Chapter 2
2
Other lamp types or lamp house configurations, e.g.
for Near Field Holography (NFH), only by or with
written consensus of SUSS MicroTec
Approved Lamp
Types for CIC1200 Manufacturer Type Part Number (SUSS)
Usable with
SUSS Lamp
House (LH)
200W Hg Osram HBO 200W/DC 191806 LH250, LH350,
LH1000, LH1500
Ushio USH - 250 S 169722 LH NFH
350W Hg Osram HBO350W/S 146049 LH350, LH1000,
LH1500
Ushio USH - 350 D 182538 LH350, LH1000,
LH1500
500W Hg Osram HBO 500W/B 188816 LH350, LH1000,
LH1500
500W Hg-Xe
(Deep UV)
Ushio UXM 501 MD 148979 LH350, LH1000,
LH1500
1000 W Hg Osram HBO 1000W/D 148959 LH1000, LH1500
Ushio USH - 1000 KS 169776 LH1000, LH1500

PROGRAM PARAMETERS
OP CIC1200 E Rev4.0 06-09 Chapter 3 9
3
3. PROGRAM PARAMETERS
for the CIC1200 for the various types of
exposure lamps.
(valid for software revisions > 2.10)
Legend:
Pmin [W] Minimum lamp power to run the
exposure lamp
Pnom [W] Rated power of the exposure lamp
Pmax [W] Maximum power to run the
exposure lamp
Pidle [W] Idle power to run the exposure lamp
while machine in idle mode, no
exposures. (valid only for software
versions < 2.00)
Lamp Life [h] Recommended life time of the
exposure lamp. If this value is
reached the LED adjacent to LAMP
LIFW in the annunciator group
FAILURE flashes.
(see also: 4.4.1. Reset Lamp Hours)
Tdelay [s] Time necessary for the lamp to cool
after power has been switched off.
During this period of time the lamp
cannot be started.
Left alphanumeric display shows
message COOL.
Right alphanumeric display shows
time left before exposure lamp can
be restarted.
Note:
During the cool down period
no function of the CIC is accessible.
N2 time [s] If the N2-pressure for cooling the
lamp socket falls below the preset
lower limit or the exhaust flow is too
low, the lamp will be switched off
after this time - caused by an inter-
lock signal from the machine to CIC.
The corresponding alarm message
starts immediately and continues
also after lamp has switched off.
Lamp Type [W] Pmin[W] Pnom[W] Pmax[W] PIdle[W] Lamp Life [h] Tdelay [s] N2 time [s]
200 Hg 150 200 250 195 1000 300 300
350 Hg 250 350 430 325 600 600 300
500 HgXe 350 500 750 475 600 600 180
500 Hg 400 500 600 475 600 600 180
1000 Hg 800 1000 1200 950 1000 900 180

PROGRAM PARAMETERS
10 OP CIC1200E Rev4.0 06-09 Chapter 3
3

Condensed Operation Instructions
Operation
Functionality
Press Key For Time in
Seconds
Additional
Key
Left Display
LIGHT INTENSITY
[mW/cm2]
Right Display
LAMP POWER
[W]
Store with
Key
Remarks
Choose Lamp (CIC is OFF) Display shows STAND BY
SET LAMP T > 1s + or -
+ or -
Lamp Type e.g.
LAMP
STOR
L:RE
NOS
STO
350 ED SET? TORE RED
SET LAMP SET LAMP
After the confirmation of the lamp type the display shows L:RESET? (lamp hours: reset?) To leave the lamp life in memory confirm with SET LAMP. To erase press + or - and confirm with SET LAMP
Power ON ON SÜSS
-REA
X.XX DY----
SW-revision
Display Lamp Hours CHANGE DIS-
PLAY
XHRS
Choose Constant Power-Mode
CP WAIT
=>> S
..... TART
Ignite Lamp START IGNI
LAMP
XXXX
TION COLD XXXX
Light Intensity and Power
Adjust Power SET POWER T > 1s + or - XXXX XXXX (blinks) SET POWER Switch CIC to IDLE- POWER (Vers.<2.00)
IDLE T > 1s IDLE XXXX Leave this mode with
IDLE or CP
Calibration of Channel 1 (UV-PROBE-Input)
1x CALIB T > 1s + or -
START
xxxx
AVER
XX,X
STO
UVP1 0.....17 (blinks) XXXX % RED
CALIB
Calibration of CHannel 2 (UV-PROBE-Input)
2x CALIB T > 1s + or -
START
XXXX
AVER
XX.X
STO
UVP2 0.....17 (blinks) XXXX % RED
CALIB

