Ulvac G-Tran Series User manual

No. SK00-8431-003-09
G-TRAN SERIES
MODEL IM1R1/IM2R1
4CH DIGITAL DISPLAY UNIT
INSTRUCTION MANUAL
This manual is for the display units of the following
serial numbers.
IM1R1:Serial No. 10134G and higher
IM2R1:Serial No. 01597 and higher
Read this manual before operation and keep it at hand
for immediate reference.
Components Division,
ULVAC, Inc.
2500 Hagizono, Chigasaki City, Kanagawa-ken, Japan
http://www.ulvac.co.jp/

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i
Prior to Use
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been
damaged during transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Symbols
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
WARNING
WARNING
CAUTION
WARNING
DANGER
WARNING
CAUTION

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Safety Precautions
In order to safely use the display unit (below, "this unit"), please read the instruction manual
and the safety precautions below.
Repair
Request repairs for this unit from the dealer where purchased, from
ULVAC Inc., or from the URL listed in this instruction manual.
Power off
If this unit is accidentally damaged, immediately turn off the power supply.
There is a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell, immediately
turn off the power supply. There is a risk of fire from use in this state.
High temperature warning
Do not touch the surface of the gauge head during operation or after
operating ends as it reaches high temperatures. There is a risk of burns if
touched.
Power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply power are the same. If the wrong power supply is connected,
there is a risk of damage to this unit and to devices connected to this unit and
a risk of fire. The overvoltage category is category I.
Power supply lightning surge handling
For the 24 VDC power supply, use a power supply that handles lightning
surges.
If the power supply does not handle lightning surges, there is a risk of damage
to this unit and to devices connected to this unit and a risk of fire.
Excessive vacuum chamber pressure
Do not connect this unit in a location where the gauge head's internal
pressure exceeds atmospheric pressure. If the gauge head's internal pressure
exceeds atmospheric pressure, there is a risk of damage to the gauge head
and it may pose a hazard to its surroundings, including to people, by flying
off its connector. When exceeding atmospheric pressure, install an isolation
valve to ensure that the gauge head's internal pressure does not exceed
atmospheric pressure.
Protective grounding
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected,
it will not only show the wrong pressure, there is a risk of damage to this unit and
the equipment connected to this unit and a risk of fire.
When this unit is insulated from the vacuum chamber, ground the case section
(D-sub connector shell section) with a class D (class 3) ground.
Operating environment
Avoid using this unit in locations with high humidity and condensation or in
locations exposed to water. There is a risk of malfunction, ground leakage, and
fire if water penetrates inside this unit.
Disassembly prohibited
Do not disassemble this unit. There is a risk of fire and electric shock. If
disassembled, sensor operation cannot be guaranteed.
WARNING
WARNING
WARNING
WARNING
WARNING
WARNING
WARNING
WARNING
WARNING
CAUTION

