Vacom BARION atm II User manual

BARION®atm II
Manual
Combination vacuum meter
for measurements from atmosphere to UHV
www.vacom-vacuum.com

0 Inhaltsverzeichnis
10 / 2016BARION®atm II Manual

07 / 2016
COLDION®Bedienungsanleitung01 / 2014-1
BARION®atm II Manual
VACOM®combination vacuum meter
for measurements from atmosphere to UHV
BARION®atm II
Contact: [email protected]

44 BARION®atm II Manual
0 Contents
0 Table of contents.......................................................................... 4
1 General information...................................................................... 6
1.1 Product description .......................................................................................... 6
1.2 Storage ............................................................................................................ 6
1.3 General regulations and warranty ..................................................................... 6
1.4 CE-derclaration of conformity ...........................................................................6
2 Safety............................................................................................ 7
2.1 Observance of the operating instructions.......................................................... 7
2.2 Basic safety information ................................................................................... 7
2.3 Signs and symbols ........................................................................................... 7
3 Getting started ............................................................................. 8
3.1 Unpacking........................................................................................................ 8
3.1.1 Check for damage............................................................................................ 8
3.1.2 Scope of delivery.............................................................................................. 8
3.1.3 Acclimatisation ................................................................................................. 9
4 Connection and installation....................................................... 10
4.1 Description of the RS232 interface ................................................................. 10
4.2 Conversion of the voltage or current at the analogue interface........................ 10
5 Operation .................................................................................... 12
5.1 General information ........................................................................................ 12
5.1.1 Safety information .......................................................................................... 12
5.2 Adjustment..................................................................................................... 12
5.3 Setpoints........................................................................................................ 12
6 Maintenance............................................................................... 13
6.1 Cleaning and care .......................................................................................... 13
6.2 Firmware update ............................................................................................ 13
7 Troubleshooting.......................................................................... 14
8 Return / disposal ......................................................................... 15

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BARION®atm II Manual
0 Contents
A Annex.......................................................................................... 16
A.1 Technical data ................................................................................................ 16
A.2 Accessories.................................................................................................... 17
A.3 Communication with the BARION®atm II....................................................... 17
A.3.1 ATMION protocol............................................................................................ 17
A.3.2 Port settings................................................................................................... 18
A.3.3 Command set ................................................................................................ 18
A.3.4 Pressure output via RV ................................................................................... 19
A.3.5 Calculation of the input values for specifying the setpoint ............................... 19
A.3.6 Meaning of the status bit ................................................................................ 20
A.3.7 Meaning of the control bit............................................................................... 21
A.4 Legally binding Declaration of Contamination.................................................. 21
A.5 VACOM®Protocol (quick introduction) ............................................................ 22
A. 5.1 Setups ........................................................................................................... 22
A. 5.2 Entering instructions ....................................................................................... 23
A. 5.2.1 For all devices valide commands .................................................................... 24
A. 5.2.2 Instructions for device class of pressure gauges............................................. 25
A. 5.2.3 Instructions for device class of ion getter pumps (IGP).................................... 26
A. 5.2.4 Special instructions for GAPAS....................................................................... 28
A. 5.2.5 Special instructions for BARION®atm II .......................................................... 29
A. 5.2.6 Control by the way of +24 V control signals.................................................... 32
Notes ...................................................................................................................... 33

