FEI Scios 2 Mounting instructions

User Operation Manual
Edition 1
Mar-2017

FreeRTOS Licensing Information
This product contains FreeRTOS software. Upon request, FEI Company will provide you with the FreeRTOS source code
and any modifications to the FreeRTOS source code made by FEI.
Trademark Acknowledgments
FEI logo is a trademark of FEI Company.
FEI is a registered trademark of FEI Company.
Microsoft® and Windows 7 are registered trademarks of Microsoft Corporation.
FreeRTOS™, FreeRTOS.org™ and the FreeRTOS logo are trademarks of Real Time Engineers Ltd.
This manual was produced using FrameMaker™ document publishing software.
FrameMaker™ and Adobe are registered trademarks of Adobe Systems Incorporated.
Other product and company names mentioned herein may be trademarks of their respective owners.
Copyright © 2017 by FEI Company
The information and materials contained herein are confidential and proprietary to FEI Company.
They are provided for your organization's internal use on a need-to-know basis.
They cannot be duplicated or disseminated for any third party without the express consent of FEI Company.
Limited Rights
The following notice applies to the U.S. Government and other purchases with federal funds:
Contractor Name:
FEI Company
Contractor Address:
5350 NE Dawson Creek Drive, Hillsboro, Oregon 97124, USA
The Government's rights to use, modify, reproduce, release, perform, show, or disclose these technical data
are restricted to those rights specified in:
DFARS 252.227-7015(b)(2), FAR 52.227-14(g)(2) (Alternate II) and FAR 12.211.
Any reproduction of technical data or portions thereof marked with this legend
must also reproduce the markings.
Any person, other than the Government, who has been provided access to such data,
must promptly notify the above named Contractor.
Manufacturer & Technical support
FEI Company, 5350 NE Dawson Creen Drive, Hilsboro, Oregon 97124, USA
www.fei.com

CONFIDENTIAL – FEI Limited Rights Data C-i
Table of Contents
Chapter 1 System Overview
User Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
FEI Microscope Systems Safety Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
User Operation Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
System Capabilities. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
System Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Chapter 2 System Control
System Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Other Software and Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Interface Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Mains Switchboard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
System States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
System Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Overnight and Standby . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
System Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Vacuum Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Vacuum Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Detector Types and Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Stages and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
Chapter 3 Software Control
Software Interface Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Icons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Tool-Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Pull-down Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Command Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Property Editor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Edit Boxes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Radio Buttons / Check Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Adjusters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
2D Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Dialogs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Tabs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Progress Bars. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
xT microscope Server Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Microscope Control Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Workspace customization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
Imaging Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Status Bar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
Control Pages and Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Preferences Dialog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
FEI Account Manager application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50
Accounts control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50
User Logins and Account Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53

Table of Contents
CONFIDENTIAL – FEI Limited Rights Data
C-ii
Entering Commands in Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Using Mouse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Using Keyboard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-55
Chapter 4 Alignments
Common Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Buttons and Control Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Alignments List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Automatic Alignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Magnification Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
E-Column: Aperture Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
E-Column: Preventive Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
E-Column: Supervisor Alignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
100 – ION: Source Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
I-Column: Aperture Management . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
I-Column: Manual Beam Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
I-Column: Alignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-18
Stage Alignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
154 – Water Bottle Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-21
Plasma Cleaning / External Plasma Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
Pump Buffer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-23
Vacuum Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
254 – GIS Alignment (option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
Chapter 5 Operating Procedures
Specimen Preparation and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Needed Items. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Natural specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Coated Specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Mounting Specimen on Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Specimen Baking Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Microscope Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Operation Pre-Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Inserting / Exchanging Specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Selecting Vacuum Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Imaging Onscreen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Optimizing Imaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Principles of SEM Imaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Magnification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Scan Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Contrast & Brightness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Focusing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Correcting Astigmatism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Direct Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Digital Imaging Enhancement / Imaging Mixing / Coloring . . . . . . . . . . . . . . . . . . . . . 5-14
Accelerating Voltage and Beam Currents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
Column Use Cases. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
Standard Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Everhart Thornley Detector (ETD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
Infrared CCD Camera . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
Low Vacuum Detector (LVD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
Trinity Detectors T1 / T2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
T1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
T2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
T3 (option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
Capturing and Handling Single Image. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

