Coremorrow XD601-D2 User manual

XD601-D2 Piezo Nanopositioning Stage
User Manual
Version: V1.0
This document describes the following products:
■XD601-D2

DECLARATION
Thank you for choosing Core Tomorrow (CoreMorrow for short) products!
This user manual is applicable to XD601-D2 Piezo Nanopositioning Stage,
for your smooth and correct use of this product, Please read this manual
carefully before use, and follow the relevant instructions in the manual for
installation and use. Improper operation may cause injury to the operator
and/or damage to the product, so it is required that the entire installation
and operation process should be completed by professionals with a certain
foundation and a certain understanding of product principles, or under the
guidance of a professional.
If you disassemble or transform the product without permission, our
company will not be responsible for any consequences arising therefrom.
To change the product model and other false sales of our company's
products are illegal, users should be vigilant. Once found, you should
actively report or contact our company, jointly crack down on illegal acts,
and prevent fraud and economic losses. CoreMorrow will investigate for the
legal responsibility of the illegal subject and related parties.
With the continuous development and innovation of technology,
CoreMorrow will timely add the latest information to the manual as
required. If you need, please contact us, or to our website www.coremorrow.
com for download, we apologize for any inconvenience caused to you.

1
1. Introduction ........................................................................................................................................2
1.1 Purpose and content ................................................................................................................2
1.2 Symbol and meaning................................................................................................................2
1.3 Users of This Manual ................................................................................................................2
1.4 Manual Lost and Reissued......................................................................................................2
2. Safety Guide........................................................................................................................................3
3. Product Overview ...........................................................................................................................4
3.1 Product Introduction ................................................................................................................4
3.2 Product Features........................................................................................................................5
3.3 Motion direction ........................................................................................................................5
4. Operating environment ..................................................................................................................6
5. Installation and operation..............................................................................................................6
5.1 Installation and Precautions...................................................................................................6
5.2 Load................................................................................................................................................8
5.3 Operating...................................................................................................................................10
6. Transportation and inspection ..................................................................................................12
6.1 Transportation..........................................................................................................................12
6.2 Open-Box Inspection.............................................................................................................12
7. Maintenance and Treatment ......................................................................................................13
7.1 Problem Handling...................................................................................................................13
7.2 Daily maintenance..................................................................................................................14
7.3 Disposal......................................................................................................................................14
8. Parameter..........................................................................................................................................15
8.1 Technical data...........................................................................................................................15
8.2 Drawing......................................................................................................................................15
8.3 Driving and Sensor Connector...........................................................................................16
9.Customer Service ............................................................................................................................17
10.Contact us........................................................................................................................................17
Contents

XD601-D2 Piezo Nanopositioning Stage User Manual
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1.
2.
1. Introduction
1.1 Purpose and content
The manual is mainly for smooth and correct use of XD601-D2 piezo stage.
The manual contains all the necessary information for XD601-D2 piezo stage.
Introduction of the precautions during installation and use.
1.2 Symbol and meaning
DANGER: Improper handling may could cause injury to the operator.
Attention: Improper handling can cause damage to the equipment.
No order between items.
1.3 Users of This Manual
The default user of this manual has knowledge of piezoelectric products and controllers,
and has a certain basis for their installation and use.
1.4 Manual Lost and Reissued
If this manual is lost, please contact CoreMorrow. We will send you the latest version of the
user manual.
Please operating in order.

