EDF PPS20 User manual

EDFelectronics JRMM Sp. z o.o. s.k
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
Magnetron Power Supply PPS20
User Manual
April 2021, Rev 1.10
EXCECUTIVE SUMMARY
The document contains a detailed description of the
start-up, configuration & interfacing of the power supply

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
2
Document History
Version
Date
Sign
Comment
1.0
2018-03-18
JL
First version
1.1
2018-05-20
JL
Manual name changed from Users
Guide to Instrument Manual.
History section added.
Revised format and cosmetic
changes.
1.2
2018-10-21
JL
Gramma correction and table of
contents liftings
1.3
2019-07-21
JL
I/O interface section updated to
proper data
1.4
2019-10-09
JL
Interface configuration sections
added.
1.5
2020-02-28
JL
Power Calculation in DCpulse
mode chapter upgrade
1.6
2020-03-18
JL
Gramma corrections at page 7 and
I/O pinout description improve;
electric specification corrected –
2.3
1.7
2020-04-29
JL
Some data corrections
1.8
2020-06-05
JL
Correction with I/O pinouts
descriptions –HV1, HV2
1.9
2020-11-23
JL
HV outputs safety information
added; Added information about
minimum power in PulseDC mode
1.10
2021-04-04
JL
Some data correction and
frequency/duty cycle dependance
explanation

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
3
Table of Contents
1.Introduction ................................................................................................................................5
1.1. Intended Use.................................................................................................................................... 5
1.2. Liabilities and Warranty............................................................................................................. 5
1.4 Safety ................................................................................................................................................... 6
1.4.1. Personnel Qualifications............................................................................................................................................6
1.4.2. Illustration Of Residual Dangers ...........................................................................................................................6
1.4.3. General Safety Instructions......................................................................................................................................7
2. technical Data...........................................................................................................................9
2.1. General Data .................................................................................................................................... 9
2.1.1. Mechanical Data ............................................................................................................................................................9
2.1.2. ambience...........................................................................................................................................................................9
2.1.3. Use and Operating Modes......................................................................................................................................10
2.1.4. STANDARDS .................................................................................................................................................................11
2.2. Mains Connection.........................................................................................................................11
2.3. Specifications ................................................................................................................................11
2.4 Features:...........................................................................................................................................12
2.5. Interfaces ........................................................................................................................................14
2.5.1. I/O interface..............................................................................................................................................................14
2.5.2. UART ( RS232/RS485 ) ......................................................................................................................................14
2.5.3 ETHERNET/IP...........................................................................................................................................................14
3. Installation ..............................................................................................................................15
3.1. Unpacking.......................................................................................................................................15
3.2. Mechanical Installation .............................................................................................................15
3.2.1. Rack Installation.........................................................................................................................................................16
3.3. Connecting......................................................................................................................................17
3.3.1. Rear Panel......................................................................................................................................................................17
.........................................................................................................................................................................................................17
3.3.3. Grounding......................................................................................................................................................................19
3.3.4. High Voltage Connectors HV1 and HV2 ..........................................................................................................20
3.3.5. Interface Connector Analog remote ..................................................................................................................22
3.3.6 Serial Interface Connector......................................................................................................................................25
3.3.7 Ethernet Interface.......................................................................................................................................................26
4. Using the Power Supply PPS20..........................................................................................27
4.1. Front Panel.....................................................................................................................................27
4.1.1. Main Power Switch ...................................................................................................................................................27
4.1.2. Membrane Keyboard................................................................................................................................................28
4.1.3. High Voltage Indicator.............................................................................................................................................29
4.1.4. Alphanumeric LCD display....................................................................................................................................29
4.1.5. Power Bar Identifier.................................................................................................................................................29
4.1.6. Rotary Encoder with Press Button....................................................................................................................30
4.1.7 Main Screen Description .........................................................................................................................................30
4.2. Menu Operation............................................................................................................................31
4.2.1. Menu Navigation ........................................................................................................................................................32
4.2.2. HV Output Selection..................................................................................................................................................33
4.2.3. Constant Power Operation....................................................................................................................................33