Table of Contents
CONFIDENTIAL – FEI Limited Rights Data C-iii
Image Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
Saving / Opening / Printing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23
Recording Movies (Saving Multiple Images) . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
Movie Settings Dialog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
Movie Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
Movie Creator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
Stage Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Eucentric Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Software Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
Stage Related Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
Patterns / Measurements / Annotations. . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-43
Patterning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-44
Patterning Control Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-45
Patterns Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-48
Advanced Patterning tab Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-50
Gas Injection Module (option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52
Application Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-53
Milling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-55
Viewing Cross Sections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-58
Chapter 6 Maintenance
Cleaning Procedures Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
List of Applied Cleaners . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Cleaning Column Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Materials and Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Aperture Strip Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Removing Aperture Rod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Replacing Aperture Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Installation of Aperture Rod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Exchange procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Stage Mechanics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Specimen Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Refilling Water Bottle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Chapter 7 System Options
Manual User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Joystick . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Uninterruptible Power Supply (UPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Optional Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Retractable Detectors Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Trinity Detector T3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Ion Conversion and Electron detector (ICE) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Retractable Directional Backscattered Detector (DBS) – 
Angular Backscattered Detector (ABS) / Concentric Backscattered Detector (CBS) . . . . . . . 7-6
Optional detectors connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Directional Gaseous Analytical Detector (GAD). . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Retractable Annular Scanning Transmission Electron Microscopy Detector 
(STEM 3 / STEM 3+) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
Nav-Cam # . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
Capturing Navigation Image Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
Energy Dispersive X-ray (EDX) Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
High Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
Low Vacuum EDX Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
STEM EDX Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
External Current Measurement (Keithley Picoamper Meter) . . . . . . . . . . . . . . . . . . . 7-14

Table of Contents
CONFIDENTIAL – FEI Limited Rights Data
C-iv
EasyLift . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15
EasyLift Module Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
EasyLift Display Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
EasyLift: Needle Exchange / Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
EasyLift Basic Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
MEMS – Heating Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
MEMS Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
MEMS Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24
Software Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24
Remote Imaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
Connection to Microscope PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
Microscope PC’s Desktop Sharing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28
Controlling Microscope Remotely. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28
UMB Stub Holder Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28
Beam Deceleration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
Detection Principles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
Beam Deceleration Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30
I-Beam Charge Neutralizer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
Using Charge Neutralizer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
Quick Loader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37
Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
CryoCleanerEC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40
Parts and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40
CryoCleaner Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
Spare Vessel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
Plasma Cleaner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43
Sample Cleaning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
Chamber Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
Specimen Holder Kit Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
Location Positions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
Interface Pillar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
Torx Drivers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
Clamp Stubs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46
Multi-Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

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System Overview
User Manuals
FEI Microscope Systems Safety Manual
The safety manual provides information for personal safety and maintenance procedures while
operating this FEI system.
This manual is required reading for the end user.
User Operation Manual
The User Manual is delivered in the electronic PDF file only. However, it is possible to print parts of the manual if
this is desired.
It is recommended to read the appropriate User Manual section before operating any microscope function. Most
importantly, you should locate the topics necessary to operate the microscope in the proper way to safely achieve
the best results.
The manual is divided into the following chapters:
1. System Overview (this chapter) 
gives overview of the user manuals and system capabilities.
2. System Control 
describes the system hardware (interface elements, vacuum system, system states, equipment).
3. Software Control 
describes the interface that sets and controls system operation, giving the function of each tool, menu item and
control page.
4. Alignments 
explains how to align the equipment to achieve the optimal performance.
5. Operating Procedures 
gives procedures for how to use the system features.
6. Maintenance 
gives allowed step by step cleaning and maintenance procedures.
7. System Options 
explains relevant options that can be integrated into or accessory to the system.
One can take advantage of the searching and navigation possibilities within the PDF file. In addition, the following
conventions are applied:
•A reference to the specific software element is highlighted in italic. For instance: 
“Clear the Stage menu / Beam Shift Reset item.”
•Some software functions use shortcuts, which are given beside the heading in the brackets 
(for instance: Save (Ctrl + S))and in the Help menu / Keyboard Shortcuts.

