Adixen ATH 2300 M User manual

Operating instructions
Operating instructions
Translated from original version
Translated from original version
ATH 2300 M/MT
Turbopumps
EN
EN

GB 01717 - Edition 06 - Nov 12
1/2
ATH 2300 M/MT - Turbopumps
Welcome
Dear Customer,
You have just purchased
an adixen Magnetically
turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field of
turbopump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
Applications:
SEMICONDUCTOR APPLICATIONS:
Plasma etching, Ion implantation,
Sputtering, Plasma deposition.
OTHERS APPLICATIONS:
Electron microscopes, Surface analysis,
Research and development, High energy physics, Space simulation,
Accelerators.
Advantages:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight - Smart and
compact electronic controller - Reliability - Maintenance free -
Battery free - Easy integration.
This operating instruction manual includes only the instructions to connect
the pump to the equipment. Refer to the controller operating instructions
to power and use the pump (chapter B, C and D).
This pumping component is designed to generate vacuum by pumping on
gases, but no liquids neither solids. It is dedicated for running in industrial
environments.
The integrator of this component must provide all operator safety measures
mainly against hot surfaces.
This pumping component must not operate in an area with risk of explosion.
Consult us to study a solution.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

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ATH 2300 M/MT - Turbopumps
GB 01717 - Edition 06 - Nov 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright
and intellectual property rights in force in any
jurisdiction.
All rights reserved, including copying this document in
whole or any part without prior written authorization
from adixen Vacuum Products.
Specifications and information are subject to change
without notice by adixen Vacuum Products.
This product complies with the requirements of European Directives, listed
in the Declaration of Conformity contained in sheet G 100 of the controller
operating instructions.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01718 - Edition 05 - Nov 12
1/2
MANUAL REFERENCE: 108895
EDITION: 06 - January 2013 General contents
ATH 2300 M/MT Operating manual
Translated from original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 2300 M/MT pumps
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Technical characteristics of the pump
A 510 - The accessories of the pump
A 515 - Pump accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and inlet air valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product maintenance
D 150 - Maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 50 - Replacement of the water valve coil
E 100 - Shipping procedure for contaminated pumps
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 100 - First level maintenance parts
Chapter G APPENDIX
G 150 - Pumping curves
G 200 - Service
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MTadixen Vacuum Products - Operating instructions - ATH 2300 M/MT

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General contents
ATH 2300 M/MT Operating manual
GB 01718 - Edition 05 - Nov 12
MANUAL REFERENCE: 108895
EDITION: 06 - January 2013
Translated from original version
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the
product.
Before switching on the product, study the Operating instructions and make
sure you follow the safety instructions it gives. You can recognise these by
the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
ON
OFF
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
Lock the electrical connector before using the
pump and during operation
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
Direction of rotation of the pump
LOCK
adixen Vacuum Products - Operating instructions - ATH 2300 M/MTadixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01719 - Edition 04 - Nov 12
1/1
Introduction
ATH 2300 M/MT Operating manual
Detailed contents
A
A 150 Introduction to the ATH 2300 M/MT pumps
A 200 Control loop of the pump
- 5 actives axis
- Unbalanced force rejection control
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The back-up ball bearings
- No maintenance
- Battery free
- Variation of the pump rotational speed
A 400 Technical characteristics of the pump
A 510 The accessories of the pump
A 515 Pump accessory dimensions
- Purge valve (50 sccm) dimensions
- Air inlet valve dimensions
- Water valve dimensions
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01720 - Edition 05 - Nov 12
1/1
A 150
Introduction to the ATH 2300 M/MT
pumps
1 magnetically
levitated hybrid
turbo pump
Five active axes
Rotor position control in 5 directions.
Automatic balancing system
Lowest possible levels of noise and vibration.
Compensation for any imbalance of the rotor.
Maintenance free
Inert gas purge
Eliminate corrosion of the motor and magnetic bearing coils.
Battery free
In case of a power failure, the pump motor acts like a generator
to transform the rotor energy into electrical power to supply the
controller.
ATH 2300 M
ATH 2300 MT Integrated heater band
Maintaining the pumps internal surface up to 75 °C to prevent the
condensation effect.
Temperature regulated by the controller. The MT version is supplied
with a water valve.
Controllers The ATH 2300 M/MT pumps work with the OBC controller or with
the MAGPOWER controller.
(refer to the operating instructions corresponding).
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

