BOC Edwards EXC100L User manual

D396-20-880
Issue F
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: [phone] Fax: [phone]
http://www.bocedwards.com
EXC100E and EXC100L Turbomolecular Pump
Controllers
Description Item Number
EXC100E Turbomolecular Pump Controller D396-20-000
EXC100L Turbomolecular Pump Controller D396-22-000
Instruction Manual

We, BOC Edwards,
Manor Royal,
Crawley,
West Sussex RHlO 2LW, UK
declareunder our soleresponsibility that the product(s)
Turbomolecular Pump Controllers
EXClOOL
EXClOOE D396-22-000
D396-20-000
to which this declaration relates is in conformity with the following standard(s)
or other normative document(s)
IEC1010-1 (1992) SafetyRequirementsfor ElectricalEquipment for Measurement,
Control and Laboratory Use.
ElectricalEquipment for Measurement,Control and Laboratory Use
-EMC Requirements.
EN61326
(Class B Emissions)
following the provisions o.f
73/023/ EEC
89/336/ EEC Low VoltageDirective.
ElectromagneticCompatibility Directive.
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Dr. J.D. Watson, Senior Technical Manager, VED 4-/~lo) S)io(\E,~
Date and Place

CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 2
1.3 Connection of an Active gauge 3
1.4 Logic interface 3
1.4.1 Introduction 3
1.4.2 Electrical supplies 4
1.4.3 Control inputs 4
1.4.4 Status outputs 4
1.4.5 Analogue outputs 5
1.5 Vent-valve control 5
1.5.1 Introduction 5
1.5.2 Vent on Stop 6
1.6 Controller Fail conditions 6
1.6.1 General 6
1.6.2 Internal Timer 7
2 TECHNICAL DATA 9
2.1 Operating and storage data 9
2.2 Mechanical data 9
2.3 Electrical supply 9
2.4 EXT pump electrical output data 9
2.5 Logic interface 10
2.6 Factory settings 10
2.7 Electrical connectors 10
3 INSTALLATION 12
3.1 Unpack and inspect 12
3.2 Configure the Controller 12
3.2.1 Introduction 12
3.2.2 Select speed or power analogue output 12
3.2.3 Enable/disable the Internal Timer to monitor low pump speed 14
3.2.4 Vent options 14
3.3 Fit the Controller 15
3.4 Introduction to Controller electrical connections 15
3.5 Connect the electrical supply 18
3.6 Connect additional earth (ground) bonding (if required) 18
3.7 Connect the EXT pump 19
3.8 Connect an AIM Active Inverted Magnetron gauge (optional) 19
3.9 Connect the logic interface to your equipment 19
3.9.1 Introduction 19
3.9.2 Connect a vacuum gauge to the logic interface 20
3.10 Adjust the Normal speed 20
3.11 Adjust the Internal Timer 20
DBW 5840-97
EXC Turbomolecular Pump Controllers i

Section Title Page
4 OPERATION 22
4.1 Start-up 22
4.2 Standby 22
4.3 Operation with high inlet pressure 22
4.4 Operation with high pump temperature 23
4.5 Normal shutdown 23
4.6 Automatic shutdown after Fail condition 23
4.7 Reset the Controller after Fail condition 23
4.10 Electrical supply failure 24
5 MAINTENANCE 25
5.1 Safety 25
5.2 Replace a fuse 25
5.2.1 Introduction 25
5.2.2 Replace the electrical supply fuse 25
5.3 Clean the Controller 25
5.4 Fault finding 25
6 STORAGE AND DISPOSAL 26
6.1 Storage 26
6.2 Disposal 26
7 SERVICE, SPARES AND ACCESSORIES 27
7.1 Introduction 27
7.2 Service 27
7.3 Accessories 27
7.3.1 Electrical supply cable 27
7.3.2 Pump-to-controller cable 28
7.3.3 BX bakeout band 28
7.3.4 TAV vent-valve 28
7.3.5 ACX air-cooler 29
7.3.6 Active vacuum gauges 29
8 ENGINEERING DIAGRAMS 29
RETURN OF BOC EDWARDS EQUIPMENT
ii EXC Turbomolecular Pump Controllers

