Hamamatsu ENERGETIQ LDLS EQ-99X User manual

Model EQ-99X
LDLS®
Laser-Driven Light Source
Operation and Maintenance Manual
Revision 6
June 2023
DOC-6521

Copyright Information 
EQ-99X Operation & Maintenance Manual 2of45 

Copyright©2023EnergetiqTechnologyInc.Allrightsreserved.

ForalistofpatentsthatcoverEnergetiqproducts,visitwww.energetiq.com/patents.

All technical information, including drawings, schematics, and specifications contained in this manual are the property
of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of
this manual is subject to change without notice.

Energetiqlaser-drivenlightsource(LDLS®)productsaredesignedtobeRoHSandREACHcompliantandpossessaCE
marking. For a list of compliance documentation, including the Declaration of Conformity, visit www.energetiq.com/
compliance.

Energetiq Technology Inc.
205 Lowell St., Wilmington, MA 01887 USA
Tel: [phone]
Email: [email protected]om
Website: www.energetiq.com

Table of Contents 
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Contents
Contents.................................................................................................................................................................. 3
Chapter 1. Safety and Warranty Information ........................................................................................................... 5
1.1 Safety Warnings............................................................................................................................................ 5
1.2 General Precautions ..................................................................................................................................... 5
1.3 Laser Information ......................................................................................................................................... 6
1.4 Labels and Safety Notifications ..................................................................................................................... 7
1.5 Safety Interlocks ........................................................................................................................................... 9
1.5.1 External Interlock........................................................................................................................................... 9
1.6 Warranty ...................................................................................................................................................... 9
Chapter 2. System Description ............................................................................................................................... 10
2.1 System Overview........................................................................................................................................ 10
2.2 Description of System Components ............................................................................................................ 10
2.2.1 Power Supply Controller.............................................................................................................................. 11
2.2.2 Lamp Head................................................................................................................................................... 14
Chapter 3. System Specifications and Requirements .............................................................................................. 16
3.1 Optical Performance................................................................................................................................... 16
3.2 Physical Specifications ................................................................................................................................ 16
3.3 Remote Interface Specifications.................................................................................................................. 16
3.4 Utility Requirements................................................................................................................................... 17
3.5 Environmental Requirements ..................................................................................................................... 17
Chapter 4. Installation ........................................................................................................................................... 18
4.1 Unpacking the System ................................................................................................................................ 18
4.1.1 Required Contents....................................................................................................................................... 18
4.1.2 Optional Accessories ................................................................................................................................... 19
4.2 Attaching the Laser Fiber from the Controller to the Lamp Head................................................................. 19
4.2.1 Tools Required ............................................................................................................................................. 20
4.2.2 Procedure .................................................................................................................................................... 20
4.3 Installation Procedure................................................................................................................................. 23
4.4 Installing Alternative Power Supply or Remote Control............................................................................... 28
4.4.1 Installing Alternative Power Supply............................................................................................................. 28
4.4.2 Installing Alternative Remote Control ......................................................................................................... 28
4.6 Water Cooling Components for EQ-99 CAL .................................................................................................. 31
4.6.1 EQ-99 CAL Water Cooling Installation Procedure........................................................................................ 31

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Chapter 5. Operating the System ........................................................................................................................... 33
5.1 Starting the System..................................................................................................................................... 33
5.2 Stopping the System ................................................................................................................................... 35
Chapter 6. Maintenance ........................................................................................................................................ 36
6.1 Fiber Cleaning Process ................................................................................................................................ 36
6.1.1 Fiber Inspection Tools.................................................................................................................................. 37
6.1.2 Fiber Cleaning Tools..................................................................................................................................... 37
6.1.3 Fiber Inspection and Cleaning Procedure.................................................................................................... 38
6.2 Lamp Bulb Replacement ............................................................................................................................. 39
Chapter 7. Troubleshooting ................................................................................................................................... 40
7.1 Issues and Remedies................................................................................................................................... 41
Appendix A. Mechanical Layout Drawings ............................................................................................................. 43
Appendix B. Revision History................................................................................................................................. 45

Chapter 1. Safety and Warranty Information 
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Chapter 1. Safety and Warranty Information
1.1 Safety Warnings
WARNING 
This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure to the direct or
reflected output beam. Make certain that the appropriate output beam shields and optics are in
place prior to energizing the unit. All interlocks must be satisfied prior to operation; failure to do so
may lead to hazardous conditions.
CAUTION 
The EQ-99X system emits dangerous levels of UV radiation. Even short exposures to skin or eyes may
cause burns. Ensure that only authorized personnel are in the vicinity of source during operation.
Personnel in vicinity of operating source should wear protective eyewear, clothing, and gloves.
Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental
exposure.
WARNING 
The EQ-99X systempowersupplycontrollerutilizesaninternalClass4IRlasercapableofcausing
severe injury to eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding
any problems with the unit.


