entegris InVue NT4400 User manual

InVue®Electronic Flowmeter,
Model NT4400
User Guide
P/N 01-1036196 | REV. D 07/21

1Entegris, Inc. | User Guide
INVUE ELECTRONIC FLOWMETER, MODEL NT4400
Table of Contents
Safety Alert Symbol ...................... 2
Introduction .................................. 2
Installation ..................................... 3
Mechanical Installation ............ 3
Mounting Orientation ............... 4
Operating Environment ........... 4
Dimension Drawings ................ 5
Electrical Installation ................. 6
Power Supply
Requirements ........................... 6
Input Power .............................. 6
Output Signals .......................... 6
Electrical Connections ........... 7
Load Resistance ....................... 9
Unit Operation ............................ 10
InVue®Electronic Flowmeter,
NT4400 Cover ......................... 10
Operating Pressure
Requirements ............................ 10
Flow Accuracy ........................ 10
Pressure Accuracy ................. 10
Pressure Drop Charts ........... 11
Determining the
Flowmeter Cv......................... 13
CE Compliance ...................... 13
Hazardous Locations ............ 13
Diagnostics .................................. 14
InVue Electronic
Flowmeter, NT 4400
Diagnostics Guide ................... 14
Maintenance ................................ 17
Normal Operation ................... 17
Flowmeter Re-zero
Function ..................................... 17
Reference ..................................... 18
Physical Specifications ........... 18
Electrical Specifications ......... 18
Performance Specifications ... 19
Ordering Information ................ 20
Control Drawing ......................... 22
Appendix (Legacy Product
Information) ................................. 23
For More Information ................ 27
Terms and Conditions
of Sale ........................................... 27
Limited Warranty ........................ 27

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
2User Guide | Entegris, Inc.
Introduction
This User Guide is for use with
the InVue®Electronic Flowmeter,
NT4400 manufactured with the
configurations noted in this manual.
The InVue Electronic Flowmeter,
NT4400 (U.S. Patent Nos: 5,869,766;
6,612,175; 7,152,478; 7,866,337;
7,447,600) is designed for use in
high-purity applications in the
semiconductor industry and is
compatible with highly corrosive
processes. The instrument measures
flow rate without using moving parts
or fill-fluids, reducing the possibility
of a contaminated process. The
wetted parts of the nonmetallic
flowmeter are constructed of PTFE,
CTFE, PFA, or similar materials.
The InVue Electronic Flowmeter,
NT4400 calculates fluid flow from
the dierential pressure measured by
two sensors separated by a venturi
style integral orifice. The unit provides
two electrical output signals, each
4 – 20 mA, one for flow rate and
another for pressure measurement.
The pressure measurement is taken
from the outlet of the flowmeter.
Signal conditioning circuit
FEP-jacketed
pigtail connection
Electronic
pressure sensors
Flared tube process
connection
Flared tube
process
connection
Venturi style
integral orifice
Process flow
Inlet Outlet
Safety Alert Symbol
WARNING! INDICATES a hazardous situation which, if not avoided,
could result in serious injury or death.
Figure 1. InVue Electronic Flowmeter, NT4400 cutaway view.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
3Entegris, Inc. | User Guide
Installation
NOTE: The InVue Electronic Flowmeter,
NT4400 has been factory sealed. Do
not attempt to remove the cover of the
flowmeter. Any attempt at removal of
the flowmeter cover will void the
warranty.
WARNING! Do not tighten the nuts
that protect the tube connections
during shipment. Do not tighten
the nuts unless the proper tubing
has been installed. Tightening
these nuts may result in damage
to the flowmeter flared tube
connections.
MECHANICAL INSTALLATION
—
The InVue Electronic Flowmeter,
NT4400 must be used with the
proper tubing size and fittings. The
unit is available with Flaretek®flared
tube connections of various sizes, as
a standard. PrimeLock®and Super
300 type Pillar®tube connections
are available upon request.
NOTE: For detailed tube flaring
instructions, see “Flaretek tube fitting
flare and assembly procedures” on our
website.
NOTE: For detailed PrimeLock tube
fitting assembly instructions, visit
our website.
For detailed Super 300 Type Pillar tube
fitting assembly instructions, contact
Nippon Pillar Packing Company, Ltd.
Care should be taken when installing
the InVue Electronic Flowmeter,
NT4400 to avoid leaks. Do not use
excessive torque or subject the flow-
meter to high heat during installation.
The flowmeter and base bracket as-
sembly must be mounted to a solid
surface to ensure stability. Verify the
flowmeter and the signal cable are
free from mechanical stress from
the surrounding equipment.
Flared tube Fitting body
Tube nut

