Brooks Automation MagnaTran 7.1 User manual

Brooks Automation
MagnaTran™ 7.1
User’s Manual
MN-003-1600-00 Revision 2.2
View our inventory

MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
Serial Number: ______________
Serial Number indicates date of construction of the MagnaTran™ 7.1. The first two characters are the year,
next two characters are the month, remaining characters are a unique identifier. If there is no Serial Number
recorded above this manual should be considered “generic” and not associated with a specific robot.
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
If you have any questions or comments about this manual, please complete the Reader’s Comment Form pro-
vided at the back of this manual and return it to the Technical Publications Dept. at Brooks Automation.
MagnaTran, BiSymmetrik, Leapfrog, Marathon, Marathon Express, Atmospheric Express, PASIV, and Time
Optimal Trajectory are trademarks of Brooks Automation.
All other trademarks are properties of their respective owners.
© Brooks Automation 1998, All Rights Reserved. The information included in this manual is Brooks Proprietary
Information and is provided for the use of Brooks’ customers only and cannot be used for distribution, reproduc-
tion, or sale without the express written permission of Brooks Automation. This information may be incorpo-
rated into the user’s documentation, however any changes made by the user to this information is the
responsibility of the user.
Author: B. Varnum
Brooks Automation
15 Elizabeth Drive
Chelmsford, MA. 01824
Phone [phone]
Fax [phone]
P/N MN-003-1600-00
June 26, 1998 Revision 1.0 Initial Release per EC# 13293.
October 30, 1998 Revision 2.0 Released per EC# 13841.
September 14, 1999 Revision 2.1 Released per EC# 15660.
May 17, 2001 Revision 2.2 Released per EC# 19565.
This manual is available in the following formats; Standard Printed, Cleanroom Printed, and CD.
PrintedintheU.S.A.

MagnaTran 7.1 User’s Manual Contents
MN-003-1600-00
Brooks Automation
Revision 2.2 i
Contents
Figures.................................................................. xv
Tables .................................................................xvii
Changes ................................................................xxi
Introduction
MagnaTran7RobotOverview...........................................1-2
SpecialFeatures.................................................1-3
OperationOverview...................................................1-4
DocumentationOverview ..............................................1-5
SupplementaryandRelatedDocumentation ..............................1-6
ManualNotation......................................................1-7
HardwareNotation..............................................1-7
SoftwareNotation...............................................1-8
DocumentandDrawingNumbering...............................1-9
Notes,Cautions,Warnings,andPictograms.........................1-10
ManualUsage.........................................................1-11
Specifications.........................................................1-12
RobotDrive.....................................................1-12
StandardArms..................................................1-15
CompanyOverview ...................................................1-17
QualityPolicy...................................................1-17
VisionStatement ................................................1-17
BusinessProfile.................................................1-17

Contents MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
ii Revision 2.2
Safety
SafetyConsiderations..................................................2-2
PersonnelSafetyGuidelines.......................................2-2
EquipmentSafetyGuidelines......................................2-3
DisconnectDevicesandInterlocks.......................................2-5
DisconnectDevices..............................................2-5
Interlocks.......................................................2-5
Mechanical Hazards ...................................................2-6
Electrical Hazards .....................................................2-7
Electrical Hazard Classifications ...................................2-8
Laser Hazards ........................................................2-9
Gas Hazards ..........................................................2-10
Chemical Hazards .....................................................2-11
Thermal Hazards ......................................................2-12
Vacuum Hazards ......................................................2-13
Fire and Explosion Hazards.............................................2-14
Environmental Hazards ................................................2-15
NoiseEmission..................................................2-15
Vibration.......................................................2-15
MatrixofEmergencyandCorrectiveResponseActions.....................2-16
MaterialSafetyInformation.............................................2-17
HeliumSafetyInformation........................................2-18
IsopropylAlcoholSafetyInformation..............................2-19
NitrogenSafetyInformation ......................................2-20
Krytox®(DuPont)SafetyInformation..............................2-21
Installation
SiteRequirements .....................................................3-2
Space ..........................................................3-2
EnvironmentalRequirements .....................................3-5
Electrical.......................................................3-5
Communications................................................3-5
UnpackingandInspection..............................................3-6
UnpackingInstructions...........................................3-7
InstallationProcedure..................................................3-8
PrepareSurfaceforMounting.....................................3-8

