
page 8 of 52
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 15
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 17
Maintenance and repair..................................................................... 19
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Important information: Equipment marking (ATEX)................... 22
Technical data................................................................... 24
Gas inlet temperatures..................................................................... 24
Wetted parts ..................................................................................... 25
Abbreviations.................................................................................... 25
Pump parts....................................................................................... 25
Use and operation ............................................................ 27
Installing a pump in a vacuum system .............................................. 27
During operation................................................................................ 30
Important notes regarding the use of gas ballast .............................. 31
Important notes concerning the operation of the
exhaust waste vapor condenser........................................................ 33
Shutdown & storage.......................................................................... 35
Installation of upgrade kit PC 8....................................... 37
Installation with chemistry diaphragm pump MD 12C or MV 10C 38
Installation with Chemistry-HYBRID pump RC 6............................... 39
Accessories ...................................................................... 40
Spare parts and troubleshooting.................................... 41
Spare parts....................................................................................... 41
Troubleshooting................................................................................ 41
Repair - Maintenance - Return - Calibration................... 42
Warranty ............................................................................ 44
Health and safety clearance form ................................... 45
EC Declaration of Conformity of the Machinery ............... 46
China RoHS....................................................................... 48