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Modification prohibited
Do not modify this unit. There is a risk of fire and electric shock. If
modified, sensor operation cannot be guaranteed.
Check power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply voltage polarity are the same. If the wrong power supply is
connected, there is a risk of damage to this unit and to devices connected to
this unit and a risk of fire.
Operating power supply
Always connect this unit to a power supply and evaluation unit that
conforms to standards (EN61010 SELV-E) for grounded protective extra low
voltage. Install a fuse in the connection.
Power on
Turn on the power supply after all the equipment, including the gauge head,
display, evaluation unit, and cables, has been connected to this unit. If the
power is supplied before connecting them, there is a risk of damage to this
unit and to devices connected to this unit and a risk of fire. There is also a risk
of breaking the filament in the gauge head.
Operating environment
Use this unit within the environment range defined by the specifications.
Condensation
Avoid using this unit in locations with high humidity and condensation or
in locations exposed to water. There is a risk of malfunction, ground leakage,
and fire if water penetrates inside this unit.
Foreign object insertion
Protect this unit so that metallic and flammable foreign objects cannot
enter the interior of this unit from the openings.
Ensure ventilation
Do not put this unit in a sealed chamber. Always install it in a location that
ensures ventilation. If sealed, there is a risk of loss of operating life when the
temperature of the electronic components inside the power supply increases.
Disposal
When disposing of this unit, please follow all local laws and regulations.
In particular, if the gauge head was used in an atmosphere that can cause
harm to the human body, dispose of it through specialized waste handler.
Customers are responsible for expenses related to disposal.
Check wiring
Ensure that the connection cable to each pin does not contact other pins or
the case. Use caution not to mistake the pin assignments. If the wiring is
wrong, there is a risk of damage to this unit and to devices connected to this
unit and a risk of fire.
Laying down cables
Do not wire this unit cable in proximity or parallel to electrical lines,
power lines, high voltage lines, or high frequency lines. There is a risk of
malfunction.
Remote host noise resistance
Use highly noise resistant insulated-type PC and PLC (programmable
logic controller) remote hosts. There is a risk of malfunction and failure.
CAUTION
CAUTION
CAUTION
CAUTION
CAUTION
CAUTION
CAUTION
CAUTION
CAUTION

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Impacts
Do not expose this unit to impacts. There is a risk of breaking filaments
and damaging the attachment section by impacts.
Transportation packaging
When transporting this unit, do so in the same state as when it was
delivered from the factory. There is a risk of damage if this unit is transported
without packaging or transported attached to the equipment.
Maintenance
The electrical circuitry inside this unit uses aluminum electrolytic
capacitors. In general, aluminum electrolytic capacitors possess an operating
life and that operating life decreases the more the ambient temperature
increases. To prevent damage to the device, we recommend maintenance at
ULVAC about once every three years.

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Contents
1. INTRODUCTION......................................................................................................................1
1.1. Overview of G-TRAN Series ...............................................................................................1
1.2. Terminology .........................................................................................................................2
2. FEATURES OF IM1R1/IM2R1 DISPLAY UNIT....................................................................3
3. SPECIFICATIONS AND CONFIGURATION.........................................................................4
3.1. Key Specifications ................................................................................................................4
3.2. Standard Accessories............................................................................................................5
3.3. Options..................................................................................................................................5
3.4. Compatible measuring unit...................................................................................................6
4. OPERATION .............................................................................................................................7
4.1. Operation Overview..............................................................................................................7
4.2. Operation of Components.....................................................................................................8
4.2.1. Front panel: Operation switches ................................................................................8
4.2.2. Front panel: Lamp......................................................................................................9
4.2.3. Rear panel ................................................................................................................10
4.3. Operation ............................................................................................................................11
4.3.1. Setting of display mode............................................................................................11
4.3.2. Operation mode setting CONTROL MODE.......................................................17
4.3.3. Setting of serial communication speed BAUD RATE VALUE .........................19
4.3.4. Setting of LCD contrast LCD CONTRAST SET ...............................................20
4.3.5. FIL HV On/Off DeGas On/Off...........................................................................21
4.3.6. ZERO point/atm point adjustment and Reset...........................................................23
4.4. Explanation of Operation 2 - Setting of Basic Conditions - PROGRAM MODE..............24
4.4.1. Setting of sensor type MEAS. UNIT SELECT.....................................................26
4.4.2. Setpoint setting.........................................................................................................28
4.4.3. Setting of combination mode CH COMBINATION ..........................................28
4.4.4. Setting of sensitivity factor CALCULATION SET..............................................32
4.4.5. HV Press. SET .........................................................................................................34
5. External Input/Output...............................................................................................................35
5.1. About Sensor Connector.....................................................................................................35
5.1.1. Sensor connector......................................................................................................35
5.2. About External IO...............................................................................................................36
5.2.1. IO connector.............................................................................................................36
5.2.2. About measurement value output.............................................................................38
5.2.3. About remote operation ...........................................................................................44

