Versum Materials GASGUARD Source System TE11 Instruction manual

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© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Installation / Operation / Maintenance
Manual
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GASGUARD®
Source System TE11
Manual Part Number: 452169
Edition: Rev-3

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MNL000239.doc Revision 3 01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part,
without prior written consent of Versum Materials, Inc. The information and data
should be available only to those with a need to know. Versum Materials, Inc. makes no
representation that the information and data is appropriate for the recipient, and each
recipient needs to independently evaluate the appropriateness of the information and
data for its use.
This Installation and Operation Manual is subject to change without notification. For
current technical information please call Product Support at [phone] from
continental U.S., or write Versum Materials, Inc., 7201 Hamilton Blvd, Allentown, PA
18195, attention: Product Support.
Printed in the U.S.A.

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WARRANTY
Versum Materials, Inc. (hereinafter referred to as "Versum Materials, Inc.") warrants
that:
(A) Each new Versum Materials, Inc. Electronics Equipment Solutions system is free
from defects in material and workmanship under normal use and service for a period of
one year from the date of delivery by Versum Materials, Inc. to the first purchaser.
(B) Each new accessory is free from defects in material and workmanship under
normal use and service for a period of one (1) year from the date of delivery by Versum
Materials, Inc. to the first purchaser.
If any product requires service during the applicable warranty period, the purchaser
should communicate directly with Versum Materials, Inc. to determine appropriate
repair. Repair or replacement will be carried out at Versum Materials, Inc. expense
subject to the terms of this warranty. It is the responsibility of the customer to perform
routine maintenance and periodic calibration.
In no event shall Versum Materials, Inc. be liable for any incidental, indirect or
consequential damages in connection with the purchase or use of any Versum Materials,
Inc. product. This warranty shall not apply to, and Versum Materials, Inc. shall not be
responsible for, any loss arising in connection with the purchase or use of any Versum
Materials, Inc. product which has been repaired by anyone other than an authorized
Versum Materials, Inc. service representative or altered in any way so as, in Versum
Materials, Inc. judgment, to affect its stability or reliability, or which has been subject to
misuse or negligence or accident, or which has the unit or lot number altered, effaced or
removed, or which has been used otherwise than in accordance with the instructions
furnished by Versum Materials, Inc..
This warranty is in lieu of all other warranties, express or implied, and all other
obligations or liabilities on Versum Materials, Inc. part, and Versum Materials, Inc.
neither assumes nor authorizes any representative or other person to assume for it any
other liability in connection with the sale of Versum Materials, Inc. equipment.
VERSUM MATERIALS, INC. DISCLAIMS ALL OTHER WARRANTIES,
EXPRESS OR IMPLIED, INCLUDING ANY WARRANTY OF
MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR
APPLICATION.
Corporate address:
Versum Materials, Inc.
1919 Vultee Street
Allentown, PA 18101, U.S.A

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MNL000239.doc Revision 3 01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 4
Revision Control Summary
Chapter Revision File Name
Introduction
Rev-2 MNL000296.doc
 Updated company name and logo
Chapter 1 – Safety Warnings
Rev-2 MNL000294.doc
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Chapter 2 – Dimensions and Mounting
Rev-2 MNL000295.doc
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Chapter 3 – Tubing Connections
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Chapter 4 – Electrical Connections
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Chapter 5 – Helium Leak Check
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Chapter 6 – Functional Checklist
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Chapter 7 – System Description
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Chapter 8 – Operating Procedures
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 Updated controller screen picture, figure 8.1
Chapter 9 – Troubleshooting
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 Updated company name and logo

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Confidential and Proprietary Data
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Chapter 10 – Maintenance
Rev-2 MNL000304.doc
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Chapter 11 – System Specific Information
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 Updated touch screen part number
Appendix A
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Appendix B – Nitrogen Material Safety Data Sheet
Rev-3 MNL000139.doc
 Updated company name and logo