System Overview: System Capabilities
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System Capabilities
The Scios is a combination of two systems:
•Scanning Electron Microscope (SEM): produces enlarged images of a variety of specimens achieving
magnification over 100 000× providing high resolution imaging in a digital format.
•Focused Ion Beam (FIB) system: capable of fast and precise milling of the specimen material, revealing the
structure under the surface layer, making cross sections, deposition layers, etc. The ion system produces high
resolution images as well.
The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three
dimensions.
This important and widely used analytical tool provides exceptional field of view, minimal specimen preparation,
and the ability to combine the technique with X-ray microanalysis.
Users can switch between the two beams for quick and accurate navigation and milling. Convergence of the SEM
and FIB at a short working distance allows precision “slice-and-view” cross-sectioning and analysis at high
resolution. The instrument provides optimum throughput, resolution and automation.
FIB/SEM instrument provide an expanded range of capabilities not possible with separate FIB and SEM tools:
•High-resolution electron beam images of FIB cross sections without eroding the feature of interest
•Real-time cross-section images and videos with the electron beam during FIB milling
•Focused electron beam charge neutralization during FIB milling
•High resolution elemental microanalysis of defect cross sections
•Imaging of sample surfaces with the electron beam during navigation without erosion or gallium implantation
from the ion beam
•TEM sample preparation with in situ conductive coating
System Performance
The equipment is intended as a standalone system.
The main instrument components used for imaging of the samples are:
•Electron / Ion source 
The beam of electrons or ions (particles) is emitted within a small spatial volume with a small angular spread
and selectable energy.
•Lens system 
The beam enters the lens system consisting of several electromagnetic or electrostatic lenses and exits to hit
the specimen surface.
•Scan unit 
The scan generator signal, fed to the deflection systems, moves the beam in a raster pattern over the specimen
area. This signal, modulated by the detection system signal produces the onscreen imaging of the specimen
surface.
•Detection unit 
Particles striking the specimen react with atoms of the sample surface in various manners:
– The electron beam produces electrons and photons (X-rays). 
– The ion beam produces ions, electrons and photons (X-rays).
The detector system picks up the particles or photons, converts them into a digital signal which is then sent to
the control PC and shown on the monitor.

System Overview: System Capabilities
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FIGURE 1-1 Column Schematic Overview
Computer Control
The xT microscope Server and Microscope Control (User Interface) software integrate SEM and FIB functionality
within a Windows 7 operating environment.
This software consists of programs defining specific instrument settings for particular applications, ensuring
reproducibility of complex procedures (for instance imaging, management of image capture, storage, and data
output devices etc.). They also control instrument hardware (the column, detector(s), stage, EDX, vacuum
functions etc.).
Vacuum System
The entire particle path from a source to specimen must be under vacuum so that the particles do not collide with
air molecules.
Various levels of vacuum are necessary, so a Turbo Molecular Pump (TMP) backed by a scroll pre-vacuum pump
(PVP) obtains the necessary specimen chamber pressure.
High Vacuum (HiVac)
This is the conventional operating mode associated with all scanning electron microscopes.
Low Vacuum (LoVac)
In the gaseous mode the electron column is under lower pressure than the specimen chamber. This mode can use
water vapours from a built-in water reservoir, or an auxiliary gas which is supplied by a user and connected to the
gas inlet provided for this purpose. Observation of outgassing or highly charging materials can be made using this
mode without the need to metal coat the sample, which would be necessary for conventional HiVac mode.
Stage
The Scios has a computer-controlled high-accuracy five-axis stage for small samples. It offers precision specimen
computer controlled manipulation and automation of all axes for overall spatial orientation on highly repetitive or
extremely irregular samples.
Specimen exchanges take place through a chamber door which exposes the specimen stage when opened or
through the Quick Loader (option). An exchange time takes a few minutes, with the Quick Loader an exchange is
much more faster. Software and interlocks protect the system against a damage and users against an injury.
Electron / Ion
CONDENSER
LENS(ES)
SCAN GENERATOR M
FINAL LENS
DEFLECTION
SYSTEM
SCAN UNIT
SPECIMEN
DETECTION UNIT
DETECTOR
LENS SYSTEM
Source

