BOC Edwards EXC100L User manual

D396-20-880
Issue F
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: [phone] Fax: [phone]
http://www.bocedwards.com
EXC100E and EXC100L Turbomolecular Pump
Controllers
Description Item Number
EXC100E Turbomolecular Pump Controller D396-20-000
EXC100L Turbomolecular Pump Controller D396-22-000
Instruction Manual

We, BOC Edwards,
Manor Royal,
Crawley,
West Sussex RHlO 2LW, UK
declareunder our soleresponsibility that the product(s)
Turbomolecular Pump Controllers
EXClOOL
EXClOOE D396-22-000
D396-20-000
to which this declaration relates is in conformity with the following standard(s)
or other normative document(s)
IEC1010-1 (1992) SafetyRequirementsfor ElectricalEquipment for Measurement,
Control and Laboratory Use.
ElectricalEquipment for Measurement,Control and Laboratory Use
-EMC Requirements.
EN61326
(Class B Emissions)
following the provisions o.f
73/023/ EEC
89/336/ EEC Low VoltageDirective.
ElectromagneticCompatibility Directive.
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Dr. J.D. Watson, Senior Technical Manager, VED 4-/~lo) S)io(\E,~
Date and Place

CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 2
1.3 Connection of an Active gauge 3
1.4 Logic interface 3
1.4.1 Introduction 3
1.4.2 Electrical supplies 4
1.4.3 Control inputs 4
1.4.4 Status outputs 4
1.4.5 Analogue outputs 5
1.5 Vent-valve control 5
1.5.1 Introduction 5
1.5.2 Vent on Stop 6
1.6 Controller Fail conditions 6
1.6.1 General 6
1.6.2 Internal Timer 7
2 TECHNICAL DATA 9
2.1 Operating and storage data 9
2.2 Mechanical data 9
2.3 Electrical supply 9
2.4 EXT pump electrical output data 9
2.5 Logic interface 10
2.6 Factory settings 10
2.7 Electrical connectors 10
3 INSTALLATION 12
3.1 Unpack and inspect 12
3.2 Configure the Controller 12
3.2.1 Introduction 12
3.2.2 Select speed or power analogue output 12
3.2.3 Enable/disable the Internal Timer to monitor low pump speed 14
3.2.4 Vent options 14
3.3 Fit the Controller 15
3.4 Introduction to Controller electrical connections 15
3.5 Connect the electrical supply 18
3.6 Connect additional earth (ground) bonding (if required) 18
3.7 Connect the EXT pump 19
3.8 Connect an AIM Active Inverted Magnetron gauge (optional) 19
3.9 Connect the logic interface to your equipment 19
3.9.1 Introduction 19
3.9.2 Connect a vacuum gauge to the logic interface 20
3.10 Adjust the Normal speed 20
3.11 Adjust the Internal Timer 20
DBW 5840-97
EXC Turbomolecular Pump Controllers i

Section Title Page
4 OPERATION 22
4.1 Start-up 22
4.2 Standby 22
4.3 Operation with high inlet pressure 22
4.4 Operation with high pump temperature 23
4.5 Normal shutdown 23
4.6 Automatic shutdown after Fail condition 23
4.7 Reset the Controller after Fail condition 23
4.10 Electrical supply failure 24
5 MAINTENANCE 25
5.1 Safety 25
5.2 Replace a fuse 25
5.2.1 Introduction 25
5.2.2 Replace the electrical supply fuse 25
5.3 Clean the Controller 25
5.4 Fault finding 25
6 STORAGE AND DISPOSAL 26
6.1 Storage 26
6.2 Disposal 26
7 SERVICE, SPARES AND ACCESSORIES 27
7.1 Introduction 27
7.2 Service 27
7.3 Accessories 27
7.3.1 Electrical supply cable 27
7.3.2 Pump-to-controller cable 28
7.3.3 BX bakeout band 28
7.3.4 TAV vent-valve 28
7.3.5 ACX air-cooler 29
7.3.6 Active vacuum gauges 29
8 ENGINEERING DIAGRAMS 29
RETURN OF BOC EDWARDS EQUIPMENT
ii EXC Turbomolecular Pump Controllers