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1 General information
1.1 Product description
The wide-range vacuum gauge BARION®atm II allows a pressure measurement from 5 x 10-
10mbar to atmosphere.
This is made possible by the combination of a heat loss vacuum gauge,
also known as Pirani, and a Bayard-Alpert vacuum meter.
1.2 Storage
The sensor and the control electronics must be stored in a dry and dust-free environment. The
flange must be covered with a plastic cap. The ambient temperatures for the storage must only
be between 0 °C and 40 °C. In addition, the environment must be non-condensing and must
have an accordingly low humidity.
1.3 General regulations and warranty
A warranty of one year is assumed for the proper functioning of the device. During this period,
material and manufacturing defects are eliminated free of charge. Normal wear as well as mal-
functions caused by improper use (this also includes severe contamination of the sensor) are
not covered by warranty.
The manufacturer does not assume any warranty for alterations to the device beyond the work
listed in the manual. The costs for returning are borne by the customer. Return is made in the
original packaging. We reserve the right to decide on replacement or repair after examination
in our premises.
1.4 CE-declaration of conformity
Within the CE-declaration of conformity the following directives, standards and guidelines have
been used:
2004 / 108 / EG EG guideline for electromagnetic compatibilityt
EN 61010-1 (2011-07) Safety requirements for electrical equipment for measurement, control,
and laboratory use
EN 55011 (2011-04) Industrial, scientific and medical equipment;
Limits and methods of measurement
EN 61000-3-2 (2010-03) Electromagnetic compatibility (EMC) -
Limits for harmonic current emissions
EN 61000-3-3 (2009-06) Electromagnetic compatibility (EMC) - –
Limits Limitation of voltage changes, voltage fluctuations and flicker in
public low-voltage supply
EN 61326-1 (2006-10) electrical equipment for measurement, control, and laboratory use –
EMC requirements
2014/ 53/ EU Guideline for radio installation

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2 Safety
2.1 Observance of the manual
The BARION®atm II is delivered ready for operation. Please observe the notes for handling the
measuring device listed in this manual.
Any damage to the product caused by improper handling will void the warranty.
2.2 Basic safety information
With regard to installation, maintenance and repair measures, observe the specified protection
provisions. Voltages exceeding 30 V AC or 60 V AC are considered to be hazardous live accor-
ding to EN 61010. Replacing the damaged component must be performed at VACOM.
Unauthorised interference will void any warranty claims.
All work on the device must only be performed by trained personnel! Improper use
may lead to serious injuries or death!
2.3 Signs and symbols
NOTE, DANGER or WARNING:
Information on preventing any kind of personal or material damage.
DANGER:
Information on preventing any kind of personal or material damage caused by electrical
influences.
NOTE:
General notes on further information or related articles.

810 / 2016BARION®atm II Manual
3 First steps
3.1 Unpacking
3.1.1 Check for damage
Before unpacking the product, check the package for visual damage. If the package and thus
also the operating device is damaged, contact us at
[email protected].
3.1.2 Scope of delivery
The scope of delivery includes one BARION®atm II, consisting of control electronics and sen-
sor. The following figures show the rears of the sensor and the control electronics after taking
apart the BARION®atm II.
Rear of control electronics
a Mains connection
b RS232 communication
c Signal lamp for setpoint control
d Signal lamp for current mode
Rear of sensor
a Pirani sensor
b1, 2 Filament 1, 2
c Filament Common
d Anode
e Collector

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3 First steps
The signal lamp for the current mode [c in Fig. 1] indicates in which mode the BARION®atm II
is currently operated
(see site 9). The signal light d shows wether the setpoint is active or inactive.
Signal light Colour Meaning
c (mode) Green, lighting
Hot cathode active
c Green, flashing slowly Pirani active
c Green, flashing rapidly Degas active
c Yellow, lighting Internal reboot
Do not cancel in this state!
If this state lasts longer than one minute,
please contact your customer adviser at
VACOM.
c green/red, flashing Defective filaments
c red, flashing Defective Pirani or control electronics
d (setpoint) o SP1 o/ SP2 o
d yellow, glowing SP1 active/ SP2 o
d green, glowing SP1 o/ SP2 active
d yellow, flashing SP1 active/ SP2 active
3.1.3 Acclimatisation
After unpacking and before the first start, the device should be brought to room temperature
for some hours for acclimatisation. This way, electrical short-circuits and thus the failure of the
device caused by condensation can be prevented.

