Air Products Gasguard 250 User manual

Installation Manual
for the
Gasguard
®
250
Valve Manifold Panel and
Valve Manifold Box Systems
Commodity Number: 809-603649
Revision July 1998
Air Products and Chemicals, Inc.
1919 Vultee Street
Allentown, PA 18103

Installation Manual Matrix Sheet
for the Gasguard
®
250
Valve Manifold Panel and Box Systems
Commodity Number: 809-603649, Revision July 1998
Manual Section Revision Level Reason for Revision
Cover and Front E Change to Section 4
Introduction A First issue
Section 1: Safety Warnings B Per SEMI S2-1993
and CE Mark
Section 2: Dimensions and Mounting B Per SEMI S2-1993
and CE Mark
Section 3: Tubing Connections C Per SEMI S2-1993
and CE Mark
Section 4: Electrical Connections E Per ETL requirement
Section 5: Helium Leak Testing B Per SEMI S2-1993
and CE Mark
Section 6: VMB Functional Checklist A First issue
Appendix B Per SEMI S2-1993
and CE Mark

Introduction
Revision D: June 1997 Page i - i
Important Safety Information
Read and understand the safety
warnings in on pages 1-1 to 1-5 of
this manual before installing the
equipment. Failure to do so can
result in personal injury or death.
Warnings:
Warnings, like the sample shown below are found throughout the manual
to point out hazards which could cause personal injury or death if proper
procedures are not followed:
All installation personnel MUST read and
understand the safety warnings section
before installing the equipment.
System Hazards:
Possible hazards when installing this system are exposure to:
•Pressurized Fluids
/ Gases
•Oxygen Deficient
Atmospheres
•Electrical Hazard
•Falling Equipment Hazard
•Cylinder Handling Hazard
•Pinch Hazard
Do not make any changes to the
equipment independently. Injury or death
may result from unauthorized
modifications. If equipment needs to be
modified, an Air Products' Representative
MUST be contacted.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page i - ii
Air Products Support Systems
Emergency Response - 24 Hour Service
If an emergency occurs that cannot be alleviated by the trained operator or his/her
supervisor, call Air Products and Chemicals, Inc. on one of these telephone
numbers.
• From anywhere in the continental United States, Canada and Puerto Rico -
800-523-9374 (toll free)
• From all other locations - 610-481-7711
• FAX -610-481-3772
• APCI Operator - 610-481-4911
• European Community/Middle East Gases - (32)(73)32.949
Technical Support - Normal Operation 8:00 a.m. to 5:00 p.m. E.S.T.
USA: Air Products and Chemicals, Inc. 610-481-3810
Semiconductor Equipment Manufacturing Center
1919 Vultee Street
Allentown, PA 18103
Regions:
East Air Products and Chemicals, Inc. 610-481-2628
A5-2-2
7201 Hamilton Boulevard
Allentown, PA 18195-1501
Mid-America Air Products and Chemicals, Inc. 512-892-7772
5341 Industrial Oaks Boulevard
Austin, Texas 78735-8811
Southwest Air Products and Chemicals, Inc. 602-813-8430
150 E. Alamo Street, Suite #9 (alternate 602-968-4494)
Chandler, Arizona 85225
West Air Products and Chemicals, Inc. 408-453-2432
2186 Paragon Drive
San Jose, California 95131

Introduction
Revision D: June 1997 Page i - iii
Technical Support - Normal Operation 08:00 to 17:00, except
Friday 08:00 to 16:30
European Community
Air Products and Chemicals, Inc. (32)-2-725.95.80
The Equipment Centre
Leuvnesesteenweg 48C
1932 St.-Stevens-Woluwe
Belgium Fax (32) -2-725.97.80