Illustrations
Figure Title Page
1 Rear panel of the Controller (EXC100E shown) 8
2 Dimensions (mm): EXC100E shown 11
3 Reconfigure the Controller (EXC100L shown) 13
4 Schematic diagram of Controller electrical connections 17
5 Normal Speed and Internal Timer potentiometers (EXC100L shown) 21
6 EXC Controller to EXT pump connections 30
7 Active Gauge connector 31
Tables
Table Title Page
1 Configuration links 12
2 Selection of vent-valve control options 14
3 Logic interface pins 16
4 Electrical supply cable wires 18
5 APG to logic interface connections 20
6 Active Gauge connector pins 31
Associated Publications
Publication title Publication Number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXC Turbomolecular Pump Controllers iii

iv EXC Turbomolecular Pump Controllers

1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the BOC Edwards
EXC100E and EXC100L Turbomolecular Pump Controllers. You must use the Controller as
specified in this manual.
Read this manual before you install and operate the Controller. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The
use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the
equipment, associated equipment or process.
The units used throughout this manual conform to the SI international system of units of
measurement.
In accordance with the recommendations of IEC1010, the following warning symbols appear on
the Controller.
Caution - refer to accompanying documents
Caution - risk of electric shock
Protective conductor terminal
Direct current only
EXC Turbomolecular Pump Controllers 1

1.2 Description
The EXC Controller generates the electrical supply and the control signals necessary to operate
an EXT pump and its accessories. Refer to Section 2 for compatible EXT pumps.
The Controller has a high-efficiency, auto-ranging power supply which adjusts itself to any
external electrical supply in the specified voltage range (refer to Section 2). The power supply
converts the single-phase electrical supply into a regulated d.c. electrical supply to control the
operation of the EXT pump. The pump has three Hall effect devices which operate as rotor
position sensors. These sensors ensure that the drive current is correctly switched to the
phase-windings of the pump-motor . The Hall effect devices also generate a speed signal which
the Controller uses to regulate the rotational speed of the pump.
The Controller has a secondary regenerative supply which uses the d.c. motor of the EXT pump
as a generator. If the electrical supply fails, the regenerative supply provides the Controller with
a back-up source of power without the need for batteries. The Controller uses the regenerative
supply to maintain the electrical supplies to the vent-valve, air-cooler and AIM gauge (if
connected) until the pump speed falls to below 50% of full rotational speed (see Section 1.5.2).
The Controllers have a number of control features which limit the power supplied to the EXT
pump in the event of sustained high pressure or temperature:
•If the EXT pump inlet pressure rises, the power supplied to the pump-motor increases to
counteract the gas frictional load. The pump rotational speed remains constant until the
Controller peak power level is reached; beyond this power level, the speed of the pump
starts to reduce. If the pump speed falls to below 50% of its full rotational speed, the
Controller may trip into Fail condition; this depends on how you have configured the
Controller (see Section 1.6.2).
•If the Controller detects that its temperature or the pump temperature is too high, it reduces
the power supplied to the pump-motor; the pump may not therefore be able to maintain full
rotational speed if it is too hot. If the pump speed falls to below 50% of its full rotational
speed, the Controller may trip into Fail condition; this depends on how you have configured
the Controller (see Section 1.6.2).
The Controller has no front-panel controls and can only be operated through the logic interface.
To operate the EXT pump, you must therefore connect the Controller to your own control
equipment. Alternatively, you can configure the mating-plug for the logic interface connector
so that the EXT pump starts to operate as soon as the electrical supply to the Controller is
switched on: refer to Section 3.9.
The rear-panel of the Controller has a Normal LED (Figure 1, item 6). The LED is on whenever
the TMP Normal status output signal is low: refer to Section 1.4.4.
The EXC100L Controller has an integral pump-to-controller cable. The EXC100E Controller has
a mating connector suitable for a pump-to-controller cable accessory (not supplied): refer to
Section 7.
2EXC Turbomolecular Pump Controllers