5 active axis The mobile assembly formed by the turbo rotor and the shaft is
known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has 5 axes of freedom monitored by 5 active
magnetic bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
+
Correction
+
Position
sensor
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded, the
controller corrects differences to bring the rotor back to its
optimum position, by varying the current in electro-magnets.
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
A 200
Control loop of the pump
1/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

Unbalanced force
rejection control
The unbalanced force rejection control is an electronic
function, that monitors the rotor position, allowing it to rotate
in its own axis of inertia.
Changes in the rotor balance, due to deposit built-up during
the life time of the pump, are automatically compensated by
the unbalanced force rejection control.
It ensures the lowest possible levels of noise and vibration.
Stator geometric axis
Rotor geometric axis
Rotor inertia axis
A 200
Control loop of the pump
2/2
GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 03411 - Edition 04 - November 12
1/3
A 210
The pump operating principle
Pumping principle The ATHM pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section.
The turbomolecular section provides high pumping speeds and
high ultimate vacuum. The molecular drag section provides a high
compression ratio and extends forevacuum tolerance.
INLET
Dry back-up bearings
EXHAUST
Cooling
Magnetic
levitated
bearings
Motor
Molecular
drag
Stator
Rotor
Gas purge*
* The gas purge provides an excellent protection of the maglev
bearings for corrosive applications and ensures the rotor cooling.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

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A 210
The pump operating principle
GB 03411 - Edition 04 - November 12
The hybrid-
turbopump in an
installation
At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
The ATHM compression ratio is set by the design. The pumping
performances depend of the primary pump and of the installation.
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Primary
pumping
Rough vacuum
High vacuum
The built-in heater band
allows pump heating up
to 75 °C, which is sufficient
to avoid the condensation
effect.
This device is controlled by
the controller.
The MT version must be
equipped with its water
valve (the water valve
is supplied with the MT
model).
The built-in heater band
(on MT model)
Heater
band
At high pressure and high throughput processes such as metal etch,
deposit can build up in the lower compression stages of the rotor,
leading the pump to early failure.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 03411 - Edition 04 - November 12
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A 210
The pump operating principle
The back-up ball
bearings
They are dry-lubricated ceramic ball bearings.
They are never used in normal operation, since the rotor is not in
contact with the ball bearings.
The back-up ball bearings are only used to protect the pump in
accidental air in-rushes, accidental shocks or power failure.
No maintenance By design, the pump doesn’t include parts liable to wear and doesn’t
need preventive maintenance. However, the back-up ball bearings
used in case of accidental shut-downs have to be changed when
the controller indicates it: the percentage of landing time to be
deducted depends on the number of incidents. The maximum life
time of the rotor is described in D 150.
Battery free In case of a power failure, the motor acts like a generator, supplying
enough power for the magnetic bearings.
When the rotation speed is too low, the pump shuts down and lands
on the back-up ball bearings.
Variation of the pump
rotational speed
The ATHM pump rotation speed can be selected and set between
a minimum speed and the maximum speed. This makes it possible
to optimize pumping characteristics according to each customer
application (for example, high pressure pumping).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set between the
low speed value and the nominal speed.
- nominal speed preselected at factory.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01725 - Edition 05 - Nov 12
1/5
A 400
Technical characteristics of the pump
Characteristics UNIT ATH 2300 M ATH 2300 MT
Flange (inlet) ISO-K DN 200 DN 250 DN 200 DN 250
Flange (exhaust) ISO KF DN 40
Pumping speed*
Ar l/s 1 450 2 000 1 450 2 000
H2 l/s 1 100 1 100 1 100 1 100
He l/s 1 650 1 800 1 650 1 800
N2 l/s 1 550 2 150 1 550 2 150
Compression rate
Ar > 1 · 108
H2 > 2 · 103
He > 3 · 104
N2 > 1 · 108
Gas throughput (1) (2)
Ar sccm 1 500 500
H2 sccm > 4 000 > 1 000
He sccm > 4 000 > 1 000
N2 sccm 4 000 1 000
Fore vacuum max. (3)
Ar hPa 3.7 3.5
H2 hPa 0,75
He hPa 2
N2 hPa 2.9 2.8
Inlet vacuum max. (2) Ar hPa 0.025 0.006
N2 hPa 0.25 0.015
Ultimate pressure (4) hPa < 6 · 10-9
Nominal rotation speed tr/mn (Hz) 31 000 (517)
Standby speed tr/mn (Hz) from 15 000 (250) to nominal speed 31 000 (517)
Sound pressure level db(A) < 47
Pump protection index IP 42
Controller power supply V 200-240 (50/60 (Hz)
Maximum leakage current mA < 12
Max. start-up supply ** W < 1 000 < 1 250
Power consumption at ultimate pressure W < 130 < 380
Max. apparent start-up power ** VA < 1 700 < 1 900
Mounting orientation any
Maximum heating temperature °C - 75
Heating power of the heating band (the
same input voltage as the controller) W - 250 (nominal value)
N2 purge flange ISO KF DN16
Integral leak rate (7) hPa l/s < 5·10-8
* Without inlet screen.
** Value could be depend on controller type.
(1) At nominal rotational speed, water temperature = 25 °C (M = cold ; MT = 65 °C).
(2) With a low exhaust pressure, depends on external conditions (water temperature, water flow, ambient temperature).
(not applicable for air cooling version).
(3) With ratio inlet pressure/exhaust pressure >100, max. throughput reduced.
(4) ISO/F flange, better with CFF flange.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

