Versum Materials GASGUARD Source System TE11 Instruction manual

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© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Installation / Operation / Maintenance
Manual
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GASGUARD®
Source System TE11
Manual Part Number: 452169
Edition: Rev-3

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The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part,
without prior written consent of Versum Materials, Inc. The information and data
should be available only to those with a need to know. Versum Materials, Inc. makes no
representation that the information and data is appropriate for the recipient, and each
recipient needs to independently evaluate the appropriateness of the information and
data for its use.
This Installation and Operation Manual is subject to change without notification. For
current technical information please call Product Support at [phone] from
continental U.S., or write Versum Materials, Inc., 7201 Hamilton Blvd, Allentown, PA
18195, attention: Product Support.
Printed in the U.S.A.

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WARRANTY
Versum Materials, Inc. (hereinafter referred to as "Versum Materials, Inc.") warrants
that:
(A) Each new Versum Materials, Inc. Electronics Equipment Solutions system is free
from defects in material and workmanship under normal use and service for a period of
one year from the date of delivery by Versum Materials, Inc. to the first purchaser.
(B) Each new accessory is free from defects in material and workmanship under
normal use and service for a period of one (1) year from the date of delivery by Versum
Materials, Inc. to the first purchaser.
If any product requires service during the applicable warranty period, the purchaser
should communicate directly with Versum Materials, Inc. to determine appropriate
repair. Repair or replacement will be carried out at Versum Materials, Inc. expense
subject to the terms of this warranty. It is the responsibility of the customer to perform
routine maintenance and periodic calibration.
In no event shall Versum Materials, Inc. be liable for any incidental, indirect or
consequential damages in connection with the purchase or use of any Versum Materials,
Inc. product. This warranty shall not apply to, and Versum Materials, Inc. shall not be
responsible for, any loss arising in connection with the purchase or use of any Versum
Materials, Inc. product which has been repaired by anyone other than an authorized
Versum Materials, Inc. service representative or altered in any way so as, in Versum
Materials, Inc. judgment, to affect its stability or reliability, or which has been subject to
misuse or negligence or accident, or which has the unit or lot number altered, effaced or
removed, or which has been used otherwise than in accordance with the instructions
furnished by Versum Materials, Inc..
This warranty is in lieu of all other warranties, express or implied, and all other
obligations or liabilities on Versum Materials, Inc. part, and Versum Materials, Inc.
neither assumes nor authorizes any representative or other person to assume for it any
other liability in connection with the sale of Versum Materials, Inc. equipment.
VERSUM MATERIALS, INC. DISCLAIMS ALL OTHER WARRANTIES,
EXPRESS OR IMPLIED, INCLUDING ANY WARRANTY OF
MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR
APPLICATION.
Corporate address:
Versum Materials, Inc.
1919 Vultee Street
Allentown, PA 18101, U.S.A

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Revision Control Summary
Chapter Revision File Name
Introduction
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 Updated company name and logo
Chapter 1 – Safety Warnings
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Chapter 2 – Dimensions and Mounting
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Chapter 3 – Tubing Connections
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Chapter 4 – Electrical Connections
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Chapter 5 – Helium Leak Check
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Chapter 6 – Functional Checklist
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Chapter 7 – System Description
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Chapter 8 – Operating Procedures
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 Updated controller screen picture, figure 8.1
Chapter 9 – Troubleshooting
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Chapter 10 – Maintenance
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Chapter 11 – System Specific Information
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Appendix A
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Appendix B – Nitrogen Material Safety Data Sheet
Rev-3 MNL000139.doc
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TABLE OF CONTENTS