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
4
4.2.4 Power Calculations.....................................................................................................................................................34
4.2.5. Constant Voltage Operation..................................................................................................................................36
4.2.6. Constant Current Operation.................................................................................................................................37
4.2.7 Timer Operation..........................................................................................................................................................39
4.2.8 Frequency set in PulseDC operation..................................................................................................................40
4.2.9 Duty Cycle set in PulseDC operation .................................................................................................................40
4.3 MENU options navigation and settings................................................................................. 41
4.3.1 SETTINGS Menu...........................................................................................................................................................41
4.3.2 SCREEN Menu...............................................................................................................................................................45
4.3.3 TARGET Menu........................................................................................................................................................46
4.3.4 LIMITS Menu ...........................................................................................................................................................47
4.3.5 RAMPS Menu ...........................................................................................................................................................48
4.3.6 SOFTWARE Menu..................................................................................................................................................50
5. Interface configuration......................................................................................................51
5.1 Analog Interface Configuration............................................................................................... 51
5.2 Serial RS232/485 Interface Configuration ......................................................................... 51
5.3 Ethernet Interface Configuration ........................................................................................... 53
6. Maintenance and Service ..................................................................................................55
6.1 Maintenance................................................................................................................................... 55
6.1.1 Cleaning...........................................................................................................................................................................56
7. Storage and Disposal............................................................................................................57
7.1 Packaging ........................................................................................................................................ 57
7.2 Storage.............................................................................................................................................. 57
7.3 Disposal............................................................................................................................................ 57
8. Addition ....................................................................................................................................58
8.1. Troubleshooting .......................................................................................................................... 58
9. Index.......................................................................................................................................58
10. Warranty Conditions........................................................................................................60

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
5
1.INTRODUCTION
Please read this manual carefully to ensure optimum operating conditions right from the
start. This user manual handbook contains important information about the functionality,
installation, start-up and operation of the Magnetron Power Supply PPS20.
Be aware, that current functionality can be different and is on the firmware version.
1.1. INTENDED USE
Power Supply PPS20 is a high voltage device which generates a high DC and PulseDC voltage
of negative polarity. PPS20 can be operated in three modes: Constant Power, Constant
Voltage or Constant Current.
The main field of application is the formation of plasma processes. The concept and design of
the power supply allows for safe and reliable integration of complex process control systems.
The device is referred to as PPS20 in the remainder of this manual.
1.2. LIABILITIES AND WARRANTY
EDFelectronics JRMM company is not liable for damages resulting from improper use of the
device and the guarantee expires, if the user, or third party:
- ignores information contained in this manual,
- utilizes the product in a manner inconsistent with intended purpose,
- makes any modification or alteration of the product,
- unit should not be used with unauthorized accessories (compatible accessories,
types and models can be found in the product documentation)
EDFelectronics JRMM company reserves the right to make changes without prior notice.
Illustrations may vary depending on the version of the device.

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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1.4 SAFETY
1.4.1. PERSONNEL QUALIFICATIONS
All work described in this document may only be carried out by persons who have
suitable technical training and the necessary experience or who have been instructed by the
end user of the product.
1.4.2. ILLUSTRATION OF RESIDUAL DANGERS
This Operating Manual illustrates safety notes concerning residual dangers as follows:
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregarding safety notes can lead to malfunctions or
equipment damage.
Note: Indicates particularly important, but not safety-relevant information.
DANGER
!
WARNING
!
CAUTION
!

PPS20 –User Manual Rev. 1.8
EDFelectronics JRMM Sp. z o.o. s.k
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
1.4.3. GENERAL SAFETY INSTRUCTIONS
For all work you are going to do, adhere to the applicable safety regulations. Also
observe all safety notes given in this document and forward the information to all other users
of the product. In particular, pay attention to the following safety notes:
Fig 1.0.1
Mains voltage.
Contact with live parts is extremely hazardous when any objects are
introduced, or any liquids penetrate into the device.
Make sure that no objects enter through the louvers of the device. Keep the
device dry.
DANGER
!

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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Improper use.
Improper use can damage the PPS20.
Use the PPS20 only as intended by the manufacturer.
Improper installation and operation data.
Improper installation and operation data may damage the PPS20.
Strictly adhere to the stipulated installation and operation data.
WARNING
!
WARNING
!

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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2. TECHNICAL DATA
2.1. GENERAL DATA
2.1.1. MECHANICAL DATA
Dimensions: Width: 483 mm
Height: 88,1 mm (2 HU)
Depth: 395 mm
See Fig . 2.1.1
Net Weight: 10.8 kg
Installation: 19” Rack standard or Bench Top unit
Fig. 2.1.1 Dimensions (mm)
Note: The image above is illustrative, rear panel connectors may differ depending on
the version of the device.
2.1.2. AMBIENCE
Temperature Storage: -10…+60 °C
Operation Temperature: +5…+40 °C

PPS20 –User Manual Rev. 1.10
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Relative Humidity: Max. 80 % (up to 31 °C), decreasing to max. 50
% (above 40 °C)
Use indoor only
Altitude: max. 2000 m n.p.m.
The degree of dust standard: II
Humidity resistance: IP20
2.1.3. USE AND OPERATING MODES
There are three common operation modes:
- manual control, with 5 buttons user interface on the front panel
- software remote control, with RS232/RS485 or Ethernet Interface
(All Read commands are accessible all the time, Write commands are
accessible only with activation of this function from the user menu –see
remote control for use)
- hardware remote control with I/O interface –see Tab. 3.3.0
This mode is active with external signal only. In this mode all of the front
buttons are deactivated. To turn the High Voltage off use Main Power Switch
on the front panel –Fig.4.1.0