System Overview: System Capabilities
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Image Viewing and Capture
Because the amplified detector signal is shown synchronously with the beam scanning, there is a relation between
brightness of an image point on the monitor screen and the signal detected at the corresponding point on the
specimen.
Magnification is the ratio of the size of the viewing monitor screen to the size of the area scanned on the specimen.
Higher magnification is achieved by reducing the size of the area scanned on the specimen.
Beams Control
DualBeam systems ideally position the point of interest for simultaneous ion beam cross-sectioning and electron
beam viewing. Separate scan generators for the two beams permit coupled or independent scan patterns and
magnifications.
Imaging while milling aids in defining milled features. Immediate electron beam images of cross sections are
possible without stage motion or sample transfer. Immediate high resolution SEM imaging after FIB milling also
prevents exposure of milled cross sections to atmospheric contaminants.
Gas Injection System (GIS)
Multiple FEI GIS (option) can be installed for material deposition in conjunction with either electron or ion beam
pattern definition. Electron beam-induced deposition offers the advantage of not sputtering the deposited material
or implanting gallium FIB source ions simultaneously.
The GIS can also contain etching precursor for fast material removal with minimal re-deposition, preferential
etching of cross-section surfaces prior to SEM imaging, and rapid milling of TEM sections.
Several GIS chemistries can be installed on the instrument, depending on a system configuration. This self-
contained apparatus allows the material to be contained entirely within the vacuum system for simple, flexible, and
safe operation.
Analysis Capability
Convergence of the SEM, FIB, and X-ray detection
system (e.g. EDX – Energy Dispersive X-ray – option) at
short working distance allows precision “slice-and-view”
cross-sectioning and chemical analysis at high
resolution of surface and subsurface features.
Various vendor options are compatible with the
instrument (see Chapter 7).

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2
System Control
This chapter describes the layout of the system, interface elements and equipment.
System Layout
The basic system layout is based around the dedicated Microscope PC with the LCD monitor, Microscope console
and Electrical console. Optionally it is possible to have a second LCD monitor with the Microscope PC or the
Support PC with LCD monitor and the switch box with keyboard and mouse to switch between the two PC’s.
FIGURE 2-1 Scios Standard Layout Scheme
Caution! 
If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be
impaired.
Mains power must be connected to a grounded socket that is visible and easily accessible!
A user must not disconnect any parts of the equipment or connect any equipment not approved in this manual or in the
FEI Microscope Systems Safety Manual!
All power and external equipment connectors should be covered by stoppers (part of delivery) when not used!
Other Software and Hardware
Call a FEI authorized service engineer for advice before installing software or hardware that is not required for
system operation. Other software, such as screen savers or hardware network cards, may corrupt the
xT microscope Server / Microscope Control software under some circumstances and may invalidate warranty.
For more detailed information about Windows 7™, refer to the Microsoft® Windows™ User’s Guide shipped with
your system.

System Control: Interface Elements
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Interface Elements
Software
The software control contains graphic applications within Windows 7™ operating environment:
•xT microscope Server: starts and stops basic microscope functions
•Microscope Control software (UI – User Interface): controls all system functions including imaging,
image and movie gathering / manipulation / output, detection and analysis, scanning,
magnification, stage navigation, chamber and column pressure, etc.
•FEI Account Manager software: ensures for the particular users admission to both the operating
system Windows 7 and the Microscope Control software
For information on all features of these applications see Chapter 3.
Password Policy
After the FEI software installation there are two initial users / passwords common for the OS Windows and the
Microscope Control software (UI):
•User: supervisor / Password: supervisor
•User: user / Password: user
At the first time log in the operating system Windows 7 a user is automatically forced to change their password.
After that the UI accepts it and enables to log in from that point on.
Each password (either for any new user or after the 90 day period expiration) has to meet the following conditions:
•at least 7 characters long
•the stem must be significantly different from a previous password and shouldn't contain complete dictionary
word and user name
•must contain at least one character of each of these character groups:
– Uppercase letter 
– Lowercase letter 
– Number 
– Symbol (/, *, -,+ etc.)
Hardware
The system is computer controlled and as such has a Microscope PC which must be turned on (use the power
button on the PC) to operate the microscope by means of the software. The Support PC can hold some other
software utilities. The switch box switches the keyboard and the mouse to either of the two PC’s. The control
software facilities and data are shown graphically on the LCD monitor and are superimposed around and on the
image. The other LCD monitor is used either as an extended desktop of the Microscope PC or as the Support PC
monitor. To control software utilities one can use a keyboard, mouse, joystick (option) or the Manual User Interface
(option).
Power Button
The console / system power is activated by pressing the power button located on the microscope console front
panel. This switches the sub-systems on and allows the interface and communication with the Microscope PC,
from which most of the functions are activated via the software control.
The power button indicates several system states:
•green lit – the Full Operation state
•amber lit – the Standby system state (considered as an abnormal system state)
•no lit – the Complete shutdown system state
FIGURE 2-2 Control Panel Power Button

