Delta HPH-20KA01KAT User manual

User Manual
DC Power Supply
Continuous 400 –1000 VDC
Model: HPH-20KA01KAT
Version: Rev. S.00

Delta Electronics. Inc. HPH- 20KA01KAT
I
Copyright
All rights reserved. The contents either of manual and design of power supply
may not be reproduced or used in any manner whatsoever without admittance by
Delta Electronics Inc.
Warranty
This product Delta “HPH-20KA01KAT” Model is been warranted against defect in
material and workmanship for a period of “1” year after date of shipment. Delta agrees
to repair or replace the fault unit free-of-charge which fails to perform with specification
and under normal use during this period.
This warranty shall not apply to the following items and will be billed of cost:
1. To exceed the warranty period.
2. Subject to misuse, negligence, accident or natural disaster.
3. Used in a hazardous or dangerous manner either alone or in conjunction
with other equipment.
4. Repaired or altered by person who was not authorized by Delta.
5. Appearance change with environment factor
Delta will be the sole arbiter for those circumstances
To make a warranty claim please contact Delta at telephone number in the table
or support at delta.com, the fault unit transportation to Delta to be prepaid and
responsibility by purchaser, and Delta will take responsibility for ship it back.
Delta Electronics, Inc.
3 Tungyuan Road, Chungli Industrial Zone
Taoyuan County 32063, Taiwan, ROC
Tel: [phone]
Fax: [phone]
Web Site: www.deltaww.com

Delta Electronics. Inc. HPH- 20KA01KAT
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INDEX
Chapter 1: Safety and Standard ·······························································1
1.1. Important Safety Information ·············································································1
1.2. Safety and Warning Symbols·············································································1
1.3. Electromagnetic Compatibility Directives and Standard ··········································2
1.4. Industry Guideline ···························································································2
Chapter 2: Introduction···········································································3
2.1. Brief Statement·······························································································3
2.2. Key Feature ···································································································3
Chapter 3: Specification··········································································4
3.1. System Block Diagram ·····················································································4
3.2. Electrical Specification ·····················································································5
3.3. Arc Suppression Specification············································································7
3.4. Process and Monitor Function…………………………………………………………………8
3.5. Mechanical Specification ··················································································9
3.6. Environment Specification··············································································· 10
Chapter 4: System Protection Mechanism ··············································· 11
4.1. Input Breaker ································································································11
4.2. Protection by MCU ·························································································11
Chapter 5: Installation···········································································14
5.1. Cooling Requirements···················································································· 15
5.2. Cabinet Design ····························································································· 15
5.3. Grounding ··································································································· 16
5.4. Connecting For Master/Slave ·········································································· 16
5.5. Configuring Your Master Unit··········································································· 16
5.6. Configuring Your Slave Units ··········································································· 17
5.7. Monitoring Your Master/Slave System ······························································· 19
5.8. Clearing Faults in a Master/Slave System ·························································· 19
Chapter 6: Interface··············································································20
6.1. Front Panel ·································································································· 20
6.2. Rear Panel ·································································································· 21
6.3. Main Menu Map……………………………………………………………………………….. 22
6.4. Digital Communication Port (Host)···································································· 23
6.5. Analog Communication Port (User)··································································· 27

Delta Electronics. Inc. HPH- 20KA01KAT
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Chapter 7: Operation ············································································30
7.1. Panel Operating Steps ··················································································· 30
7.2. D-SUB Operating Steps ················································································· 31
7.3. RS232 Operating Steps·················································································· 31
7.4. RS485 Operating Steps·················································································· 31
7.5. Parallel Operating Steps················································································· 32
Chapter 8: Maintenance ········································································33

Delta Electronics. Inc. HPH- 20KA01KAT
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Chapter1: Safety and Standard
1.1. Important Safety Information
To keep your safety from hazardous and fatal circumstance, please read and realize the content
of this manual before installing and operating Delta “HPH-series” power supply.
1.2. Safety and Warning Symbols
The following advisory symbols as shown in Table 1.1 will be used in the manual for different
level of warning. The meanings of the advisory symbols are explained below.
Table 1.1 Safety and warning symbols (1)
This danger symbol advises that improper operation will
cause serious personal injury or death.
This warning symbol advises that improper operation will
cause serious personal injury, or catastrophic damage the
generator or any electronic devices connected to the
generator, or lose important data.
This caution symbol advises that improper operation will
cause personal injury, damage the power supply or any
electronic devices connected to the power supply, lose data.
The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/or
on printed circuit board (only provided with white paint), and/or other part of the generator. The
meanings of these symbols are explained as below.
Table 1.2 Safety and warning symbols (2)
Dangerous voltage symbol indicates the presence of high
voltage. Access the high voltage will cause serious personal
injury or death.
To protect against electrical shock in case of a fault. This
symbol indicates that the terminal must be connected to
ground before operation of equipment.
Residual voltage:
Wait 8 minutes at least for capacitor discharge after power
cord is removed and before servicing.
Heavy object:
Two persons lifting are recommended to avoid muscle strain
or back injuries.

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1.3. Electromagnetic Compatibility Directives and Standard
Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20 kVA)
General Immunity Standard for Industry: EN 61000-6-2
Safety Requirement: IEC-61010-1 (CE and UL certification)
1.4. Industry Guideline
Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

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Chapter 2: Introduction
2.1. Brief Statement
Delta “HPH-20KA01KAT” is a high voltage DC generator that meets the exciting requirement in
sputtering system. Tight regulation, small output ripple and superior arc quenching make it very
suitable to be applied in most of plasma-based sputtering application.
Figure 2.1 Delta “HPH-20KA01KAT” power supply
2.2. Key Feature
Excellent Accuracy, Load Regulation, and Stability
Ultrafast Arc Suppression Detect Time
Very Low Arc Energy (< 1 mJ per kW)
Adjustable Ramp and Delay Time
Convenience for Multi-parallel Application
Remote Control Signals, User Port Analog I/O (D-sub), Host Port Digital I/O (RS-
232 and RS-485)

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Chapter 3: Specification
3.1. System Block Diagram
Figure 3.1 System block diagram of Delta “HPH-20KA01KAT”
Table 3.1 Detail description for block diagram
Soft Start and PFC Section
AC line voltage is applied through the circuit breaker. The contactor,
when closed, delivers the line voltage to a rectifier bridge, where it is
converted to DC bus.
Converter Section
The converter section converts DC voltage stored in the bulk
capacitors to high-frequency voltage by alternating the current
through switching power components.
Output Section
In the output section, an isolation transformer steps up the high-
frequency voltage from the converter section and delivers it to a full-
wave rectifier bridge. The rectified DC power is then passed through
a measurement section to the output connector.
Output Measurement and
Feedback
The output measurement section measures current and voltage, and
feedback the voltage and current information to MCU for voltage,
current and power control and related protection.
Auxiliary Power
The AUX power provides low voltage source to supply the Vcc of
analog OPA, main controller, MCU, fan and LCD display.
MCU.FPGA
The MCU is responsible for controlling the power supply status and
providing status information to the operator through all interfaces.
The FPGA dominates the arc suppression mechanism.
Control Panel Display
Control panel shows operating mode, command level, feedback
values, set up Arc processing, process control, interface setup,
communication set and system status during power supply working.
Remote Control Interface
The power supply supports three types of interfaces: a User port
(analog), a Host port (RS-232, RS-485) and an active front panel. All
three interfaces communicate operator-supplied inputs to MCU and
provide the operator with status information.
EMI Filter
Three-phase
Power Input PFC DC Bus DC-DC Converter Arc Suppressor
Soft Start
Mechanism Wide Range Power Output
System Controller Interface
Sensor & Driver
Auxiliary
Power
Adaptable Fan Isolation

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3.2. Electrical Specification
Table 3.2 Electrical specification
Item
Specification
Condition
Input Voltage
208 VAC ± 10% (Three Phase)
50 / 60 Hz
Input Current (Per Phase)
< 80 ARMS
208VAC Input voltage
Maximum Output Power
20 kW
-
Output Voltage Range
0 to 1000 V
Output accuracy specification
guaranteed from 131 to 1000 V
Output Current Range
0 to 50 A
Output accuracy specification
guaranteed from 5 to 50 A
Power Supply Efficiency
> 90%
Rated output power at 1000 V
Power Factor
> 0.9
Rated output power
Output Voltage Ripple
< 2% (VRMS), line frequency
20% to 100% output power
within operation range
Output Voltage Accuracy
1% of command setting or 0.5%
of full scale voltage between
output and command
Within operation range at 25 ˚C
Output Current Accuracy
1% of command setting or 0.5%
of full scale current between
output and command
Within operation range at 25 ˚C
Output Voltage Reader (Digital
Interface) Accuracy
1% of command setting or 0.5%
of full scale voltage between
output and command
Within operation range at 25 ˚C
Output Current Reader
(Digital Interface) Accuracy
1% of command setting or 0.5%
of full scale current between
output and command
Within operation range at 25 ˚C
D-sub Reader/Command
(Analog Interface) Accuracy
1% of full scale rating P/I/V
between output and D-sub
Within operation range at 25 ˚C
Parallel Reader (Digital
Interface) Accuracy
20% of full scale rating P/I/V
between output and D-sub
Within operation range at 25˚C
Parallel D-sub Reader (Analog
Interface) Accuracy
20% of full scale rating P/I/V
between output and D-sub
Within operation range at 25˚C
Load Regulation
1% of command setting or 0.5%
of full scale voltage between
output and command
10% to 100% Output Power

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Temperature Coefficient
< 50 ppm/˚C
20 to 40 ˚C
Variation in regulated output
Regulation Mode
Constant voltage, current, and power mode
Figure 3.2 Operation curve of output V-I characteristic
Figure 3.3 Operation curve of output impedance characteristic
1000V
200V
400V
50A
600V
5A 20A
Power Limit
Current Limit
Voltage Limit
1900V
Operation Range
Vout
Iout
131V
20kW
10kW
8Ω
Power Limit
Current Limit
Operation Range
Zout
50Ω100Ω
Pout
Voltage Limit

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For Delta “HPH-20KA01KAT” power supply, the maximum output voltage and current level are
1000 V and 50 A. The output characteristic is as the figures above. If the operation point is below
400 V, the power supply can provide at most 50 A, if the operation is more than 400 V, the maximum
output current will decrease to 20 A within the output voltage reaching 1000 V.

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3.3. Arc Suppression Specification
Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3
indicates the arc energy and adjustable parameters for user.
Figure 3.4 Arc Suppression mechanisms
Table 3.3 Arc Energy specification and adjustable parameters for User
Item
Specification
Description
Delay Time
1 to 5 µs
Adjustable delay until cutoff
output after detecting arc
Pause Time
40 to 250 µs
Adjustable time between output
cutoff and recovery
Arc Trip Voltage Level
25 to 200 V
The level to determine if arc
occurs from output
Over Arc Density Protection
1 to 99
Adjustable counter to alarm if
the a frequent arc condition
occurs within 1 second
Over Arc Number Protection
1 to 999
Adjustable counter to alarm if
the arc number is over the
setting.
Arc Energy
< 1 mJ per kW
0V
0A
Arc Occurs
Detection Circuit Activated
Arc Detected
Switching off
Detection
Time Delay Time Pause Time
Arc Voltage
Trip Level
t1t2
Voltage
Current
Signal of
Switching
t
t3t4t5t6t7
Recovery
Time

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3.4. Process and Monitor Function
Table 3.4 Adjustable function parameters for User
Item
Specification
Description
Max. Power
2 to 20 kW
Power will be constrained within
the value of setting prior to the
set point of regulation.
Max. Current
5 to 50 A
Current will be constrained
within the value of setting prior
to the set point of regulation.
Max. Voltage
500 to 1000 V
Voltage will be constrained
within the value of setting prior
to the set point of regulation.
Ignition Mechanism
1000 to 1900 V
A voltage up to 1900 V is
adjustable for igniting the
system.
Ramp Time
50 to 2000 ms
A ramp up to set point is
adjustable for a soft start
mechanism.
Set Point
1 to 10 s
Monitoring if the output reaches
the setting of regulation within
the setting of period.
Energy Mode
1 to 99999 kJ
Monitoring if the output energy
reaches the setting of energy.
Target Life Mode
1 to 15000 kWh
Monitoring if the output energy
reaches the setting of kWh.
3.5. Mechanical Specification
The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports
of Delta “HPH-20KA01KAT” power supply are described as below:
Table 3.5 Mechanical specification
Item
Description
Physical Dimension
482.6 mm (W) x 132.5 mm (H) x 600 mm (L)
19" (W) x 5.2" (H) x 22.0" (L)
19" 3U
Weight
38.7 kg
Cooling
Fan cooling
Noise
Noise generated by this unit under 70 dB (A) at a 1m distance in 25
˚C ambient temperature
AC Input Connector
4 pin terminal block
DC Output Connector
3 pin terminal block
User Port
Analog I/O: 15-pin female D-sub
Host Port
Digital I/O: 9-pin female RS232 and RS485
Parallel Bus
8-pin RJ46

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Figure 3.5 Physical dimension of HPH-20KA01KAT power supply
Cooling requirement
Minimum air flow rate: 7.36 m3/min (260 CFM)
Figure 3.6 Air Flow directions
Air InAir In
Air OutAir Out
Air Out Air Out

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Delta “HPH-20KA01KAT” power supply is the forced air cooling type. Please keep enough
space for air flow cooling capability when it is installing to the cabinet. Air inlet on the front panel and
air outlet on the rear panel is shown in figure 3.6. Air outlet of rear panel is responsible for dissipating
the heat from inside of power supply to outside by internal two fans. The temperature of air inlet
should not exceed 40 degree C.
3.6. Environment Specification
Table 3.6 Climatic specification
Item
Temperature
Relative Humidity
Air Pressure
Operating
0 to 40 ˚C
(32 to 104 ˚F)
10% to 90% RH (Non-
condensing)
80 to 106 kPa
(approximately 2000 m
above sea level)
Storage
-25 to 55 ˚C
(-13 to 131 ˚F)
10% to 95% RH
80 to 106 kPa
(approximately 2000 m
above sea level)
Transportation
-25 to 40 ˚C
(-13 to 104 ˚F)
95% RH
(Maximum)
66 to 106 kPa
(approximately 2000 m
above sea level)
Table 3.7 Environment specification
Item
Description
Operating
Category II
Pollution Degree
Pollution Degree 2

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Chapter 4: System Protection Mechanism
4.1. Input Breaker
The function of this switch is to prevent over current at input side from any malfunction
happening and simultaneously provide a manual switch for user to turn off the power supply.
4.2. Protection by MCU (A: Auto Recovery, L: Latch)
Table 4.1 Definition and description of MCU protection
Alarm Condition
Code
Description
Mode
HW Fault M1
01
Hardware error from the left module
A
HW Fault M2
02
Hardware error from the right module
A
SW OVP
03
Output over voltage
A
SW OCP
04
Output over current
A
SW OPP
06
Output over power
A
Arc Number Limit
07
Arc number is over setting parameter
L
Target Life Monitor
09
Power off while output reaches setting Energy
L
Output Interlock
11
Uninstallation of output cover
L
Contactor Interlock
12
Uninstallation of contactor pin in D-sub connector
L
Communication Loss
15
Error from internal communication
L
Fan1 Error
17
Error from the left fan
L
Fan2 Error
18
Error from the right fan
L
Bus UVP
20
Input voltage is under operation range
L
Bus OVP
21
Input voltage is over operation range
L
GND Detect
22
Positive output is not connected to system ground
L
Set Point Monitor
23
Error while output fails to reach setting parameter
within setting time
L
Energy Mode Monitor
24
Power off while output reaches setting energy
L
Parallel Fault
000
Fault from other PSU (showing on Slave)
L

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Parallel Fault IP1
101
Fault from PSU IP 01 (showing on Master)
L
Parallel Fault IP2
102
Fault from PSU IP 02 (showing on Master)
L
Parallel Fault IP3
103
Fault from PSU IP 03 (showing on Master)
L
Parallel Fault IP4
104
Fault from PSU IP 04 (showing on Master)
L
Parallel Fault IP5
105
Fault from PSU IP 05 (showing on Master)
L
Parallel Fault IP6
106
Fault from PSU IP 06 (showing on Master)
L
Parallel Fault IP7
107
Fault from PSU IP 07 (showing on Master)
L
Parallel Fault IP8
108
Fault from PSU IP 08 (showing on Master)
L
Parallel Fault IP9
109
Fault from PSU IP 09 (showing on Master)
L
Parallel Fault IP10
110
Fault from PSU IP 10 (showing on Master)
L
Parallel Fault IP11
111
Fault from PSU IP 11 (showing on Master)
L
Parallel Fault IP12
112
Fault from PSU IP 12 (showing on Master)
L
Parallel Fault IP13
113
Fault from PSU IP 13 (showing on Master)
L
Parallel Fault IP14
114
Fault from PSU IP 14 (showing on Master)
L
Parallel Fault IP15
115
Fault from PSU IP 15 (showing on Master)
L
Parallel Fault IP16
116
Fault from PSU IP 16 (showing on Master)
L
Parallel Fault Master
Communication Loss
223
Master fails to receive the ack from slave while
power on
L
Parallel Fault Slave
Communication Loss
224
Slave fails to receive the ack from Master while
power on
L
Warning Condition
Code
Description
Mode
Arc Density Limit
01
Arc Density is over parameters of setting
A
Output Limit
02
Output is over setting parameters of setting
A
Parallel Number
03
Parallel number is different between setting and
reality
A
Parallel Mode
Communication Fault
04
A
Target Life
05
While output reaches setting Target Life
A

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Energy Mode Monitor
06
While output reaches setting Energy
A