Toyota IPUP T100L User manual

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Date: 2006/12
Instruction Manual
IPUP T100L, EC100L
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IPUP T100L V3.4
EC100L V2.1

IPUP T100L / EC100L Instruction Manual
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Dear Customers:
Thank you for purchasing IPUP T100L / EC100L dry vacuum pumps manufactured by TOYOTA
INDUSTRIES CORPORATION. Please read through this manual for ensuring correct operation
and handling and for ensuring a long service life.

IPUP T100L / EC100L Instruction Manual
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INDEX Page
1. INTRODUCTION 6
1-1. Scope 7
1-2. Description 8
1-3. Technical Data 9
1-3-1. Technical data table 9
1-3-2. Technical data drawing 10
1-4. CE marking certificate 14
1-5. SEMI S2 certificate 15
2. SAFETY 16
2-1. General 17
2-2. Identified label symbols 17
2-3. Safety Instruction 18
2-3-1. Power supply 18
2-3-2. EMO system 18
2-3-3. Safety sensors 18
2-4. Safety Precaution 19

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INDEX Page
3. INSTALLATION 22
3-1. General 23
3-2. Unpacking Precaution 23
3-3. Moving procedure 24
3-3-1. Hoisting the pump to move 24
3-3-2. Moving the pump 25
3-4. Installation Procedure 27
3-4-1. Installation precaution 27
3-4-2. Pump positioning method 28
3-4-3. Method of fixation 29
3-4-4. When using two vertically stacked pumps 30
3-5. Connection to the pumping circuit 31
3-6. Electrical connection 32
3-6-1. Precaution 32
3-6-2. Power source 32
3-6-3. Electrical connection method 33
3-7. Signal 34
3-7-1. Outline 34
3-7-2. SPI connector wiring 34
3-7-3. SPI Pin assignment 35
3-7-4. External output for monitoring system 36
3-8. Cooling water 37
3-8-1. Specification of cooling water 37
3-8-2. Connection of cooling water 38
3-9. Operation condition setting 39
3-9-1. Initial setting 39
3-9-2. Setting items 39
3-10. Pump storage 40

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INDEX Page
4. OPERATION 41
4-1. Indication 42
4-2. Main Switch 43
4-3. Operation Method 44
4-4. Control by SPI 45
4-4-1. SPI connection 45
4-4-2. Adjustment before operation 45
4-4-3. Pump running with SPI 45
4-5. Control by Hand-held controller 46
4-5-1. Hand-held controller connection 46
4-5-2. Key functions 46
4-5-3. Operation by hand-held controller 46
4-5-4. Display Menu 47
4-6. Changing Operation Modes 48
4-6-1. Changing from local to remote mode 48
4-6-2. Changing from remote to local mode 48
4-7. Setting 49
4-7-1. Alarm Log 49
4-7-2. Updating Clock 50
4-7-3. REMOTE/LOCAL mode setting 51
4-7-4. Operation condition setting 52
4-7-5. Other function setting 54

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INDEX Page
5. TROUBLESHOOTING 60
5-1 Pump does not start 61
5-2 Error message 62
5-3 Pump is running and no error messages are indicated 64
6. MAINTENANCE 65
6-1 General 66
6-2 Overhaul Maintenance Intervals 66
6-3 Pump Removal & Return Procedure 67
6-4 Pump Disposal 68
6-5 Application Form for Pump Return 69
7. APPENDIX 70
7-1. Electrical Circuit Diagram 71
7-2. Cooling Diagram 72
7-3. Material Safety Data Sheet 73
7-3-1. Lubricant 73
8. EC100L V2.1 APPENDIX 82
8-1. Scope 82
8-2. Technical Data drawing 83
8-3. Moving Procedure 87
8-4. Electrical Circuit Diagram 89

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1. INTRODUCTION Page
1-1. Scope 7
1-2. Description 8
1-3. Technical Data 9
1-3-1. Technical data table 9
1-3-2. Technical data drawing 10
1-4.CE marking certificate 14
1-5.SEMI S2 certificate 15