1.2 General Precautions
The output beam from the EQ-99X systemshouldbeblockedwhennotinusewithanelectronicshutterorother
appropriate beam blocking device. Due to the possibility of generating ozone when ambient oxygen is exposed to
short wavelength light, the beam should always be enclosed in an appropriate beam pipe, tube, or enclosed
space.Energetiq recommends purging any beam transport space with dry nitrogen gas.


The EQ-99X systempowersourcemustalsobecabledcorrectlyandconnectedtoasocketwithaprotectiveearth
ground prior to operation.

SeeChapter 4. Installationfordetailsofthefacilitiesconnections.


Chapter 1. Safety and Warranty Information 
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Other than the lamp bulb and output window, there are no user-serviceable parts inside the EQ-99X system. For any
problems encountered during operation, please contact Energetiq for assistance. If there is a component failure, do
not attempt to open the power supply controller or lamp head enclosure of the EQ-99X system.

The EQ-99X system utilizes a quartz lamp bulb containing a high-pressure gas fill. Explosion of the lamp bulb and
possible injury from flying fragments can occur if the bulb is mishandled.

Do not open the enclosure of either the lamp head enclosure or the power supply controller. Dangerous invisible
infrared laser beams and hazardous voltages exist inside the units. Opening the chassis both voids the warranty and
exposestheusertodangerousradiationandhazardousvoltages.

Caution:Useofcontrolsoradjustmentsorperformanceofproceduresotherthanthosespecifiedhereinmayresult
in hazardous radiation exposure.

1.3 Laser Information
TheEQ-99X systemusesapatented*laserdrivesystemtoexciteaplasmathatradiatesintheultravioletaswellasthe
visible bands. A class 4 laser is located in the power supply controller. Laser energy is delivered to the lamp head via a
laser fiber optic cable and connected with an SMA-type connector. Safety interlocks shut down the laser power if the
SMAconnectorisremovedfromthelamphead.Theopticalconfigurationofthelampheadensuresthatthedirect
laser beam cannot exit the unit. The EQ-99X systemlaserproductisdesignatedasClass1duringallnormaloperation.

The parameters of the non-accessible internal laser are given below in the table Embedded Laser Parameters.

Wavelength Emission
Type Laser Power for classification Beam Diameter Divergence Transverse Beam Mode
974 nm CW <8.7 mW via 12 mm measurement
aperture at a distance of 300 mm
29 mm at
aperture >100 mRad Diffuse

No regular service is required for the EQ-99X system. Any service to the system must be performed only by factory
authorizedandtrainedtechnicians.Alllampheadbulbreplacementsmustbeperformedatthefactory.Toavoid
injury,undernocircumstancesshouldtheuseropenormodifythelampheadorpowersupplycontroller.

The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiqifany
problems with the equipment are suspected.

*Visit www.energetiq.com/patentsforalistofEnergetiqproductpatents.
Embedded Laser ParametersTable 1.

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1.4 Labels and Safety Notifications
Thefollowingsafetylabelsappearontheproduct.ThefiguresEQ-99X Power Supply Controller Label Locationsand
EQ-99XLampHeadLabelLocationsshowthelocationofeachlabelontheEQ-99X system.

UV Hazard Warning Label–indicateshazardouslevelsofUVlightarepresent.
Heat Warning Label–indicateshazardouslevelsofheatarepresent.
Laser Label–indicatesthatalaserlightispresent.
Manufacturer’s Identification Label (Power Supply Controller) –givesthemanufacturer’sname
and address, and the model, serial number, and date of manufacture of the power supply
controller.
Manufacturer’s Identification Label (Lamp Head) –givesthemanufacturer’snameandaddress,
and the model, serial number, and date of manufacture of the lamp head.
Explanatory Label –statestheclassificationofthelaserproduct.Class1isthelowesthazard
level classification.
Certification Label–statesthattheequipmenthasbeentestedandverifiedtomeetthe
standards indicated.
Non-interlocked Housing Label –notifiesofapotentialhazardwhencoversareremoved.
Risk Group Warning Label–statestheclassificationofthesourceperIEC62471,
PhotobiologicalSafetyofLampsandLampSystems.

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EQ-99X Power Supply Controller Label LocationsFigure 1.

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1.5 Safety Interlocks
The EQ-99X systemisequippedwithinterlockstopreventoperationofthedevicewhenanyofthefollowing
conditions are present:
1.5.1 External Interlock
Externalinterlockpinsareprovidedforthecustomer’suse.Anysuitablenormallyopencontactorsolid-stateswitch
can operate the interlock circuit.