Introduction
Section 1 Title ................................................................................ I-1
Chapter 1 Safety Warnings
1.1 Introduction ..................................................................... 1-2
1.1.1 Level or Intensity of Hazard .......................................... 1-2
1.1.2 Hazard Types (Symbols) ................................................. 1-2
1.2 Important Safety Warnings ............................................. 1-5
1.3 Inert Gas Hazards ............................................................ 1-6
1.4 Pressurized Fluids / Gases ............................................... 1-7
1.5 Electrical Hazard ............................................................. 1-7
1.6 Falling Equipment Hazard .............................................. 1-8
1.7 Gas Cylinder Handling Hazard ....................................... 1-8
1.8 Pinch Hazard ................................................................... 1-8
1.9 Personal Protective Equipment ....................................... 1-9
1.10 Hazard Warnings ............................................................. 1-12
1.10.1 Toxic Gas Hazards .......................................................... 1-13
1.10.2 Corrosive Gas Hazards .................................................... 1-14
1.10.3 Flammable and Pyrophoric Gas Hazards ........................ 1-14
1.10.4 Oxygen and Other Oxidizer Hazards .............................. 1-16
1.10.5 Inert Gas Hazards ............................................................ 1-18
1.10.6 Pressurized Gases ............................................................ 1-20
1.10.7 Cylinder Handling Hazards ............................................. 1-20
1.10.8 Electrical Hazards ........................................................... 1-21
1.10.9 Purge Gas Backstream Hazard ........................................ 1-22
1.11 Typical Minimal Lockout or Tagout System Procedures 1-22
1.12 Safety Signs and Labels .................................................. 1-26
1.13 Equipment Safety Features ............................................. 1-35
1.14 Safety Literature for Handling and Use of Gas Cylinders 1-36
1.15 Safety Literature for Handling and Use of Instrument
Nitrogen Supply .............................................................. 1-36
Chapter 2 Dimensions and Mounting
2.1 Outline Dimensions ........................................................ 2-2
2.1.1 Outline Dimension Figures for 2 Cylinder Source Systems 2-3
2.1.2 Outline Dimension Figures for 3 Cylinder Source Systems 2-8
2.1.3 Outline Dimension Figures for 1x1 Cylinder Source
Systems ........................................................................... 2-13
2.1.4 Outline Dimension Figures for 1x2 Cylinder Source
Systems ........................................................................... 2-18
2.2 Mounting Hole Locations ............................................... 2-23
2.2.1 Cabinet Anchoring .......................................................... 2-24
2.2.2 Rack Anchoring .............................................................. 2-29

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Chapter 3 Tubing Connections
3.1 Tubing Interconnections ................................................. 3-3
3.2 Process Line Connection ................................................ 3-4
3.3 Vent Line ......................................................................... 3-6
3.4 Venturi Line .................................................................... 3-7
3.5 Purge Line ....................................................................... 3-7
3.6 Pneumatic Supply ............................................................ 3-8
3.6.1 Z-Purge Procedure .......................................................... 3-9
3.7 Enclosure Exhaust System Requirements ....................... 3-10
3.8 Sprinkler Installation ....................................................... 3-13
3.9 Helium Leak Test Port .................................................... 3-14
3.10 Hazardous Gas Leak Detection System (Customer
Requirement) ................................................................... 3-14
3.11 Restrictive Flow Orifice (RFO) for Cylinder Valve
(Customer Requirement) ................................................. 3-15
Chapter 4 Electrical Connections
4.1 Grounding Method ......................................................... 4-1
4.2 Power Supply Connection .............................................. 4-2
4.3 Field Connections ............................................................ 4-4
4.4 External I/O Communication .......................................... 4-6
4.4.1 Available External I/O Communications ........................ 4-8
Chapter 5 Helium Leak Check
Chapter 6 Source System Functional Checklist
6.1 Source system Utility Checklist ........................................ 6-3
6.2 Source System Field Start-up Checklist .......................... 6-5
Chapter 7 System Description
7.1 Gas Cabinet .................................................................... 7-2
7.2 Rack System ................................................................... 7-4
7.3 Auto Switchover System ................................................. 7-5
7.4 Hazardous Gas Panel ....................................................... 7-6
7.5 Inert Gas Purge Panel ...................................................... 7-6
7.6 Panel Schematic and Component Descriptions ............... 7-7
7.7 GASGUARD®TE11Controller.......................................... 7‐12
 7.7.1 ControllerComponents....................................................... 7‐13
 7.8 MainMenuOptions............................................................ 7‐15
 7.8.1 SourceModeMenuOptions............................................... 7‐15
 7.8.2 ActiveAlarms....................................................................... 7‐18
 7.8.3 ConfigurationMenu............................................................ 7‐18
 7.9 HighPressureLeakTest(HPLT)........................................... 7‐18
 7.9.1 Definitions........................................................................... 7‐18
 7.9.2 ValveandTransducerNumbersandNomenclature........... 7‐19