Illustrations
Figure Title Page
1 Rear panel of the Controller (EXC100E shown) 8
2 Dimensions (mm): EXC100E shown 11
3 Reconfigure the Controller (EXC100L shown) 13
4 Schematic diagram of Controller electrical connections 17
5 Normal Speed and Internal Timer potentiometers (EXC100L shown) 21
6 EXC Controller to EXT pump connections 30
7 Active Gauge connector 31
Tables
Table Title Page
1 Configuration links 12
2 Selection of vent-valve control options 14
3 Logic interface pins 16
4 Electrical supply cable wires 18
5 APG to logic interface connections 20
6 Active Gauge connector pins 31
Associated Publications
Publication title Publication Number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXC Turbomolecular Pump Controllers iii

iv EXC Turbomolecular Pump Controllers

1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the BOC Edwards
EXC100E and EXC100L Turbomolecular Pump Controllers. You must use the Controller as
specified in this manual.
Read this manual before you install and operate the Controller. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The
use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the
equipment, associated equipment or process.
The units used throughout this manual conform to the SI international system of units of
measurement.
In accordance with the recommendations of IEC1010, the following warning symbols appear on
the Controller.
Caution - refer to accompanying documents
Caution - risk of electric shock
Protective conductor terminal
Direct current only
EXC Turbomolecular Pump Controllers 1

1.2 Description
The EXC Controller generates the electrical supply and the control signals necessary to operate
an EXT pump and its accessories. Refer to Section 2 for compatible EXT pumps.
The Controller has a high-efficiency, auto-ranging power supply which adjusts itself to any
external electrical supply in the specified voltage range (refer to Section 2). The power supply
converts the single-phase electrical supply into a regulated d.c. electrical supply to control the
operation of the EXT pump. The pump has three Hall effect devices which operate as rotor
position sensors. These sensors ensure that the drive current is correctly switched to the
phase-windings of the pump-motor . The Hall effect devices also generate a speed signal which
the Controller uses to regulate the rotational speed of the pump.
The Controller has a secondary regenerative supply which uses the d.c. motor of the EXT pump
as a generator. If the electrical supply fails, the regenerative supply provides the Controller with
a back-up source of power without the need for batteries. The Controller uses the regenerative
supply to maintain the electrical supplies to the vent-valve, air-cooler and AIM gauge (if
connected) until the pump speed falls to below 50% of full rotational speed (see Section 1.5.2).
The Controllers have a number of control features which limit the power supplied to the EXT
pump in the event of sustained high pressure or temperature:
•If the EXT pump inlet pressure rises, the power supplied to the pump-motor increases to
counteract the gas frictional load. The pump rotational speed remains constant until the
Controller peak power level is reached; beyond this power level, the speed of the pump
starts to reduce. If the pump speed falls to below 50% of its full rotational speed, the
Controller may trip into Fail condition; this depends on how you have configured the
Controller (see Section 1.6.2).
•If the Controller detects that its temperature or the pump temperature is too high, it reduces
the power supplied to the pump-motor; the pump may not therefore be able to maintain full
rotational speed if it is too hot. If the pump speed falls to below 50% of its full rotational
speed, the Controller may trip into Fail condition; this depends on how you have configured
the Controller (see Section 1.6.2).
The Controller has no front-panel controls and can only be operated through the logic interface.
To operate the EXT pump, you must therefore connect the Controller to your own control
equipment. Alternatively, you can configure the mating-plug for the logic interface connector
so that the EXT pump starts to operate as soon as the electrical supply to the Controller is
switched on: refer to Section 3.9.
The rear-panel of the Controller has a Normal LED (Figure 1, item 6). The LED is on whenever
the TMP Normal status output signal is low: refer to Section 1.4.4.
The EXC100L Controller has an integral pump-to-controller cable. The EXC100E Controller has
a mating connector suitable for a pump-to-controller cable accessory (not supplied): refer to
Section 7.
2EXC Turbomolecular Pump Controllers

