Granville-Phillips Micro-Ion 354 E Series User manual

Instruction manual part number 354011E
Revision A - October 2013
Series 354
Instruction Manual
Granville-Phillips®Micro-Ion®E
Vacuum Gauge Module with
Analog or RS–232 Output

Series 354
Instruction Manual
This Instruction Manual is for use with all Granville-Phillips
Series 354 Micro-Ion Vacuum Gauge Modules with analog
output. A list of applicable catalog numbers is provided on
the following page.
Customer Service/Support
For customer service within USA, 8 AM to 5 PM
Mountain Time Zone, weekdays excluding holidays:
Granville-Phillips
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone]
Phone: [phone]
FAX: [phone]
Email: [email protected]
Brooks Automation, Inc.
15 Elizabeth Drive
Chelmsford, MA 01824 USA
Phone: [phone]
For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays within the USA:
Phone: [phone]
www.brooks.com
© 2013 Brooks Automation, Inc. All rights reserved. Granville-Phillips®and Micro-Ion®are
registered trademarks of Brooks Automation, Inc. All other trademarks and registered
trademarks are the properties of their respective owners.
Granville-Phillips®Micro-Ion®E
Vacuum Gauge Module with
Analog or RS–232 Output

Granville-Phillips®Series 354 Micro-Ion®Vacuum Gauge
Module with Analog Output or RS-232 Digital Interface
Catalog Numbers for Series 354 Micro-Ion Modules - CE Marked
Power supply and cable are not included.
Analog Output 354001E - Y D - T
RS-232 Interface 354010E - Y D - T
Filament: Yttria-Coated Iridium Y
Fitting: NW16KF D
Measurement Unit: Torr T

Micro-Ion E Module Instruction Manual 354011, Rev. A 5
Contents
Chapter 1 Safety & Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 About These Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 7
1.3 Reading and Following Instructions . . . . . . . . . . . . . . . . . . 8
1.4 Definitions of Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.5 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 Module Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Step 1 Locate the module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Step 2 Attach module to vacuum chamber . . . . . . . . . . . . . . . . . . 13
Step 3 Assemble and connect wiring . . . . . . . . . . . . . . . . . . . . . . . 13
Connecting Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Wiring for Analog Module . . . . . . . . . . . . . . . . . . . . . . . . . 14
Wiring for RS–232 Module . . . . . . . . . . . . . . . . . . . . . . . . . 15
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4 Eliminating Radio Frequency Interference . . . . . . . . . . . . . . 16
Chapter 3 Operation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.1 Analog versus RS–232 Operation Procedures . . . . . . . . . . . 17
3.2 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.3 RS–232 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.1 Output Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.2 Preparing to Operate the Module . . . . . . . . . . . . . . . . . . . . 19
4.3 Operational Tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.4 Turn the Micro-Ion E Gauge ON or OFF . . . . . . . . . . . . . . . 20
4.5 Micro-Ion E Gauge ON/OFF Status . . . . . . . . . . . . . . . . . . . 21
4.6 LED Status Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.7 Reading Vacuum Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . 22
N2or Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Correction Factor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.8 Overpressure Limit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Chapter 5 RS–232 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.1 Output Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.2 Preparing to Operate the Module . . . . . . . . . . . . . . . . . . . . 25
5.3 Operational Tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Contents
6Micro-Ion E Module Instruction Manual 354011, Rev. A
5.4 Error Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
5.5 RS–232 Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
5.6 RS–232 Command Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
UNL Unlock Interface Functions . . . . . . . . . . . . . . . . . . . . . . . . . 27
TLU Toggling Locked Functions . . . . . . . . . . . . . . . . . . . . . . . . . 28
SB Set Baud Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
FAC Reset Baud Rate to Factory Defaults . . . . . . . . . . . . . . . . . . 30
IG Turn Micro-Ion E Gauge ON or OFF . . . . . . . . . . . . . . . . . . 30
IGS Read Micro-Ion E Gauge ON/OFF Status . . . . . . . . . . . . . . 31
RD Read Vacuum Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
N2or Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Correction Factor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
SO Set Overpressure Limit . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
RST Reset Module to Programmed Values . . . . . . . . . . . . . . . . . 33
RS Read Module Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
VER Read Firmware Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Chapter 6 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
6.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 35
6.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Symptoms, Causes, and Solutions . . . . . . . . . . . . . . . . . . . . 36
RS–232 Error Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
6.3 Micro-Ion E Gauge Continuity Test . . . . . . . . . . . . . . . . . . . 39
6.4 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Appendix A Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

Micro-Ion E Module Instruction Manual 354011, Rev. A 7
Safety & Introduction Installation Operation Overview Analog Operation MaintenanceRS-232 Operation
Chapter 1 Safety & Introduction
1.1 About These Instructions These instructions explain how to install, operate, and maintain the
Granville-Phillips®Micro-Ion®E vacuum gauge module.
The module may have an analog output or an RS–232 output. Installation
and operating procedures depend on the output.
•This chapter explains caution and warning statements, which must be
adhered to at all times; explains your responsibility for reading and
following all instructions; defines the terms that are used throughout this
instruction manual; and explains how to contact customer service.
•Chapter 2 explains how to install the module.
•Chapter 3 is an operational overview of the module.
•Chapter 4 explains analog module operation.
•Chapter 5 explains RS–232 module operation.
•Chapter 6 explains troubleshooting; Micro-Ion E gauge testing, removal
and replacement; and module return procedures.
•Appendix A provides specifications for the module.
•Appendix B explains how the Micro-Ion E gauge measures pressure.
1.2 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Caution statements alert you to hazards or unsafe
practices that could result in inaccurate measurement,
minor personal injury or property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

Chapter 1
8Micro-Ion E Module Instruction Manual 354011, Rev. A
Caution and warning statements comply with American Institute of
Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.3 Reading and Following
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. Brooks
Automation / Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
•Read instructions – Read all instructions before installing or operating the
product.
•Follow instructions – Follow all installation, operating and maintenance
instructions.
•Retain instructions – Retain the instructions for future reference.
•Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
•Parts and accessories – Install only those replacement parts and
accessories that are recommended by Brooks Automation /
Granville-Phillips. Substitution of parts is hazardous.
1.4 Definitions of Terms The terms listed in Table 1-1 are used throughout this manual in reference
to the Micro-Ion E vacuum gauge module.
Table 1-1 Terms Describing the Micro-Ion E Module and Components
Term Description
Module The entire Micro-Ion E module, which includes the housing, gauge assembly,
electronics, and vacuum chamber fitting.
Gauge assembly A removable assembly that contains a hot filament Micro-Ion gauge
(Bayard-Alpert type ionization gauge).
Micro-Ion E gauge The Bayard-Alpert type ionization gauge, which indicates pressure by producing
a current that is proportional to gas density.

Safety & Introduction
Micro-Ion E Module Instruction Manual 354011, Rev. A 9
Before You Begin Installation Operation Overview Analog Operation MaintenanceRS-232 Operation
1.5 Service Guidelines Some minor problems are readily corrected on site. If the product requires
service, please contact our Customer Service Department at 303-652-4400
for troubleshooting help over the phone.
If the module must be returned to the factory for service, request a Return
Materials Authorization (RMA) from Brooks Automation /
Granville-Phillips. Do not return products without first obtaining an RMA.
In some cases a hazardous materials document may be required. The
Brooks Automation / Granville-Phillips Customer Service Representative
will advise you if the hazardous materials document is required.
When returning equipment to Brooks Automation / Granville-Phillips, be
sure to package the products to prevent shipping damage. Circuit boards
and modules separated from the controller chassis must be handled using
proper anti-static protection methods and must be packaged in anti-static
packaging. Brooks Automation / Granville-Phillips will supply return
packaging materials at no charge upon request. Shipping damage on
returned products as a result of inadequate packaging is the Buyer's
responsibility. Before you return the module, obtain an RMA number by
contacting Granville-Phillips customer service:
• Phone [phone] or 1-800-776-6543 within the USA.
• Phone [phone] hours per day, seven days per week
within the USA.
• Email [email protected]
• For Global Customer Support, go to www.brooks.com and click on
Services to locate the Brooks Automation office nearest you.

10 Micro-Ion E Module Instruction Manual 354011, Rev. A