10 10 / 2016BARION®atm II Manual
The sensor is conventionally assembled to a KF25 flange. In order to guarantee a clean vacuum
and thus an optimum pressure measurement, we recommend the use of gloves.
If the sensor is connected, it can be connected to a PC via a RS232 cable. The BAA adapter
cable (not included in the scope of delivery, see Annex A.2) can be used for the connection to
a VMG read or an MVC3-A. Moreover, the communication with
BARION®atm II is optionally
possible via fieldbus. In case of communicating with a PC or via fieldbus, the power supply
must be connected.
4.1 Description of the RS232 interface
The RS232 interface allows communication with the outside world. In addition to RxD / TxD
connections for communicating via RS232, the interface has inputs for the power supply,
an analogue output, which supplies a voltage proportional to the pressure or a current pro-
portional to the pressure, and three setpoint outputs.
1) Analogue output 2) RxD
3) TxD 4) + 24V DC
5) GND 6) Analogue GND
7) Setpoint 1 (RTS), max. 30V/0.5A
8) Setpoint 1 (CTS)
9) Setpoint 2 OC, max. 30V / 0.5A
4.2 Conversion of the voltage or current at the analogue interface
During the readout of the pressure from the BARION®atm II via an analogue interface, the fol-
lowing conversions must be observed:
Type of readout Voltage
(0…10 V)
Current
(0…20 mA)
Current
(4…20mA)
Conversion factor 0.625V /
Dekade
1.250mA /
Dekade
1.000 mA/
Dekade
Maximum
(V or mA / mbar)
9.375V /
1000mbar
18.750mA /
1000mbar
19.000 mA/
1000 mbar
Minimum
(V or mA / mbar)
0.625V /
10-11mbar
1.250mA /
10-11mbar
5.000 mA/
10-11 mbar
An error signal is generated above the maximum and below the minimum.
4 Connection and installation

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5 Operation
Any operation is realised via a connection to the PC or to the display (a VMG read or an MVC3-A).
The communication takes place regularly via the VACOM protocol; however, the ATMION®
protocol is supported as well.
A more detailed description of these two protocols can be found in the Annex.
5.1 General information
5.1.1 Safety information
The change from pressure measurement using the Pirani principle to pressure measurement
using the Bayard-Alpert measuring principle and back is made by the control electronics. Never-
theless, it is important to point out that the Bayard-Alpert gauge may be irreparably damaged in
case of inrush airing.
Minimize the contamination of the sensor (e.g. via a bae, see accessories), since contamina-
tions may drastically reduce the reproducibility of the sensor and may lead to failures in extreme
case. Slight contaminations may be cleaned by repeated outgassing cycles in a clean vacuum
environment (p < 1x10-5 mbar).
Make sure that strong vibrations of the sensor are avoided, since those vibrations may irreparably
damage the Pirani gauge.
5.2 Adjustment
As explained in the last section, the BARION®atm II automatically switches between its two
measuring principles. In doing so, it is switched from Pirani to hot cathode at a pressure of
1 x 10-2 mbar, and from hot cathode to Pirani at a pressure of 1x 10-1 mbar.
In order to ensure good coordination of both measuring principles, an adjustment is required.
Regarding such an adjustment, the upper and the lower measuring limit of the Pirani measuring
gauge are specified by the user. At atmospheric pressure (e. g. when the chamber is open), the
sensor is informed that there is a pressure of 1000 mbar. At a pressure p < 1 x 10-3 mbar, the
sensor receives the confirmation that the lower measuring range has been reached.
5.3 Setpoints
BARION®atm II is equipped with two independent setpoint relais. These can be programmed
via RS232 interface. The electrical contacting is possible via SUB-D connector (see chapter
4.1)

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5. Control by the way of +24 V Steuersignalen
Elementary control signals can be transmitted to
BARION®atm II by wiring of the inputs Control
1 (RxD) and Control 2 (TxD) with +24 V.
Control 1 (0 V) Control 2 (0 V) Normal operation
Control 1 (+24 V) Control 2 (0 V) Start Degas
Control 1 (0 V) Control 2 (+24 V)
Pirani only operation
Hot cathode gauge o as
long as +24 V active
Control 1 (+24 V) Control 2 (+24 V) Adjustment Pirani gauge*
* atmosphere or vacuum adjustment depends from the displayed pressure at the time of this adjustment: >10 mbar
atmosphere adjustment < 1 mbar vacuum adjustment.
5 Operation