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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2.1.4. STANDARDS
Conformity with the Directive relating to electrical equipment designed for use within
certain voltage limits 73/23/EWG
Conformity with the Directive relating to electromagnetic compatibility 89/336/EWG
Harmonized and international/national standards and specifications:
EN 61010-1 (Safety requirements for electrical equipment for measurement, control
and laboratory use)
EN 61000-6-2 (Electromagnetic compatibility generic immunity standard)
EN 61000-6-3 (Electromagnetic compatibility generic emission standard)
2.2. MAINS CONNECTION
Voltage: 195 to 250 VAC, 1 phase operation
Frequency: 43 - 63 Hz
Current consumption: Max. 8 A at 230V,
Power consumption: Max. 1800 W
Overvoltage category II
Protection class 1
Connection European
appliance connector IEC 320 C14
Fuse T16A at 230V
2.3. SPECIFICATIONS
Electrical
Input Supply Voltage
195 to 250 Vac (43 …. 63 Hz), 1 phase operation *
Input Current
Max 8A; Power factor = 0.87

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
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Mode of operation
DC and Unipolar PulseDC
Frequency in PulseDC operation
10kHz … 120 kHz, or 10kHz … 300kHz **
Duty Cycle in PulseDC operation
2 … 70% ( min pulse width 1,5 us )
Output Voltage / Current / Power
0 –1000 VDC negative (ignition voltage 1200V)
0 –3000 mA (1 mA step)
2 - 1500W max in DC mode; 1050W in PulseDC
mode***
Regulation mode
Power, Voltage or Current mode
Ripple Noise
Switching: 2% p-p (50kHz) Line: 1% p-p (100/120
Hz)
Ramp Up time
Programable
Communication Interface
RS232 or RS485** and Ethernet 10/100Mb
Methods of control
Local or remote through Communication Interface
Arc Detection
< 2 us Response Time
Dimensions
483 x 395 x 88 mm (W x D x H) - 2U Rack Mounting
Standard
Weight
10.8 kg
* alternatively, operation is also possible from two hot wires 3 phase systems, providing
the voltage between them does not exceed more than 250 VAC
*** minimum power in Pulse mode strongly depends from cable length and output
(magnetron) impedance
I/O control
Analog Interface
25 Dsub male connector isolated (up to 2000 V
RMS, 0…5V Analogue,
0/24 VDC Digital)
Serial Communication Options
RS232 or RS485 with ModBUS EDF’s protocol ***;
Ethernet IP, with ModBUS TSP EDF’s protocol
*** configurable with order only
2.4 FEATURES:
•Operating mode: DC, and PulseDC with variable frequency and duty cycle
•Two high-voltage outputs - the ability to support two independent magnetrons
without having to use an external switch
•Fast response arc detection/suppression
•Switched control methods (I, V, P) for maximum performance,
•Transparent interface with OLED display and desk light identification parameters
•Built-in timer
•Stable power operation from just 2W ( depends from cable length strongly )

PPS20 –User Manual Rev. 1.10
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•High acceptance output impedance - ability to work with magnetrons of different
sizes
•Suitable for working with one or two magnetrons
•User-friendly interface with OLED display, keypad and rotary encoder

PPS20 –User Manual Rev. 1.10
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Rybnicka 64, Radlin 44-310, Poland
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2.5. INTERFACES
2.5.1. I/O INTERFACE
Connector: D-Sub 25 female connector
Refer to chapter 3.3.5 for details
No of Digital Inputs: 6 –opto-isolated; 24VDC
No of Digital Outputs: 6 –OC type, opto-isolated; 24 VDC
No of Analog Inputs: 3 –voltage input type, opto-isolated ( 0 … 5VDC)
No of Analog Outputs: 3 –voltage output type, opto-isolated (0 ... 5VDC)
Response time: 100 ms max
2.5.2. UART (RS232/RS485 )
Connector: D-Sub 9; female connector
Transmission mode: 2400, 4800, 9600, 19200, 38400, 57600, 115200 bits/s
Data Length: 8 bit
Parity Control: none
Stop Bit: 1
Transmission Control: none
2.5.3 ETHERNET/IP
Connector: RJ45
Transmission mode: 100 MB/s
TCP/IP stack, IPv4
NOTE: The communication protocol is described in separate document