Condensed Operation Instructions
Operation
Functionality
Press Key For Time in
Seconds
Additional
Key
Left Display
LIGHT INTENSITY
[mW/cm2]
Right Display
LAMP POWER
[W]
Store with
Key
Remarks
Calibration of Channel 1 (with manu- ally assigned values)
3x CALIB T > 1s + or -
START
CAL
(blinks) XXXX
STO
EXT1 XXXX RED
CALIB
Calibration of Channel 2 (with manu- ally assigned values)
4x CALIB T > 1s + or-
START
CAL
(blinks) XXXX
STO
EXT2 XXXX RED
CALIB
Adjust Intensity: Channel 1 and Chan- nel 2 (CP-Mode or CH1 or CH2-Mode)
CHANGE DISPLAY SET CH1/ CH2
T > 1s
+ or - (blinks) XXXX XXXX
SET CH1/ CH2
Switch the green LED in annunciator group DIS- PLAY with CHANGE DISPLAY from Channel 1 to Channel 2
Choose Constant Intensity Mode (CI- MODE)
CH1 or CH2
XXXX XXXX Calibration and adjust-
ment of intensity (Set CH1/CH2) has to be done before
Adjustment of Light sensor input Channel 1
5x CALIB
T > 1s START XX%
S10K S10K CALIB
Adjust max. 95% with max. lamp power
Adjustment of Light sensor input Channel 2
6x CALIB
T > 1s START XX%
STO
S20K S20K RED CALIB
Adjust max. 95% with max. lamp power
Measurement with UV- Probe input
7x CALIB
T > 1s START XXXX
UVPR UVPR
Exit with CALIB Display shows FINISH
Erase calibration data for CH1
8x CALIB
T > 1s START
START
CAL1 CAL1
DONE
STO
RES RES? RED
CALIB
Erase calibration data for CH2
9x CALIB
T > 1s
CAL2 CAL2
DONE
STO
RES RES? RED
CALIB
Leave calibration menu 10x CALIB T > 1s START EXIT Reset Error Messages RESET T > 1s

OPERATING PROCEDURES
OP CIC1200 E Rev4.0 06-09 Chapter 4 11
4
4. OPERATING PROCEDURES
4.1. CIC1200 Front Panel
Annunciator Groups (1,2,3,4)
1. Annunciator Group LAMP TYPE
2. Annunciator Group DISPLAY
3. Annunciator Group FAILURE
4. Alphanumeric Display for LIGHT INTENSITY
and LAMP POWER
5. Key Pad (see Section Key Controls)
6. Socket for UV Probe (see Section Calibration of
the CIC)
135
6
24

OPERATING PROCEDURES
12 OP CIC1200E Rev4.0 06-09 Chapter 4
4
4.1.1. The Annunciator Group
FAILURE
4.1.1.1. Lamp Life/ Power
The lamp life LED flashes - indicating that the
lamp shall be replaced. This can be caused by
one of two reasons:
• The actual value of voltage, current or power
- necessary to achieve the programmed out-
put - has reached the specified parameter
limit.
An acoustic warning (beep) will also sound.
The display message will read respectively:
VOLT ERR or
CURR ERR or
PWER ERR
Immediate counter measures are required to
prevent damage; for recommended action
see the introducing section of chapter 5.1. Er-
ror Messages.
• The lamp has reached its recommended op-
erating life (controlled by the CIC’s operating
hour meter). The lamp should be replaced as
soon as possible
For more details see also section 4.4.1 Reset
Lamp Hours.
Caution!
If the lamp life LED begins to flash dur-
ing normal operation, the UV-lamp
should be turned off and replaced to
prevent explosion!
Refer to the Operator’s Manual of the
machine for instructions on lamp re-
placement.
Note:
As long as the display shows LAMP COLD the
flashing LED can be ignored.
4.1.1.2. Interlock N2
•IftheN
2flow rate is too low the Interlock N2LED
will flash. If left uncorrected the lamp will auto-
matically be turned off to prevent lamp failure. Af-
ter the lamp has been turned off the alpha
numeric display will read: N2 ERR
4.1.1.3. Interlock
• The interlock LED can indicate multiple interlock
failures. The specific cause of failure will be indi-
cated in the alphanumeric display.
4.1.1.4. Temperature
• If for some reason the temperature within the unit
reaches a certain limit the unit is shut off immedi-
ately. The corresponding LED of the annunciator
is ON and the alphanumeric display reads:
TEMP ERR
4.1.1.5. Sensor Overflow
• This LED indicates that there is an error in the
light monitoring and control system. Contact your
SUSS MicroTec Service representative.
(see also section 4.7.4)