2/5
A 400
Technical characteristics of the pump
GB 01725 - Edition 05 - Nov 12
Characteristics UNIT ATH 2300 M ATH 2300 MT
ISO-K DN 200 DN 250 DN 200 DN 250
Run-up time up to 90 % of nominal
rotation speed, with exhaust pressure
< 0,1 hPa **
min < 8
Maximum baking temperature °C 120
Recommended purge flow rate sccm 50
Vibration level at nominal speed μm < 0,01
Maximum water line pressure hPa 7·103
Weight of the pump kg (lb) 60
Recommended backing pump adixen ADP / ADS
Cooling water flow rate l/h > 60
Water temperature (5) °C 15 < T < 40 15 < T < 25
Environmental conditions:
- Ambient operating temperature (6) °C 5 < T < 45 5 < T < 25
- Use of the product
- Maximum altitude
- Accept transient over voltages typi-
cally present on the main supply
- Pollution degree applicable
- Maximum relative humidity (8)
m/ft
°C
Indoor only
2 000/6 562
Catégory II
2
80 %
Three phase motor characteristics
(max values): **
- Voltage between phases
- Supply frequency
- Phase current
Vrms
Hz
A
40
1033
12
(5) Over 25 °C apply a derating on continuous max flow.
(6) Not applicable for air cooling version.
(7) Not all leakage current is necessary evacuated through the earth wire; it depends on the pump earth connect regarding the
equipment to which the pump is connected.
(8) Maximum relative humidity 80 % for temperatures up to 31 °C, decreasing linearly to 50 % relative humidity at 40 °C.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01725 - Edition 05 - Nov 12
3/5
A 400
Technical characteristics of the pump
48,2°
61°
60°
de
22,5°
50,5°
70,5°
115,5 f
g
60°
h
131
E
H
CG
52,8
L
J
174,5
b
ØD
Ø260
K
I
131,5
Ø207 Ø310
160
A°
d1
24,1°
170
Number of holes d2 on d1
Gravity center
Inlet
Exhaust
Exhaust
Ø242
(4.55)
(12.2)
(9.53)
(8.15)
(6.3)
(10.23)
(6.69)
(5.16)
(2.08)
(5.18)
(6.87)
Dimensions
ATH 2300 M
Inlet flange E H I J K L D d1 d2 N A° CG
DN 250 ISO-F
mm 16,00 232,50 322,60 348,00 325,50 358,50 335,00 310,00 11,00 12,00 15° 170,00
inch 0.63 9.15 12.70 13.70 12.81 14.11 13.19 12.20 0.43 0.47 15° 6.69
DN 250 ISO-K
mm 12,00 232,50 322,60 348,00 325,50 358,50 290,00 ----179,00
inch 0.47 9.15 12.70 13.70 12.81 14.11 11.42 - - - -7.05
DN 250 CF-F
mm 26,00 276,50 366,60 392,00 369,50 402,50 306,00 284,00 8,60 32,00 5,625° 204,00
inch 1.02 10.89 14.43 15.43 14.55 15.85 12.05 11.18 0.34 1.26 5.625° 8.03
DN 200 ISO-F
mm 16,00 276,50 366,60 392,00 369,50 402,50 306,00 260,00 11,00 12,00 15° 204,00
inch 0.63 10.89 14.43 15.43 14.55 15.85 12.05 10.24 0.43 0.47 15° 8.03
DN 200 CF-F
mm 12,00 276,50 366,60 392,00 369,50 402,50 306,00 ----213,00
inch 0.47 10.89 14.43 15.43 14.55 15.85 12.05 - - - -8.39
b : Inlet flange
d : Exhaust DN40 ISO - KF
e : Water inlet and outlet 1/4 NPT female others pumps
f : N2 purge DN16 ISO-KF
g : 6 holes M10-6H on ø 190
Depth max 29, Depth min 25
h : Electrical power supply
Dimensions (mm/inch)
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