3
In order to prevent damage to the product caused by improper operation, the
following points should be paid attention to the following points when in use.
XD601-D2 piezoelectric nanopositioning stage should be used in a dust-free, oil-free
and lubricant-free environment.
As the product is designed with flexible structure, it is recommended that the load
should not exceed load capacity of product. When loading, DO NOT apply torque
force and DO NOT pry or twist the load surface, so as not to damage the structure.
Recommended voltage range is 0~120V for long-term use and lifetime.
Do not disassemble the product to avoid damage.
Avoid stretching and bending the cable interface to prevent damage to the cable.
Use the dedicated cable provided by CoreMorrow to connect XD601-D2 piezoelectric
nanopositioning stage to controller.
Do not connect via an extension cable casually, if you need a longer cable, please
contact CoreMorrow.
A change in temperature and pressure will charge the piezoelectric actuator, and
the actuator will remain charged for a period of time when it is disconnected from
the controller, so the operator should pay attention to when in use:
Do not disassemble XD601-D2 piezoelectric nanopositioning stage.
Discharge XD601-D2 before mounting, which can be done by connecting to the
controller.
Do not unplug the wire connecting with controller during operation.
Before use, check whether the connection wire of the product is in good condition and
whether the product and the controller are effectively grounded. During operation,
strictly standardize the operation. Do not touch the product (up to 150V voltage) with
your hand when power on, in case of danger.
2. Safety Guide
XD601-D2 piezoelectric nanopositioning stage is designed with the most advanced
technology and safety standards for your own safety and the correct use of the product,
please observe the following points when in use.

XD601-D2 Piezo Nanopositioning Stage User Manual
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3. Product Overview
3.1 Product Introduction
XD601-D2 piezoelectric nanopositioning stage has the following advantages:
High performance piezo stack:
XD601-D2 piezoelectric nanopositioning stage is driven by a highly reliable ceramic
actuator with a fully insulated structure, so its performance and service life are far better
than the traditional actuator. The insulating layer can effectively prevent the piezoelectric
ceramic from being damaged when exposed to moisture. Therefore, the stability of
piezoelectric ceramics can be guaranteed under extreme circumstances. Compared with
traditional driving mechanism, there are no transmission parts and friction. Therefore,
ceramic actuator has the characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
XD601-D2 piezoelectric nanopositioning stage adopting flexible hinge mechanism has
advantages of no friction, high positioning accuracy. Flexible hinge is an element not
affected by static and dynamic friction, based on the elastic deformation of metal material
(e.g., steel) , there is no rolling and sliding parts. Flexible unit has very high load capacity
and stiffness. Hinge guide needs no maintenance and no wear and tear. Suitable for a wide
range of temperatures, no lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
The sensor is connected by full bridge without drift and can accurately do the position in
the nanometer range.
The stroke of XD601-D2 piezo nanopositioning stage can reach the displacement of X180/

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3.2 Product Features
Large displacement in XYZ.
Closed-loop strain gauge sensor, high positioning accuracy.
Mainly used in low frequency or static application.
3.3 Motion direction
Y180/Z300um. The flexure hinge mechanism ensures that the XYZ-dimensional motion
has no coupling, and features no mechanical friction, fast response speed, high repeatable
positioning accuracy, high flexibility, easy to operate, so it can meet different applications.
This product can also be customized according to the needs.
XD601-D2 is mainly used in biotechnology, interferometry, quality detection, optical
detection, nano-positioning, microscopy and imaging, image processing and other fields.
FIG. 1 Motion direction of XD601-D2 piezo nanopositioning stage
X
X
Y

XD601-D2 Piezo Nanopositioning Stage User Manual
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The identification of the labels on the wires of XD601-D2 is as follows：
Table1. XD601-D2 Wire Identification and Motion Direction
4. Operating environment
A clean, dustfree and non-corrosive environment
Operating temperature : -20~80℃
Relative humidity : <60%
Recommended voltage range is 0~120V for long-term use and lifetime
5. Installation and operation
Safety check should be carried out before installation, such as whether the connection wire
is damaged or broken, whether the drive power supply is grounded, etc.
5.1 Installation and Precautions
1、Make sure the mounting surface is flat.
2、Use M3 screws to mount the XD601-D2 and tighten.
3、Mount a load and tighten it properly to achieve high positioning accuracy.
4、Connect XD601-D2’s connector to the corresponding interface of the controller
according to the identification on the leads.
Model Motion direction Function Label
XD601-D2
Y
PZT Drive CH1
Senser output 1
X
PZT Drive CH2
Senser output 2
Z
PZT Drive CH3
Senser output 3