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 7.9.3 DescriptionofOperation..................................................... 7‐19
 7.9.4 AlarmConditionsandResponses........................................ 7‐21
 7.10 MultipleProcessOutlets..................................................... 7‐21

Chapter 8 Operating Procedures
8.1 Emergency Shutdown Procedures .................................. 8-3
8.2 Operation of the Source System Controller ................... 8-5
8.2.1 Source Mode Menu (Left or Right side) ......................... 8-8
8.3 Process and Purge Cylinder Procedure ........................... 8-9
8.3.1 Inert Purge Gas Cylinder Change Procedure .................. 8-10
8.3.2 Process Gas Cylinder Procedures .................................... 8-14
8.4 New System Startup Procedures ..................................... 8-21
8.5 Manual Mode Operation ................................................. 8-23
8.5.1 How to Operate in Manual Mode .................................... 8-23
8.5.2 How to Open and Close Valves ...................................... 8-25
8.5.3 General Principles of Manual Operation ......................... 8-26
8.6 Source System Configuration ......................................... 8-27
8.6.1 Net Product ...................................................................... 8-29
8.6.2 Alarm Setpoints ............................................................... 8-29
8.6.3 Subcycle Parameters ....................................................... 8-30
8.6.4 Leak Test Parameters ...................................................... 8-30
8.6.5 Digitals Inputs ................................................................. 8-31
8.6.6 Digitals Outputs .............................................................. 8-31
8.6.7 Analog Inputs .................................................................. 8-31
8.6.8 Analog Setput .................................................................. 8-31
8.6.9 Analog Conditions .......................................................... 8-32
8.6.10 Helium Leak Check ......................................................... 8-32
8.6.11 Password List .................................................................. 8-32
8.6.12 System Setup ................................................................... 8-32
8.6.13 Edit Date / Edit Time ...................................................... 8-32
Chapter 9 Troubleshooting
9.1 Troubleshooting the Controller ...................................... 9-3
9.1.1 System Off, No Display on Controller ............................ 9-3
9.1.2 Incorrect Analog Value on Display ................................. 9-4
9.1.3 Digital Input Not Working .............................................. 9-4
9.1.4 Valve Does Not Open ..................................................... 9-5
9.2 No or Low Purge Gas Pressure ....................................... 9-5
9.3 No or Low Purge Gas Flow ............................................ 9-6
9.4 No or Low Process Gas Pressure .................................... 9-6
9.5 No or Low Process Gas Flow .......................................... 9-7
9.6 Typical Alarms ................................................................ 9-7
9.6.1 Excess Flow .................................................................... 9-8
9.6.2 Low Pneumatic Pressure ................................................. 9-8
9.6.3 Low Process Cylinder Pressure or Very Low Process