1.3 Connection of an Active gauge
Note: The Controller contains a regenerative power supply which maintains the electrical supply to the
AIM gauge in the event of a failure of the external electrical supply to the Controller (see
Section 1.2).
You can connect an BOC Edwards AIM Active Inverted Magnetron Gauge directly to the active
gauge connector on the Controller and use the Controller TMP Normal signal to switch the gauge
on. This allows you to control the AIM Gauge without the need to use an additional high
pressure gauge (and its associated control equipment) to interlock the operation of the AIM
Gauge to system pressure. Refer to Section 3.8 for details about how to connect an AIM gauge
to the Controller.
If you want to use another type of gauge, you must connect the gauge to the Controller through
the logic interface: refer to Section 3.9.
1.4 Logic interface
1.4.1 Introduction
The rear panel of the Controller has a 15-way logic interface connector (Figure 1, item 4) which
you can use to connect the Controller to your own equipment.
Signals on the logic interface are of four types:
•Electrical supplies These are electrical supplies for optional accessories connected to
your pump, such as the vent-valve and the air-cooler.
•Control inputs These are switch-type input signals which are used to control the
operation of the EXT pump.
•Status outputs These output signals identify the status of the pump and the
Controller.
•Analogue output The Controller can be configured to provide a speed output or a
power output. This output gives an indication of the EXT pump
speed or power consumption.
Refer to Table 3 and to Figure 4 for detailed information about the logic interface pins and their
uses. A general description of the logic interface connections follows.
EXC Turbomolecular Pump Controllers 3

1.4.2 Electrical supplies
Two nominal 24 V supplies are provided, as described below:
Vent-valve supply
This electrical supply is provided to operate a vent-valve fitted to your EXT pump or vacuum
system. The Controller automatically opens the valve when the speed of the pump falls to below
50% of full rotational speed. You can also configure the Controller to operate the valve in other
specific conditions: refer to Sections 1.5 and 3.2.
Air-cooler supply
This electrical supply is provided to operate an ACX air-cooler fitted to your EXT pump. The
electrical supply is on whenever the Controller is on. Alternatively, if your pump is
water-cooled, you can use this supply to operate a solenoid-valve to control the flow of water
through the water-cooler.
1.4.3 Control inputs
You can use these inputs to control the operation of the EXT pump. The input signals are
switch-type signals; you link (close) two pins on the logic interface when you want to set the
required signal and you do not link (open) the pins when you do not want to set the signal. The
input signals are as follows:
Start/Stop
Use the Start/Stop input to Start and Stop the EXT pump. To Start the pump, you must close
the Start/Stop input. To Stop the pump, you must open the input (refer to Sections 4.1 and 4.5).
Standby
Close the Standby input to select pump Standby (refer to Section 4.2).
1.4.4 Status outputs
The Controller provides Normal, Fail and Pump On status output signals (TMP Normal, TMP
Fail and TMP On) through open collector transistor outputs on the logic interface connector.
These signals can be used to control devices in the pumping system or to provide remote status
output signals. The signals operate as described below.
TMP Normal
TMP Normal is normally high and goes low when the EXT pump reaches its ’Normal’ speed.
The Normal speed is determined by a potentiometer on the side of the Controller. The Controller
is supplied with the potentiometer adjusted so that Normal speed is 80% of full rotational speed.
You can adjust the Normal speed as described in Section 3.10. The Normal LED on the rear panel
of the Controller (Figure 1, item 6) is on when the TMP Normal signal is low.
4EXC Turbomolecular Pump Controllers