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The connection mode of LEMO connector is shown in the following figure.
The XD601-D2 mounting diagram is shown below:
FIG.2 Connector diagram
FIG.3 XD601-D2 mounting diagram
Sensor output Label for sensor output
Label for PZT drive
PZT drive output
Moving platform
Load mounting hole (M3 screw)
Deep 3.5mm
Mounting hole (4×M3 screw)

XD601-D2 Piezo Nanopositioning Stage User Manual
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5.2 Load
When mounting the load, ensure that the load quality is less than the maximum load
capacity of XD601-D2, and try to mount the load in the center of the moving surface.
The correct position to mount the load is shown below.
FIG.4 The load is applied to the center of the moving surface
FIG.5 Try not to let the position of the center of gravity far exceed the active platform
For the protection of the product, we do not recommend that the load is too high. If a
higher load must be used, please appropriately low the position of the center of gravity of
the load.
The wrong mounting way is shown in the figure below:

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FIG.6 Do not mount long loads on one side of the platform
It is forbidden to mount the load on one side of the moving platform, which will cause
serious damage to the product, as shown in the figure below.
Too long screws selected in the fastening and connection process will lead to failure of
mounting or part of bolts will be exposed, which will scratch the product and affect the
motion accuracy of the product. If the bolt is too short, the connection will be weak, and
it is easy to be loosened. Loosening during operation will damage the internal structure of
the product.
FIG.7 The correct bolt connection
We recommend using the connection method shown in the figure below:

XD601-D2 Piezo Nanopositioning Stage User Manual
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Please do not connect in this way as shown below:
FIG. 8 Inappropriate bolt selection
Notice:
When mounting the load, tighten the load slowly. The torque should not be too large
to prevent damage to the mechanism.
Avoid stretching and bending cables.
Use the dedicated cable provided by CoreMorrow to connect XD601-D2 and the
controller.
Do not connect via an extension cable casually, if you need a longer cable, please
contact CoreMorrow.
5.3 Operating
Please reconfirm the following information before turning on the power:
The operating environment meets the operating environment requirements of
XD601-D2.
Fixed screws must be tightened.

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After the above information is confirmed, relevant controller operations can be carried out:
1.Please read the user manual of the controller carefully before operation, and then start
the controller.
2.Set the controller’ output voltage to zero first.
3.Check no abnormal phenomenon, then input voltage value (via keyboard or analog
control) according to specified input voltage range.
4.Operating normally within the rated voltage range of piezoelectric ceramics (0~120V,
maximum 150V).
5.After use, please carry out voltage reset operation.
Please take light steps when XD601-D2 in operation, do not knock the product, so as not
to affect the use of the product or even damage the product.
The resolution of the product itself is unlimited, and the resolution depends on
the performance of the controller. In order to achieve better motion precision, it is
recommended to use our company's supporting controller. Please refer to the user manual
of the controller for the specific operation to ensure correct operation before relevant
operation.
Notes：
Do not remove the grounding protection during the operation. If you need to remove
it temporarily, please reconnect the grounding protection before starting it again.
The driving voltage shall not exceed the voltage range of XD601-D2(150V).
If any abnormal noise or oscillation occurs during use, turn off the power immediately
and check the parameter setting.

XD601-D2 Piezo Nanopositioning Stage User Manual
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6.1 Transportation
This product is packed in cartons. Transportation is carried out under the packaging
conditions. This product can be transported by various means of transport under normal
circumstances. In the process of transportation, direct rain and snow, corrosive substances,
strong collision, extrusion, irregular placement and other improper behaviors should be
avoided as far as possible.
6. Transportation and inspection
6.2 Open-Box Inspection
Inspection content:
Before opening the package, please check the outer packing carefully to see if there is
any breakage, wetting, dampness, deformation, etc.
Please check the completeness of package contents one by one according to the
supply contract and packing list.
Check whether the surface of the product has obvious damage
Check whether the product identification is clear and complete.
Check whether the connector is loose and the connector wire is broken or damaged.
In case of any of the above, please make a detailed record and take a photo of it.
Meanwhile, please contact us for processing immediately.
Attention:
Please handle with care when opening the package, so as not to knock against the
product and cause permanent damage to it.
Please do not use heavy tools or rough way to open.
Please do not discard all the packaging materials which are needed for repair and
return.