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Cylinder Pressure ............................................................ 9-8
9.6.4 Low Vacuum at PT1 ....................................................... 9-8
9.6.5 Low Purge Pressure at PT1 ............................................. 9-9
9.6.6 High Pressure at Cylinder Connection
(Diss, CGA, keyed VCR, etc) ......................................... 9-9
9.6.7 Standby Leak Detected ................................................... 9-9
9.6.8 Cylinder Connection Leaking ......................................... 9-9
9.6.9 Cylinder Leaking ............................................................. 9-10
9.6.10 Low Vacuum at PT2 ....................................................... 9-10
9.6.11 Low Purge Pressure at PT2 ............................................. 9-10
9.6.12 Low Process Delivery or Very Low Process Delivery ... 9-10
9.6.13 High Process Delivery Pressure or Very High Pressure . 9-11
9.6.14 Low Purge Cylinder Pressure or Very Low Purge
Cylinder Pressure ............................................................ 9-11
9.6.15 Low Purge Delivery Pressure .......................................... 9-11
9.6.16 High Purge Delivery Pressure ......................................... 9-11
9.6.17 High Vent Pressure ......................................................... 9-12
9.6.18 Low Vacuum Generated PT5 .......................................... 9-12
9.6.19 High Purge Delivery PT8 or Very High Purge
Delivery PT8 ................................................................... 9-12
9.6.20 Low Purge Delivery Pressure .......................................... 9-13
9.6.21 High Purge Delivery Pressure ......................................... 9-13
9.6.22 Low Cylinder Weight or Very Low Cylinder Weight .... 9-13
9.7 Troubleshooting Procedures ............................................ 9-14
9.7.1 Troubleshooting Analog Inputs ....................................... 9-14
9.7.2 Troubleshooting Digital Inputs ....................................... 9-15
9.7.3 Troubleshooting Digital Outputs ..................................... 9-15
Chapter 10 Maintenance
10.1 Warranty .......................................................................... 10-1
10.2 Routine Maintenance ..................................................... 10-2
10.3 Component Expected Life ............................................... 10-8
Chapter 11 System Specific Information
11.1 System Specifications .................................................... 11-2
11.2 TE11 Recommended Spare Parts ................................... 11-3
11.2.1 TE11 Controller Recommended Spare Parts .................. 11-3
11.2.2 Source Recommended Mechanical Spare Parts .............. 11-5
11.3 Program Logic Chart ....................................................... 11-6
Appendix A UHP Tubing and Fitting Specification Gas Equipment ................... A-1
Appendix B Nitrogen Material Safety Data Sheet ................................................. B-1

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

Introduction

Chapter I - Introduction
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ImportantSafetyInformation
Readandunderstandthesafetywarningssectioninthismanual
beforeinstallingtheequipment.Failuretodosocanresultin
personalinjuryordeath.
Warnings:
Warnings,likethesampleshownbelowarefoundthroughoutthe
manualtopointouthazardswhichcouldcausepersonalinjuryor
deathifproperproceduresarenotfollowed:

AllinstallationpersonnelMUSTread
andunderstandthesafetywarnings
sectionbeforeinstallingtheequipment.

SYSTEMHAZARDS:
PossiblehazardswheninstallingTHISSYSTEMAREEXPOSURETO:
<PressurizedFluids/Gases  <FallingEquipmentHazard
<OxygenDeficientAtmospheres <CylinderHandlingHazard
<ElectricalHazard   <PinchHazard

Donotmakeanychangestothe
equipmentindependently.Injuryor
deathmayresultfromunauthorized
modifications.Ifequipmentneedsto
bemodified,anVersumMaterials,Inc.’
RepresentativeMUSTbecontacted.

Chapter I - Introduction
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

This manual covers the tasks required to install, operate and maintain a GASGUARD Gas Equipment
System. GASGUARD Gas Equipment Systems including Source System Gas Cabinets and Racks.
Because of unique installation variables from site to site, it is not intended as a step-by-step installation
procedure, but relies on the knowledge of qualified personnel to perform the work properly. This
manual should be read thoroughly by the supervising installation engineer before installation is begun.
GASGUARD Equipment Systems have been designed and built in accordance with the Uniform Fire
Code (UFC) and the National Fire Protection Association (NFPA). They must be installed and
operated in accordance with the UFC, NFPA and all other applicable industrial, federal, state and local
codes.
GASGUARD is a registered trademark. The GASGUARD name is officially registered and legally
restricted to be used only by Versum Materials, Inc. The information and data contained herein are
proprietary to Versum Materials, Inc. and are not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part, without prior written consent of Versum Materials, Inc.
This restriction shall not apply to any safety information contained in the manual. The safety
information is intended for your use and we encourage you to copy it so that anyone using this
equipment knows how to use it safely.