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
4User Guide | Entegris, Inc.
NOTE: When connecting the flow-
meter to the process tubing, verify the
direction of flow corresponds to the
inlet and outlet of the flowmeter (the
process fluid must enter at the inlet and
exit at the outlet). A flowmeter installed
backwards will output an erroneous
flow and pressure signal.
The flowmeter must be installed
with a two-way valve installed
downstream from the flowmeter.
The valve is required to perform the
flowmeter re-zero function. Please
refer to Maintenance on page 17 for
more information concerning the
re-zero function.
MOUNTING ORIENTATION
—
The InVue Electronic Flowmeter,
NT4400 may be mounted in any
orientation. The flowmeter does not
require straight lengths of tubing at
the inlet or the outlet connection.
For best performance, mount the
flowmeter at relative elevation lower
than the point-of-dispense to main-
tain positive pressure at all times.
NOTE: To perform within specification,
a minimum of 7 kPa (1.0 psig) of pres-
sure must be present on the outlet side
of the flowmeter.
WARNING! Flaretek fittings are
specifically designed, tested and
characterized to work together
with specific Flaretek fitting com-
ponents manufactured by Entegris.
Customer assumes the risk of
connection integrity if Flaretek
fittings, body, and/or nut compo-
nents are attached to components
manufactured by third parties.
OPERATING ENVIRONMENT
—
The InVue Electronic Flowmeter,
NT4400 is to be mounted in an
indoor, climate controlled environ-
ment. Refer to Reference on
page 18 for specifications.
Fluid flow
NT4400 Electronic Flowmeter 2-way valve required
for re-zero function

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
5Entegris, Inc. | User Guide
DIMENSION DRAWINGS
—
INLET/OUTLET
PORT CONNECTION ABC
11⁄44" Flaretek 151.9 mm (5.98”) 86.4 mm (3.40”) 19.6 mm (0.77”)
33⁄88" Flaretek 155.4 mm (6.12”) 87.9 mm (3.46”) 19.6 mm (0.77”)
11⁄22" Flaretek 159.5 mm (6.28”) 91.7 mm (3.61”) 21.6 mm (0.85”)
33⁄44" Flaretek 165.6 mm (6.52”) 99.1 mm (3.90”) 25.7 mm (1.01”)
1" Flaretek 177.8 mm (7.00”) 106.9 mm (4.21”) 30.5 mm (1.20”)
Flaretek Connection
127.0 mm (5.00”)
90.9 mm (3.58”)
114.0 mm (4.49”)
26.0 mm (1.02”)
40.1 mm
(1.58”)
76.7 mm
(3.00”)
50.8 mm
(2.00”)
8 conductor
connector/cable (DXX)
(cable length 12 ft)
8 conductor FEP-jacketed
cable pigtail connection (BXX)
(cable length 12 ft)
6.3 mm
(0.25”)
User supplied tubing
Flared nuts (2)
53.3 mm
(2.10”)
A
B
Inlet Outlet
C

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
6User Guide | Entegris, Inc.
ELECTRICAL INSTALLATION
—
Power Supply Requirements
The power supply for the InVue
Electronic Flowmeter, NT4400 must
provide clean power and must be
used only to power similar measure-
ment-type devices. The power supply
must not be used to power inductive
loads such as motors, relays, or sole-
noids. These devices may produce
transients that may aect the flow-
meter measurements when such an
inductive device is powered-up or
powered down.
In addition to providing clean power,
return lines must not be run within
the same conduit or cable. Heavy
current demands from motors, charg-
ing capacitors or other inductive
loads may cause a voltage change
within the instrumentation signal line,
causing erroneous output readings
from the flowmeter.
Input Power
The InVue Electronic Flowmeter,
NT4400 requires a nominal 24 VDC
(12 – 28 VDC input voltage) to
operate. Table A on page 7 describes
the unit input power requirements.
Output Signals
The InVue Electronic Flowmeter,
NT4400 provides two optically
isolated analog 4 – 20 mA output
signals, one signal for flow and
one signal for pressure. Each analog
output signal uses a standard two-
wire system that requires a 24 VDC
(12 – 28 VDC) power supply with less
than 2% ripple at 100 or 120 Hz.
The required power supply voltage
(VPS) for the output signal(s) varies
with the maximum load resistance,
RLoad (see Figure 4 on page 9).
Flowmeter output signals are
described in Table A.
Input and output signals to the InVue
Electronic Flowmeter, NT4400 are
supplied through an 8-wire FEP-jack-
eted pigtail or an optional 8-wire
removable PVC-jacketed electrical
connector (D-Series connector),
located on the top of the flowmeter.
8-wire Connector (D-series Connector)
1
3
2
5
4
6
78

