Coremorrow S54 Series User manual

S54 Piezo Tip/Tilt Stage
User Manual
Version: V1.0
This document describes the following products:
■S54.T2S
■S54.T2K

DECLARATION
This user manual is applicable to S54 piezo tip/tilt stage, for your smooth
and correct use of this product, please read this manual carefully before
using it. Please follow the instructions in the installation and use process.
Improper operation may cause injury to the operator and/or damage to the
product, so it is required that the entire installation and operation process
should be completed by professionals with a certain foundation and a
certain understanding of product principles, or under the guidance of a
professional.
If you disassemble or transform the product without permission, our
company will not be responsible for any consequences arising therefrom.
To change the product model and other false sales of our company's
products are illegal, users should be vigilant. Once found, you should
actively report or contact our company, jointly crack down on illegal acts,
and prevent fraud and economic losses. CoreMorrow will investigate for the
legal responsibility of the illegal subject and related party.
With the continuous development and innovation of technology,
CoreMorrow will timely add the latest information to the manual as
required. If you need, please contact us, or to our website www.coremorrow.
com for download, we apologize for any inconvenience caused to you.

1
1. Introduction ........................................................................................................................................2
1.1 Purpose and content ................................................................................................................2
1.2 Symbol and meaning................................................................................................................2
1.3 Users of This Manual ................................................................................................................2
1.4 Manual Lost and Reissued......................................................................................................2
2. Safety Guide........................................................................................................................................3
3. Product Overview ...........................................................................................................................4
3.1 Product Introduction ................................................................................................................4
3.2 Product Features........................................................................................................................5
3.3 Motion direction ........................................................................................................................5
4. Operating environment ..................................................................................................................6
5. Installation and operation..............................................................................................................6
5.1 Installation and Precautions...................................................................................................6
5.2 Load................................................................................................................................................8
5.3 Operating...................................................................................................................................10
6. Transportation and inspection ..................................................................................................11
6.1 Transportation..........................................................................................................................11
6.2 Open-Box Inspection.............................................................................................................12
7. Maintenance and Treatment......................................................................................................12
7.1 Problem Handling...................................................................................................................12
7.2 Daily maintenance..................................................................................................................13
7.3 Disposal......................................................................................................................................14
8. Connector .........................................................................................................................................14
8.1 Driving and Sensor Connector...........................................................................................14
9.Customer Service ............................................................................................................................15
10.Contact us........................................................................................................................................16
Contents

S54 Piezo Tip/Tilt Stage User Manual
2
1.
2.
1. Introduction
1.1 Purpose and content
The manual is mainly for smooth and correct use of S54 piezo tip/tilt stage.
The manual contains all the necessary information for S54 piezo tip/tilt stage.
Introduction of the precautions during installation and use.
1.2 Symbol and meaning
DANGER: Improper handling may could cause injury to the operator.
Attention: Improper handling can cause damage to the equipment.
No order between items.
1.3 Users of This Manual
The default user of this manual has knowledge of piezoelectric products and controllers,
and has a certain basis for their installation and use.
1.4 Manual Lost and Reissued
If this manual is lost, please contact CoreMorrow. We will send you the latest version of the
user manual.
Please operating in order.

3
In order to prevent damage to the product caused by improper operation, the
following points should be paid attention to when in use.
S54 piezo tip/tilt stage is used in a dust-free, oil-free and lubricant-free environment.
As the product is designed with flexible structure, it is recommended that the load
should not exceed load capacity of product. When loading, DO NOT apply torque
force and DO NOT pry or twist the load surface, so as not to damage the structure.
Recommended voltage range is 0~120V for long-term use and lifetime.
Do not disassemble the product to avoid damage.
Avoid stretching and bending the cable interface to prevent damage to the cable.
Use the dedicated cable provided by CoreMorrow to connect S54 piezo tip/tilt stage
to controller.
Do not connect via an extension cable casually, if you need a longer cable, please contact
CoreMorrow.
A change in temperature and pressure will charge the piezoelectric actuator, and
the actuator will remain energized for a period of time when it is disconnected
from the controller, So the operator should pay attention to when in use:
Do not disassemble S54 piezo tip/tilt stage.
Discharge S54 before installation, which can be done by connecting to the
controller.
Do not unplug the wire connecting with controller during operation.
Before use, check whether the connection wire of the product is in good condition and
whether the product and the controller are effectively grounded. During operation,
strictly standardize the operation. Do not touch the product (up to 150V voltage) with
your hand when power on, in case of danger.
2. Safety Guide
S54 piezo tip/tilt stage is designed with the most advanced technology and safety
standards for your own safety and the correct use of the product, please observe the
following points when in use