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1. INTRODUCTION
1-1. Scope
This manual covers the IPUP T100L, EC100L dry vacuum pump for semiconductor equipment.
These pumps are suitable for loadlock, transfer chamber and all other clean process.
Inlet NW50 ISO KF
Exhaust NW25 ISO KF
Cooling water in
Cooling water out
Handheld
controller
RS232C
connector
Adjuster
SPI connecto
r

Power supply
connector
Power switch

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Gear

Bearing
Motor
Inlet
Exhaust
Ceramic
bearing
Pump
L.P. side
H.P.
1. INTRODUCTION
1-2. Description
The IPUP T100L / EC100L is a roots type vacuum pump that rotates a pair of
synchronized, timing gears. The pump is driven by a 3-phase induction motor. Bearings
and gears on the high pressure side are lubricated by fluoric type oil. Nitrogen is not
required for shaft seals. Ceramic balls are used in the bearings on the low pressure side
which are lubricated by fluoric type grease. The pump and motor are equipped with an
indirect cooling system.
This product has following features including high reliability and low running cost in
addition to low power consumption taking the global ecology into account and
specifications that ensure customer satisfaction.
IPUP T100L V3.4 features:
- ATL listing
- Automatic restart in case of 1second power loss
- Low power consumption. (1.3 kW)
- RoHS Compliance
EC100L V2.1 features:
- ATL listing
- 0.55 kW, 58% reduced power consumption. (vs IPUP T100L V3.4)
- RoHS Compliance

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1. INTRODUCTION
1-3. Technical Data
1-3-1. Technical data table
1) The lubricant is added to the appropriate level at the factory. Never change the lubricant
level.
2) Cooling water should satisfy water quality standard of Japan Refrigeration and Air
Conditioning Industry Association. Refer to “3-8-1characteristics of cooling water”
3) Voltage tolerance: ±10%
The above utilities are required for the pump. Be careful as
performance and reliability are not guaranteed unless the
requirements listed are satisfied.
Item Unit IPUP T100L EC100L
Dimensions
(LxHxW) mm 590×300×280 590×300×280
Dimensions and
weight Weight kg 105 104
Maximum revolution
(Default rpm setting)
r/min 5250 4650
m3/h 100
Peak
pumping speed l/min 1670
Pa 1.2
Ultimate pressure
(at Default rpm
setting) Torr 0.009

Power consumption
at ultimate pressure
kW 1.3 0.55
MＰａ 6.67×10-3Maximum continuous inlet pressure
(at Default rpm setting) Torr 50
Noise level （at ultimate pressure）dB(A) <55
Lubricant quantity cm3110(1)
Inlet flange NW50
Exhaust flange NW25
Ambient temperature °C 15 to 30
Environment Humidity % Max 90 (no condensation)
Pollution degree 2
UL classification
Installation Category II
Connector Inch 1/4
Type Non-corrosive industrial water or treated soft
water(2)
Flow Rate L/min Min. 1.5
kPaG Min300 Max700
Supply pressure Bar Min3.0 Max7.0
Cooling
water
Temperature °C 10 to 25
Number of phases 3
Input voltage V 208(3)
Frequency Hz 50/60
Full load current A 12
Utility
Power
supply
Max. power capacity kVA 4.6

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1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing
IPUP T100L Dimension Diagram
Unit: mm
3 73.5
107208.5
22
257
136
280
280
78
300 27.5
274
25
230
420
85
25
190
310
45
590
105
45.4
21.8

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1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Position of IPUP T100L center of gravity
Weight distribution at adjusters
1 (kg) 2(kg) 3 (kg) 4 (kg)
25.5 31.7 24.4 22.4

Unit: mm
Position of pump center of gravityPump
weight (kg) L (mm) W (mm) H (mm)
104 263 146 151
L
H
W
4
3
2
1