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
7Entegris, Inc. | User Guide
Electrical Connections
The InVue Electronic Flowmeter,
NT4400 is provided with a 12’ 8-wire
FEP-jacketed pigtail or an optional 6’
or 12’, 8-wire removable PVC-jack-
eted electrical connector (D-Series
connector). Figure 2 and Figure 3 on
page 8 show the wiring diagrams for
both the pigtail and pin connector
configurations.
WARNING! Do not remove or
replace while circuit is live unless
the area is known to be free of
ignitible concentrations of
flammable substances.
WARNING! Do not replace
components unless power has
been disconnected or the area
is known to be free of ignitible
concentrations of flammable
gases or vapors.
WARNING! Explosion hazard. Do
not connect while the circuit is live
or unless the area is known to be
free of ignitible concentrations.
WARNING! Substitution of compo-
nents may impair suitability for
division 2.
NOTE: For use in Class I Division 2
Hazardous Environments, models with
disconnecting cable options must be
wired in accordance with the control
drawing 01-1033563 on page 22.
Table A. Electrical connector information
SIGNAL
CONNECTOR TYPE AND WIRE COLOR
COMMENTS
8-WIRE PIGTAIL
OR D-SERIES
CONNECTOR
7-WIRE
CONNECTOR
Ground Black (pin 1) Black (pin 1) Input power
+24 VDC Red (pin 2) Red (pin 2) Input power
4 – 20 mA (-) Brown (pin 3) White w/yellow
stripe (pin 3)
Pressure output signal
4 – 20 mA (+) Yellow (pin 4) White w/green
stripe (pin 4)
Pressure output signal
4 – 20 mA (+) Orange (pin 5) White w/red
stripe (pin 5)
Flow output signal
4 – 20 mA (-) Blue (pin 6) White w/black
stripe (pin 6)
Flow output signal
Level input
(ref. to pin 1)
Violet (pin 7) Green (pin 7) Flow re-zero: Apply 24 VDC (12 – 28
VDC) level input for a minimum of
3 seconds to re-zero flow; Please
refer to Maintenance on page 17
Factory use White (pin 8) —Factory use only
Shield — — Earth ground or chassis ground

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
8User Guide | Entegris, Inc.
i
i
i
07-Violet
24 VDC +/- 10%
Factory use only
08-White
01-Black (-)
02-Red (+)
For Re-zeroing
(Recommended)
Power Supply
Normally Open Switch
WIRING NOTICE
INFORMATION NOTICE
Re-zero wire: For 8-wire
cable units, the re-zero
is violet.
The unit requires instrument grade
“regulated” power for proper
functioning. Consult the User
Guide for additional information.
Re-zero recommended at
installation and periodic
maintenance. Consult the User
Guide for additional information.
Electrical cable
Figure 2. Connect power and re-zero wires.
05-Orange
Flow loop
03-Brown
06-Blue
Electrical cable
Power Supply
24 VDC +/- 10%
Flow display or other
monitoring device
Pressure display or other
monitoring device
+
-
+
-
+
-
The display devices are
not required for proper
functioning of the unit.
04-Yellow
Pressure loop
i
Figure 3. Connect flow and pressure signal wires.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
9Entegris, Inc. | User Guide
Load Resistance
If a load resistor, RLoad, is used in
series with the current output (flow
and pressure outputs), the value of
RLoad is dependent on the supply
voltage and the meter resistance and
is calculated from the following
formula.
where:
RLoad = maximum load resistance
VPS = power supply voltage
Rmeter = meter resistance
(theoretically = 0)
If RLoad is calculated using a voltage
drop across the meter (Vm), the
following equation is used:
RLoad = 50* (VPS -12 - Vm)
Figure 4 below shows the power
required for a 4–20 mA loop.
(VPS -12)
RLoad = 0.02 - Rmeter
800
600
0
12 Power Supply Voltage
(VPS)
R
Load
(Ohms)
24 28
Operating
region
Figure 4. Power required for a 4 – 12 mA loop.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
10 User Guide | Entegris, Inc.
Unit Operation
INVUE ELECTRONIC FLOWMETER,
NT4400 COVER
—
The InVue Electronic Flowmeter,
NT4400 cover is factory sealed and
should not be tampered with.
NOTE: Any attempt to remove or tamper
with the flowmeter cover will void the
warranty.
OPERATING PRESSURE
REQUIREMENTS
—
The flowmeter calculates fluid flow
from the dierence in pressure (meas-
ured by two sensors) across a venturi
style orifice. For the flowmeter to per-
form within specification, a minimum
of 7 kPa (1.0 psig) must be present at
the outlet of the flowmeter. Maximum
pressure is 414 kPa (60 psig).
WARNING! The InVue Electronic
Flowmeter, NT4400 may be
damaged if the flowmeter is
subjected to any level of vacuum
pressure (less than atmospheric
pressure).
WARNING! The InVue Electronic
Flowmeter, NT4400 over-pressure
limit decreases significantly for
temperatures above 65°C (149°F).
Flow Accuracy
The accuracy of the analog flow
output is ±1% of full scale, or
±2.5% of full scale. The flowmeter
accuracy includes the eects of
linearity, hysteresis and repeatability,
measured using deionized water at
room temperature.
Pressure Accuracy
The accuracy of the analog pressure
output is ±1% of full scale. These
calculations include the eects of
linearity, hysteresis and repeatability,
measured at 23°C (73°F).