System Control: Interface Elements
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Final Lens Aperture Strip
The strip is made from a Mo coated Si. The Automatic Aperture System (AAS) automatically controls the final lens
aperture selection according to imaging needs when working with the electron and ion beams (see Chapter 5).
Note 
The aperture holes edges cleanness is very important, exchange or clean them if necessary (see Chapter 6). When
performing the E-Column: Aperture Selection alignment (see Chapter 4) there are knobs accessible on the aperture
mechanism on each column enabling the fine adjustment of the strip hole.
FIGURE 2-3 Automatic Aperture System Control Knobs Electron / Ion column
External Connectors panel
It is located at the back side of the microscope console.
It is used to connect 3rd party equipment to the
following connectors:
CONTROL SIGNALS / E-BEAM SCAN INPUT / 
VIDEO OUT
These connectors are used for connection of EDX, WDX
and lithography systems, provided by 3rd party
suppliers. Do not connect anything else in these
connectors!
SPECIMEN CURRENT
This connector is used together with the Keithley
picoamper meter (option) equipment.
Ground point
The point is intended for a defined ground connection
between a microscope and a 3rd party module. This
connection is not a safe ground!
ELPHY SCAN & BLANKING IN
Not used.

System Control: Interface Elements
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Mains Switchboard
Breakers and connectors placed at the cabinet back:
•Mains switch S1 – entire system mains power switch
•PVP Breaker F1/5A – pre-vacuum pumps power switches
•Mains Breaker F2/10A – system pumps power switches
•Main input 230 VAC – input mains power cord
•PVP X5 – output power supply for pre-vacuum pumps
•X1 – not used
•X2 – optional equipment output power supply
•X3 – optional equipment output power supply
•X4 – output power supply for Microscope PC, LCD 1, optionally for Support PC,LCD 2, LCD 3
FIGURE 2-4 Mains Switch Board
Caution! 
Always keep all control elements accessible! This is especially important in case of emergency.

System Control: System States
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Power Off
The system has protection against power failures in the sense that the different components of the system are not
likely to be damaged. However, a power failure is never good for the system. It might affect the ultrahigh vacuum
levels of the columns and the overall stability of the system.
Take sufficient measures to avoid power failures. If it occurs while the instrument is completely operational, the
microscope comes down to a safe state and the following happens:
•Both electron and ion accelerating voltages are switched off.
•Both electron and ion emissions are switched off.
•The specimen chamber vents gently, automatically.
The vacuum in the instrument is no longer supported by running pumps, the column isolating valves close to
save the vacuum in the sources areas.
•The Microscope PC and the Support PC are switched off, the momentary adjustments of all system parameters
(accelerating voltage, magnification, stage positions etc.) are lost if they were not saved.
Note 
If the mains failures occur occasionally it is recommended to use the Uninterruptible Power Supply (UPS – option).
Emergency Off
To switch off the electrical power completely in case of emergency, follow this quick and safe procedure:
1. Push the red EMERGENCY OFF (EMO) button (option – see the Safety Manual).
If the button is not installed proceed as follows:
2. Switch off the Main switch S1 breaker, which is placed at the very left side in the row of three, 
or disconnect the power cord Main input 230 VAC.
If this is not easily accessible:
3. Turn off the mains wall switch (if present), and / or disconnect the mains plug from the mains socket.
WARNING! 
The microscope console water chiller (option – separate device in the microscope vicinity) is powered separately via the
individual power cord. The hazardous voltages may be present on this equipment even when the microscope power plug
is disconnected!
Because the electron column IGP’s are supported by internal batteries, some parts of the microscope are still under
power.
System States
There are several system states:
•Complete shutdown – service and emergency reasons
•Standby – not using the system for a longer period
This is an abnormal system state.
•Overnight – not using the system overnight
•Full operation – all microscope equipment and accessories are in use or ready to use
The system is intended for continuous operation.
The Complete shutdown system state can be set only by a supervisor. 
See detailed description of all following processes and elements further in this manual.