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TABLE OF CONTENTS
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Introduction
Section 1 Title ................................................................................ I-1
Chapter 1 Safety Warnings
1.1 Introduction ..................................................................... 1-2
1.1.1 Level or Intensity of Hazard .......................................... 1-2
1.1.2 Hazard Types (Symbols) ................................................. 1-2
1.2 Important Safety Warnings ............................................. 1-5
1.3 Inert Gas Hazards ............................................................ 1-6
1.4 Pressurized Fluids / Gases ............................................... 1-7
1.5 Electrical Hazard ............................................................. 1-7
1.6 Falling Equipment Hazard .............................................. 1-8
1.7 Gas Cylinder Handling Hazard ....................................... 1-8
1.8 Pinch Hazard ................................................................... 1-8
1.9 Personal Protective Equipment ....................................... 1-9
1.10 Hazard Warnings ............................................................. 1-12
1.10.1 Toxic Gas Hazards .......................................................... 1-13
1.10.2 Corrosive Gas Hazards .................................................... 1-14
1.10.3 Flammable and Pyrophoric Gas Hazards ........................ 1-14
1.10.4 Oxygen and Other Oxidizer Hazards .............................. 1-16
1.10.5 Inert Gas Hazards ............................................................ 1-18
1.10.6 Pressurized Gases ............................................................ 1-20
1.10.7 Cylinder Handling Hazards ............................................. 1-20
1.10.8 Electrical Hazards ........................................................... 1-21
1.10.9 Purge Gas Backstream Hazard ........................................ 1-22
1.11 Typical Minimal Lockout or Tagout System Procedures 1-22
1.12 Safety Signs and Labels .................................................. 1-26
1.13 Equipment Safety Features ............................................. 1-35
1.14 Safety Literature for Handling and Use of Gas Cylinders 1-36
1.15 Safety Literature for Handling and Use of Instrument
Nitrogen Supply .............................................................. 1-36
Chapter 2 Dimensions and Mounting
2.1 Outline Dimensions ........................................................ 2-2
2.1.1 Outline Dimension Figures for 2 Cylinder Source Systems 2-3
2.1.2 Outline Dimension Figures for 3 Cylinder Source Systems 2-8
2.1.3 Outline Dimension Figures for 1x1 Cylinder Source
Systems ........................................................................... 2-13
2.1.4 Outline Dimension Figures for 1x2 Cylinder Source
Systems ........................................................................... 2-18
2.2 Mounting Hole Locations ............................................... 2-23
2.2.1 Cabinet Anchoring .......................................................... 2-24
2.2.2 Rack Anchoring .............................................................. 2-29

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Chapter 3 Tubing Connections
3.1 Tubing Interconnections ................................................. 3-3
3.2 Process Line Connection ................................................ 3-4
3.3 Vent Line ......................................................................... 3-6
3.4 Venturi Line .................................................................... 3-7
3.5 Purge Line ....................................................................... 3-7
3.6 Pneumatic Supply ............................................................ 3-8
3.6.1 Z-Purge Procedure .......................................................... 3-9
3.7 Enclosure Exhaust System Requirements ....................... 3-10
3.8 Sprinkler Installation ....................................................... 3-13
3.9 Helium Leak Test Port .................................................... 3-14
3.10 Hazardous Gas Leak Detection System (Customer
Requirement) ................................................................... 3-14
3.11 Restrictive Flow Orifice (RFO) for Cylinder Valve
(Customer Requirement) ................................................. 3-15
Chapter 4 Electrical Connections
4.1 Grounding Method ......................................................... 4-1
4.2 Power Supply Connection .............................................. 4-2
4.3 Field Connections ............................................................ 4-4
4.4 External I/O Communication .......................................... 4-6
4.4.1 Available External I/O Communications ........................ 4-8
Chapter 5 Helium Leak Check
Chapter 6 Source System Functional Checklist
6.1 Source system Utility Checklist ........................................ 6-3
6.2 Source System Field Start-up Checklist .......................... 6-5
Chapter 7 System Description
7.1 Gas Cabinet .................................................................... 7-2
7.2 Rack System ................................................................... 7-4
7.3 Auto Switchover System ................................................. 7-5
7.4 Hazardous Gas Panel ....................................................... 7-6
7.5 Inert Gas Purge Panel ...................................................... 7-6
7.6 Panel Schematic and Component Descriptions ............... 7-7
7.7 GASGUARD®TE11Controller.......................................... 7‐12
 7.7.1 ControllerComponents....................................................... 7‐13
 7.8 MainMenuOptions............................................................ 7‐15
 7.8.1 SourceModeMenuOptions............................................... 7‐15
 7.8.2 ActiveAlarms....................................................................... 7‐18
 7.8.3 ConfigurationMenu............................................................ 7‐18
 7.9 HighPressureLeakTest(HPLT)........................................... 7‐18
 7.9.1 Definitions........................................................................... 7‐18
 7.9.2 ValveandTransducerNumbersandNomenclature........... 7‐19