Chapter I - Introduction
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Note: Versum Materials, Inc. recommends that the customer develop a specific "Work Instruction"
for each gas cabinet, rack system or distribution system. The work instruction can be used as a step
through check list procedure for trained operators.
A standard industrial work instruction would include the following:
 System identification number, gas service, basic description of system, etc.
 Current operating data (pressure, etc.), date, time, operator.
 Tools/supplies required for maintenance (PPE required for the gas, leak testing equipment,
gaskets, etc.)
 Step-through procedural check list to include specific customer PPE protocol, communications
and customer leak test procedures.
Consult your local Versum Materials, Inc. technical representative if you need assistance in
preparation of standard work instruction.
Please refer to the Table of Contents of this manual for a listing of the detailed Chapters and Sections
within and what pages they can be found on.
The table below provides a quick reference as to the applicability of the manual's sections.
Manual Section Supervisory Maintenance Operations
1. Safety Warnings 
2: Dimensions and Mounting 
3: Tubing Connections 
4: Electrical Connections 
5: Helium Leak Test 
6: Distribution System
Functional Checklist
  
7: System Description 
8: Operating Procedures 
9: Troubleshooting  
10: Maintenance  
11: System Specific Information 
Appendices 
The information and data contained herein are proprietary to Versum Materials, Inc. and are not to be
copied, reproduced, duplicated or disclosed to others, in whole or in part, without prior written consent
of Versum Materials, Inc.
This restriction shall not apply to any safety information contained in the manual. The safety
information is intended for your use and we encourage you to copy it so that anyone using this
equipment knows how to use it safely.

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Chapter 1
Safety Warnings
Section 1 Introduction
Section 2 Important Safety Warnings
Section 3 Inert Gas Hazards
Section 4 Pressurized Fluids / Gases
Section 5 Electrical Hazard
Section 6 Falling Equipment Hazard
Section 7 Gas Cylinder Handling Hazard
Section 8 Pinch Hazard
Section 9 Personal Protective Equipment
Section 10 Hazard Warnings
Section 11 Typical Minimal Lockout or Tagout System
Procedures
Section 12 Safety Signs and Labels
Section 13 Equipment Safety Features
Section 14 Safety Literature for Handling and Use of Gas
Cylinders
Section 15 Safety Literature for Handling and Use of Instrument
Nitrogen Supply

Chapter 1 - Safety Warnings
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Please read the following safety warnings carefully before installing the equipment.
1.1 Introduction
This section is meant to communicate to the user any hazards involved with the equipment.
The following paragraphs will define the hazard warnings used and describe the icons found in various
sections of the manual and on the equipment. The hazard warning labels used in the manual will
correlate with those used on the equipment.
1.1.1 Level or Intensity of Hazard
Indicates an immediate hazard, which if
not avoided, will result in death or
serious injury.

Indicates a potentially hazardous
situation, which if not avoided, could
result in death or serious injury.

Indicates a potentially hazardous
situation, which if not avoided, may
result in a minor or moderate injury. It
may also be use to alert against unsafe
practices.
1.1.2 Hazard Types (Symbols)
This symbol is a safety alert symbol.
This symbol represents asphyxiant, toxic or corrosive
gases. Gases used with the GASGUARD® can cause
personal injury or death.

Chapter 1 - Safety Warnings
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This symbol can represent one or more of the following
conditions:
Explosive gases! Gases used with the GASGUARD® can
cause an explosion when combined with air.
The formation for explosive gas mixtures of flammable gas
and air when exposed to an ignition source.
Pyrophoric gases which will ignite spontaneously without
the presence of an ignition source when exposed to air.
Energy release which may result from pneumatic or
hydraulic pressure rapidly escaping from a portion of the
equipment.
This symbol represents flammable gases. Gases used with
the GASGUARD® can cause flammable atmospheres.
This symbol represents PPE (Personal Protective
Equipment). Proper PPE shall be worn when working
with this system.
This symbol represents electrical shock hazard.
This symbol warns of potential strain or injury when
lifting cylinders.