System Control: System States
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System Startup
In the Complete shutdown state the system is disconnected from all sources used for an operation. Connect the
following sources:
•electrical – power cord
•pneumatic – compressed air inlet
•cooling water – hose flanges
•operating gas – nitrogen inlet
The amber color Power button on the Microscope console panel
starts to shine.
To bring the system to the Full operation state follow the
procedure:
1. Push the amber Power button on the Microscope console panel
– it changes to the green one (a).
2. Switch on the Microscope PC. The operating system
(b) Windows 7™ loads and shows the appropriate icons on the
monitor desktop.
3. Double-click on the xT microscope Server icon to start the
software (all seeming LED’s should be green – Initialized).
4. Click on the Start button to start the server. Wait until all
elements are fully functional (green – Initialized).
5. Click on the Start UI button to start the Microscope Control
software. The main window appears behind the UI Log On
dialog.
Note 
This step can take place automatically, if Advanced / Autorun UI
check box is ticked.
6. Enter your Username and a Password (b).
7. Start the electron column IGP pumps with the use of 
the 5 – Emitter Startup alignment, Step 1 of 2. This procedure
takes a few minutes and the final IGP Upper pressure should be 
< 5.10-7 Pa to start the emitter.
8. Switch on the Emitter with the use of the 5 – Emitter Startup
alignment, Step 2 of 2. This procedure can take about 2 or 40
minutes (short or long procedure) depending on emitter
conditions. 
If this is not possible, call a FEI authorized service engineer!
9. Start the ion column IGP pump with 
the 100 – ION: Source Control alignment.

System Control: System States
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10. Select the desired Vacuum module / Vacuum mode radio
button and click on the Vacuum module / Pump Button. Wait
for the Pumped status.
11. Click on the Column module / Beam On button to start the
selected beam only or the System module / Wake Up(c) button
to start both beams. A Column module source awaking
progress bar indicates the actual status and the button turns
orange when finished.
See Chapter 5 to set desired imaging conditions.
Note 
a) When switching the console on (starting from the Standby state),
the SEM aperture becomes heated. It may take several (5–10)
minutes before it is at the proper temperature. Do not make any
adjustments during this interval (aperture, source or lens alignment)!
The microscope could become misaligned when the aperture reaches
the operational temperature.
b) Once you have your user account set up via FEI Account manager
software (see Chapter 3), you can use your name and password to
access both Windows 7 system and the Microscope Control software. Take
note of the Password policy (see above), which helps to protect individual
settings and results.
c) Usually, the Scios remains on with the vacuum system in operation, but
typically the ion emitter and accelerating voltages for both columns remain
off. The system starts with the setting in use when the Microscope Control
software was closed. This allows quick resumption of daily operation.



Overnight and Standby
When leaving the system, it is advisable to bring it to the Overnight state by following the procedure:
1. Click on the System module / Sleep button to switch off both beams and to stop the ion source.
2. If one needs to remove the sample, select the Stage menu / Tilt 0° (Ctrl + E). Click on the Vacuum module / Vent
button. Wait for the Vented status and remove your sample.
3. Click on the Vacuum module / Pump button to pump to the High Vacuum. (d)
4. Select (e) the File menu / Log Off to log off the present user and to
provide the Log On dialog for entering another one. Switch off the
monitor.
Now the system is in the Overnight state, to proceed to the Standby state
follow the procedure:
5. Click on the xT microscope Server window / Standby button.
This stops the UI, the xT microscope Server application services and
switches off the console (the green power button on the microscope
front control panel changes to amber one).
In the Standby state the electron emission is on and the chamber vacuum
is maintained by running vacuum pumps.