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
11Entegris, Inc. | User Guide
Pressure Drop Chart
The following pressure drop chart
details the pressure drop developed
using deionized water at 23°C (73°F).
Percent of Full Scale Flow (%)
Nominal Pressure Drop (psi)
Pressure Drop vs. Percent Full Scale Flow – T Flow Range
s
020406080100
5
4
3
2
1
0

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
12 User Guide | Entegris, Inc.
The following diagrams illustrate the
expected current outputs for the flow
and pressure measurement signals
from the flowmeter. Outputs below
4 mA or above 20 mA signify low or
high alarm conditions.
NOTE: Specifications are subject to
change without notice.
mA Output vs. Full Scale Flow – T Flow Ranges
mA Output vs. Pressure
Accuracy not specified
below 5.6 mA (10% FS flow)
mA output values
indicated on graph
Pressure (psi
g
)
Do not operate
below 0 psig
mA output values
indicated on graph
mA OutputmA Output
Percent of Full Scale Flow (%)
01020406080100 120
0510 15 20 25 30 35 40 45 50 55 60 7065
24
20
16
12
8
4
0
24
20
16
12
8
4
0

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
13Entegris, Inc. | User Guide
Determining the Flowmeter Cv
The Cvof the flowmeter using de-
ionized water at 23°C (73°F) is listed
on the right.
Cvflow factor is the number of
gallons of water that pass through
the orifice in one minute at a pres-
sure drop of 7 kPa (1.0 psid).
CE Compliance
Entegris products have been tested
to various test standards required by
the EMC 2014/30/EU directive. The
results of this testing are on file at
Entegris and are available upon
request.
Please contact the factory for the
latest information. The most current
specifications may be found on our
website.
Hazardous Locations
The InVue Electronic Flowmeter,
NT4400 conforms to UL 61010-1
and ANSI®/ISA®12.12.01 standards
for use in Class I, Division 2 Group
A – D, T6 10°C ≤Ta ≤65°C, hazardous
environments.
FLOW RANGE CV
T0 0.006
T1 0.015
T2 0.031
T3 0.061
T4 0.15
T5 0.31
T6 0.61
T7 1.2
T8 2.4
T9 4.9
T10 7.3
T11 11.0
T12 14.6

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
14 User Guide | Entegris, Inc.
Diagnostics
Troubleshooting the InVue Electronic
Flowmeter, NT4400 may be accom-
plished by measuring the current
(420 mA) output signal of the flow-
meter with a battery powered current/
voltage meter. The meter may be
placed in series with a flowmeter
output to measure the current output
or it may be used to directly measure
the voltage from a load resistor.
Using the battery powered current/
voltmeter is an eective method
to determine whether the Entegris
device or the on-site data acquisition
system is not functioning properly.
Diagnostics Guide
SYMPTOM POSSIBLE CAUSES SUGGESTIONS
1. Current output
reads 4 mA or
less when fluid
flow is present.
The flowmeter is
installed backwards.
Install the flowmeter so the direction of
flow is from inlet towards outlet (direction
of the arrow).
The flowmeter was
accidentally re-zeroed
while flow was present.
Make sure the flow is stopped, and that
there is a minimum of 7 kPa (1.0 psig)
static line pressure present, then re-zero
the flowmeter. See page 17. Use the
included pressure output to verify the
re-zero pressure.
Insucient line
pressure.
The line pressure (i.e., back-pressure must
be 7 kPa (1.0 psig). If the back- pressure is
being supplied by a column of liquid, the
column height must be greater than
28 inches of water (7 kPa [1.0 psig]). Some
liquids may require greater height due to
lower density. Use the included pressure
output to verify the re-zero pressure.
The actual flow
is lower than the
specified flow range
for the flowmeter.
A flowmeter configured to a dierent
flow range is required. For example, if
the flowmeter is a T7 unit, any flow less
than 1.0 L/min will read 4 mA. Please
contact Entegris for additional product
information.
Improper wiring. Verify main power connection
(Red and Black wires).

