Adixen ACP 15 User manual

Alcatel Vacuum Technology, as part of the Alcatel-
Lucent Group, has been supplying vacuum pumps,
helium and hydrogen leak detection systems,
plasma sensors, vacuum measurement for several
years.
Thanks to its complete range of products, the
company has become an essential player in
multiple applications : instrumentation, Research
& Developement, industry and semiconductors.
Alcatel Vacuum Technology has launched
Adixen, its new brand name, in recognition of
the company's international standing in vacuum
position.
With both ISO 9001 and 14001 certifications,
the French company is an acknowlegded expert
in service and support, and Adixen products have
the highest quality and environmental standards.
With 45
years of experience, AVT today has a worldwide
presence, through its international network that includes
a whole host of experienced subsidiaries, distributors
and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States, thirty
years ago, reinforced today by 2 others US subsidiaries in
Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and its subsidiaries,
Alcatel Hochvakuumtechnik (Germany), Alcatel Vacuum
Technology UK (Scotland), Alcatel Vacuum Technology
Benelux (Netherlands), Alcatel Vacuum Systems (Italy)
and more recently Adixen Sensistor AB in Sweden (in
2007) form the foundation for the European partner
network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has been strengthened
with Alcatel Vacuum Technology Korea (in 1995), Alcatel
Vacuum Technology Taiwan (in 2001), Alcatel Vacuum
Technology Singapore, Alcatel Vacuum Technology
Shanghai (China) (in 2004).
This organization is rounded off by more than 40
represensatives based in a variety of continents.
Thus, whatever the circumstances, the users of Adixen
products can always rely on quick support of our
specialists in Vacuum Technology.
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2

User's manual
ACP series dry primary pumps
Welcome
Dear customer,
You have just purchased an
Adixen dry primary pump.
We would like to thank you
and are proud to include you
among our customers.
This product benefits from
Alcatel Vacuum Technology's
many years of experience in
producing vacuum products
in many applications like
Instrumentations, R & D, Semi-
conductors process. In the last
field, thousands of dry pumps,
based on the ACP technology
are currently running.
In order to guarantee per-
formance and obtain full
satisfaction from this
equipment, we sug-
gest that you study this
manual, particularly chap-
ter B devoted to installa-
tion and start-up, before
installing or performing
maintenance on your
pump.
APPLICATIONS:
ACP 15, ACP 28 AND ACP 40 DRY PRIMARY PUMPS FOR ( CLEAN)
APPLICATIONS
• Instrumentation
• Research and Development
• Semi-conductors: Load lock - Transfer chamber
ACP 15 G, ACP 28 G, ACP 40 G DRY PRIMARY PUMPS FOR THE
PUMPING OF CORROSIVE GAS TRACES.
FEATURES:
MULTI-STAGE ROOTS TECHNOLOGY
UNIVERSAL SINGLE PHASE ELECTRICAL SUPPLY
AIR COOLED
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Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2

User's manual
ACP series dry primary pumps
This product complies with the requirements of
European Directives, listed in the Declaration of
Conformity contained in G100 of this manual. These
Directives are amended by Directive 93/68/E.E.0 (E.C.
Marking).
Copyright/Intellectual property:
The use of Adixen products are subject to copyright
and intellectual property rights in force in any jurisdic-
tion.
All rights reserved, including copying this document in
whole or any part without prior written authorization
from Alcatel Vacuum Technology France.
Specifications and information are subject to change
without notice by Alcatel Vacuum Technology France.
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Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2

MANUAL REFERENCE:
112369
EDITION: 02 - June 2008
General contents
ACP Series User's Manual
A 10 - ACP Series dry primary pumps overview
A 20 - Operating principle
A 30 - Dry primary pump applications
A 40 - Technical characteristics - ACP 15
A 41 - Technical characteristics - ACP 28, ACP 40
A 50 - Accessories
B 00 -
Safety instructions
B
10 - Installation of ACP Series pumps
B 20 - Mechanical connections
B 30 - Electrical connections
B 40 - Remote control connector wiring
B
41 - RS 485 serial link wirin g
B 50 -
Inert gas purge connection (G version)
C
10 - Pump operation
C 20 - Detailed description of RS 485 commands
C10 - Pump operations
C20 - Detailed descriptions of RS 485 commands
D10 Maintenance frequency
D 20 - Instructions for cleaning
E 00 -
Maintenance safety instructions
F -
Non used
G 10 - ACP 15 / 15 G - Pumping curves
G 11 - ACP 28 / 28 G - Pumping curves
G 12 - ACP 40 / 40 G - Pumping curves
G 100 - European Declaration of Conformity
G
101 - S2 Semi certificate
G 200 - Safety questionnaire
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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MANUAL REFERENCE: 112369
EDITION: 02 - June 2008
General contents
ACP Series User's Manual
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Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2

