Adixen ADP122 User manual

Operating instructions
Operating instructions
Translated from original version
Translated from original version
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ADP / ADS Series Two
Multistage Roots dry pump
EN
EN

G 02274 - Edition 07 - July 12
1/2
ADP/ADS Series Two
APPLICATIONS:
• H version : for harsh processes.
• P version : for medium processes.
• LMversion : for clean processes.
AVANTAGES:
Reduced volume and foot-print – Low operating cost –
High performance (pumping speed and ultimate pressure) –
Excellent behavior in harsh environments – Easy integration –
Advanced monitoring functions (Stand-by position to reduce N2
consumption, power failure protection) – SEMIS2-93 standard
compatible (on option).
SPECIAL FEATURES:
Multi-stage Roots technology – Water-cooled multi-voltage motors –
Exhaust and utilities connections possible on top or at the rear of
the pump – adixen Network compatible.
Dear Customer,
you have just purchased
an adixen dry pump.
We thank you and are
proud to include you in
our customers.
This product has benefited
from adixen Vacuum
Products’ many years
of experience in
“semi-conductor” processes
and dry pumping.
For optimum performance
and to obtain full satisfaction
from this equipment, we
recommend that you study
this manual before any
intervention on your pump,
in particular, the chapter on
installation and start up.
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

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ADP/ADS Series Two
G 02274 - Edition 07 - July 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction. All rights
reserved, including copying this document in whole or any part
without prior written authorization from adixen Vacuum Products.
Specifications and information are subject to change without
notice by adixen Vacuum Products.
This product complies with the requirements of European Directives, listed in
the Declaration of Conformity contained in sheet G100 of this manual.
These Directives are amended by Directive 93/68/E.E.C (E.C. Marking).
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01033 - Edition 08- September 14
1/2
MANUAL REFERENCE: 111128
EDITION: 08 - September 2014 Contents
Operating instructions
ADP/ADS Series Two
Chapter A INTRODUCTION
A 010 - Dry pump operational principle
A 020 - ADP/ADS Series Two dry pump range
A 030 - M4 monitoring
A 040 - Technical characteristics
A 050 - Accessories
A 060 - Options
Chapter B START UP
B 000 - Safety instructions
B 010 - Unpacking / Storage
B 020 - Positioning the pump in the pumping installation
B 025 - Filling the machine oil housings
B 030 - Connection to the cooling circuit
B 040 - Inert gas purge connection (N2 plug)
B 050 - Electrical connection
B 051 - Checking the direction of rotation at initial pump start-up
B 060 - Connection to the pumping circuit
B 070 - J14 Remote control plug connection
B 100 - Emergency stop plug connection
B 110 - RS 232 or RS 485 link wiring
B 130 - Installation of exhaust heater accessory
Chapter C OPERATION
C 000 - Safety recommendations for harsh processes
C 010 - Operating modes
C 020 - M4 monitoring system parameters
C 040 - Operating mode with hand held remote
C 041 - Start-up of the M4 monitoring system
C 042 - M4 monitoring system function table
C 043 - Use of the M4 monitoring system for pumping operation
C 044 - Saving and remote loading of pump configuration (M4 monitoring)
C 045 - M4 monitoring setting for transport
C 050 - Water flowrate on ADS 602, P and H versions
C 060 - Use of the option “Power failure protection”
C 070 - Use of the Inlet isolation valve (accessory)
C 090 - Use of the serial link (M4 monitoring).
Chapter D MAINTENANCE
D 000 - Safety instruction related to maintenance
D 010 - First level of maintenance
D 030 - Diagnosis and troubleshooting
D 400 - Pump or Roots does not start
D 500 - The pump is running and then is showing a warning or fault message
D 600 - The pump is running but the performances are not correct
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