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 7.9.3 DescriptionofOperation..................................................... 7‐19
 7.9.4 AlarmConditionsandResponses........................................ 7‐21
 7.10 MultipleProcessOutlets..................................................... 7‐21
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Chapter 8 Operating Procedures
8.1 Emergency Shutdown Procedures .................................. 8-3
8.2 Operation of the Source System Controller ................... 8-5
8.2.1 Source Mode Menu (Left or Right side) ......................... 8-8
8.3 Process and Purge Cylinder Procedure ........................... 8-9
8.3.1 Inert Purge Gas Cylinder Change Procedure .................. 8-10
8.3.2 Process Gas Cylinder Procedures .................................... 8-14
8.4 New System Startup Procedures ..................................... 8-21
8.5 Manual Mode Operation ................................................. 8-23
8.5.1 How to Operate in Manual Mode .................................... 8-23
8.5.2 How to Open and Close Valves ...................................... 8-25
8.5.3 General Principles of Manual Operation ......................... 8-26
8.6 Source System Configuration ......................................... 8-27
8.6.1 Net Product ...................................................................... 8-29
8.6.2 Alarm Setpoints ............................................................... 8-29
8.6.3 Subcycle Parameters ....................................................... 8-30
8.6.4 Leak Test Parameters ...................................................... 8-30
8.6.5 Digitals Inputs ................................................................. 8-31
8.6.6 Digitals Outputs .............................................................. 8-31
8.6.7 Analog Inputs .................................................................. 8-31
8.6.8 Analog Setput .................................................................. 8-31
8.6.9 Analog Conditions .......................................................... 8-32
8.6.10 Helium Leak Check ......................................................... 8-32
8.6.11 Password List .................................................................. 8-32
8.6.12 System Setup ................................................................... 8-32
8.6.13 Edit Date / Edit Time ...................................................... 8-32
Chapter 9 Troubleshooting
9.1 Troubleshooting the Controller ...................................... 9-3
9.1.1 System Off, No Display on Controller ............................ 9-3
9.1.2 Incorrect Analog Value on Display ................................. 9-4
9.1.3 Digital Input Not Working .............................................. 9-4
9.1.4 Valve Does Not Open ..................................................... 9-5
9.2 No or Low Purge Gas Pressure ....................................... 9-5
9.3 No or Low Purge Gas Flow ............................................ 9-6
9.4 No or Low Process Gas Pressure .................................... 9-6
9.5 No or Low Process Gas Flow .......................................... 9-7
9.6 Typical Alarms ................................................................ 9-7
9.6.1 Excess Flow .................................................................... 9-8
9.6.2 Low Pneumatic Pressure ................................................. 9-8
9.6.3 Low Process Cylinder Pressure or Very Low Process

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Cylinder Pressure ............................................................ 9-8
9.6.4 Low Vacuum at PT1 ....................................................... 9-8
9.6.5 Low Purge Pressure at PT1 ............................................. 9-9
9.6.6 High Pressure at Cylinder Connection
(Diss, CGA, keyed VCR, etc) ......................................... 9-9
9.6.7 Standby Leak Detected ................................................... 9-9
9.6.8 Cylinder Connection Leaking ......................................... 9-9
9.6.9 Cylinder Leaking ............................................................. 9-10
9.6.10 Low Vacuum at PT2 ....................................................... 9-10
9.6.11 Low Purge Pressure at PT2 ............................................. 9-10
9.6.12 Low Process Delivery or Very Low Process Delivery ... 9-10
9.6.13 High Process Delivery Pressure or Very High Pressure . 9-11
9.6.14 Low Purge Cylinder Pressure or Very Low Purge
Cylinder Pressure ............................................................ 9-11
9.6.15 Low Purge Delivery Pressure .......................................... 9-11
9.6.16 High Purge Delivery Pressure ......................................... 9-11
9.6.17 High Vent Pressure ......................................................... 9-12
9.6.18 Low Vacuum Generated PT5 .......................................... 9-12
9.6.19 High Purge Delivery PT8 or Very High Purge
Delivery PT8 ................................................................... 9-12
9.6.20 Low Purge Delivery Pressure .......................................... 9-13
9.6.21 High Purge Delivery Pressure ......................................... 9-13
9.6.22 Low Cylinder Weight or Very Low Cylinder Weight .... 9-13
9.7 Troubleshooting Procedures ............................................ 9-14
9.7.1 Troubleshooting Analog Inputs ....................................... 9-14
9.7.2 Troubleshooting Digital Inputs ....................................... 9-15
9.7.3 Troubleshooting Digital Outputs ..................................... 9-15
Chapter 10 Maintenance
10.1 Warranty .......................................................................... 10-1
10.2 Routine Maintenance ..................................................... 10-2
10.3 Component Expected Life ............................................... 10-8
Chapter 11 System Specific Information
11.1 System Specifications .................................................... 11-2
11.2 TE11 Recommended Spare Parts ................................... 11-3
11.2.1 TE11 Controller Recommended Spare Parts .................. 11-3
11.2.2 Source Recommended Mechanical Spare Parts .............. 11-5
11.3 Program Logic Chart ....................................................... 11-6
Appendix A UHP Tubing and Fitting Specification Gas Equipment ................... A-1
Appendix B Nitrogen Material Safety Data Sheet ................................................. B-1

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MNL000296.doc Revision 2 09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Introduction