S54 Piezo Tip/Tilt Stage User Manual
4
3. Product Overview
3.1 Product Introduction
S54 piezo tip/tilt stage has the following advantages:
High performance piezo stack:
S54 piezo tip/tilt stage is driven by a highly reliable ceramic actuator with a fully insulated
structure, so its performance and service life are far better than the traditional actuator.
The insulating layer can effectively prevent the piezoelectric ceramic from being damaged
when exposed to moisture. Therefore, the stability of piezoelectric ceramics can be
guaranteed under extreme circumstances. Compared with traditional driving mechanism,
there are no transmission parts and friction. Therefore, ceramic actuator has the
characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
S54 piezo tip/tilt stage adopts flexible hinge mechanism has advantages of no friction,
high positioning accuracy. Flexible hinge is an element not affected by static and dynamic
friction, based on the elastic deformation of metal material (e.g., steel) , there is no rolling
and sliding parts. Flexible unit has very high load capacity and stiffness. Hinge guide needs
no maintenance and no wear and tear. Suitable for a wide range of temperatures, no
lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
The sensor is connected by a full bridge, no drift, and can be precisely positioned in the
nanometer range.
The S54 can run up to ±1.1mrad, can do two dimensional tilt at the same time,. Adopting

5
3.2 Product Features
High resolution.
Closed loop strain gauge sensor, high positioning accuracy.
Quick response.
3.3 Motion direction
flexible hinge makes θXθY motion uncoupled, and features fast response speed, high
repeatable positioning accuracy, high flexibility, easy to operate, so it can meet different
applications. This product can also be customized according to the needs.
S54 is mainly used in biotechnology, interferometry, quality detection, optical detection,
nanometer positioning, microscopy and imaging, image processing and other fields.
FIG. 1 S54 Motion Direction
AXIS2 AXIS1
Lead out

S54 Piezo Tip/Tilt Stage User Manual
6
4. Operating environment
A clean, dustfree and non-corrosive environment
Operating temperature : -20~80℃
Relative humidity : <60%
Recommended voltage range is 0~120V for long-term use and lifetime
The label and motion direction of S54 is as follows:
Table1.S54 Label and motion Direction
Model Motion direction Function Label
N50
AXIS1
PZT Drive CH1
Senser output 1
AXIS2
PZT Drive CH2
Senser output 2
Constant voltage PZT Drive CH3
5. Installation and operation
Safety check should be carried out before installation, such as whether the connection wire
is damaged or broken, whether the drive power supply is grounded, etc.
5.1 Installation and Precautions
1.Ensure that the installation plane is relatively flat;
2.Mount M3 on the mounting surface directly and tighten it;
3.Mounting the load and tighten it properly to ensure the positioning accuracy;
4.Connect the S54 connector with the corresponding controller according to the
identification at the connector;

7
The wiring mode of LEMO connector is shown as below:
FIG.2 Connector diagram
Sensor output Label for sensor output
Label for PZT drive
PZT drive output
S54 Installation diagram is as follows:
FIG. 3 S54 installation diagram
Mounting hole (M3 screw)
Motion surface
Mounting hole (M6 screw)

S54 Piezo Tip/Tilt Stage User Manual
8
5.2 Load
When mounting the load, ensure that the load quality is less than the maximum load
capacity of S54, and try to mount the load in the center of the moving surface.
The correct position to mount the load is shown below.
FIG.4 The load is applied to the center of the moving surface
For the protection of the product, we do not recommend that the load is too high. If a
high load must be used, please appropriately low the position of the center of gravity of
the load.
FIG.5 Try not to let the position of the center of gravity far exceed the active platform
The wrong mounting way is shown in the figure below:

9
FIG.6 Do not mount long loads on one side of the platform
It is forbidden to mount the load on one side of the moving platform, which will cause
serious damage to the product, as shown in the figure below.
Excessive length of screws selected in the fastening and connecting process will lead to
failure in installation or leakage of bolts, which will expose the product and scratch the
product, affecting the motion accuracy of the product. Short bolts will lead to insufficient
compactness of the connection and easy looseness, which will damage the internal
structure of the product during operation.
Please do not connect in this way as shown below:
FIG. 7 The correct bolt connection

S54 Piezo Tip/Tilt Stage User Manual
10
Please do not connect in this way as shown below:
FIG. 8 Inappropriate bolt selection
Notice:
When mounting the load, tighten the load slowly. The torque should not be too large
to prevent damage to the mechanism.
Avoid stretching and bending cables.
Use the dedicated cable provided by CoreMorrow to connect S54 and the controller.
Do not connect via an extension cable casually, if you need a longer cable, please
contact CoreMorrow.
5.3 Operating
Please reconfirm the following information before turning on the power:
The S54 has been grounded.
The operating environment meets the operating environment requirements of S54.
Fixed screws must be tightened.
After the above information is confirmed, relevant controller operations can be carried out:
1.Please read the user manual of the controller carefully before operation, and then start
the controller.