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page i - iv
Table of Contents
Section 1: Safety Warnings..............................................................................................1-1
1.1 Introduction....................................................................................................1-1
1.2 Inert Gas Hazards...........................................................................................1-3
1.3 Pressurized Fluids / Gases .............................................................................1-5
1.4 Electrical Hazard............................................................................................1-5
1.5 Falling Equipment Hazard.............................................................................1-6
1.6 Pinch Hazard..................................................................................................1-6
Section 2: Dimensions and Mounting..............................................................................2-1
2.1 Outline Dimensions .......................................................................................2-1
2.2 Mounting Hole Locations ..............................................................................2-4
2.3 Open Controller Dimensional Requirements.................................................2-4
Section 3: Tubing Connections........................................................................................3-1
3.1 Tubing Interconnections ................................................................................3-1
3.2 Process Line Connection................................................................................3-3
3.3 Vent Line........................................................................................................3-4
3.4 Venturi Line...................................................................................................3-6
3.5 Purge Line......................................................................................................3-6
3.6 Pneumatic Supply ..........................................................................................3-7
3.7 Enclosure Exhaust System Requirements......................................................3-8
3.8 Weld Shield Gas, Purge Gas Connection ......................................................3-10
3.9 Helium Leak Test Port...................................................................................3-11
3.10 Hazardous Gas Leak Detection System (Customer Requirement) ..............3-11
Section 4: Electrical Connections....................................................................................4-1
4.1 Grounding Method.........................................................................................4-2
4.2 Power Supply Connection..............................................................................4-3
4.3 Field Connections ..........................................................................................4-5
4.4 External I/O Communication.........................................................................4-6
4.4.1 Gasguard 250 Controller.................................................................4-6
4.5 PC and MMMS Gasguard Networks.............................................................4-9
4.5.1 General Description ........................................................................4-9
4.5.2 Gasguard 250 Controller Connections............................................4-10
4.5.3 PC Network Breakout Box .............................................................4-10
4.5.4 PC Network Field Wiring...............................................................4-11
4.5.5 MMMS Network Wiring Configuration.........................................4-12
4.5.6 MMMS Network Interface Box......................................................4-13
4.5.7 MMMS Network Field Wiring.......................................................4-13
Section 5: Helium Leak Testing.......................................................................................5-1
Section 6: Valve Manifold Box Functional Checklist.....................................................6-1
Appendix..........................................................................................................................A-1

Introduction
Revision A: July 1995 Page i - 1
Introduction
This manual covers the tasks required to install the Gasguard 250 Valve Manifold
Box. Because of unique installation variables from site to site, it is not intended as
a step-by-step installation procedure, but relies on the knowledge of qualified
personnel to perform the work properly. This manual should be read thoroughly
by the supervising installation engineer before installation is begun.
The Gasguard 250 valve manifold boxes have been designed and built in
accordance with the Uniform Fire Code (UFC) and the National Fire Protection
Association (NFPA). They must be installed and operated in accordance with the
UFC, NFPA and all other applicable industrial, federal, state and local codes.
This valve manifold box is to be used with an upstream hazardous process gas
source (a gas cabinet or rack system) that is also designed and built in accordance
with the Uniform Fire Code (UFC) and the National Fire Protection Association
(NFPA). The source equipment must be installed and operated in accordance with
the UFC, NFPA and all other applicable industrial, federal, state and local codes.
The source system must have excess flow shutdown, emergency shutdown and
over-pressure protection and the source cylinders must contain a restrictive flow
orifice in the cylinder valve if required by code.
Gasguard
®
250 is a registered trademark. The Gasguard name is officially
registered and legally restricted to be used only by Air Products and Chemicals,
Inc. The information and data contained herein are proprietary to Air Products and
Chemicals, Inc. and are not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part, without prior written consent of Air Products and
Chemicals, Inc. This restriction shall not apply to any safety information
contained in the manual. The safety information is intended for your use and we
encourage you to copy it so that anyone using this equipment knows how to use it
safely.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page i - 2