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
15Entegris, Inc. | User Guide
Diagnostics Guide (continued)
SYMPTOM POSSIBLE CAUSES SUGGESTIONS
2. Output reads
above 4 mA
when there is
zero flow.
The flowmeter needs
to be re-zeroed.
Perform the re-zeroing procedure. Make
sure the flow is stopped, and that there
is a minimum of 7 kPa (1.0 psig) static
line pressure present, then re-zero the
flowmeter. See page 17. Use the included
pressure output to verify the re-zero
pressure.
3. Current output
does not change
with changing
flow.
The pressure output
is being monitored
instead of the flow
output.
Check the wiring to ensure the flow
output is wired correctly.
Improper wiring. Verify main power connection
(Red and Black wires).
Insucient line
pressure.
The line pressure (i.e., back-pressure must
be 7 kPa (1.0 psig). If the back- pressure is
being supplied by a column of liquid, the
column height must be greater than
28 inches of water (7 kPa [1.0 psig]). Some
liquids may require greater height due to
lower density. Use the included pressure
output to verify the re-zero pressure.
The flowmeter was
accidentally re-zeroed
while flow was present.
Make sure the flow is stopped, and that
there is a minimum of 7 kPa (1.0 psig)
static line pressure present, then re-zero
the flowmeter. See page 17. Use the
included pressure output to verify the
re-zero pressure.
4. Current output
is extremely high
(>25 mA).
The 4 – 20 mA loop
signal is shorted to the
power (+24 V) of the
flowmeter.
Examine all electrical connections Please
note, if wires are stripped back too far
before insertion in a terminal block, they
may cross and short together.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
16 User Guide | Entegris, Inc.
Diagnostics Guide (continued)
SYMPTOM POSSIBLE CAUSES SUGGESTIONS
5. Output is
extremely noisy
(spiking above
and below
20 and 4 mA).
The actual fluid flow
conditions are noisy.
Flow turbulence may be caused
by “noisy” pumps used in a system.
Examples of noisy pumps are diaphragm
pumps without pulsation dampeners
and peristaltic pumps operating at low
flow rates. Please contact Entegris for
additional information.
The supply power
(+24 V) is noisy.
If the power supply is shared with other
systems, components such as solenoids,
DC motors, valves, etc., the flowmeter
may be receiving “dirty” power. The noise
spikes on the power supply will cause the
flowmeter output to be noisy.
6. Flow inaccuracy
at low operating
flow rates.
The flowmeter needs
to be re-zeroed.
Perform the re-zeroing procedure. Make
sure the flow is stopped, and that there
is a minimum of 7 kPa (1.0 psig) static
line pressure present, then re-zero the
flowmeter. See page 17. Use the included
pressure output to verify the re-zero
pressure.
Insucient back-
pressure (7 kPa
[1.0 psig]).
Check pressure output valve. If below
7 kPa (1.0 psig) at all operational flow rates
(including zero flow), move flowmeter or
increase back-pressure. Use the included
pressure output to verify the pressure.
The flowmeter is
mounted above
dispense point.
Move flowmeter below dispense point.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
17Entegris, Inc. | User Guide
Maintenance
NORMAL OPERATION
—
During normal operation, the InVue
Electronic Flowmeter, NT4400
requires no maintenance, other than
a periodic re-zero of the flowmeter.
FLOWMETER RE-ZERO FUNCTION
—
The calibration of the flowmeter
can be re-zeroed, meaning that the
analog output that corresponds to
zero flow may be reset.
WARNING! When executing the
re-zero function, there must be
7 to 414 kPa (1 to 60 psig) of static
pressure. Best results when re-zero
is performed at the operating
pressure.
NOTE: The following procedure must
be followed precisely to ensure proper
flowmeter re-zero.
1. The flowmeter re-zero function
requires the same power supply of
24 VDC (12 – 28 VDC) as is used to
power the unit.
2. Stop the process fluid flow and
verify that the flowmeter is ex-
periencing absolutely no flow
(typically requires a fully closed
process valve located on the
outlet side of the flowmeter).
3. Using the pressure output signal of
the flowmeter, verify that there is
at least 7 kPa (1.0 psig) [414 kPa
(60 psig) maximum] of stable static
line pressure.
4. Apply 24 VDC (12 – 28 VDC) to the
violet wire for a minimum of three
seconds. This voltage supply must
use the same ground as the power
supply for the flowmeter.
In most applications, the re-zero
procedure may be automated using
switches, a PLC or other logic
controller devices.
In order to obtain best performance,
the re-zero function should be
performed, if possible, every day of
service when operating at ambient
temperature conditions. The re-zero
function should be performed more
often if operating at higher tempera-
ture. It is also recommended to
perform a re-zero after start-up and
after fluid temperature changes of
greater than 5°C (9°F). Best perfor-
mance will be achieved by re-zeroing
between each dispense cycle.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
18 User Guide | Entegris, Inc.
Reference
The following section lists the specifications for the
InVue Electronic Flowmeter, NT4400.
Physical specifications
PART MATERIALS OF CONSTRUCTION
Wetted parts Body PTFE
Sensor interface CTFE or PFA (consult factory for specific material)
O-rings Kalrez®6375 UP
Nonwetted parts Polypropylene, Polyethylene, Viton®, and PVDF
Connection type Flaretek tube fitting, standard. PrimeLock, and
Super 300 Type Pillar are available upon request.
Electrical specifications
Nominal input voltage 24 VDC
Input voltage range 12 – 28 VDC
Input current 50 mA (max.)
(+20 mA +20 mA for each output signal)
Signal output range for flow
and pressure
4 – 20 mA
(Externally powered with 24 VDC. Output varies
proportionately with flow or pressure measured)
Maximum load resistance 0 Ωat 12 VDC
800 Ωat 28 VDC
Maximum output current 22 mA for flow signal, 22 mA for pressure signal
Electrical connection 12’, 8-wire FEP-jacketed pigtail or
polypropylene removable connector
with 6’ or 12’ PVC-jacketed cable.
Electrical enclosure IP54
Certifications
ETL listed for conformance to UL 61010-1 and
ANSI/ISA 12.12.01 standards for use in Class
I, Division 2 Group A–D, T6 10°C ≤Ta ≤65°C,
hazardous environments.