MagnaTran 7.1 User’s Manual Contents
MN-003-1600-00
Brooks Automation
Revision 2.2 iii
RobotInstallation................................................3-10
FacilitiesConnections............................................3-10
ElectricalConnections............................................3-10
CommunicationConnections......................................3-14
Control/DisplayModule.........................................3-17
SoftwareInstallation.............................................3-19
Check-out............................................................3-20
MechanicalChecks ..............................................3-20
FacilityChecks..................................................3-20
InitialPower-upSequence..............................................3-21
ConfigurationCompatibility............................................3-22
MounttheArmSet ....................................................3-23
MounttheMagnaTran7LeapfrogArmSet..........................3-24
MounttheMagnaTran7.1BiSymmetrikArmSet/HubStyle ..........3-29
MountMagnaTran6BiSymmetrikArmSet.........................3-34
MounttheMagnaTran6FroglegArmSet...........................3-38
MounttheMagnaTran7BiSymmetrikArmSet/ConeStyle...........3-42
InstallEndEffector ....................................................3-47
AlignmentandCalibration..............................................3-48
Subsystems
MechanicalSystem ....................................................4-2
Subsystems.....................................................4-2
ProtectiveCovers................................................4-3
FrameAssembly.................................................4-4
T1/T2DriveAssembly...........................................4-5
ZAxisDriveAssembly...........................................4-7
RobotArms....................................................4-9
ElectricalSystem ......................................................4-11
PC104CPU(Supervisor)Board....................................4-11
Personality(MotionControlComputer)Board ......................4-11
T1/T2AxisDriverBoardandZAxisDriverBoard...................4-11
I/O(Interface)Board.............................................4-12
PowerPak......................................................4-15
PowerSupply...................................................4-15
Software..............................................................4-16
Control/DisplayModule...............................................4-17
FunctionalBlockDiagram........................................4-18

Contents MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
iv Revision 2.2
Operational Interfaces
InterfaceOverview ....................................................5-2
PowerConnections....................................................5-3
Serial Communication SIO1.............................................5-5
SwitchSettings..................................................5-7
Serial Communication SIO2.............................................5-8
MISC I/O Communications.............................................5-9
HighSideI/O...................................................5-10
LowSideI/O...................................................5-12
HighSide/LowSideInterfaces....................................5-14
SafetyInterlock..................................................5-17
RetractPin......................................................5-18
MarathonExpressI/O ...........................................5-19
Control/DisplayModule...............................................5-20
EmergencyStopCDM............................................5-20
OptionalCDM..................................................5-21
Operation
MagnaTran7.1WaferHandlingRobotOverview..........................6-2
ArmDescription.................................................6-2
MagnaTran7.1ApplicationNumber.....................................6-8
TheoryofOperation ...................................................6-9
Single Arm Motion ..............................................6-10
DualArmMotion................................................6-10
MotionControl..................................................6-13
Speed..........................................................6-13
HardwareMemoryStructure......................................6-16
StationCoordinateSystem........................................6-17
FactorySetHOMEPosition.......................................6-19
HOMEOperation................................................6-20
ControlsandIndicators.................................................6-21
Overview.......................................................6-21
Controls........................................................6-21
Indicators.......................................................6-21
OperationalInterlocks..................................................6-23
Identification....................................................6-23
CreatingtheOperationalInterlocks................................6-26
RelatedCommands..............................................6-26
PassThroughFeature............................................6-26

MagnaTran 7.1 User’s Manual Contents
MN-003-1600-00
Brooks Automation
Revision 2.2 v
SpecialNotesonRETRACT_PIN ..................................6-26
SpecialNotesonthePowerPak....................................6-27
MappingtheInterlocks...........................................6-29
WaferPresenceSensors-ExtendandRetract...............................6-32
Overview.......................................................6-32
WaferPICK.....................................................6-33
WaferPLACE...................................................6-36
ServoPositionRecording.........................................6-37
SensorInterfaceSpecifications.....................................6-37
Ex/ReSensorCommands.........................................6-37
Wafer Presence Sensors- Radial Motion...................................6-38
R_MTWaferSensingTechnique...................................6-38
R_MTPlacementCriteria.........................................6-38
R_MTCommands...............................................6-39
RadialMotionSetupProcedure....................................6-41
OffCenterPICKandPLACEFeature.....................................6-42
DiscreteI/OControl(DIO) .............................................6-45
DIOControlSystem..............................................6-45
DIOControlProgramming........................................6-45
InitialDIOConfigurationProcedure...............................6-45
DIOFaultConditions............................................6-45
DIOStart-up....................................................6-46
DIOSignalDefinitions ...........................................6-46
EnableDIOInitializationSequence.................................6-56
RobotMotionDIOInhibition......................................6-56
PASIV™SafetyFeatureOperation.......................................6-58
TheWorkspaceOverview ........................................6-58
CreatingWorkspaces.............................................6-59
ReservedWorkspaceNames......................................6-60
DefiningTminandTmax.........................................6-62
AssigninganInterlocktoaWorkspace.............................6-62
PASIV™commands.............................................6-62
Control/DisplayModule(CDM)Operation...............................6-63
PowerControl ..................................................6-63
ControlModes..................................................6-66
KeyDescriptions................................................6-67
LeftColumnKeys ...............................................6-69
AxisParameterSelectionKeys.....................................6-78
MovingintheMenuTree.........................................6-80
EnteringDataValues.............................................6-80
SettingUpStations...............................................6-81
ExampleofTeachingaStationwiththeCDM:.......................6-82

Contents MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
vi Revision 2.2
PowerPakPowerFaultManager.........................................6-84
Operation ......................................................6-84
ControlsandIndicators...........................................6-85
OperationalInterlocks............................................6-86
Start-up..............................................................6-87
OperationalCheck-out...........................................6-87
NormalRunning......................................................6-88
ASampleSession................................................6-88
EmergencyConditions.................................................6-89
IssuingaHALTCommandinBackgroundMode....................6-89
IssuinganEmergencyOff(EMO)..................................6-89
IssuinganEMER_STOPinDIOMode..............................6-89
IssuingaSTOPinCDMMode.....................................6-89
IssuinganEMERGENCYSTOPontheCDMMode ..................6-90
Shut-down............................................................6-91
Alignment and Calibration
RobotAlignment......................................................7-2
RequiredToolsandTestEquipment................................7-2
AlignmentStrategy..............................................7-3
AlignmentProcedure............................................7-4
VerifyingFlatnessofRobot’sEndEffector ................................7-5
AdjustingtheRobot’sEndEffector.......................................7-7
SettingtheRobottotheWaferTransportPlane............................7-13
SettingtheTransferandProcessModules’TandRCoordinates .............7-16
TeachingArmBoftheDualArmSets....................................7-18
TeachArmBProcedureI.........................................7-18
TeachArmBProcedureII ........................................7-19
FinalCheckout........................................................7-20
VerifyProperPICKandPLACEofWafer...........................7-20
Command Reference
Description...........................................................8-2
RobotOperation.................................................8-2
CommandFlows................................................8-2
OperatingModes................................................8-4

MagnaTran 7.1 User’s Manual Contents
MN-003-1600-00
Brooks Automation
Revision 2.2 vii
CommandandResponseStructure.......................................8-6
ResponseTypesandSyntax.......................................8-9
CommandandResponseCompatibility ............................8-11
CommandQuickReferenceTables.......................................8-13
CommandReference...................................................8-22
CheckLoad.....................................................8-23
ConfigureRobotApplication......................................8-25
CreateWorkspace...............................................8-26
DIOStart.......................................................8-27
DIOStop.......................................................8-28
EEPROMReset..................................................8-29
FindEncoder....................................................8-30
FindPhase......................................................8-31
FindZero.......................................................8-32
GoTo..........................................................8-33
GoToStationwithOffset.........................................8-36
Halt............................................................8-39
Hllo............................................................8-40
Home..........................................................8-41
LifeTest........................................................8-43
Map ...........................................................8-44
MapPassThrough...............................................8-49
Mount .........................................................8-51
Move ..........................................................8-52
Pick............................................................8-54
PickwithanOffset...............................................8-56
Place...........................................................8-59
PlacewithanOffset..............................................8-61
Reference.......................................................8-64
Release.........................................................8-65
RemoveIO......................................................8-66
RemoveStation..................................................8-67
RemoveWorkspace..............................................8-68
RequestBackground.............................................8-69
RequestCapture.................................................8-70
Request Communication..........................................8-71
RequestConfiguration ...........................................8-74
RequestDIOOutput.............................................8-75
RequestHistory.................................................8-76
RequestHomePositionZ-Axis....................................8-79
RequestInterlock................................................8-80
RequestI/OEcho................................................8-81
RequestI/OMap................................................8-82
RequestI/OState................................................8-84
RequestLoad ...................................................8-86

Contents MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
viii Revision 2.2
RequestLoadMode..............................................8-88
RequestMount..................................................8-89
RequestPositionAbsolute........................................8-90
RequestPositionDestination......................................8-92
RequestPositionStation..........................................8-94
RequestPositionTarget ..........................................8-96
Request Radial Motion Sense......................................8-98
RequestReference...............................................8-100
RequestRetract2Value ..........................................8-101
RequestRevision................................................8-102
RequestRobotApplication........................................8-103
RequestStation..................................................8-104
RequestStationOption...........................................8-106
RequestStationSensor...........................................8-108
RequestSyncPhase..............................................8-110
RequestSyncZero...............................................8-111
RequestVersion.................................................8-112
RequestWarningCDMStatus.....................................8-113
RequestWho....................................................8-114
RequestWorkspace..............................................8-115
RequestWorkspaceAutoCreate...................................8-116
RequestWorkspaceMode........................................8-117
Reset...........................................................8-118
SetArms .......................................................8-119
SetCapture.....................................................8-120
SetCommunication..............................................8-121
SetDIOOutput..................................................8-125
SetHighSpeed..................................................8-126
SetHomePositionZ-Axis.........................................8-127
SetInterlock ....................................................8-128
SetI/OEcho....................................................8-129
SetI/OState....................................................8-130
SetLoad........................................................8-132
SetLoadMode..................................................8-134
SetLowSpeed ..................................................8-135
SetMediumSpeed...............................................8-136
SetMount......................................................8-137
SetRadialMotionSense..........................................8-138
SetRetract2Value...............................................8-139
SetStation......................................................8-140
SetStationOption ...............................................8-142
SetStationOptionVIAPoint......................................8-145
SetStationSensor................................................8-147
SetSyncPhase ..................................................8-149
SetSyncZero ...................................................8-150
SetTeachSpeed.................................................8-151