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Contents
Operating instructions
ADP/ADS Series Two
G 01033 - Edition 08- September 14
MANUAL REFERENCE: 111128
EDITION: 08 - September 2014
Chapter E MAINTENANCE SHEET
E 010 to E 015 - ADP/ADS exchange standard repair
Chapter G APPENDIX
G 100 - CE Marking certificate
G 101 - Semi certificate
G 110 - ADP/ADS electrical schematic (P/LM/H models)
(with option power failure protection)
G 120 - ADP/ADS electrical schematic (P/LM/H models)
(without option power failure protection)
G 150 - Frequency converter wiring for ADS 1202
G 151 - Frequency converter wiring for for ADS 1802
G 200 - Service
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01037 - Edition 08 - January 10
1/1
Introduction
User’s Manual ADP/ADS Series Two
Detailed contents
A
A 010 Dry pump operational principle
A 020 ADP/ADS Series Two dry pump range
A 030 M4 monitoring
A 040 Technical characteristics
A 050 Accessories
A 060 Options
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01038 - Edition 05 - September 03
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A 10
Dry pump operational principle
LP 1 LP 2 LP 3 HP 4 HP 5
Design to minimize
potentiel residues
The equipment was designed to minimize potential residue deposits:
by limiting the internal volumes that contain gas,
by injecting N2purge on each pump stage to dilute the process
gas (P and H versions),
by regulating the pump temperature and adjusting it to each
process in order to limit gas condensation (P and H versions).



Multi-stage Roots
principle
The ADP pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
The three stages on the low pressure side are called “LP stages” and
the two stages on the high pressure side are called “HP stages”.
Water
Inlet
Exhaust tube
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A 10
Dry pump operational principle
G 01038 - Edition 05 - September 03
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas. The pressurization and the seals prevent pumped gases
from migrating towards the bearings.
Neutral gas purging for the bearings is imperative for corrosive
processes.
Tightness at low
pressure side
Tightness at motor side
(shaft passage)
The vacuum tightness is ensured
by the motor design with built-in
jacket (hermetically sealed).
This system provides total safety
regarding leaks outside the pump
and requires no maintenance.
1 - Built-in jacket
2 - Motor housing
3 - Electrical rotor
1
2
3
Tightness at high
pressure side
The bearings are lubricated by oil splashing.
The oil sump is sealed from stage HP5by a trap and a deflector.
1
2
5
7
3
86
1 - Stage HP5
2 - Cooling plate (trap)
3 - Water cooling
4 - HP5purge
5 - Dynamic seal
6 - Lubrication disk
7 - Gear casing
8 - Deflector
4
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01038 - Edition 05 - September 03
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Dry pump operational principle
Tightness at shutdown The pump is fitted with an antisuckback valve in the exhaust tube, that
prevents the exhaust being sucked back.
The pump in a
pumping installation Process
chamber
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Secondary
pumping
ADP
pump
HIGH
VACUUM
ROUGH
VACUUM
ATMOSPHERE
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01039 - Edition 08 - December 06
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A 20
ADP/ADS Series Two dry pump range
The pump manufacturer has developed a range of dry pumps
adapted to the different processes used in the semi-conductor industry.
The range includes:
ADP122, which is available in two versions:
ADP 122 P: integrated in a covered frame including: the pump,
the monitoring, the hand-held remote control, facilities, the
flowmeter panel, the OEM interface, the serial link.
ADP 122 LM: simplified model with monitoring designed for clean
processes (load-lock and transfer chamber pumping).
Five pumping groups composed of an ADP122 combined with
a Roots to make a fully integrated system:
ADS 602 H, ADS 602 P, ADS 602 LM, ADS 1202 H and
ADS 1202 P for semi-conductors processes.
Two high volume pumping groups ADS 1802.
They are composed of a A300 primary dry pump with a
RSV 1802W Roots blower fitted to the inlet of the dry pump.
The A300 dry pump is a five stage Roots type pump similar to
ADP 122 pump, the RSV 1802W booster is a Roots blower type
pump similar to RSV 1002P blower used in ADS 1202 P system.
They are available in two versions:
ADS 1802 P for medium processes in the semi-conductor.
ADS 1802 H for harsh processes (anti-corrosive materials,
possibility to increase purge flowrate). It includes a built-in
dual cooling system.
H models are optimized for harsh processes (anti-corrosive materials,
possibility to increase purge flowrate). Beside they are equipped with
exhaust pipe heater device which reduces deposits when pumping
condensable gases.
Model’s description
Monitoring Purge Thermo-controlled Applications
ADP 122 LM - ADS 602 LM M4 No No Clean processes
ADP 122 P - ADS 602 P
ADS 1202 P - ADS 1802 P M4 Yes Yes Medium processes
ADS 602 H
ADS 1202 H - ADS 1802 H M4 Yes Yes Harsh processes
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ADP/ADS Series Two dry pump range
G 01039 - Edition 08 - December 06
Interfaces
(example ADP 122 P)
Inlet
Mains power supply
Exhaust
inlet outlet
N 2 purge
Main switch
Mains on
Electrical
interface
panel
Rear view
Front view
Display panel
Emergency stop button
Hand-held remote control
Water circuit
Facilities at the rear
Facilities on the top
Exhaust
Mains switch
Remote control connector
Configuration switch
Coding wheel
Hand-held remote
control connector
RS 232/485 connector
RS 485 connector
Mains wire
Facilities (water + gas)
Electrical interface panel
J14
S1
S2
J4
J6
J7
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01039 - Edition 08 - December 06
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ADP/ADS Series Two dry pump range
Internal equipment
of the pumps
The dry pumps include a cooling circuit and an inert gas purge circuit
(purge for P and H versions).
M4
ADP
Débitmètre
d'eau
Entrée d'eau
Sortie d'eau
Aspiration
Vanne manuelle 3 voies *
Refoulement Clapet anti-retour
Capteur de
Temperature Roots
Cooling circuit
Principle schematic
ADS 602 P and H,
ADS 1202 P and H
Principle schematic
ADS 1802 P
Entrée d’eau
Sortie d’eau
Refoulement
M4
A300
Débitmètre
d’eau
Aspiration
Vanne
d’eau
Clapet anti-retour Silencieux
Roots
Tp
Tc
Tp : Temperature sensor of pump (alert and alarm)
Tc : Temperature sensor of motor (alert and alarm)
Water inlet
Water outlet
Exhaust
Inlet
SilencerAnti-suckback valve
Water
valve
Water
flowmeter
Water outlet
Water inlet
Exhaust
Inlet
Temperature
sensor
Anti-suckback valve
3 - way - valve*
Water
flowmeter
* Only for ADS 602
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ADP/ADS Series Two dry pump range
G 01039 - Edition 08 - December 06
Sortie d’eau
Refoulement
A300
Débitmètre
d’eau
Aspiration
Vanne
d’eau
Vanne
d’eau auxiliaire
Clapet anti-retour Silencieux
Roots
Tp
Tc
Entrée d’eau
Ta
Principle schematic
ADS 1802 H
dual cooling
Tp : Temperature sensor of pump (alert and alarm)
Tc : Temperature sensor of motor (alert and alarm)
Ta : Auxiliary temperature sensor (alert and alarm)
Water inlet
Water outlet
Exhaust
Inlet
SilencerAnti-suckback valve
Water
valve
Water
flowmeter
Auxiliairy
water valve
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