Chapter 1 - Safety Warnings
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This symbol warns of a pinch hazard. This hazard exists
on cabinet doors equipped with automatic closers.

This symbol indicates the need for head protection.

This symbol warns of the possibility of the
source system tipping over if it is not installed
properly. Personal injury could result.
This s
y
mbol cautions a
g
ainst the improper
anchoring of cabinets.

Chapter 1 - Safety Warnings
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1.2 Important Safety Warnings
Failure to read, understand and follow the
safety information found in this section
could result in personal injury and death.

The operator must read and understand
this safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Versum Materials, Inc.
All cylinder storage areas must be
continually monitored with an air quality
monitor to prevent the danger of a
hazardous atmosphere.
Before using the system, review your
company's requirements for use of toxic,
corrosive, flammable, pyrophoric, oxidizers
and inert gas cylinders and electrically
powered equipment. You must be
thoroughly trained in your company's
safety procedures and safety equipment
(self-contained breathing apparatus,
emergency shutdown systems, plant alarm
locations, etc.)

Chapter 1 - Safety Warnings
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Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 1 - 6
Do not use this device in any manner other
than specified in this manual.
Do not make any changes to the equipment
independently. INJURY or DEATH may
result from unauthorized modifications.
All modifications to equipment MUST be
approved in writing by an Versum
Materials, Inc.' Representative.
1.3 Inert Gas Hazards
High concentrations of nitrogen, helium, or
other inert gases can cause an oxygen
deficient atmosphere in a confined area
which can cause DEATH. All personnel
must read and understand the material
safety data sheet(s) (MSDS) for the specific
gas(es) being used.
Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel.
Before working in an area where nitrogen, helium or other inert gases could be present, check the area
with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%. While
working in the area, the oxygen concentration needs to be monitored with a continuous oxygen
monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen
deficient atmosphere.
Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated. Breathing of
pure inert gases will cause immediate unconsciousness. Symptoms of asphyxia include:
 Rapid breathing
 Nausea
 Vomiting
 Inability to move
 Convulsive movements
 Collapse
 Abnormal pulse
 Rapid fatigue

Chapter 1 - Safety Warnings
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MNL000294.doc Revision 2 09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 1 - 7
 Faulty judgment
 Insensitivity to pain
 Abnormal emotions
Remove any personnel in an oxygen deficient atmosphere to fresh air. Get medical attention
immediately. Positive pressure breathing apparatus must be worn by any rescuers entering a
suspected oxygen deficient atmosphere.
Nitrogen gas may accumulate in low or confined areas. All requirements of OSHA 1910.146
(Confined Space Guidelines) must be met when inert gases may be present in confined spaces. Self
contained breathing apparatus is required (cartridge or filter type gas masks cannot be used). See the
information on personal protective equipment in this section for details.
When entering a confined area or area which may contain high inert gas concentrations, a "Buddy
System" must be used. One person should remain outside the suspect area, but within view of the
other person. This method ensures that the other person can respond in the event of an emergency.
1.4 Pressurized Fluids / Gases
Pressurized gas and water sprinkler lines
can injure personnel and damage
equipment. Never tighten or loosen a fitting
when it is under pressure.
The house nitrogen supply lines can contain pressures of 100+ psig (6.9+ barg). The water sprinkler
lines contain pressures of 30 psig (2.1 barg). Exercise care when working around these lines. Ensure
that pressure has been vented before breaking any connection. Tag out and lock out the line before
doing any work. Follow Typical Minimal Lockout or Tagout System Procedures described by
Occupational Safety and Health Admin., Labor Para. 1910.147.
1.5 Electrical Hazard
Electric shock can cause personal injury or death.