Vacom NOVION User manual

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NOVION®
Vacuum sensor
Instruction manual
Version 2019:1.1, Last update: 05.03.2020

Table of Contents
NOVION Instruction manual 3
1 Safety....................................................................................................................................... 5
1.1 general safety instructions .................................................................................................. 5
1.2 Safety symbols used ............................................................................................................ 5
1.3 Warranty / Guarantee ......................................................................................................... 6
1.4 CE - Declaration of Conformity............................................................................................ 7
2 Device description .................................................................................................................. 8
2.1 Product description ............................................................................................................. 8
2.2 intended use........................................................................................................................ 8
2.3 technical data ...................................................................................................................... 9
3 Comissioning ......................................................................................................................... 12
3.1 Unpacking / Scope of delivery........................................................................................... 12
3.2 Vacuum connection........................................................................................................... 13
3.3 Electrical connection ......................................................................................................... 15
3.3.1 NOVION®Operating unit (rear)............................................................................................ 15
3.3.2 Quick start ..................................................................................................................... 15
3.3.3 LED status codes............................................................................................................ 18
3.3.4 Establish power supply.................................................................................................. 18
3.3.5 Establishing the data connection (cable) ...................................................................... 19
3.3.6 Establishing the data connection (Bluetooth)............................................................... 20
3.4 Software Installation............................................................................................................. 21
3.5 Quick start (Software NOVION®Viewer) ......................................................................... 22
4 Operation .............................................................................................................................. 25
4.1 Operating modes............................................................................................................... 25
4.2 Measurement modes ........................................................................................................ 25
4.3 Operating the NOVION®Viewer ........................................................................................ 26
4.4 Operating VACOM Protocol .............................................................................................. 26

Table of Contents
4 NOVION Instruction manual
5 Troubleshooting.................................................................................................................... 27
5.1 Error messages .................................................................................................................. 27
6 Service / Maintenance.......................................................................................................... 28
6.1 Operating information....................................................................................................... 28
6.2 Calibration Mass spectrum................................................................................................ 29
7 Disassembly .......................................................................................................................... 30
7.1 Uninstall............................................................................................................................. 30
7.2 Return to VACOM.............................................................................................................. 31

Safety and Security
NOVION Instruction manual 5
1 Safety
1.1 general safety instructions
Please read the contents of this document carefully before using the device.
When using the device, observe the safety instructions given in this document.
When using the device, observe the regulations and protective measures in
connection with the vacuum system used.
All activities listed in these instructions may only be carried out by suitably trained
and skilled personnel.
Before using the device, consider possible interactions with the process media used
due to self-heating of the device. (especially explosion)
Before using the device, consider possible contamination of the device by the process
media used.
1.2 Safety symbols used
The safety and warning symbols explained below are used in this operating manual:
Warning !
Danger of personal injury
Attention
Risk of damage to device or vacuum system

Safety and Security
6 NOVION Instruction manual
Reference
General reference to further details or reference sections and useful
information
1.3 Warranty / Guarantee
VACOM warrants the proper functioning of the device for one year. During this
period, material and manufacturing defects are eliminated free of charge.
Damage caused by improper use is not covered by the warranty (this also includes
severe contamination or excessive strain on the sensor).
(Note: Section "Intended Use")
VACOM does not assume any warranty if the user or third parties make changes to
the device which goes beyond the work listed in this document.
The return is at the expense of the customer in the original packaging.
VACOM reserves the right to decide on replacement or rectification of defects after
inspection at our premises.

Safety and Security
NOVION Instruction manual 7
1.4 CE - Declaration of Conformity