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6.1 Cleaning and care
The BARION®atm II is maintenance-free. For cleaning the housing, the supply voltage must
be switched o by unplugging the plug-in power supply. The housing can be cleaned using a
soft, slightly damp cloth. Using aggressive cleaning agents should be avoided since this may
attack the surfaces.
6.2 Firmware update
Possible firmware updates may quickly be installed on the BARION®atm II by the customer. The
current firmware versions and a programme for installing the firmware can be downloaded from
our website at http://www.vacom.de/downloads/software. In case of special requests, such as
older or special firmware versions, please contact your customer adviser or inform us.
Regarding the update procedure, proceed as follows:
1. Connect the
BARION®atm II via a RS232 cable to your PC.
2. Connect the power supply to the BARION®atm II.
3. Open the programme ‟VACOM Firmware updater”(File name: firmwarewpf.exe)
4. Select the language ‟English” and click ”Next” twice.
5. Select the COM port to which the BARION®atm II is connected.
6. Do not change the baud rate, the correct value ”19200 kb / s” is preset. If an error
message is displayed here, check whether the communication with the
BARION®atm
II
is ensured, i. e. whether it is correctly connected, supplied with power and whether
the correct COM port is selected.
7. After clicking ”Next” again, search in the ”File” field for the firmware which you want to
install on the
BARION®atm II .
8. Click on ”Update” in the next window. Here, it is displayed which firmware is currently
installed on the device and which firmware shall be loaded to the device.
6 Maintenance

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Problem Cause Measure
There is no change from
the Pirani to the hot catho-
de mode, even though the
pressure would allow it
Adjustment from the Pirani
incorrect
Repeat adjustment
While measuring with the
hot cathode, a pressure
too low or a heavily varying
pressure is displayed
Sensor contaminated Perform degas
Sensitivity values
incorrectly set
Reset sensor again to
factory-set sensitivity values
In case of doubts or other occurring problems, please contact our support at [email protected].
7 Troubleshooting

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Contamination of the product: If the BARION®atm II was used in atmospheres with
substances hazardous to health or the environment, these substances must be indi-
cated at the disposal company.
In case of returning the sensor to the VACOM Vakuum Komponenten & Messtechnik GmbH,
a legally binding declaration on the contamination of the product must be completed and
signed by a competent person. The Declaration of Contamination can be downloaded from
www.vacom.de. Without an enclosed Declaration of Contamination, a return delivery is not
accepted and sent back.
8 Return / disposal

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A.1 Technical data
The BARION®atm II is a wide-range vacuum meter consisting of a hot cathode and a heat loss
vacuum meter according to the Pirani principle. With this device, a failure-free process control
from atmosphere up to the UHV regime is possible. By a high variety of interfaces, an easy
system integration is guaranteed.
Measuring range 5 • 10-8 to 1 • 10+5Pa
5 • 10-10 to 1000mbar
3.75 • 10-10 to 750torr
Accuracy ±10% (1 • 10-8 bis 1 • 10-2 mbar)
±25% (1 • 10-2 bis 1 • 10 mbar)
Reproducibility ±5% of the measured value (1 • 10-8 bis 1 • 10-2 mbar)
Max. bake-out temperature 150 °C at the flange
Max. operating temperature 10 to 50°C
Pressure reading gas type
dependent
Yes
Filaments 2 x irdium, Y2O3coated (not replaceable)
Materials in vacuum SS, W, Au, Y2O3 auf Ir, Glas, Ag, Pt, Cu
Setpoints 1 x relais (floating, max. 30V/0.5A )
1 x open collector (OC) (max. 30V/0.5A)
Power supply 24 V ±10 %, 24 W
Dimensions (H x W x D) 122 x 73 x 66mm
Weight ca 570 g (flange dependent)
Possible vacuum connections KF16 / KF 25 / CF40
Available interfaces
Data I/O: D-Sub, 9 pin with RS232, analog (0 to 10 V, 0 to
20 mA, 4 to 20 mA
Corresponding display and
control devices
VaX Vacuum Explorer (optional)
VMG and CABLE-VMG-ADAPTER (optional)
A Annex