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ADP/ADS Series Two dry pump range
Vanne
standby
Vanne
d'arrêt
Régulateur
de pression
Manomètre
Débitmètre
massique
Injecteurs
calibrés
Clapets
anti-retour
Capteur
de pression
Entrée N2
Clapet
anti-retour
Refoulement
M4
Aspiration
Roots
ADP
HP HP BP BP BP
N2purge circuit
Principle schematic
ADS 602 P and H,
ADS 1202 P and H
Refoulement
Vanne
d’arrêt
Régulateur
de pression
Manomètre
Débitmètre
massique Injecteurs
calibrés
Entrée N2
34521
Clapets
anti-retou
r
A300
Aspiration
Clapet anti-retour Silencieux
Roots
P1
Principle schematic
ADS 1802 P
P1: Analog sensor (alert, alarm)
N2inlet
Exhaust
Inlet
SilencerAnti-suckback valve
Manometer
Pressure
regulator Mass flowmeter Stop
valve Calibrated
jets
Inlet
Anti-suckback
valves
N2inlet
Exhaust
Manometer
Pressure
regulator
Mass
flowmeter Stop
valve
Standby
valve
Calibrated
jets
Anti-suckback
valves
Anti-suckback
valve
Pressure
sensor
LPLP LP
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01040 - Edition 05 - September 03
1/2
A 30
M4 monitoring
Principle Each Series Two pump includes an intelligent monitoring system.
Description Electrical cabinet
It is located at the rear of the
machine.
It is linked with main power supply,
ADP/Roots motors and electronic
cabinet.
Electronic cabinet
It ensures the pump automatic operation and controls all sensors and
valves.
It is linked to the display panel and emergency stop button.
It allows to exchange data with the hand-held remote control and
ensures the interface with the supervision network.
M4 monitoring can be interfaced with the main production equipment.
Hand-held remote control
It ensures Man-Machine interface.
It can be used either from the
front or the rear of the pump and
allows the access at all operation
parameters.
Red indicator light ”fault”
Yellow indicator light ”warning”
Green indicator light ”running”
Emergency stop
Power box
Electrical
cabinet
Hand-held
remote control
Electronic
cabinet
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M4 monitoring
G 01040 - Edition 05 - September 03
M4 monitoring
characteristics Microprocessor controlled.
Parameters and messages are displayed on the hand-held remote
control.
Memorization of the last ten warnings and hazards.
RS 232 - RS 485 - Network links.