INVUE ELECTRONIC FLOWMETER, MODEL NT4400
19Entegris, Inc. | User Guide
Performance specifications
Process temperature 10° to 65°C (50° to 149°F)
Ambient temperature 10° to 65°C (50° to 149°F)
Storage temperature -15° to 40°C (20° to 149°F)
Minimum operating pressure
(at the outlet)
7 kPa (1.0 psig)
Maximum operating pressure 414 kPa (60 psig)
Pressure drop 21 kPa (3 psid) at 80% flow (10:1 turn down)
21 kPa (3 psid) at 40% flow (20:1 turn down)
Response time 50 msec update rate
Flow accuracy 10:1 turndown
(T flow ranges)
20 – 100% of range ±1.0% of full scale
10 – 20% of range ±2.5% of full scale*
20:1 turndown
(E flow ranges)
(legacy)
10 – 100% of range ±1.0% of full scale
5 – 10% of range ±2.5% of full scale
Accuracy stated as full scale using deionized
water at 23°C (73°F) and includes the combined
eects of linearity, hysteresis and repeatability.*
Flow repeatability 10:1 turndown
(T flow ranges)
20 – 100% of range ±0.5% of full scale
10 – 20% of range ±1.0% of full scale
20:1 turndown
(E flow ranges)
(legacy)
10 – 100% of range ±0.5% of full scale
5 – 10% of range ±1.0% of full scale
Pressure measurement range 0 – 414 kPa (0 – 60 psig)
Over-pressure limit 690 kPa (100 psig)
Pressure accuracy ±1.0% of full scale, includes the combined
eects of linearity, hysteresis and repeatability.
Pressure repeatability ±1.0% of full scale
*Note: A performance loss up to 10% FS accuracy error may occur when the unit is exposed
to radiated radio frequency fields of 10 V/m in the frequency range of 730 – 970 MHz range
or conducted radio frequency of 3V in the 10 – 15 MHz range.