4/5
A 400
Technical characteristics of the pump
GB 01725 - Edition 05 - Nov 12
Number of holes d2 on d1
A°
E
H
K
CG
Gravity center
ØD
Ø207 (8.15) Ø242 (9.53) Ø310 (12.2)
J
L
48,2°
61°
60°
60°
70,5°
115,5 (4.55)
60°
22,5°
50,5°
(8.58)(htr conn)
217,9
131 (5.16)
I
ad
b
e
f
h
g
174,5 (6.87)
131,5
Inlet
Exhaust
Exhaust
Connector for thermal regulation
d1
(5.18)
Dimensions (mm/inch)
ATH 2300 MT
Dimensions
Inlet flange E H I J K L D d1 d2 N A° CG
DN 250 ISO-F
mm 16,00 232,50 322,60 348,00 325,50 358,50 335,00 310,00 11,00 12,00 15° 170,00
inch 0.63 9.15 12.70 13.70 12.81 14.11 13.19 12.20 0.43 0.47 15° 6.69
DN 250 ISO-K
mm 12,00 232,50 322,60 348,00 325,50 358,50 290,00 ----179,00
inch 0.47 9.15 12.70 13.70 12.81 14.11 11.42 - - - -7.05
DN 250 CF-F
mm 26,00 276,50 366,60 392,00 369,50 402,50 306,00 284,00 8,60 32,00 5,625° 204,00
inch 1.02 10.89 14.43 15.43 14.55 15.85 12.05 11.18 0.34 1.26 5.625° 8.03
DN 200 ISO-F
mm 16,00 276,50 366,60 392,00 369,50 402,50 306,00 260,00 11,00 12,00 15° 204,00
inch 0.63 10.89 14.43 15.43 14.55 15.85 12.05 10.24 0.43 0.47 15° 8.03
DN 200 CF-F
mm 12,00 276,50 366,60 392,00 369,50 402,50 306,00 ----213,00
inch 0.47 10.89 14.43 15.43 14.55 15.85 12.05 - - - -8.39
a : Pump heater power
b : Inlet flange
d : Exhaust DN40 ISO - KF
e : Water inlet and outlet 1/4 NPT Female others pumps
f : N2 purge DN16 ISO-KF
g : 6 holes M10-6H on ø 190
Depth max 29, Depth min 25
h : Electrical power supply
3 THREADED HOLES
M6 AVAILABLE TO
CONNECT A FUNC-
TIONAL EARTH
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 01725 - Edition 05 - Nov 12
5/5
A 400
Technical characteristics of the pump
Dimensions (mm/inch)
ATH 2300 MT with OBC
Controller
Inlet flange A N d2 d1 D E L K J M I H CG1 CG2 CG3
DN 250 ISO-F
mm 15 12 11 310 335 16 481 325,50 323,50 429 299 232,50 198 2 7,5
inch 0.59 0.47 0.43 12.20 13.18 0.63 18.93 13.19 12.73 16.88 11.77 9.15 7.79 0.78 0.29
DN 250 ISO-K
mm - - - - 290 12 481 325,50 323,50 429 299 232,50 206 2 7,5
inch 11.41 0.47 18.93 12.81 12.73 16.88 11.77 9.15 8.11 0.78 0.29
DN 200 ISO-K
mm - - - - 240 12 525 369,50 371,50 473 343 276,50 240 2 7
inch 9.44 0.47 20.66 14.55 14.62 18.62 13.50 10.88 9.44 0.78 0.27
DN 200 ISO-F
mm 15 12 11 260 285 16 525 369,50 371,50 473 343 276,50 231 2 7
inch 0.59 0.47 0.43 10.23 11.22 0.63 20.66 14.55 14.62 18.62 13.50 10.88 9.09 0.78 0.27
DN 250 CF-F
mm 5,625 32 8,6 284 306 26 525 369,50 371,50 473 343 276,50 231 2 7
inch 0.22 1.26 0.34 11.18 12.04 1.02 20.66 14.55 14.62 18.62 13.50 10.88 9.09 0.78 0.27
Dimensions
Purge port DN 16
ISO-KF
Exhaust
DN 40 ISO-KF
1/4 NPT water outlet
Heater banc connector
N holes Ø d2 along d1
OUT
IN
(5.79)
(5.17)
(7.62)(4.97)
(2.02)
(2.23)
(8.57)
(7.88)
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 02992 - Edition 04 - Nov. 12
1/2
A 510
The accessories of the pumps
Inlet screen This screen protects the pump against solid particles. It is integrated
into the pump housing.
DN 200 P/N
Convexe filter (S.steel) + clip (mesh size 4.5 mm) 108872
DN 250 P/N
Convexe filter (S.steel) + clip (mesh size 5 mm) 108762
Purge flow reduction
device
This device is used to reduce
the purge gas flow rate in
some processes.
Flow Reduction
device DN 16 * P/N
50 SCCM 066752
Isolation valve
at pump inlet
The secondary isolation valve is used to maintain the vacuum in the
chamber while the pump is reset to atmospheric pressure.
See the manufacturer’s catalog.
* For pumps equipped with purge
valve (see next page).
Pumps model Inlet
size DN
P/N for
ISO F Description P/N for CF-F Description
ATH 1603 M
200 110675
110676S
12 CHC M10x30
12 CHC M10x35 *
250 110675
110676S
12 CHC M10x30
12 CHC M10x35 *
ATH 2303 M
ATH 2300 MT
200 114510 12 stub M10x35 * --
250 110034
110676S
12 CHC M10x30
12 CHC M10x35 * 118690 32 Studs M8x35
Bolt and washer kit
for pump installation
* With centering ring
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