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7.1 Problem Handling
FAQ are shown in the table below.
7. Maintenance and Treatment
Problem description Possible reason Solution
No displacement or
less displacement
The connection wire is
not connected properly or
poor contact
Check the connection wire
Excessive load Load according to the
product’s load capacity
Sensor zero drift Check the sensor
Low accuracy
Mountingsurface unevenness Mount the platform on a flat
surface
Loose connection Fasten connection
Wrong connection Check if the wiring is correct
Vibration or inaccurate
positioning at startup
Incorrect input control
parameters
Stop immediately and check the
parameter Settings
Resonance occurs Make drive frequency less than
resonance frequency
Table 2 FAQ and solutions
If the user cannot solve the problem by himself in the process of using, please record the
problem in detail and contact CoreMorrow, and professional technical personnel will help
to solve.
Problems caused by improper operation are not covered by the warranty.
CoreMorrow is not responsible for any problems caused by dismantling products without
permission.

XD601-D2 Piezo Nanopositioning Stage User Manual
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7.2 Daily maintenance
If the product is not used for a long time, please store it in a dust-free, well-ventilated,
clean and non-corrosive indoor environment after packaging.
In the daily maintenance, please do not loosen the bolts on the product structure, so as
not to affect the movement accuracy of the product.
Daily cleaning:
Please disconnect the product from the controller before cleaning the surface of the
product.
When cleaning, gently wipe the surface of the product with a towel dipped in a small
amount of detergent, and then clean it with alcohol. Please do not use ultrasonic cleaner.
When cleaning the surface, try not to pick up the product. If you have to pick up the
product, it is better to put the sponge under the product for protection. The product
should not be too high from the sponge, in case the product falls off.
7.3 Disposal
Waste products should be disposed according to national and local rules and regulations.
In order to fulfill our responsibility as a product manufacturer, we will dispose all old
equipments on the market in an environmentally friendly manner. If you have equipment
that cannot be disposed, you can ship it to CoreMorrow.
Address: 1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, Heilongjiang
Tel: [phone]

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8.1 Technical data
8. Parameter
Table 3 XD601-D2 Technical Parameters
Note：The tolerances of the above data are all ±20%
8.2 Drawing
FIG.9 Drawings
Models XD601-D2 Unit
Active axis XYZ
Stroke（0~120V） X130/Y130/Z250 μm
Stroke（0~150V） X180/Y180/Z300 μm
Unloaded resonant frequency X200/Y180/Z200 Hz
Maximum load 0.2 kg
Capacitance X2.2/Y2.2/Z7 μF
Material Al, Steel
12.5
9.5
1
41
Z
50
6
59.5
X
Y
30
6.516.5
84-M3x3.5
16.5
22 30
44
40
30
4-R3
48
4- 3.2通孔
1.5 1.5
THRU

XD601-D2 Piezo Nanopositioning Stage User Manual
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FIG.10 Single Core LEMO
8.3 Driving and Sensor Connector
The connector of PZT driving wire is LEMO, and model is LEMO ERA.00.250.CTL, as shown
in below:
FIG.11 Four-core LEMO
The sensor connector is four-core LEMO, and the model is LEMO ERA.0S.304.CLL，as
shown in the following figure:
Note：Open-loop products have only PZT drive line, no sensor line.
FIG. 12 Definition of Sensor Connector
Note: The open loop product only has drive connector, no sensor connector.
The bridge connection mode and pin definition of strain gauge are as follows:

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9.Customer Service
If you have questions about the products you are currently using, please let us know the
following information:
Product model and relevant number
The controller model
Software driver version
Computer operating system that installs supporting software
Harbin Core Tomorrow Science & Technology Co., Ltd.
Tel: [phone] Fax: [phone]
Email: [e-mail] Website: www.coremorrow.com
Address: 1F, Building T2, No.191 Xuefu Road, Nangang District, Harbin, Heilongjiang
Province, China
CoreMorrow Official and CTO WeChat are below:
10.Contact us