Superior technology
A10
ACP Series dry primary pump overview
■ Type Multi-stage Roots primary pump
- frictionless technology,
- reliability,
- aluminium pump body.
■ Dry and clean vacuum
- no particulate contamination,
- residual gas spectrum free of traces of hydrocarbons.
■ Sealed air-cooled motor
- permanent air cooling (built-in fan),
- safety: certified leaktight.
■ Single-phase frequency converter
- multi-voltage, dual frequency 50/60 Hz,
■ 2 pump models according to different applications
- standard version,
- G version.
■
Thermal protection based on temperature sensors.
■ RS 485 Serial link
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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Model ACP 28 / 28 G /
40 / 40 G overview
Model ACP 15 / 15 G
overview
A10
ACP Series dry primary pump overview
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A 20
Operating principle
Multi-stage Roots
■
The ACP pumps are composed of 5 or 6 Roots type stages,
principle
connected in series.
■
No contact design. The rotors do not touch each other or the
housing.
INLET
■ The standard pumps are
equipped with a gas ballast
device to improve pumping of
li ght gases and condensable
vapors.
Thus avoiding condensation
of pumped gases into the
pump.
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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A 30
Dry primary pump applications
Standard version
The pump is designed for applications that require the pumping of
for "clean vacuum"
clean (dust-free) and non-corrosive gases. Examples are:
applications
• Instrumentation:
• Gas analysis.
• Electronic microscope.
• X-ray spectrometer.
• Leak detection.
• Surface analyzer.
■ Research and Development
■
Semiconductor Fabrication:
•
Load lock and transfer chamber pumping.
• Wafer back pumping.
G version for
G version pump is compatible with the pumping of corrosive
pumping of corrosive
traces.
It is equipped with 3 gas purge circuits used to withstand
gas traces or
gas traces, to protect the LP and HP ball bearings, and the
condensable gas
pump thightness is reinforced. This pump model can be used in
applications such as:
• Process monitoring.
• Load lock pumping.
•
Transfer chamber pumping.
• Focused Ion Beams.
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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A 40
Technical characteristics -
ACP 15 / ACP 15 G
(1) Typical value obtained after minimum 1 hour of pump warm up time.
(2) Relative nitrogen pressure 300 mbar.
(3)
Oil charge has been introduced into oil casing at factory. Don't modify this oil level.
Alcatel Vacuum Technology France - User's manual ACP 15 /28 /40 Series 2
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Dimensional drawing
mm (inch)

A 40
Technical characteristics -
ACP 15 / ACP 15 G
Gravity center and
weight distribution
Right wiew Front view
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Alcatel Vacuum Technology France - User's manual ACP 15 /28 /40 Series 2

Maximum loads on
ground & seismic
fixations
We strongly advise you to secure the pump on the tool with
4 M6 x20 screws (2 screws per fixation plate minimum recommended).
Screw material must comply with foot load specifications given in the
table below.

A41
Technical characteristics -
ACP 28 / 28 G / 40 / 40 G
(1)
Typical value obtained after minimum 1 hour of pump warm up time.
(2) Relative nitrogen pressure 300 mbar.
(3) Oil charge has been introduced into oil casing at factory. Don't modify this oil level.
Alcatel Vacuum Technology France - User's manual ACP 15 /28 /40 Series 2
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Dimensional drawing
mm (inch)

A41
Technical characteristics -
ACP 28 / 28 G / 40 / 40 G
Gravity center and
weight distribution
Right wiew
Front view
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Alcatel Vacuum Technology France - User's manual ACP 15 /28 /40 Series 2

Maximum loads on
ground & seismic
fixations
We strongly advise you to secure the pump on the tool with 4 M6
x20 screws (2 screws per fixation plate minimum recommended).
Screw material must comply with foot load specifications given in
the table below.

A 50
Accessories
Inlet filter
Exhaust silencer
Frequency converter
interface plug
Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2
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A 50
Pump holding device
Accessories
It includes holding plates to fasten to the pump body on the
equipment (M6 screw customer supplied).
Wheel kit
This kit includes 4 free castering wheels and connecting accessories
that can be installed on pump frame, and allows pump easy
movement through an around cluttered areas. It is compatible with
ACP15, ACP28 and ACP40 pump models.
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Alcatel Vacuum Technology France - Manuel de l'Utilisateur - ACP 15 / 28 / 40 Series 2