Main functions Motor protection.
N2 purge monitoring.
Pump(s) temperature monitoring and control.
Thermostatic control of the pump (temperature and water flow)
(P and H versions).
Exhaust pressure monitoring.
Maintenance time control.






Supervision Network
Remote control connector
OEM interface
Mains
Emergency
stop output
Roots motor
ADP motor
Actuators
(valves)
Sensors
Alternative
connection
Hand-held
remote
control
Power box
Electrical
cabinet
Electronic
cabinet
Alternative connection
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01043 - Editition 11 - September 14
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A 40
Technical characteristics
Characteristics Units ADP 122 P
ADP 122 LM
ADS 602 H
ADS 602 P
ADS 602 LM
ADS 1202 H
ADS 1202 P
ADS 1802 H
ADS 1802 P
Peak pumping speed
(50/60 Hz)
m3/h 95/112 480/560 1050/1150 1700/1700
cfm 55.8/65.8 282/329 617/676 1000/1000
l/mn 1583/1867 8000/9333 17500/19167 28333
Typical Ultimate Pressure
(without N2purge) (50/60 Hz)
mbar 1.10-2/9.10-3 8.10-4/5.10-4 8.10-4/5.10-4 5.10-4
mtorr 7.5 / 6.7 0.6 / 0.375 0.6 / 0.375 0.375
Pa 1 / 0.6 0.08 / 0.05 0.08 / 0.05 0.05
Maximum Ultimate Pressure
(without N2purge) (50/60 Hz)
mbar 3.10-2/1.5x10-2 2.10-3/9.10-4 2.10-3/9.10-4 9.10-4
torr 22.5 / 11.25 1.5 / 0.675 1.5 / 0.675 0.675
Pa 3 / 1.5 0.2 / 0 .09 0.2 / 0 .09 0 .09
Maximum pumped volume m31
Motor rating kW 1.5 3 5.2 7.5
Supply voltage V 200 V / 480 V - 3 phases - 50/60 Hz (1)
Power consumption at ultimate
pressure (50/60 Hz) kW 1.3 / 1.5 1.8 / 2.0 3.0 / 3.2 3.5
Maximum continuous inlet
pressure
mbar 50 10 5 3
torr 37 7.5 3.7 2.25
Maximum exhaust overpressure mbar 1200
torr 900
N2flowrate range (2) slm 0 to 60 (P version) / 0 to 120 (H version) 20 to 70 «P»
0 to 120 «H»
Water flow l/mn min. 1 min. 1 min. 1.3 min. 5
Rotation speed
(functionnal block) rpm 3000 to 3600 6000
Gear boxes
Dry pump (3)
fluid capacity
Roots
0.35
-
0.35
0.7
0.35
1.90
0.15
1.55
Inlet flange
DN 50 – ISO KF DN 100 – ISO KF
Exhaust flange DN 40 – ISO KF
Dimension (l x w x h) mm 830 x 390 x 580 830 x 390 x 875 995 x 390 x 985 995 x 390 x 985
inch
32.7 x 15.4 x 22.8 32.7 x 15.4 x 34.4 39.2 x 15.4 x 38.8 39.2 x 15.35 x 38.8
Weight kg 243 378 531 498
lbs 540 840 1170 1097
Maximum sound level (4) dB(A) < 65 < 68 < 69 < 69
(1) According to CE regulations. ADP Series Two can withstand a supply voltage variation of ± 10 %.
(2) P and H versions only.
(3) A300 oil charge is filled at factory.
(4) Measured at 1 m length. and 1.6 m height. according to ISO 9614-2 standard.
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A 40
Technical characteristics
G 01043 - Editition 11 - September 14
Characteristics Units
ADP 122 P
ADP 122
LM
ADS 602 H
ADS 602 P
ADS 602 LM
ADS 1202 H
ADS 1202 P
ADS 1802 H
ADS 1802 P
Environmental conditions:
Use of the product
Altitude
Ambient operating temperature
Maximum relative humidity
Transient overvoltage
Pollution degree
indoor use
up to 2000m
5 to 40°C (41 to 104°F)
80% for temp. up to 31°C (87°F)decreasing
linearly to 50% at 40°C (104°F)
category II
rate 2
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