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
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3. INSTALLATION
3.1. UNPACKING
1. Visually inspect the transport packaging for signs of external damage
2. Unpack the PPS20 and put the packaging material aside
Note: Keep the packaging material for later use. The PPS20 must be stored
and transported in the original packaging material only.
3. Examine the PPS20 for completeness
4. Visually inspect the PPS20 for signs of damage
Damaged product.
Putting a damaged product into operation can be extremely dangerous.
Never attempt to put a damaged product into operation. Secure the damaged
product from unintended operation. Send a damage report to the haulage
company or the insurer.
3.2. MECHANICAL INSTALLATION
PPS20 can be used in the following ways: as a bench top device, mounted in
a control panel or mounted in a 19 "rack. In each case, consider the
following important safety information:
The temperature of the environment.
Exceeding the allowable temperature of the device may damage the unit.
Make sure that the maximum permissible ambient temperature is not
DANGER
!
WARNING
!

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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exceeded, and the air can circulate freely through the ventilation slots. Do
not expose the device to direct sunlight.
3.2.1. RACK INSTALLATION
The PPS20 is designed for installation into a rack according to DIN 41 494 (19", 2
HU).
Ambient temperature.
Exceeding the maximum permitted ambient temperature may damage the device.
Make sure that the maximum permitted ambient temperature is not exceeded and
that the air can flow freely through the louvers. Do not expose the device to direct
sunlight.
Protection class of the rack.
If the product is installed in a rack, it is likely to lower the protection class of the
rack (protection from foreign bodies and water) e.g. according to the EN 60204-1
regulations for switching cabinets.
Take appropriate measures to restore the required protection class of the rack.
NOTE: To reduce the stress on the front panel, the device must be supported with
rack rails.
1. Insert PPS20 guides.
2. Screw the PPS20 using the supplied screws and plastic sleeves.
WARNING
!
DANGER
!

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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3.3. CONNECTING
3.3.1. REAR PANEL
A B B G G
C D F H E
Fig. 3.3.0 Rear panel PPS20
A –HV1 and HV2 output connectors type N-50/2-0/G1.07
B –fans and filters
C - RS232 interface Dsub 9 female ( RS485 optionally )
D –Ethernet interface RJ45
E –main power socket IEC C13
F –I/O interface connector Dsub 25 female ( see chapter 3.3.5 for details )
G –Fuses
H –grounding pin

PPS20 –User Manual Rev. 1.10
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Screw for internal protective conductor.
The internal protective conductor is connected to the casing with a screw.
Do not turn or loosen this screw.
The configuration of the available connections and photographs of cables is described
in the following sections.
3.3.2. MAINS CONNECTION
The mains connection is designed for a mains cable which contains IEC 320 C19
connector on the device side. A mains cable is supplied with the device. If the plug is
not compatible with your wall socket, you should replace it with a suitable mains cable:
•Three-conductor cable with protective ground
•Conductor cross-section 3x1.5 mm2or larger
Fig. 3.3.1 Three-conductor cable with protective ground (example)
DANGER
!

PPS20 –User Manual Rev. 1.10
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Mains power.
Improperly grounded devices can be extremely dangerous in the event of a
fault. Use three-wire mains or extension cables with protective ground only.
Plug the mains cable into wall sockets with protective ground only.
1. Connect the European appliance connector of the mains cord with the mains
connection of the device
2. Connect the plug of the mains cable with the wall socket
Note:
If the device is installed in a switching cabinet, the mains power can be supplied via a
switchable central power distributor.
3.3.3. GROUNDING
Grounding screw (Fig. 3.3.0, the reference H) should be used to connect the PPS20
with the main grounding system in which it operates. It is recommended to use a
cable with a minimum section of 2.5 mm2
If required, connect the vacuum system ground from the earthing screw using the
protective conductor.
DANGER
!

PPS20 –User Manual Rev. 1.10
EDFelectronics JRMM Sp. z o.o. sp.k.
Rybnicka 64, Radlin 44-310, Poland
http: www.edfelectronics.com ; e-mail: [email protected] tel.: [phone]
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3.3.4. HIGH VOLTAGE CONNECTORS HV1 AND HV2
The power supply is equipped with two HV outputs of N-50/2-0/G1.07 type. Output
configuration is set by the software user interface. Please refer to chapter 4.3.0
1
2
Fig. 3.3.2 HV connector , N-50/2-0/G1.07 type
1 –HV1 ( - 1000 VDC )
2 –HV2 ( - 1000 VDC )
Hazardous voltage.
After entering "Operate" mode (HV LED indicator on the front panel is lit),
the connector develops voltage levels dangerous to life and health. The
device must be turned off and completely isolated before any work
associated with connecting or disconnecting the high voltage cable. When
turned off, you must wait at least 15 seconds before attempting to connect /
disconnect the HV cable.
DANGER
!