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A 510
The accessories of the pumps
GB 02992 - Edition 04 - Nov. 12
Dimensions P/N
1 m A462403-010
3.5 m A462403-035
5 m A462403-050
10 m A462403-100
20 m A462403-200
Purge valve * (50 sccm)
(driven by the customer
tool)
Air inlet valve *
Air inlet valve cables
and purge valve cables
(for pumps controlled by
Magpower)
The air inlet valve, powered by the
controller, is installed on the pump
exhaust port. It allows to reduce
the braking time of the pump to
put it at the atmospheric pressure.
It is a NC valve which is activated
when the pump nominal speed is
below 10 000 rpm.
Air inlet valve P/N
24 V DC 114280
Purge valve 50 sccm P/N
24 V DC 111921S
The gas purge provides an
excellent protection of the maglev
bearings for corrosive applications
and ensures the rotor cooling.
The purge of this valve can be
isolated during an air tightness
test.
* Provide a power line compatible with extra low voltage and safety standards
(SELV).
Dust filter
Dust filter
Water valve P/N
Water valve 108668
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT

GB 04430 - Edition 04 - January 13
1/2
A 515
Accessory dimensions
Purge valve (50 sccm)
dimensions mm (inch)
30 (1.18)
22 (0.86)
83.3 (3.28)
32 (1.26)
1/8 NPT
Can rotate Plug coil
Pump connection
62 (2.44)
82 (3.23)
65,5 (2.58)
18,5 (0.73)
65 (2.56)
1/8NPT female
connector
(air inlet)
DN 40 ISO KF
Pump connection
Connector for coil
(possible to rotate)
1/8 NPT female connector
Dust filter
Air inlet valve
dimensions
mm (inch)
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT