
Table of Contents
Instruction Manual COBRA DS 3181 C_EN_en 3 | 68
6.1.7 Electrical Connection/ Checks............................................................................................................. 25
6.2 Installation ........................................................................................................................................................... 25
6.2.1 Mounting ............................................................................................................................................... 25
6.2.2 Electrical Connection............................................................................................................................ 26
6.2.3 Equipment Connections (with Options)............................................................................................. 30
6.2.4 Connection of Lines/ Pipes.................................................................................................................. 31
6.2.5 Oil Filling ................................................................................................................................................ 31
6.2.6 Cooling Liquid Filling............................................................................................................................ 36
6.2.7 Direct Cooling Checking ...................................................................................................................... 38
6.2.8 Nitrogen Supply Checking................................................................................................................... 38
6.2.9 Operating Parameters Saving ............................................................................................................ 38
6.3 Recommendations on Operation...................................................................................................................... 38
6.3.1 Application............................................................................................................................................. 38
6.3.2 Switching the Vacuum Pump On/ Off ................................................................................................ 40
6.4 Load Lock Operation Mode................................................................................................................................ 41
7 Standard Operational Time Chart ...................................................................................................................... 43
7.1 Signal Control Mode (Select LL Mode = EXTERN) ............................................................................................ 43
7.2 Current Control Mode (Select LL Mode = AUTO)............................................................................................. 44
8 Maintenance ......................................................................................................................................................... 45
8.1 Maintenance Schedule ....................................................................................................................................... 46
8.1.1 Lock Out/ Tag Out Procedure ............................................................................................................. 48
8.1.2 Safety Lockout Procedure ................................................................................................................... 48
8.2 Oil Checking......................................................................................................................................................... 48
8.2.1 Oil Level Checking ................................................................................................................................ 48
8.2.2 Oil Refilling ............................................................................................................................................ 49
8.2.3 Oil Color Inspection.............................................................................................................................. 50
8.2.4 Oil Change............................................................................................................................................. 50
8.3 Cooling Liquid Checking..................................................................................................................................... 53
8.3.1 Cooling Liquid Level Checking ............................................................................................................ 53
8.3.2 Cooling Liquid Refilling........................................................................................................................ 53
8.3.3 Cooling Liquid Draining....................................................................................................................... 54
8.3.4 New Cooling Liquid Filling................................................................................................................... 54
8.4 Additional Checking............................................................................................................................................ 55
9 Overhaul ................................................................................................................................................................ 56
10 Removal from Service .......................................................................................................................................... 57
10.1 Temporary Removal from Service..................................................................................................................... 57
10.2 Recommissioning................................................................................................................................................ 57
10.3 Dismantling and Disposal .................................................................................................................................. 58
11 Spare Parts ............................................................................................................................................................ 59
12 Troubleshooting ................................................................................................................................................... 60
13 Oil Type/ Quantity ................................................................................................................................................ 62
13.1 Oil Type................................................................................................................................................................. 62
13.2 Oil Quantity.......................................................................................................................................................... 62
14 Cooling Liquid Type/ Quantity ............................................................................................................................ 63
14.1 Cooling Liquid Type ............................................................................................................................................ 63
14.2 Cooling Liquid Quantity...................................................................................................................................... 63
15 Technical Data ...................................................................................................................................................... 64
16 EU Declaration of Conformity ............................................................................................................................. 65
17 UK Declaration of Conformity............................................................................................................................. 66