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5.2.4. About setpoint output...............................................................................................45
5.2.5. Other outputs............................................................................................................47
5.3. About Serial Communication .............................................................................................48
5.3.1. Serial communication setting...................................................................................48
5.3.2. Communication specifications.................................................................................48
5.3.3. Communication command .......................................................................................49
6. INSTALLATION.....................................................................................................................60
6.1. Preparations ........................................................................................................................60
6.2. Installation ..........................................................................................................................60
6.2.1. Installing the display unit.........................................................................................60
6.2.2. Dimensional drawings..............................................................................................62
6.2.3. Electrical connection................................................................................................64
6.2.4. Wiring in serial communication...............................................................................65
6.3. Setting the Measuring Unit.................................................................................................68
6.3.1. About setting of box unit operation mode................................................................68
6.3.2. About cable connecting to measuring unit and display unit ....................................68
7. TROUBLESHOOTING...........................................................................................................70
7.1. Power is supplied, but no display appears. .........................................................................70
7.2. Pressure has changed, but the segment indicator remains at a certain indication...............70
7.3. Pressure indication is not [FU LL] under atmospheric pressure.........................................70
7.4. Pressure has increased, but the segment LED indicates 0.0 10-* Pa and does not change
after FIL (HV) is turned ON though FIL (HV) lamp is lit..................................................71
7.5. FIL lamp stays blinking after FIL is turned ON. ................................................................71
7.6. Pressure indication is not constant......................................................................................72
7.7. When the FIL/HV is turned ON, it turns OFF immediately or it cannot be turned ON. ....72
7.8. Operation is disabled from display unit (FIL/HV ON/OFF, DEGAS ON/OFF)................72
7.9. Operation disabled from remote host (FIL ON/OFF, DEGAS ON/OFF, FIL 2/1) ............73
7.10. Pressure indication differs greatly from expected value.....................................................73
7.11. “NC” is displayed when Pirani gauges, SP1 or BPR2 are connected.................................73
8. WARRANTY...........................................................................................................................74
9. Certificate of Decontamination ................................................................................................75
10. China RoHS Declaration..........................................................................................................76

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1. INTRODUCTION
1.1. Overview of G-TRAN Series
The G-TRAN series units are varied and include the following types and models.
In this manual, "Measuring unit" means all types and models of box unit and sensor unit.
as of 2015
Unit
Major
classification
Unit
Minor
classification
Specification Type Model
Measurement
unit
Box
unit Analog/communication
Pirani BPR2*
Ionization BMR2*
Sensor
unit
Analog Pirani SP1
Analog CCG SC1
Analog/communication Pirani (atmospheric pressure) SW1
Analog/communication Ionization, multi SH2
ST2
SH2-dedicated Pirani SPU
SH2-dedicated Pressure sensor SAU
Analog Diaphragm CCMT-D
Display
unit
1CH
Digital 24 VDC Pirani/ionization/ CCG/diaphragm/multi ISG1
4CH
Digital
24 VDC Pirani/ionization/
CCG/multi
IM1R1
100 VAC IM2R1
*: This product will discontinue producing in March, 2013.

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1.2. Terminology
In this manual, the following terms have the same meanings.
Setpoint SETPOINT SET
Filament FILAMENT FIL
Open signal ERROR ERR
Pressure protection (signal) PROTECT PRT
Emission valid Em. Valid E.V.
Degassing DEGAS DEG
Communication mode Remote mode RS-MODE
CAL function Calculating function CAL
Ionization gauge
In this manual, the ionization gauge means both the hot cathode ion gauge and cold cathode ion
gauge, unless otherwise specified.
Pirani gauge Pirani gauge PG
Pirani gauge Atmospheric Pirani gauge PG2
Ionization gauge Hot cathode ion gauge IG
Ionization gauge Hot cathode ion gauge IG3
Ionization gauge Cold cathode ion gauge CCG