Device description
8 NOVION Instruction manual
2 Device description
2.1 Product description
The NOVION® allows a wide range pressure measurement from 1 × 10−11 mbar to 1000
mbar (atmospheric pressure), as well as the detection of helium and residual gas analysis
function from mass number 1 to 300. The use of a novel ion trap combines numerous
functions in a compact sensor.
In the total pressure range 1000 mbar (atmospheric pressure) to 5 × 10−3 mbar, a heat
conduction sensor (Pirani) is used to determine the total pressure parameter.
In the total pressure range 5 × 10−3 to 1 × 10−11 mbar a hot cathode ionization sensor is
used to determine the parameters total pressure and partial pressure helium as well as for
residual gas analysis. With this sensor electrons are emitted by means of heated filaments.
The electrons generated in this way are used to impact gas particles in the measuring
volume and collect them in an ion trap. The collected ions are then accelerated to a Faraday
Cup and evaluated using time-of-flight analysis. The parameters total pressure and partial
pressure in the measuring volume are determined from the collected data. Switching
between the measuring principles is fully automatic.
The supply voltages for the heat conduction sensor and the hot cathode sensor are provided
by the operating unit on the device. The operating unit also provides the required output
signals and interfaces for displaying the measured parameters on an external display or on
an external computer.
NOVION® features a wide range of functions and intuitive software. Traditional vacuum
sensors for total pressure measurement and residual gas analysis are replaced by a compact
and cost-effective NOVION®.
2.2 intended use
The device is used exclusively for pressure measurement of non-flammable gases and gas
mixtures in a vacuum system in the pressure range 1 × 10−11 to 1000 mbar. It may only be
connected to components intended for this purpose.

Device description
NOVION Instruction manual 9
2.3 technical data
General Information
Principles of measurement
•electron impact ionization
•Electrostatic ion trap
•time-of-flight - spectroscopy
•Heat conduction (Pirani)
Vacuum connection KF 25 / CF40
Filaments 2 x Iridium, yttrium oxide coated
Materials in vacuum stainless steel, gold, yttrium oxide on iridium, glass, copper,
aluminum oxide, platinum
mounting position
Any for pressure < 10 mbar
Position-dependent pressure indication for pressure > 10
mbar
operating temperature
10°C … 55°C
humidity
≤85% (non condensing)
max. bake out temperature 80°C at flange (with operating unit)
200°C (without operating unit)
weight
Sensor head: approx. 1 kg
Operating unit: approx. 0.76 kg
Dimensions (H x W x D) 260 x 73 x 66 mm (with operating unit)
100 x 73 x 66 mm (without operating unit)
Total pressure measurement
measuring range
1 × 10−9 … 1 × 105
Pa
1 × 10−11 …1000 mbar
7.5 × 10−12 …750 Torr
accuracy ± 25 % of measured value (for p = 1 × 10−3 … 1 × 10+1 mbar)
± 15 % of measured value (for p = 1 × 10−5 … 1 × 10−7 mbar)
repeatability ± 10 % of measured value (for p = 1 × 10−8 … 1 × 10−2 mbar)
repetition rate adjustable
up to 250ms
Gas type dependence yes

Device description
10 NOVION Instruction manual
Helium leak detection
Minimum detectable partial
pressure of helium
[% total pressure]
< 0.05% total pressure (for p = 1 × 10−6 … 1 × 10−3 mbar)
< 0.5% total pressure (for p = 1 × 10−7 … 1 × 10−6 mbar)
< 1% total pressure (for p = 1 × 10−8 … 1 × 10−7 mbar)
< 10% total pressure (for p = 1 × 10−10 … 1 × 10−8 mbar)
Minimum detectable helium leak
rate for SHe = 10 l / s
5 x 10−9 … 5 x 10−6mbar ∙l / s (for p = 1 x 10−6 … 1 x 10−3 mbar)
5 x 10−9 mbar ∙l / s (for p = 1 x 10−7 … 1 x 10−6 mbar)
1 x 10−9 mbar ∙l / s (for p = 1 x 10−8 … 1 x 10−7 mbar)
1 x 10−10mbar ∙l / s (for p = 1 x 10−10 … 1 x 10−8 mbar)
Partial pressure measurement
Residual gas analysis function yes
mass range 1 … 300 amu
Mass resolution R*
(*small R is better)
< 1 (for 1 … 5 amu)
< 10 (for 10 … 50 amu)
< 20 (for 50 … 100 amu)
< 50 (for 100 … 300 amu)
Minimum detectable partial
pressure of light gases
up to 40 amu
0.1% Total pressure*
(*depending on total pressure and mass number)
Minimum detectable partial
pressure of the sum of heavy
gases 45 ... 300 amu
0.1% Total pressure*
(*depending on total pressure and mass number)
Operating unit
interfaces
RJ45 socket:
- digital In / Out: RS232/RS485 (VACOM protocol)
- Analog Out: 0...10 V, max. 20mA
Bluetooth 2.0 (VACOM protocol)
power supply 24 VDC ± 10%, 30 W
Display non-existent
protection class IP 50
switching points non-existent
Upgrade via Firmware yes
Connection to sensor head Plug with locking nut