The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection open
duringoperationorstandby,thesourceisimmediatelydisabled,andalllightoutputfromtheapertureceases.
1.6 Warranty
ForinformationonyourEQ-99X system's warranty, contact your local distribution representative.
EQ-99XLampHeadLabelLocationsFigure 2.
1. Lamp bulb is not properly installed in the lamp head.
2. The laser fiber is not properly connected to the lamp head.
3. Anexternalinterlockisopen.

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Chapter 2. System Description
2.1 System Overview
The EQ-99X systemisabroadbandlampsystemforuseinawidevarietyofapplications.Thelampbulbproduceshigh
brightness, broadband light from DUV wavelengths through visible and beyond. The output is very stable, and the
system has a long lifetime before any service is required. A simple control interface ensures ease of use.

Some of the advantages of the EQ-99X systeminclude:


The EQ-99X systemconsistsofapowersupplycontroller,lamphead,andinterconnectingcables.ConnectiontoDC
power is required for operation. Connection to nitrogen purge gas is optional but strongly recommended for best
performance. For connection details, see Chapter 4. Installation.
2.2 Description of System Components
The EQ-99X systemconsistsofapowersupplycontroller,lamphead,laserfiberopticcable,andlampheadsignal
cable (not shown). Power and Input/Output (I/O) interface connections (also not shown) are provided by the user.

•
◦
Very high brightness across complete spectrum
170 nm through visible and beyond
•
◦
Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
Simplified optical system
•
◦
Excellent spatial stability
Repeatable measurements
•
◦
Superior short and long-term power stability
Repeatable measurements
•
◦
◦
Electrodeless operation for long life
Reduced consumable costs
Minimal recalibration of instrument

Chapter 2. System Description 
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
The following subsections provide descriptions of the system components and controls and give an overview of their
functions.

2.2.1 Power Supply Controller
Thepowersupplycontrollercontainsthefollowingcomponents:


EQ-99X SystemFigure 3.
•Status Indicator LEDs
•I/O Port
•Power Port
• LampHeadSignalPort
•Laser Fiber Optic Cable (permanently attached)
•IR Diode Laser (internal, not shown)
• LaserPowerSupply(internal,notshown)
• ThermoelectricLaserCooler(internal,notshown)

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A. Status Indicator LEDs
These five LEDs indicate the system status. The function of these indicators is shown below in the table Status
Indicator LED Functions.


LED Label Meaning (when lit)
POWER ON DCpowerisconnectedtothepowersupplycontroller
LAMP ON UVLightison
LASER ON Laser power is ON and laser light is being delivered to the lamp head
CONTROLLER FAULT
One of the following has occurred in the power supply controller:
EQ-99X Power Supply Controller ComponentsFigure 4.
Status Indicator LED FunctionsTable 2.
1. External interlock open
2. Controller internal temperature too high
3. Laser power not reaching setpoint
4. Laser temperature fault
5. Failure in laser delivery fiber

Chapter 2. System Description 
EQ-99X Operation & Maintenance Manual 13of45 
LED Label Meaning (when lit)
LAMP MODULE FAULT
One of the following has occurred in the lamp head:

B. Input/Output (I/O) Port
The I/O port is used to connect a remote control to the EQ-99X system. You can either use the EQ-99-RC Remote
Controlprovidedwiththesystem,oranotherremotecontrol.See4.4.2 Installing Alternative Remote Controlforpin
assignments and functions.

C. Power Port
This is a latching port for 12VDC power. Power can be provided using the included 12VDC power supply. Alternatively,
the EQ-99X systemcanbepowereddirectlyfromacustomer-provided12VDCpowersupply.See4.4.1 Installing
Alternative Power Supplyfordetailedinformation.
D.LampHeadSignalPort
This port is used to provide various power and control signals to/from the lamp head. No other connector or cable
may be used with the EQ-99X systemotherthantheonesupplied.
E. Laser Fiber Optic Cable
Thelaserlightisdeliveredfromthepowersupplycontrollertothelampheadviaafiberopticcablewitharmored
protection. The fiber is permanently attached to the power supply controller and connects to the lamp head via an
SMA-type connector.

It is critical that this armored fiber be treated with care and inspected for any abnormalities prior to operation. Avoid
sharp bends which can permanently damage the fiber. The minimum bend radius is 30 mm (1.18 in). Avoid crimping
orcompressingthefiber.SeeChapter 4. InstallationformoreinformationoninstallationandChapter 6.
Maintenanceformoreinformationonfiberend-facecleaning.