G 01043 - Editition 11 - September 14
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A 40
Technical characteristics
Minimum space
for connection
Exhaust NW 40
Cover pumping Ø 50
Flush gas
connection
Inlet NW 100 *
Water circuit
D
M
C
H
J
115 (ADS 1802)
Q
N
T
R
I
G
L
A
O
P
173
107
193 (ADS 1202)
(ADS 1802)
B
E
S33
15
54
IN
OUT
K
F
Dimensions
Front view Left view
Right view
Top view
ABCDE FGH I J
ADP 122 32.8/832 1.03/26 10.3/260 28.7/728 1.54/39 15.4/390 22.8/580 22.0/560 3.62/92 5.83/148
ADS 602 32.8/832 1.03/26 10.3/260 28.7/728 1.54/39 15.4/390 34.4/875 33.1/840 3.62/92 5.83/148
ADS 1202 39.3/997 1.14/29 10.3/260 35.1/891 1.62/41 15.4/390 38.8/986 37.7/958 2.95/75 9.45/240
ADS 1802 39.2/995 1.06/27 10.4/263 35.1/891 1.62/41 15.4/390 38.8/986 37.8/959 2.95/75 9.45/240
KLMNOPQRST
ADP 122 8.8/223 26.5/674 28.6/727 01.12/28 10.6/269 2.87/73 3.70/94 3.23/82 16.5/419
ADS 602 8.8/223 21.2/539 23.3/592 00.79/20 5.28/134 2.87/73 4.25/108 3.23/82 27.7/704
ADS 1202 7.7/195 20.9/532 23.1/585 1.12/28 06.93/176 3.98/101 3.98/101 2.83/72 31.2/793
ADS 1802 7.7/195 20.9/531 23.1/585 1.12/28 06.93/176 3.98/101 3.98/101 2.83/72 31.2/793
Dimensions in inch/mm
* DN50 for ADP 122
(Facilities at rear)
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A 40
Technical characteristics
G 01043 - Editition 11 - September 14
Minimum space
for connection
Exhaust
NW 40
Cover pumping Ø 50
Flush gas
connection
Inlet NW 100 *
Water circuit
IN
OUT
D
M
C
H
K
F
G
L
A
O
N
P
R
B
E
Q
S
T
55 55
J I
* DN50 for ADP 122
Dimensions
ABCDE FGH I J
ADP 122 32.8/832 1.03/26 3.27/83 28.7/728 1.54/39 15.4/390 22.8/580 22.0/560 3.62/92 5.83/148
ADS 602 32.8/832 1.03/26 3.27/83 28.7/728 1.54/39 15.4/390 34.4/875 33.1/840 3.62/92 5.83/148
KLMNOPQRST
ADP 122 8.8/223 26.5/674 0.71/18 6.61/168 1.12/28 10.6/269 4.41/112 8.66/220 6.61/168 6.54/166
ADS 602 8.8/223 21.2/539 6.02/153 6.61/168 1.12/28 5.28/134 4.41/112 3.45/85 6.61/168 1.22/31
Dimensions in inch/mm
Front view Left view
Right view
Top view
(Facilities on top)
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two