TMP Fail
TMP Fail is normally low and goes high when the Controller trips into a Fail condition (see
Section 1.6).
TMP On
The TMP On signal mimics the operation of the vent-valve. If you select Vent On Stop (see
Section 1.5.2), TMP On is normally high and goes low when the electrical supply to the EXT
pump is switched on by the Controller.
1.4.5 Analogue output
The Controller has a single analogue output signal, which can be configured to indicate either
Pump Speed or Pump Power consumption.
The Controller is supplied configured so that the analogue output signal is proportional to EXT
pump speed. Connect the output to a suitable meter or indicator to display the pump speed or
connect the output to your control equipment (for example, to operate other components in the
pumping system at a preset EXT pump speed).
If required, you can configure the Controller so that the analogue output signal is proportional
to the electrical power drawn by the EXT pump (see Sections 2.5 and 3.2.2). Connect the output
to a suitable meter or indicator to display the pump power or connect the output to your control
equipment.
1.5 Vent-valve control
1.5.1 Introduction
Note: The factory settings for vent options are shown in Table 2.
If the Controller electrical supply fails, the Controller maintains the electrical supply to the
vent-valve until the pump speed falls to below 50% of full rotational speed, then the Controller
switches off the vent-valve electrical supply. This feature of the Controller cannot be
reconfigured.
However, you can use the configuration links in the Controller (refer to Section 3.2.4) to select a
combination of vent options in reponse to the Stop input signal and the TMP Fail output signal.
When a selected vent option condition is detected, the Controller:
•waits approximately two seconds, to allow a vacuum system isolation-valve (if fitted) to
close,
•then switches off the electrical supply to the vent-valve.
EXC Turbomolecular Pump Controllers 5

1.5.2 Vent on Stop
If Vent on Stop is selected when you switch the Controller on, the vent-valve electrical supply
remains off until Start is selected. When Start is selected, the Controller switches the vent-valve
electrical supply on. If Stop is then selected, the Controller switches the vent-valve electrical
supply off again.
If Vent on Stop is not selected when you switch the Controller on, the vent-valve electrical supply
remains off until Start is selected. When Start is selected, the Controller switches the vent-valve
electrical supply on. If Stop is then selected, the EXT pump will decelerate and the vent-valve
electrical supply will remain on until the pump speed falls to below 50% of full rotational speed;
the vent-valve electrical supply will then be switched off.
1.5.3 Vent on Fail
If Vent on Fail is selected, then the setting of the Vent on Stop option determines how the
vent-valve is controlled in response to a Fail condition, as follows:
•If you have selected Vent on Stop and a failure occurs, the Controller switches the vent-valve
electrical supply off approximately two seconds after the the Fail condition is detected.
•If you have not selected Vent on Stop, the EXT pump will decelerate and the vent-valve
electrical supply will remain on until the pump speed falls to below 50% of full rotational
speed; the vent-valve electrical supply will then be switched off.
If you have not selected Vent on Fail, the electrical supply to the vent-valve will not be switched
off when a Fail condition is detected.
1.6 Controller Fail conditions
1.6.1 General
Note: If you enable the Internal Timer (see Sections 1.6.2 and 3.2.3), the Controller will trip into Fail
condition only after the preset time has elapsed.
The Controller will trip into Fail condition if either of the following occurs:
•The EXT pump does not reach 50% of full rotational speed within a preset time after it starts
(the time set by the adjustable Internal Timer: see Sections 1.6.2 and 3.2.3).
•The EXT pump speed falls to below 50% of its full rotational speed.
When the Controller trips into Fail condition, the electrical supply to the EXT pump-motor is
switched off and the TMP Fail status output signal on the logic interface goes high. The operation
of the vent-valve depends on how you have configured the Controller (refer to Sections 1.5 and
3.2). To reset the Controller after a Fail condition has occurred, refer to Section 4.7.
6EXC Turbomolecular Pump Controllers

1.6.2 Internal Timer
The Internal Timer has two functions:
Firstly, when the EXT pump is started by the Controller, the Internal Timer in the Controller also
starts. If the EXT pump does not reach 50% of full rotational speed within the preset time
measured by the timer, the Controller will trip into Fail condition. This function cannot be
disabled.
Secondly, you can configure the Controller to enable or disable the Internal Timer if the pump
speed falls during pump operation:
•If you disable the Internal Timer, the Controller will trip into Fail condition as soon as the
pump speed falls to below 50% of full rotational speed.
•If you enable the Internal Timer, the Internal Timer will start as soon as the pump speed falls
to below 50% of full rotational speed; the Controller will trip into Fail condition if the pump
speed is still below 50% of full rotational speed at the end of the preset time.
The Controller is supplied with the Internal Timer enabled and adjusted for a preset time of
eight minutes. You can adjust the timer for your application: refer to Section 3.11.
EXC Turbomolecular Pump Controllers 7