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1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Dimensions for two horizontally installed IPUP T100L pumps
Unit: mm
22 235
136
3
73.5
208.5
374.5
509.5
590
21.8
45.4
300
601
575
274
530
218
Top View
530
216
Bottom
Positions of stacking brackets
280

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1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Position of center of gravity for two horizontally installed IPUP T100L pumps
Unit: mm
Weight distribution at adjusters
1 (kg) 2 (kg) 3 (kg) 4 (kg)
51 63.4 48.8 44.8
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Position of pump center of gravityPump
weight (kg)
L (mm) W (mm) H (mm)
208 263 146 301

L
H
W
2
1
3
4

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1. INTRODUCTION
1-4.CE marking certificate


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1. INTRODUCTION
1-5.SEMI S2 certificate


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2. SAFETY PRECAUTION Page
2-1. General 17
2-2. Identified label symbols 17
2-3. Safety Instruction 18
2-3-1. Power supply 18
2-3-2. EMO system 18
2-3-3. Safety sensors 18
2-4. Safety Precaution 19

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2. SAFETY PRECAUTION
2-1. General
A dangerous voltage for the human body is used inside the IPUP T100L / EC100L.
Improper operation may possibly result in a serious accident. Thoroughly read this
manual to prevent accidents before using the product.
2-2. Identified label symbols
Observe important safety precautions which are clearly identified by WARNING or
CAUTION symbols.
Wear various protective gear when operating the product and comply with all
warnings and dangers indicated by the following symbols.
A hazard that causes an accident resulting in injury or
damage to the process.
CAUTION
A hazard related to electrical that cause injury or death if
you don’t follow these rules.
WARNING
A hazard that could cause injury or death if you don’t follow
the rules.
WARNING
A hazard related to temperature that causes injury or death
if you don’t follow these rules.
WARNING
Refer to the references and follow the instructions.

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2. SAFETY PRECAUTION
2-3. Safety Instruction
2-3-1. Power supply
IPUP T100L / EC100L are not provided with a 10000 AIC main circuit breaker. Supply
power to the pump from process tool with a 15 A max main circuit breaker. (in US UL489,
in Europe EN60947-2 approval)
Do not place pump where power-disconnecting devices become difficult to access.
2-3-2. EMO system
This product has no EMO device as it is designed as a built-in pump. The user is required
to install an EMO unit within 10ft travel from the pump, which shuts off the power.
2-3-3. Safety sensors
The IPUP T100L / EC100L pumps have a number of safety sensors to detect overload,
over-temperature of pump, over-temperature of motor, by these sensors.
Sensors Function
Circuit protector Overcurrent protection in case of overload
Thermistor for pump body Measurement and monitoring of pump body
temperature
Temperature switches for pump
motor Monitoring of motor over-temperature
Converter for pump Overcurrent protection in case of overload

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2. SAFETY PRECAUTION
2-4. Safety Precaution
Cautions related to safety are listed below.
The performance and safety of this product are guaranteed only when the
pump is operated within the parameter ranges specified herein.
Harmful voltage or current exists in the pump. When
working with the cover open, be sure to turn the pump main
switch off and disconnect the power cable to avoid getting an
electric shock.
WARNING
After turning the power off, voltages of 60 VDC or more
remain in internal parts such as the FC converter. When
operating with cover open, wait 30 sec. after turning the
power off. Also, wait 30 sec. when turning power on again.
WARNING
The circuit between the power supply connector and the main
switch remains live even after power is turned off. An
electric shock will occur if you touch the live area. Be sure to
disconnect the power cable.
WARNING
If any modification is made to the product by the customer,
performance and safety are not guaranteed. In such cases,
we will not be responsible for any failures.
WARNING
Only qualified, well-trained personnel can operate this product
with its cover open for installation or other reasons.
WARNING
The IPUP T100L / EC100L is designed for loadlock, transfer
chamber and all other clean chambers. Never use the
pump in processes using corrosive, explosive, poisonous or
flammable gases.
WARNING