11
2.Set the controller' output voltage to zero first.
3.Check no abnormal phenomenon, then input voltage value (via keyboard or analog
control) according to specified input voltage range.
4.Operating normally within the rated voltage range of piezoelectric ceramics (0~120V,
maximum 150V).
5.After use, please carry out voltage reset operation.
Please take light steps when S54 in operation, do not knock the product, so as not to affect
the use of the product or even damage the product.
In order to achieve better motion precision of S54, it is recommended to use our
company's supporting controller. Please refer to the user manual of the controller for the
specific operation to ensure correct operation before relevant operation.
Notice：
Do not remove the ground protection during operation. If it needs to be temporarily
removed, please reconnect the ground protection before restart.
The driving voltage shall not exceed the voltage range of S54.
If any abnormal noise or oscillation occurs during use, turn off the power immediately
and check the parameter setting.
6.1 Transportation
This product is packed in cartons. Transportation is carried out under the packaging
conditions. This product can be transported by various means of transport under normal
circumstances. In the process of transportation, direct rain and snow, corrosive substances,
strong collision, extrusion, irregular placement and other improper behaviors should be
avoided as far as possible.
6. Transportation and inspection

S54 Piezo Tip/Tilt Stage User Manual
12
6.2 Open-Box Inspection
Inspection content:
Before opening the package, please check the outer packing carefully to see if there is
any breakage, wetting, dampness, deformation, etc.
Please check the completeness of package contents one by one according to the
supply contract and packing list.
Check whether the surface of the product has obvious damage.
Check whether the product identification is clear and complete.
Check whether the connector is loose and the connector wire is broken or damaged.
In case of any of the above, please make a detailed record and take a photo of it.
Meanwhile, please contact us for processing immediately.
Attention:
Please handle with care when opening the package, so as not to knock against the
product and cause permanent damage to it.
Please do not use heavy tools or rough way to open.
Please do not discard all the packaging materials which are needed for repair and
return.
7.1 Problem Handling
FAQ are shown in the table below.
7. Maintenance and Treatment
Problem description Possible reason Solution
No displacement or
less displacement
The connection wire is
not connected properly or
poor contact
Check the connection wire
Excessive load Load according to the
product’s load capacity
Sensor zero drift Check the sensor

13
Table2 FAQ and solutions
If the user cannot solve the problem by himself in the process of using, please record the
problem in detail and contact CoreMorrow, and professional technical personnel will help
to solve.
Problems caused by improper operation are not covered by the warranty.
CoreMorrow is not responsible for any problems caused by dismantling products without
permission.
7.2 Daily maintenance
If the product is not used for a long time, please store it in a dust-free, well-ventilated,
clean and non-corrosive indoor environment after packaging.
In the daily maintenance, please do not loosen the bolts on the product structure, so as
not to affect the movement accuracy of the product.
Daily cleaning:
Please disconnect the product from the controller before cleaning the surface of the
product.
When cleaning, gently wipe the surface of the product with a towel dipped in a small
amount of detergent, and then clean it with alcohol. Please do not use ultrasonic cleaner.
Problem description Possible reason Solution
Low accuracy
Mountingsurface unevenness Mount the platform on a flat
surface
Loose connection Fasten connection
Wrong connection Check if the wiring is correct
Vibration or inaccurate
positioning at startup
Incorrect input control
parameters
Stop immediately and check the
parameter Settings
Resonance occurs Make drive frequency less than
resonance frequency

S54 Piezo Tip/Tilt Stage User Manual
14
When cleaning the surface, try not to pick up the product. If you have to pick up the
product, it is better to put the sponge under the product for protection. The product
should not be too high from the sponge, in case the product falls off.
7.3 Disposal
Waste products should be disposed according to national and local rules and regulations.
In order to fulfill our responsibility as a product manufacturer, we will dispose all old
equipments on the market in an environmentally friendly manner. If you have equipment
that cannot be disposed, you can ship it to CoreMorrow.
Address: 1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, Heilongjiang
Tel: [phone]
8. Connector
FIG.9 1-contact LEMO
8.1 Driving and Sensor Connector
The driving connector adopts a 1-contact lemo connector. The model is LEMO era.00.250.
CTL as shown in the figure below:
FIG.10 4-contacts LEMO
The sensor connector adopts the 4-contacts lemo, model LEMO ERA.0s.304.CLL, as shown
in the figure below:
Note：Open-loop products have only PZT drive line, no sensor line.

15
FIG. 11 Definition of Sensor Connector
Note: The open loop product only has drive connector, no sensor connector.
The bridge connection mode and pin definition of strain gauge are as follows:
9.Customer Service
If you have questions about the products you are currently using, please let us know the
following information:
Product model and relevant number
The controller model
Software driver version
Computer operating system that installs supporting software

S54 Piezo Tip/Tilt Stage User Manual
16
10.Contact us
Harbin Core Tomorrow Science & Technology Co., Ltd.
Tel: [phone]
Email: [e-mail]
Website: www.coremorrow.com
Address: Building I2, No.191 Xuefu Road, Nangang District, Harbin, HLJ, China
CoreMorrow Official and CTO WeChat are below: