DUNIWAY Stockroom Terranova 907 User manual

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Terranova® 907
Dual Capacitance Diaphragm Gauge &
Convection-enhanced Pirani Control Unit
Instructions Manual
Revision - 0917NC
©2017 Duniway Stockroom Corporation

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TABLE OF CONTENTS
SPECIFICATIONS 3
ACCESSORIES 4
INTRODUCTION 6
INSTALLATION 6
OPERATION 8
Self-Test 8
Setup Mode 8
Zero Adjustment 10
Upper Range Pressure Adjustment 11
Changing Pressure Gauge Curves 12
Pascal Mode 12
Restoring Default Values 13
PRESSURE MEASUREMENT 13
SET POINT OPERATION 14
SERIAL COMMUNICATION 16
ANALOG OUTPUT 18
TROUBLESHOOTING 19
CHANGING FUSES 22
WARRANTY 23
DECLARATION OF CONFORMITY 24
APPENDIX 1. TERRANOVA® 907 COMPATIBLE PRESSURE GAUGES 25
APPENDIX 2. GAUGE CABLE DIAGRAMS 26
APPENDIX 3. FULL SCALE RANGE OPTIONS 27
APPENDIX 4. CORRECTED PRESSURE VALUES FOR VARIOUS GASES 28
APPENDIX 5. NOTES ON TERRANOVA® SET POINT RELAYS 29

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Specifications
Operating Voltage
Universal
100 V to 240 V AC @ 50 Hz to 60 Hz; 40 VA
100 V to 240 V DC
Pressure Display
4 Red LEDs –4 digits (NNNN) with pressure unit auto ranging
Pressure Units
Torr / mTorr (Default)
mbar / µbar
Pa / kPa
Display Range
-0.20 mTorr to 1.5 x 104Torr
(-0.26 µbar to 2.0 x 104mbar)
(-0.026 Pa to 2033 kPa)
Relay Rating
Varies
From:
2 A at 30 V DC (60 V AC)
To:
0.4 A at 150 V DC (300 V AC)
See Appendix 5 for more details
Temperature Range
2°C to 50°C (in operation)
Weight
1 lb / 0.5 kg
Convection-enhanced Pirani
Measuring Range
1 x 10-4 Torr to 1000 Torr (Air / Nitrogen)
(1.3 x 10-4 µbar to 1333 mbar)
(1.3 x 10-2 Pa to 133 kPa)
Display Resolution
Varies
From:
0.1 mTorr less than 100 mTorr
(0.13 µbar less than 133 µbar)
(0.01 Pa less than 13.3 Pa)
To:
5 Torr greater than 100 Torr
(6.7 mbar greater than 133 mbar)
(0.7 kPa greater than 13.3 kPa)
Accuracy
Pressure calculation algorithm is accurate to ±1 % of
published data for the MKS / HPS Series 317 and Granville-
Phillips 275 Convectron® gauges
(Accuracy does not include pressure gauge uncertainty)
Capacitance Diaphragm Gauge
Measuring Range
Four pressure decades (or orders of magnitude) from full scale
See Appendix 3 for full scale range options
Output Voltage
± 15 V DC at 0.75 A

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Accessories
Included
Instruction manual (Online)
One power cord
Two replacement fuses
Two panel mount clips
One unterminated male 15-pin D-sub connector
Required
(Sold separately)
HYB-275
Hybrid Granville-Phillips 275 Convectron®
(or equivalent) & capacitance diaphragm
gauge cable (10 ft)*
HYB-CEP
Hybrid MKS / HPS Series 317 Convection-
enhanced Pirani (or equivalent) &
capacitance diaphragm gauge cable (10 ft)*
See Appendix 1 for a list of compatible pressure gauges
Optional
RS232-TN9DIN
RS-232 serial communication cable (10 ft)*
* Custom cable lengths available upon request

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Explosive Gases
Do not use the Terranova® 907 to measure the pressure of
combustible gas mixtures. Although the pressure gauge normally
operates at low temperatures, it is possible that momentary
transients or controller malfunction can raise the pressure gauge
above the ignition temperature of combustible mixtures. This, in
turn, can create an explosion which can damage equipment
and / or injure personnel.
Limitation on use of Compression Mounts
Do not use a compression port to connect pressure gauges to a
vacuum system in applications that may develop above-
atmospheric pressures. Pressures above atmospheric pressures
may cause the pressure gauge to eject from a compression fitting
and damage equipment and / or injure personnel.
Chemicals
Many organic cleaning solvents, such as acetone, produce fumes
that are toxic and / or flammable. Such solvents should only be
used in well-ventilated areas and away from electronic
equipment, open flames, or other potential ignition sources.

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Introduction
The Terranova® 907 Dual Gauge Controller is designed to simultaneously operate both a
Granville-Phillips 275 Convectron® gauge, MKS / HPS Series 317 convection-enhanced Pirani
gauge, or equivalent pressure gauge and a capacitance diaphragm gauge such as the MKS 722B
Baratron® capacitance manometer.The Terranova® 907 covers the pressure range between
1 x 10-4 Torr to 1 x 104Torr. The control unit can operate both standard and heated capacitance
diaphragm gauges with full scale ranges between 1 x 104Torr and 2 x 10-2 Torr that require a
± 15 V DC input and have a 0 V - 10 V DC output signal.
Installation
Mounting the Terranova® 907
The Terranova® 907 is housed in a standard 1/8 DIN box to allow for mounting on most
equipment racks or cabinets. The dashed call-out dimensions in Figure 1 illustrate the proper
cutout dimensions for the 1/8 DIN box.
Figure 1. Terranova® 907 cutout and unit dimensions
To properly mount the unit:
1. Locate the mounting clips included with the control unit
2. With the square end of the mounting clip facing towards the front panel, slide
the beveled surfaces of the clip under the cutout located on each side of the
control unit
3. Push the clip toward the back of the unit until the central tongue locks the clip
4. Tighten the rod against the rack or panel to secure the unit
If successful, the clips should hold the Terranova® 907 in place. Installation must not block vent
ports and should provide enough clearance to access rear cable connections.

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Connecting the Pressure Gauge
The Terranova® 907 has a female 9-pin D-sub port located on the back of the control unit
labeled SENSOR(S) to connect the pressure gauge cable (see Figure 2). A special hybrid cable is
required to simultaneously connect both the convection-enhanced Pirani and capacitance
diaphragm gauge to the control unit. To connect both a Granville-Phillips 275 Convectron®
gauge (or equivalent gauge) and a compatible capacitance diaphragm gauge, the user will
require the Duniway gauge cable HYB-275. Similarly, the user will require the Duniway gauge
cable HYB-CEP to connect the MKS / HPS Series 317 convection-enhanced Pirani gauge and
compatible capacitance diaphragm gauge to the control unit.
Figure 2. Terranova® 907 back view
Terranova® 907 should be OFF before connecting the pressure gauge(s).
Plugging or unplugging the pressure gauge while the control unit is ON can
damage pressure gauge internals.
To properly connect the Terranova® 907 to the respective pressure gauges:
1. Secure the pressure gauge cable ends to the sensors
2. Secure the male 9-pin D-sub connector of the cable to the SENSOR(S) port
3. Fasten retainer screws (where applicable) on all cable connections
Figure 3. Pressure gauge orientation
The recommended convection-enhanced Pirani gauges should be installed with the axis
horizontal as shown in Figure 3 with the port pointing downward. Large errors can result at
higher pressures if the axis is not horizontal. User should always ensure the pressure gauge is
securely connected to the vacuum system before use.
Use of a pressure gauge other than the suggested types may lead to
improper readings and / or cause damage to the pressure gauge.

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Operation
Self-Test
The Terranova® 907 will perform a self-test at power ON. The self-test cycle is initiated by a
BEEP sound followed by:
1. All pressure unit LEDs become illuminated
2. All function indicator LEDs become illuminated
3. All numeric display indicators become illuminated
4. Display reads the model number (i.e. 907)
5. Display reads the software version (e.g. 0.81)
6. Display reads the pressure gauge curve (e.g. 275)
7. Display reads the gas curve (e.g. AIR)
The control unit will commence normal operation if Self-Test is successful. Control unit fan will
automatically start at power ON.
Setup Mode
The Terranova® 907 parameters can be set or modified by the following nine-step operation:
1. Press the SELECT button to set or adjust the relay deactivation pressure for SET
POINT 1. Use the RAISE or LOWER button to increase or decrease the SET PT 1 HI
pressure value shown on the display. Default value is OFF. SET PT 1 HI LED will
illuminate during adjustment. See Set Point Operation
2. Press the SELECT button a second time to set or adjust the relay activation
pressure for SET POINT 1. Use the RAISE or LOWER button to increase or
decrease the SET PT 1 LO pressure value shown on the display. Default value is
OFF. SET PT 1 LO LED will illuminate during adjustment. See Set Point Operation
3. Press the SELECT button a third time to set or adjust the relay deactivation
pressure for SET POINT 2. Use the RAISE or LOWER button to increase or
decrease the SET PT 2 HI pressure value shown on the display. Default value is
OFF. SET PT 2 HI LED will illuminate during adjustment. See Set Point Operation
4. Press the SELECT button a fourth time to set or adjust the relay activation
pressure for SET POINT 2. Use the RAISE or LOWER button to increase or
decrease the SET PT 2 LO pressure value shown on the display. Default value is
OFF. SET PT 2 LO LED will illuminate during adjustment. See Set Point Operation
Although the SET POINT HI and SET POINT LO parameter may be
independently assigned to operate with either pressure gauge, both values
will apply to the pressure gauge selected for the SET POINT LO value. Use the
GAUGE SELECT button to choose between CEP / 275 or CDG.

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5. Press the SELECT button a fifth time to set or adjust the full-scale range of the
capacitance diaphragm gauge. Use the RAISE or LOWER button to select the
proper CDG RANGE value shown on the display. Default full-scale range is
1.00 Torr. CDG RANGE LED will illuminate during adjustment. See Appendix 3 for
permissible pressure ranges.
6. Press the SELECT button a sixth time to zero-adjust the control unit. Use the
RAISE or LOWER button to increase or decrease the GAUGE ZERO pressure value
shown on the display. Default value is 0.0. GAUGE ZERO LED will illuminate
during adjustment. See Zero Adjustment
7. Press the SELECT button a seventh time to adjust the atmospheric pressure value
for the convection-enhanced Pirani gauge and upper range pressure value of the
capacitance diaphragm gauge. Use the RAISE or LOWER button to increase or
decrease the CDG CALIB / CONV ATM pressure value shown on the display.
CDG CALIB / CONV ATM LED will illuminate during adjustment. See the Pressure
Adjustment section
The GAUGE ZERO and CDG CALIB / CONV ATM pressure values may be
independently modified for each sensor. Use the GAUGE SELECT button to
choose between CEP / 275 and CDG.
8. Press the SELECT button an eighth time to set the pressure units for both
pressure gauges and the gas response curve for the 275 / CEP. Use the RAISE or
LOWER button to select the proper UNITS & GAS values shown on the display.
User can select between torr, millibar, and Pascal pressure units and air and
argon gas response curves. Default pressure unit and response curve is
TORR / AIR. UNITS & GAS LED will illuminate during adjustment.
9. Press the SELECT button a ninth time to return the unit to normal operation.
User must press and hold the RAISE or LOWER button until value changes. Pressing and holding
the RAISE or LOWER button during Setup Mode allows for faster value change. Display will flash
during all Setup Mode steps. Unit will return to normal operation in approximately 60 seconds
if left unattended during Setup Mode; any changes will be saved. Timer is reset if any button is
pressed during the 60-second timeout.

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Zero Adjustment
Zero adjustment is recommended when installing a new pressure gauge or to restore pressure
output accuracy. The Terranova® 907 can be either zero adjusted or set to a specific low-
pressure value via the GAUGE ZERO value. Zero adjustment should be conducted before the
atmospheric pressure adjustment.
Pressure reading range will shift if user accidentally changes the GAUGE ZERO
value during use. If this occurs, user should reset the Terranova® 907 and redo
both the zero and atmospheric pressure adjustment.
Negative pressure readings during use or zero adjustment may indicate the
control unit requires further adjustment. Negative pressure readings are to be
used only as an indication of vacuum.
Convection-enhanced Pirani Gauge
Pressure reading must be less than approximately 50 mTorr (or 68 µbar) at initial set-up to
adjust the GAUGE ZERO value; otherwise, error code ER11 will be output on the display. For
zero adjustment, GAUGE ZERO value should be set to approximately 0.0 mTorr and system
pressure must be less than 1 x 10-4 Torr (1 x 10-4 mbar) to display accurate pressure
measurements. The control unit may also be set to a specific pressure value. For example, if
system pressure is indicated to be at 10 mTorr by a secondary pressure gauge, the unit can also
be set to agree with said value. Although the GAUGE ZERO value is stored by the control unit, it
will not be displayed in subsequent adjustments. The GAUGE ZERO value is appropriately
converted when switching between pressure units.
Capacitance Diaphragm Gauge
Zero adjustment can be conducted through a combination of the Terranova® 907 and
capacitance diaphragm gauge. To zero-adjust the unit, system pressure must be less than 10%
full scale of the capacitance diaphragm gauge. Otherwise, error code ER21 will be output on to
the display. Through a combination of the GAUGE ZERO value and zero adjustment of the
pressure gauge, pressure value should be set to approximately 0.0 mTorr. The control unit may
also be set to a specific pressure value. For example, if system pressure is indicated to be at
10 mTorr by a secondary pressure gauge, the unit can also be set to agree with said value.
Heated or temperature-controlled capacitance diaphragm gauges should be at their regulated
temperatures when zero adjusting for accurate pressure readings. Although the GAUGE ZERO
value is stored by the control unit, it will not be displayed in subsequent adjustments. The
GAUGE ZERO value is appropriately converted when switching between pressure units.

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Upper Range Pressure Adjustment
Convection-enhanced Pirani Gauge
Atmospheric pressure adjustment is recommended when installing a new pressure gauge or to
restore pressure output accuracy. The Terranova® 907 can be set to either local atmospheric
pressure –760 Torr (1013 mbar) at sea level –or a specific high-pressure value via the CDG
CALIB / CONV ATM pressure value. To set or adjust the atmospheric pressure value, pressure
reading must be greater than approximately 270 Torr (or 360 mbar). Otherwise, error code
ER12 will be output on to the display. Although the CDG CALIB / CONV ATM value is stored by
the control unit, it will not be displayed in subsequent adjustments. The CDG CALIB / CONV
ATM value is appropriately converted when switching between pressure units. Zero adjustment
should be conducted before the atmospheric pressure adjustment.
Pressure reading range will shift if user accidentally changes the
CDG CALIB / CONV ATM value during use. If this occurs, user should reset the
Terranova® 907 and redo both the zero and atmospheric pressure adjustment.
Capacitance Diaphragm Gauge
The upper range of the capacitance diaphragm gauge may be modified via the
CDG CALIB / CONV ATM value. This feature should only be used to calibrate a capacitance
diaphragm gauge when reliable calibration data is available. Pressure reading must be greater
than 50% of the full-scale pressure value to adjust the value. Otherwise, error code ER22 will be
output on to the display. The CDG CALIB / CONV ATM value may be used to set the atmospheric
pressure value for 1000 Torr full scale pressure gauges. Although the CDG CALIB / CONV ATM
value is stored by the control unit, it will not be displayed in subsequent adjustments. The CDG
CALIB / CONV ATM value is appropriately converted when switching between pressure units.
Zero adjustment should be conducted before upper range pressure adjustment.
Pressure reading range will shift if user accidentally changes the
CDG CALIB / CONV ATM value during use. If this occurs, user should reset the
Terranova® 907 and redo both the zero and atmospheric pressure adjustment.

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Changing Pressure Gauge Curves
The Terranova® 907 is able to output pressure readings based on the pressure curve of either
the Granville-Phillips 275 Convectron® gauge (i.e. 275) and equivalent sensors or the MKS / HPS
Series 317 (i.e. CEP) sensor. The default pressure gauge curve is CEP.
To change pressure gauge curves:
1. Remove power from the control unit
2. Simultaneously depress the RAISE and SELECT buttons while restoring power to
the control unit
3. Release the buttons once the Self-Test has initiated
If pressure gauge curve change is successful, two BEEPs will be emitted and the corresponding
pressure curve code will appear on the unit display. Thereafter, the Terranova® 907 will resume
normal operation.
Pascal Mode
Pascal Mode disables the ability to change pressure units via the front panel and strictly outputs
pressure measurement in Pascal units. The Pascal mode only applies to the capacitance
diaphragm pressure gauge.
To enter or exit Pascal Mode:
1. Remove power from the control unit
2. Simultaneously depress the RAISE,LOWER, and SELECT buttons while restoring
power to the control unit
3. Release all three buttons after the Self-Test has initiated
If Pascal Mode is entered successful, two BEEPs will be emitted and the model number will be
output with an appended letter J (i.e. 907J). Once the front panel buttons are released, the Self-
Test will continue and the Terranova® 907 will resume normal operation. See Appendix 3 for
Pascal unit display format.

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Restoring Default Values
Restoring default parameters provides a starting point for control unit re-adjustment in the
event pressure measurements become unreliable. To restore Terranova® 907 default
parameters:
1. Remove power from the control unit
2. Simultaneously depress the RAISE and LOWER buttons while restoring power to
the control unit
3. Release the buttons once the Self-Test has initiated
If reset process is successful, two BEEPs will be emitted and the code RST will appear on the
unit display. Once the front panel buttons are released, the Self-Test will continue and the
Terranova® 907 will resume normal operation. Restoring default parameters does not exit
Pascal Mode.
Pressure Measurement
Terranova® 907 operation is almost automatic and will commence after a successful Self-Test.
Pressure unit will auto range during use as system pressure increases or decreases. Although
the control unit is able to simultaneously operate both types of pressure gauges, only one
pressure gauge reading will be output onto the display at a time. User can select between the
CEP / 275 and CDG pressure gauge via the GAUGE SELECT button to display the corresponding
pressure readings. The selected pressure gauge LED will illuminate during use.
Due to a number of system variables, pressure differences may result
with each subsequent pressure measurement and/or between
different pressure gauges.
Convection-enhanced Pirani Gauge
The Terranova® 907 may be set to output pressure readings based on either air / nitrogen or
argon. If gases other than air / nitrogen or argon are to be used, Appendix 4 provides corrected
pressure values for a number of gases including helium with respect to air / nitrogen. For
example, if the vacuum system is backfilled with helium and the Terranova® 907 reads a
vacuum pressure of 13.2 Torr, true system pressure is approximately 5 Torr.
Unit display will read OFF if gauge cable is not connected. Unit display will read HI if system
pressure is greater than 995 Torr or if the pressure gauge is disconnected, but the gauge cable
is connected to the unit. Unit display will read LO if system pressure is less than the lowest
displayable value. Display resolution is converted from torr to millibar or Pascal units. For
example, 20.0 mTorr will be converted to 26.7 µBar and 2.7 Pa, respectively. Terranova® 907
pressure display resolution is as follows:

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Step
Range
5 Torr
greater than 100 Torr
0.5 Torr
10 Torr to 100 Torr
0.05 Torr
5 Torr to 10 Torr
0.02 Torr
1 Torr to 5 Torr
1 mTorr
100 mTorr to 1000 mTorr
0.1 mTorr
less than 100 mTorr
Capacitance Diaphragm Gauge
Appendix 3 shows pressure display format for Torr / millibar and Pascal units. Pressure readings
are reliable to approximately 0.05 % of full scale. Display resolution is converted from torr to
millibar units in the respective pressure ranges. Unit display will read OFF if gauge cable is
connected or disconnected. The display will also read OFF if the pressure gauge is out of range.
Display will read LO if system pressure is less than the lowest displayable value. Display will
flash if pressure reading is greater than the full-scale value.
Control unit may become warm during operation; this is normal
Set Point Operation
The Terranova® 907 can be utilized for process control functions through the use of two
independent, programmable set points, SET POINT 1 and SET POINT 2, and corresponding
relays. Each set point has an adjustable activation (i.e. SET POINT LO) and deactivation
(i.e. SET POINT HI) pressure value that allows the user to modify the relay hysteresis. SET PT 1
HI and SET PT 1 LO correspond to SET POINT 1; SET PT 2 HI and SET PT 2 LO correspond to SET
POINT 2. Set point pressure values are adjusted via the front panel; relay output is accessible
through the INPUT / OUTPUT 15-pin D-sub connector port located in the back of the control
unit. See Table 1 for relay pin configuration.
Each relay will independently activate once the pressure reading is less than its corresponding
SET POINT LO value. The relay will deactivate once the pressure reading is greater than its
corresponding SET POINT HI value. Relays will be disabled if set point value is OFF. The
Terranova® 907 will automatically increase the SET POINT HI value to the next pressure step
from the SET POINT LO value if SET POINT LO is adjusted greater than SET POINT HI and vice
versa. For example, if SET POINT HI is set to 100 Torr and SET POINT LO is set to 110 Torr, the
SET POINT HI value will automatically be adjusted to 115 Torr. See Appendix 5 for relay use
with inductive or capacitive load switching.

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Convection-enhanced Pirani Gauge
Terranova® 907 set point pressure display resolution is as follows:
Step
Range
5 Torr
greater than 100 Torr
0.5 Torr
10 Torr to 100 Torr
0.05 Torr
5 Torr to 10 Torr
0.02 Torr
1 Torr to 5 Torr
1 mTorr
less than 1000 mTorr
Display resolution steps are converted from torr to millibar or Pascal units.
Capacitance Diaphragm Gauge
The Terranova® 907 SET POINT HI pressure value can range from 0.20% to 99.9% of full scale
value. The SET POINT LO pressure value can range from 0.19% to 99.8% of full scale value. Set
point resolution steps (in torr units) are as follows:
Step
Pressure Range
0.01 % of full scale
less than 10% of full scale
0.1 % of full scale
greater than 10% of full scale
For example, a 1000 Torr full scale sensor has a SET POINT HI pressure range from 2.0 Torr to
999 Torr; the SET POINT LO pressure range is from 1.9 Torr to 998 Torr. Values will be displayed
in 0.1 Torr steps for pressures less than 100 Torr and 1 Torr steps for pressures greater than 100
Torr. The Terranova® 907 converts the set point resolution from torr to millibar or Pascal
pressure units, rounding pressure values to the next resolution step. For example, for a 1333
mbar full scale sensor, values will be displayed in 0.13 mbar steps for pressures less than 133
mbar and 1.33 mbar steps for pressures greater than 133 mbar.

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PIN
Function
Output
Description
1
SET POINT 1 Relay
Normally closed (NC)
See Set Point Operation
2
SET POINT 1 Relay
Common
See Set Point Operation
3
SET POINT 1 Relay
Normally open (NO)
See Set Point Operation
4
SET POINT 2 Relay
Normally closed (NC)
See Set Point Operation
5
SET POINT 2 Relay
Common
See Set Point Operation
6
SET POINT 2 Relay
Normally open (NO)
See Set Point Operation
7
Tx
See Serial Communication
8
Rx
See Serial Communication
9
Common Ground
See Serial Communication
10
N/A
N/A
N/A
11
CDG Analog Output
See NOTES
12
N/A
N/A
N/A
13
Analog Output
See Analog Output
14
N/A
N/A
N/A
15
CEP Analog Output
See NOTES
Table 1. I/O port pin configuration
NOTES
PIN 11 Buffered signal; 1kΩ output impedance
PIN 15 Buffered signal; 1kΩ output impedance
Serial Communication
The INPUT / OUTPUT 15-pin D-sub port allows the user to remotely query the Terranova® 907
to read unit parameter values. The serial communication standard used for data transmission is
RS-232. The RS-232 format for communication with the Terranova® 907 unit is as follows:
RS-232 Settings
9600 baud
No parity
8 bits
1 stop bit
Full duplex
Figure 4 shows the pin configuration for RS-232 communication. User will have to utilize
Duniway cable RS232-TN9DIN and a separate program, such as HyperTerminal, to send query
characters and read output from the control unit. Query applies to both pressure gauges
regardless of which gauge is selected on the control unit display. Table 2 lists the characters
used by the Terranova® 907 to return unit parameters.

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Figure 4. Terranova® 907 RS-232 pin configuration
The Terranova® 907 outputs pressure values in the following scientific notation format
AeB, XeY
in which Aand Xare the significand and Band Yare the exponent. When character p is
transmitted to the unit, Aand Bvalues correspond to the convection-enhanced Pirani gauge
and Xand Yvalues correspond to the capacitance diaphragm gauge. The control unit also
utilizes the same format to output set point pressure values. However, two values are
appended to the output
AeB, XeY, R, G
in which R indicates the set point relay state and Gindicates the pressure gauge to which the
set point applies. If the relay is active, R= 1; otherwise, R= 0. G= CDG corresponds to the
capacitance diaphragm gauge; G= PIR corresponds to the convection-enhanced Pirani gauge.
When character 1 or 2 is transmitted to the control unit, pressure values correspond to
SET POINT HI and SET POINT LO, respectively.
Character
Query
Output format
Notes
1
SET POINT 1 values
AeB, XeY, R, G
ASCII value 49
2
SET POINT 2 values
AeB, XeY, R, G
ASCII value 50
f
Full-scale range
AeB
ASCII value 102
p
Pressure reading
AeB, XeY
ASCII value 112
u
Pressure units
Torr / mBar / Pascal
ASCII value 117
v
Model number;
Software version
907[J], ver N.NN
ASCII value 118
x
Gauge curve
275, CEP
ASCII value 120
Table 2. Serial communication query characters
Pressure output is in the selected units of the UNITS & GAS parameter

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Examples
CDG pressure:
2.340 Torr
p
275 / CEP pressure:
HI
Output:
2.340e+0, HI
CDG pressure:
OFF
p
275 / CEP pressure:
OFF
Output:
OFF, HI
SET POINT 1 is assigned to 275 / CEP (Relay ON)
SET POINT 1 HI pressure:
60 mTorr
1
SET POINT 1 LO pressure:
57 mTorr
Output:
60.0e-3, 57.0e-3, 1, PIR
SET POINT 2 is assigned to CDG (Relay OFF)
SET POINT 2 HI pressure:
OFF
2
SET POINT 2 LO pressure:
OFF
Output:
0.00, 0.00, 0, CDG
Control unit will output LO for either pressure gauge if display reads LO.
Analog Output
The Terranova® 907 has a calibrated, 12-bit resolution, logarithmic analog output available for
use as a secondary method to read measured pressure values. Analog output voltage can be
accessed through the INPUT / OUPUT 15-pin D-sub connector port. The unit outputs 0.50 V per
pressure decade (or order of magnitude). LO pressure value corresponds to 0.00 V; HI / OFF
pressure value corresponds to approximately 4.52 V. Analog output is valid only for the
selected gauge on the control unit. See Table 1 for pin configuration.
The analog output voltage can be approximated using the displayed pressure measurement by
V= 0.50 * log10 (100 * P)
where Pis the pressure reading in mTorr and Vis the analog output in volts. For example, if Pis
equal to 10 mTorr, V(rounded to the nearest hundredth) is equal to 1.50 V. Table 3 lists sample
analog output and corresponding pressure values. For example, if analog output is 3.00 V, the
corresponding pressure reading is 10.0 Torr.

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Analog Output [V]
Pressure
0.00
LO / P≤0 mTorr
0.50
0.10 mTorr
1.00
1.0 mTorr
1.50
10.0 mTorr
2.00
100 mTorr
2.50
1.00 Torr
3.00
10.0 Torr
3.50
100 Torr
4.00
1000 Torr
4.52
HI / OFF / P ≥1 x 104Torr
Table 3. Analog output with displayed pressure values
Pressure as a function of the analog output can be approximated by
P= 0.01 * 102V
where Vis the analog output in volts and Pis pressure in mTorr. For example, if Vis equal to
3.50 V, Pis approximately 100 Torr. Pressure values are converted from torr to millibar or Pascal
units.
1 kΩ source impedance for analog output
Troubleshooting
Problem
Possible Cause
Diagnostic
Unit fails Self-Test
N/A
Restart unit; if restart fails,
contact Duniway Stockroom
Fuse(s) repeatedly
burn out
Incorrect AC input
voltage
Verify AC voltage; if unit fails,
contact Duniway Stockroom
Display is dim and reads
incorrect pressure values
Incorrect AC input
voltage
Verify AC voltage; if unit fails,
contact Duniway Stockroom
Incorrect VAC / ATM
values
Faulty pressure gauge
Verify pressure gauge is
operational
Incorrect VAC / ATM
values
Faulty power supply
Verify unit output voltage

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Error Code
Description
ER01
Operation not allowed
ER02
Parameter at limit
ER03
Timeout during Setup Mode
ER11
275 / CEP zero adjustment not allowed
ER12
275 / CEP ATM adjustment not allowed
ER21
CDG zero adjustment not allowed
ER22
CDG ATM adjustment not allowed
Pressure Gauge
The Granville-Phillips 275 Convectron® gauge and MKS / HPS Series 317 gauge have internal
resistance values indicative of an operational pressure gauge. User should first reset the
Terranova® 907 to correct any controller problems. If resetting does not resolve the problem,
user may clean the inside of the pressure gauge. A cleaning agent such as acetone or toluene
may be used to carefully clear away any contaminants. The pressure gauge should be replaced
if resistances greatly deviate or if cleaning does not provide reasonable pressure readings.
Chemicals
Many organic cleaning solvents, such as acetone, produce fumes
that are toxic and/or flammable. Such solvents should only be
used in well-ventilated areas and away from electronic
equipment, open flames, or other potential ignition sources.
Granville-Phillips 275 Convectron® Gauge
Figure 5. Granville-Phillips 275 Convectron® gauge pin configuration
PIN
Resistance [Ω]
1 & 2
18 to 23
2 & 3
50 to 60
1 & 5
180 to 185
Table 4. Granville-Phillips 275 Convectron® gauge resistance values