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A.2 Accessories
The following accessories are available for the
BARION®atm II :
Article number Description
BARION-ATM-PS-EU
Power supply unit*
CABLE-VAX-VAXlinkB-X X = cable length: 3m, 5m, 10m, 15m
BARION-ATMII-S-X (X = flange: KF16 / KF 25 / CF40)
ATLPC3 RS232 cable, length 3 m*
BAA3 Adapter cable for VMG, length 3 m*
KF25LBAFFLE3-SVCR-304 Lamella bae DN25KF
CF40LBAFFLE3-SVCR-304 Lamella bae DN40CF
* Other versions on request
A.3 Communication with the BARION®atm II
The BARION®atm II has the following communication interfaces:
Via an RS232 interface, communication is possible via both the VACOM proto-
col and the ATMION protocol.
At an analogue interface, both a current proportional to the pressure and a vol-
tage proportional to the pressure can be output.
 Optionally, there are possibilities of a PROFIBUS or other fieldbus communication.
Please refer to the corresponding manuals for information on the VACOM protocol and the
fieldbus systems; here, details of the ATMION protocol are presented.
A.3.1 ATMION protocol
As an alternative to the VACOM protocol, the ATMION protocol can also be used for interac-
ting with the BARION®atm. (VACOM Protocol see chapter 5.4)
A Annex

18 10 / 2016BARION®atm II Manual
A.3.2 Port settings
The following settings are provided for the RS232 communication:
Baud rate 19200
Data bits 8
Stop bit 1
Parity None
Protocol None
A.3.3 Command set
The general format of the commands is as follows:
<Command><Command parameter><CR>
Command Function
RV
Reading the current pressure value.
RS Reading the status bit (see below for more details).
RP
Reading the setpoint value for SP On and SP O. Output value in hex.
RT Reading the operating time of the filaments.
SD Degas (2min)
SC**** Set control bit. Input values in hex.
SP**** **** Set setpoint values for SP On and SP O. Input values in hex.
SX1 Start automatic transmission of pressure and service values every 500 ms.
SX0 Stop automatic transmission of pressure and service values.
A Annex

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A.3.4 Pressure output via RV
As shown in the table, the current pressure value can be read out via ”RV<CR>”. The response
string has the following form:
<Mode>_<Pressure>
The pressure has thereby the form ”0.00E+/-00”. The dierent modes are explained in the fol-
lowing table:
Mode Description
P
Pirani measuring mode
I1 Ionisation measuring mode with filament 1
I2 Ionisation measuring mode with filament 2
DDegas
EError
A.3.5 Calculation of the input values for specifying the setpoint
The pressures, at which a setpoint is switched on or switched o, are saved in the hex format.
The conversion is as follows:
Input value = 49152 + 4069*log (p)
Here, the pressure value p is given in mbar.
A Annex

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A.3.6 Meaning of the status bits
Status bits can be read out via the command ”RS<CR>”. The response is a four-digit hexade-
cimal number and stands for 16 bits. The individual bits stand for various status information.
The 16 bits are divided into four sections, which can, in each case, be described by a hexade-
cimal number. The following table explains the meanings of the individual status bits and how
to decode a sample code (in this case 001D).
Bit Meaning Hex Bit
0 Pressure-dependent switching of gauge active D 1
1 Pirani active, measured value is output 0
2 Ionisation gauge active, measured value is output 1 1
3 Filament is automatically selected 1 1
4 Filament 1 active 1 1
5 Filament 2 active 0
6 Degas active 0
7 Small emission current range active 0
8 Setpoint is controlled externally 0 0
9 State at the setpoint output 0
10 Setpoint function is active 0
11 External inputs for system control are activated 0
12 Error bit is reset 0 0
13 Adjustment at vacuum is activated 0
14 Adjustment at atmospheric pressure is activated 0
15 Live signal 0
A response to the command RS<CR> is read from right to left. As shown above, the code 001D
means that the measuring mode is changed pressure-dependently, the automatic filament se-
lection and the ionisation gauge are activated and the filament 1 is running.
A Annex