Section 1: Safety Warnings
Revision B: May 1997 Page 1 - 1
Section 1: Safety Warnings
Please read the following safety warnings carefully before installing the
equipment.
1.1 Introduction
This section is meant to communicate to the user any hazards involved with the
equipment.
The following paragraphs will define the hazard warnings used and describe the
icons found in various sections of the manual and on the equipment. The hazard
warning labels used in the manual will correlate with those used on the equipment.
1.1.1 Level or Intensity of Hazard
Indicates an immediate hazard, which if
not avoided, will result in death or
serious injury.
Indicates a potentially hazardous
situation, which if not avoided, could
result in death or serious injury.
Indicates a potentially hazardous
situation, which if not avoided, may
result in a minor or moderate injury. It
may also be use to alert against unsafe
practices.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page 1 - 2
1.1.2 Hazard Types (Symbols)
This symbol is a safety alert symbol.
This symbol represents asphyxiant, toxic or corrosive
gases. Gases used with the Gasguard 250 can cause
personal injury or death.
This symbol can represent one or more of the following
conditions:
Explosive gases! Gases used with the Gasguard 250 can
cause an explosion when combined with air.
The formation for explosive gas mixtures of flammable
gas and air when exposed to an ignition source.
Pyrophoric gases which will ignite spontaneously without
the presence of an ignition source when exposed to air.
Energy release which may result from pneumatic or
hydraulic pressure rapidly escaping from a portion of the
equipment.
This symbol represents flammable gases. Gases used
with the Gasguard 250 can cause flammable
atmospheres.
This symbol represents PPE (Personal Protective
Equipment). Proper PPE shall be worn when working
with this system.

Section 1: Safety Warnings
Revision B: May 1997 Page 1 - 3
This symbol represents electrical shock hazard.
This symbol warns of potential strain or injury when
lifting cylinders.
This symbol warns of a pinch hazard. This hazard exists
on cabinet doors equipped with automatic closers.
This symbol warns of the possibility of the cabinet tipping
over if it is not installed properly. Personnel injury could
result.
This symbol indicates the need for head protection.
1.2 Inert Gas Hazards
High concentrations of nitrogen, helium, or
other inert gases can cause an oxygen deficient
atmosphere in a confined area which can cause
DEATH. All personnel must read and
understand the material safety data sheet(s)
(MSDS) for the specific gas(es) being used.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page 1 - 4
Oxygen concentrations of 19.5% or less can greatly increase the hazard of
asphyxiation to personnel. Before working in an area where nitrogen, helium or
other inert gases could be present, check the area with an oxygen monitor to be
sure the oxygen concentration is between 19.5% and 23%. While working in the
area, the oxygen concentration needs to be monitored with a continuous oxygen
monitor. Always provide adequate ventilation in the work area to decrease the risk
of an oxygen deficient atmosphere.
Personnel in an oxygen deficient atmosphere will not realize they are being
asphyxiated. Breathing of pure inert gases will cause immediate unconsciousness.
Symptoms of asphyxia include:
• Rapid breathing
• Nausea
• Vomiting
• Inability to move
• Convulsive movements
• Collapse
• Abnormal pulse
• Rapid fatigue
• Faulty judgment
• Insensitivity to pain
• Abnormal emotions
Remove any personnel in an oxygen deficient atmosphere to fresh air. Get
medical attention immediately. Positive pressure breathing apparatus must be
worn by any rescuers entering a suspected oxygen deficient atmosphere.
Nitrogen gas may accumulate in low or confined areas. All requirements of
OSHA 1910.146 (Confined Space Guidelines) must be met when inert gases may
be present in confined spaces. Self contained breathing apparatus is required
(cartridge or filter type gas masks cannot be used). See the information on
personal protective equipment in this section for details.
When entering a confined area or area which may contain high inert gas
concentrations, a "Buddy System" must be used. One person should remain