Figure 1 - Rear panel of the Controller (EXC100E shown)
1. Electrical supply connector
2. Earth (ground) stud
3. EXT pump connector *
* EXC100E only; the EXC100L has an
integral pump-to-controller cable
4. Logic interface connector
5. Active gauge connector
6. Normal LED
8EXC Turbomolecular Pump Controllers

2TECHNICALDATA
2.1 Operating and storage data
Ambient operating temperature range 0 to 40 oC
Ambient storage temperature range -20 to 70 oC
Maximum ambient operating humidity 10 to 95% RH (non-condensing to DIN 40040)
Maximum operating altitude 3000 m
Cooling Natural convection
2.2 Mechanical data
Dimensions See Figure 2
Mass
EXC100E 0.8 kg
EXC100L 1.0 kg
Enclosure protection IP20 (as defined by IEC529)
Pollution degree IEC664, category 2
2.3 Electrical data
Electrical supply
Voltage 90 to 264 V a.c., single-phase
Frequency 47 to 63 Hz
Maximum input power 220 VA
Peak inrush current 11 A at 110 V a.c.
40 A at 240 V a.c.
Fuse rating 2 A, type T 20 mm
Over-voltage transients IEC664, category 2
Radiated electromagnetic emission EN50081-1
Electromagnetic immunity EN50082-2
2.4 EXT pump electrical output data
Compatible EXT pumps EXT70, EXT250, EXT351
Maximum continuous output power 80 W
Maximum output voltage 53 V a.c. r.m.s.
Switching frequency 32 kHz
Nominal output frequency 600 Hz to 1.5 kHz
Maximum output frequency 1.07 x nominal
Standby frequency 70% of nominal
EXC Turbomolecular Pump Controllers 9

2.5 Logic interface
Remote control signals
Control voltage: low (close) < 0.8 V d.c.
Control voltage: high (open) 4 to 24 V d.c.
Maximum input current (at 24 V) 80 µA
Maximum output current (at 0 V d.c.) 160 µA
Air-cooler electrical supply
Voltage range +20 to +26 V d.c.
Maximum output current 150 mA
Vent-valve electrical supply
Voltage range +16 to +26 V d.c.
Maximum output current 80 mA
Analogue output
Output voltage 0 to +10 V d.c. proportional to speed or power:
0 to 10 V ≅0 to 100% of pump speed, or
0 to 10 V ≅0 to 80 W motor power
Maximum output current 5 mA
TMP Normal and TMP Fail status outputs
Maximum output voltage (high) 26 V d.c.
Maximum output current
Vout (low) ≥0.8 V 20 mA
Vout (low) <0.8 V (TTL level) 1 mA
TMP On status output
Logic high output voltage at 8 µA 4.12 V
Logic low output voltage at 42 µA 0.77 V
2.6 Factory settings
Normal speed 80%
Internal Timer 8 min, enabled
Vent options See Table 2
Analogue output Speed output
2.7 Electrical connectors
Note: Do not connect voltages greater than 45 V to the logic interface. If you do, the Controller will not
comply with the low voltage safety recommendations of IEC 1010.
Electrical supply connector socket type CEE/IEC 320
Earth (ground) stud (on rear panel) M4
Active gauge connector
Signals on the connector pins See Figure 6 and Table 4
Socket type FCC68, 8-way
Manufacturer Western Electric
Maximum power 3 W
Logic interface connector 15-way sub-miniature ’D’ type socket
10 EXC Turbomolecular Pump Controllers

Figure 2 - Dimensions (mm): EXC100E shown
A Rear view
B Top view
C Side view
1. Clearance for ventilation
2. Clearance for cables
3. Optional mounting plate
EXC Turbomolecular Pump Controllers 11