1.3 Connection of an Active gauge
Note: The Controller contains a regenerative power supply which maintains the electrical supply to the
AIM gauge in the event of a failure of the external electrical supply to the Controller (see
Section 1.2).
You can connect an BOC Edwards AIM Active Inverted Magnetron Gauge directly to the active
gauge connector on the Controller and use the Controller TMP Normal signal to switch the gauge
on. This allows you to control the AIM Gauge without the need to use an additional high
pressure gauge (and its associated control equipment) to interlock the operation of the AIM
Gauge to system pressure. Refer to Section 3.8 for details about how to connect an AIM gauge
to the Controller.
If you want to use another type of gauge, you must connect the gauge to the Controller through
the logic interface: refer to Section 3.9.
1.4 Logic interface
1.4.1 Introduction
The rear panel of the Controller has a 15-way logic interface connector (Figure 1, item 4) which
you can use to connect the Controller to your own equipment.
Signals on the logic interface are of four types:
•Electrical supplies These are electrical supplies for optional accessories connected to
your pump, such as the vent-valve and the air-cooler.
•Control inputs These are switch-type input signals which are used to control the
operation of the EXT pump.
•Status outputs These output signals identify the status of the pump and the
Controller.
•Analogue output The Controller can be configured to provide a speed output or a
power output. This output gives an indication of the EXT pump
speed or power consumption.
Refer to Table 3 and to Figure 4 for detailed information about the logic interface pins and their
uses. A general description of the logic interface connections follows.
EXC Turbomolecular Pump Controllers 3

1.4.2 Electrical supplies
Two nominal 24 V supplies are provided, as described below:
Vent-valve supply
This electrical supply is provided to operate a vent-valve fitted to your EXT pump or vacuum
system. The Controller automatically opens the valve when the speed of the pump falls to below
50% of full rotational speed. You can also configure the Controller to operate the valve in other
specific conditions: refer to Sections 1.5 and 3.2.
Air-cooler supply
This electrical supply is provided to operate an ACX air-cooler fitted to your EXT pump. The
electrical supply is on whenever the Controller is on. Alternatively, if your pump is
water-cooled, you can use this supply to operate a solenoid-valve to control the flow of water
through the water-cooler.
1.4.3 Control inputs
You can use these inputs to control the operation of the EXT pump. The input signals are
switch-type signals; you link (close) two pins on the logic interface when you want to set the
required signal and you do not link (open) the pins when you do not want to set the signal. The
input signals are as follows:
Start/Stop
Use the Start/Stop input to Start and Stop the EXT pump. To Start the pump, you must close
the Start/Stop input. To Stop the pump, you must open the input (refer to Sections 4.1 and 4.5).
Standby
Close the Standby input to select pump Standby (refer to Section 4.2).
1.4.4 Status outputs
The Controller provides Normal, Fail and Pump On status output signals (TMP Normal, TMP
Fail and TMP On) through open collector transistor outputs on the logic interface connector.
These signals can be used to control devices in the pumping system or to provide remote status
output signals. The signals operate as described below.
TMP Normal
TMP Normal is normally high and goes low when the EXT pump reaches its ’Normal’ speed.
The Normal speed is determined by a potentiometer on the side of the Controller. The Controller
is supplied with the potentiometer adjusted so that Normal speed is 80% of full rotational speed.
You can adjust the Normal speed as described in Section 3.10. The Normal LED on the rear panel
of the Controller (Figure 1, item 6) is on when the TMP Normal signal is low.
4EXC Turbomolecular Pump Controllers