Section 1: Safety Warnings
Revision B: May 1997 Page 1 - 5
outside the suspect area, but within view of the other person. This method ensures
that the other person can respond in the event of an emergency.
1.3 Pressurized Fluids / Gases
Pressurized gas and water sprinkler lines
can injure personnel and damage
equipment. Never tighten or loosen a
fitting when it is under pressure.
The house nitrogen supply lines can contain pressures of 100+ psig. The water
sprinkler lines contain pressures of 30 psig. Exercise care when working around
these lines. Insure that pressure has been vented before breaking any connection.
Tag out and lock out the line before doing any work. Follow Typical Minimal
Lockout or Tagout System Procedures described by Occupational Safety and
Health Admin., Labor Para. 1910.147.
1.4 Electrical Hazard
Electric shock can cause personnel injury or death.
The control circuits for the system use 115/240 VAC, 50/60 Hz. Do not attempt to
work on the system without first turning the power off and tagging out and locking
out the electrical supply disconnect switch per plant lock out procedures. Follow
the Typical Minimal Lockout or Tagout System Procedures described by
Occupational Safety and Health Admin., Labor Para. 1910.147.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page 1 - 6
1.5 Falling Equipment Hazard
This system is a top heavy device. If it is not
properly installed, it could fall and injure,
crush or kill personnel working in the area.
When installing the system, extreme care needs to be taken to support it properly.
Due to the top heavy nature of the system, if not installed properly, it could tip
over, injuring, crushing or possibly killing personnel in the area.
1.6 Pinch Hazard
A pinch hazard exists on cabinet doors
equipped with automatic closers.

Section 2: Dimensions and Mounting
Revision B: May 1997 Page 2 - 1
Section 2: Dimensions and Mounting
2.1 Outline Dimensions
The Gasguard 250 Valve Manifold Boxes are typically mounted to a free-standing
floor mounted rack. An alternate wall mounting method utilizes vertical unistrut
attached to the rear of the enclosure. Figure 2.1 shows the outline dimensions for
an eight branch valve manifold box with unistrut for wall mounting. Figure 2.2
shows the outline dimensions for a four branch valve manifold box mounted on a
free-standing rack. For certain non-toxic gases, the manifold enclosure may not be
used and the manifold panel will be mounted directly to the free-standing rack or
unistrut.
Note: These dimensions are typical. See the installation drawings
in the Appendix for specific dimensions for this system.

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page 2 - 2
Weight = 275 Pounds (124.43 Kilograms)
Figure 2.1: Outline Dimensions for 8 Branch Valve Manifold Box
with Vertical Unistrut

Section 2: Dimensions and Mounting
Revision B: May 1997 Page 2 - 3
Weight = 405 Pounds (183.26 Kilograms)
Figure 2.2: Outline Dimensions for 4 Branch Valve Manifold Box
Mounted on a Free Standing Rack

Gasguard
®
250 VMB System Installation Manual
Air Products and Chemicals, Inc. Page 2 - 4
2.2 Mounting Hole Locations
The Gasguard 250 Valve Manifold Box rack assembly is mounted to the floor
using the four (4) 3/8" holes located in each corner of the rack. See Figure 2.3 for
typical mounting hole locations for the 4 and 8 branch VMB racks. The mounting
location should be clean and level.
Figure 2.3: Mounting Hole Locations for Valve Manifold Box Racks
2.3 Open Controller Dimensional Requirements
The dimensions of the GG250 VMB controller, when opened, are detailed in
Figure 2.4 below.
Figure 2.4: Dimensions of Open Controller (side view)

Section 3: Tubing Connections
Revision C: May 1997 Page 3 - 1
Section 3: Tubing Connections
All tubing should be designed and installed following the local piping codes and
the following:
• ASME B31.3 "Chemical Plant and Petroleum Refinery Piping"
• SEMC-005 "UHP Tubing and Fitting Specification"
(found in the Appendix)
Tubing must be sized to flow the maximum amount of gas required by the process
system. All tubing is constructed of 316L stainless steel.
All tubing connections are made at the top rear of the enclosure. All tube stubs are
labeled with their function. Process and purge lines are double bagged and taped
for shipment. Vent and venturi supply lines are single bagged. The tube end has
been faced and is ready for welding to facility piping. Welding should be
performed using established high purity welding techniques.
3.1 Tubing Interconnections
Process outlet: 1/4" diameter, 0.035" wall thickness
(coaxial tubing option) (coax - 1/2" diameter, 0.035" wall)
Venturi inlet: 1/4" diameter, 0.035" wall thickness
Purge inlet: 1/4" diameter, 0.035" wall thickness
Vent outlet: 3/8" diameter, 0.035" wall thickness