System Control: System States
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To bring the system back to an operation, follow the procedure:
Caution! 
When the Standby state was just entered, wait 10 s at minimum before starting microscope operation again (pressing
the power button on the microscope front control panel)!
1. Push the amber Power button on the Microscope console panel
– it changes to the green one (a).
2. Double-click on the xT microscope Server icon to start the
software (all seeming LED’s should be green – Initialized).
3. Click on the Start button to start the server. Wait until all
elements are fully functional (green – Initialized).
4. Click on the Start UI button to start the Microscope Control
software. The main window appears behind the UI Log On
dialog.
Note 
This step can take place automatically, if Advanced / Autorun UI
check box is ticked.
Now the system is in the Overnight state, to proceed to the Full
operation state follow the procedure:
5. Enter your Username and a Password (b).
6. Click on the Column module / Beam On button to start the
selected beam only or the System module / Wake Up(c) button
to start both beams. A Column module source awaking
progress bar indicates the actual status and the button turns
orange when finished.
Note 
d) It is strongly recommended to always leave the chamber evacuated
when not being used. When the sample chamber is left in the LoVac
mode, water vapour is likely to accumulate in it, PVP lifetime
decreases and the water reservoir or gas cylinder empties
prematurely.
e) Waiting for a new user leaves the status of the Microscope Control
software non-operational and only the xT microscope Server software
is active. Therefore changing a user does not require Logging off /
Logging on at Windows 7™ level.

System Control: System States
C O N F I D E N T I A L – FEI Limited Rights Data 2-9
System Shutdown
In case of emergency bring the system to the Complete shutdown state by following the procedure:
1. Click on the System module / Sleep button to stop the
accelerating voltage for both beams. A Column module source
progress bar indicates the actual status and the button turns
grey when finished.
2. Click on the Vacuum module / Vent button to vent the
chamber.
3. Switch off the Emitter with the use of the 5 – Emitter Startup
alignment, Step 2 of 2. (f)
4. Click on the xT microscope Server software / Standby button.
This stops the UI, the xT microscope Server application
services and the console (the green power button on the
microscope front control panel changes to amber one).
5. Shutdown the Windows 7™ and switch Off the monitor. (g)
6. If there is a demand, disconnect the power cord and any other
input / output if used. (h)
Note
f) Switching off the console when Emitter is On is not optimal and
sparing way for the emitter – it may deteriorate the filament lifetime.
Supervisor should use the xT microscope Server Standby button only
in case of emergency.
g) The system can be left in this state if electrical power is supplied to
the instrument because the pumps are running and pumping the
column.
h)
The Complete shutdown procedure brings the system to the non-
powered state, where the vacuum in the column area is no longer
supported by running pumps. All valves are closed, and the electron
column and specimen chamber areas are vented. Normally it is used for
a system transportation or for service actions, like repair to essential
systems (electrical and air supplies).

System Control: Vacuum System
C O N F I D E N T I A L – FEI Limited Rights Data2-10
Vacuum System
Model difference
There are the High Vacuum and Low Vacuum variations of the
Scios system. This manual describes the Low Vacuum model, for
the High Vacuum one there are some controls missing and a
functionality is modified accordingly.
Within the system there are the following vacuum sections:
•Electron source
•Electron column
•Ion source
•Ion Column
•Specimen chamber
In operation the electron and ion sources and columns sections
are always under high vacuum. The specimen chamber is at the
pressure required for the given state (Pump / Vent) or mode
(HiVac / LoVac).
Note 
The ion beam can only be operated in HiVac. When a gaseous mode is chosen, the ion column CIV is closed. 
All valve and pump operations are fully automatic.
FIGURE 2-5 Scios HiVac / LoVac Vacuum system
ABV . . . . . . . Auxiliary Bypass Valve
AGV . . . . . . Auxiliary Gas Valve
BPV . . . . . . . By Pass Valve
BG . . . . . . . . Buffer Gauge
BV . . . . . . . . Buffer Valve
HVG . . . . . . High Vacuum Gauge
CIV . . . . . . . Column Isolation Valve
EG . . . . . . . . ESEM Gauge
EBV . . . . . . . Environmental Backing Valve
ChEV . . . . . . Chamber Evacuation Valve
ChIV . . . . . . .Chamber Isolation Valve
IGP . . . . . . . .Ion Getter Pump
NAV . . . . . . .Nitrogen Admittance Valve
NVC . . . . . . .Needle Valve Control
PVP . . . . . . .Pre Vacuum Pump
SIV . . . . . . . .Servo Isolation Valve
TMP . . . . . . .Turbo Molecular Pump
TVV . . . . . . .Turbo Venting Valve
VV . . . . . . . .Venting Valve
WBV . . . . . .Water Bottle Valve