3INSTALLATION
3.1 Unpack and inspect
Remove all packing materials and check the Controller. If the Controller is damaged, notify your
supplier and the carrier in writing within three days; state the Item Number of the Controller
together with your order number and your supplier’s invoice number. Retain all packing
materials for inspection. Do not use the Controller if it is damaged.
If the Controller is not to be used immediately, store the Controller in suitable conditions, as
described in Section 6.
3.2 Configure the Controller
3.2.1 Introduction
The Controller has four links which can be used to configure the Controller for your application:
see Table 1. Each link can be in one of two positions as shown in Figure 3 and described in
Sections 3.2.2 and 3.2.4.
If you want to reconfigure the Controller, undo and remove the two screws (Figure 3, items 1)
and remove the top cover (2) of the Controller to access the links. Use the links as described in
the following sections.
Link Use
LK1 Select speed or power analogue output
LK4 Enable or disable the Internal Timer
LK5 Select Vent on Stop or no Vent on Stop
LK6 Select Vent on Fail or no Vent on Fail
Table 1 - Configuration links
3.2.2 Select speed or power analogue output
Note: The Controller is supplied with link LK1 configured to provide the pump speed analogue output
signal on the logic interface.
Refer to Figure 3. To select the pump speed analogue output signal on the logic interface, insert
link LK1 in the upper position (5).
To select the pump power analogue output signal on the logic interface, insert link LK1 in the
lower position (6).
12 EXC Turbomolecular Pump Controllers

Figure 3 - Reconfigure the Controller (EXC100L shown)
7. Link LK6 not active: Vent On Fail not selected
8. Link LK6 active: Vent On Fail selected
9. Link LK5 not active: Vent On Stop not selected
10. Link LK5 active: Vent On Stop selected
11. Link LK4 not active: Timer disabled
12. Link LK4 active: Timer enabled
1. Screw
2. Top cover
3. Fuse holder
4. Speed/power link: LK1
5. Link LK1 in speed configuration
6. Link LK1 in power configuration
EXC Turbomolecular Pump Controllers 13

3.2.3 Enable/disable the Internal Timer to monitor low pump speed
Notes: If you pump a high gas load when the Internal Timer is enabled (link LK4 in the enabled position:
Figure 3, item 12), the EXT pump may stall before the Controller trips into Fail condition. Ensure
that oil which backstreams from the backing pipeline will not adversely affect your process. Disable
the Internal Timer to provide the greatest protection against backstreaming if a Fail condition
occurs.
The Controller is supplied with the Internal Timer enabled.
Set link LK4 to enable or disable the use of the Internal Timer when the pump rotational speed
falls to below 50% of full rotational speed during operation (see Section 1.6.2):
•Insert link LK4 in the active position (Figure 3, item 12) to enable the Timer. The Internal
Timer will then start as soon as thepump rotational speed falls to below 50% of fullrotational
speed. If the pump speed remains below 50% of full rotational speed after the preset time,
the Controller will trip into the Fail condition.
•Insert link LK4 in the not active position (Figure 3, item 11) to disable the Timer. The
Controller will then trip into the Fail condition as soon as the pump rotational speed falls to
below 50% of full rotational speed.
3.2.4 Vent options
Links LK5 and LK6 are used to select the vent-valve control options (refer to Section 1.5). Each
of the links can be in one of two positions: the link not active position and the link active position.
Position the links to select the required vent options as shown in Table 2.
Note however, that if the electrical supply to the Controller fails, the Controller will always
switch off the electrical supply to the vent-valve when the EXT pump speed falls to below 50%
of full speed (see Section 1.6.1).
Link positions Vent options
LK6 (Vent on Fail) LK5 (Vent on Stop)
not active not active
Vent when the EXT pump speed falls to
50% of full speed after Stop is selected or a
Fail condition is detected.
not active active
Vent on Stop; vent when the EXT pump
speed falls to 50% of full speed after a Fail
condition is detected.
active * not active *
Vent on Fail; vent when the EXT pump
speed falls to 50% of full speed after Stop
is selected.
active active Vent on Fail and vent on Stop.
* Link positions as supplied.
Table 2 - Selection of vent-valve control options
14 EXC Turbomolecular Pump Controllers