1. Control cable not connected properly
2. Lamp head internal temperature too high
3. Laser fiber not correctly connected
4. Lamp bulb not correctly installed
5. Ignition failure

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2.2.2 Lamp Head
Thelampheadcontainsthefollowingcomponents:



A. Lamp Output Window
The lamp window at the optical output provides protection from the high-pressure bulb inside the lamp head. The
lamp output window accommodates a light output of 0.47 NA. An internally-threaded SM1 adapter is provided for
easyconnectionofopticalhardware.SeeAppendix A. Mechanical Layout Drawingsformoreinformation.
B. Laser ON Indicator
ThisLEDisilluminatedwhenthelaserisON.
•Lamp Output Window
•Laser ON Indicator
•Nitrogen Purge Inlet
•Laser Input
•J4 Signal Port
•Lamp Bulb (internal, not shown)
•Igniter (internal, not shown)
• IRPumpingOptics(internal,notshown)
EQ-99XLampHeadComponentsFigure 5.

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C. Nitrogen Purge Inlet
This is the inlet fitting for nitrogen purge gas. Purge gas is optional but strongly recommended for best performance.
For optimal product performance, nitrogen gas purging of the EQ-99X systemisrequired.Ifnitrogenpurgegasisnot
used, shorter lifetime and faster output degradation (especially in the ultraviolet wavelength range) is expected.
Product use without nitrogen purge gas will result in the buildup of ozone (from atmospheric oxygen) and attenuate
the light output in the 220-280 nm band, as well as below 200 nm in the presence of atmospheric oxygen and water
vapor.

Thereisnoreturnfittingforthepurgenitrogen.Thepurgeflownormallyescapeswithinthelampheadenclosure,
and then to atmosphere.

D. Laser Input
This is the inlet for the laser fiber optic cable from the power supply controller. It contains a set of interlock pins that
disablethelaserwhentheSMAconnectorisnotproperlyinplace.
E. J4 Signal Port
This port is used to provide various power and control signals to/from the power supply controller. No other
connector or cable may be used with the EQ-99X systemotherthantheonesupplied.


Chapter 3. System Specifications and Requirements 
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Chapter 3. System Specifications and Requirements
3.1 Optical Performance
SeethefigureTypical Output Spectrumbelowforthetypicaloutputspectrum.


3.2 Physical Specifications
Dimensions (H x W x D)

Weight
3.3 Remote Interface Specifications
Digital Inputs

Typical Output SpectrumFigure 6.
•Lamp Head:82x86x76mm(3.2x3.4x3.0in)
•Power Supply Controller:113x111x299mm(4.4x4.4x11.8in)
•Lamp Head:0.7kg(1.5lbs)
•Power Supply Controller: 1.4 kg (3.0 lbs)
•Type:OptocouplerLED
•Logic: Active High
•Input Voltage: 5VDC
•Input Current: 8mA

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EQ-99X Operation & Maintenance Manual 17of45 
Digital Outputs

User Power
3.4 Utility Requirements
3.5 Environmental Requirements
Operating

Transport
•Type: Open collector to ground (digital common)
•Logic: Active Low
•Voltage: 30VDC max.
•Sink Current: 30mA max.
•Voltage: 5VDC, referenced to digital common
•Current: 50mA maximum
•Electrical: 12VDC at 11.7A minimum (140W rating). Power consumption is approximately 100W during normal
operation.
•
◦
◦
◦
◦
◦
Purge Gas: Optional (strongly recommended). Clean dry nitrogen, filtered to 5 um 20 psig (0.14 MPa) supply
pressure.
Withnopurge,ozonewillformfromatmosphericoxygenandattenuatethelightoutputinthe220–280
nm band. This will reduce the lamp bulb's overall lifetime. In addition, atmospheric oxygen and water
vapor will attenuate the output below 200 nm.
Clean and dry nitrogen from either a dewar or research-grade N2 bottle is recommended. Do not use
any other purge gas.
Grade 4.8 or better gas purity is recommended to maintain cleanliness of the optics.
With a 20 psig inlet pressure, the EQ-99X system will consume approximately 1 slm of flow.
There is no return fitting for the purge nitrogen. The purge flow normally escapes within the lamp head
enclosure, and then to the atmosphere.
•Ambient Temperature:15–35°C
•Relative Humidity: Non-condensing, 80% max. for temperatures up to 31 °C, decreasing linearly to 50% max. at
40 °C.
•Pollution Degree: Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary
condensation possible).
•Installation Category: Installation Category II.
•Indoor/Outdoor Use: Indoor use only.
•Temperature:-5–95°C
•Relative Humidity: non-condensing, 95% max.

Chapter 4. Installation 
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
Chapter 4. Installation
4.1 Unpacking the System
Upon arrival, inspect all parts of the EQ-99X systemforcompletenessanddamageincurredinshipping.Usecarewhen
unpacking to avoid damaging the laser fiber optic cable.
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Ifanypartismissingorappearsdamaged,contactEnergetiq immediately. Do not attempt to substitute any parts.
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At a minimum, the EQ-99X systemshippingboxcontainsthefollowingrequireditems:
4.1.1 Required Contents

Qty Item Description Picture
1 Power Supply Controller
1 Lamp Head
RequiredContentsofShippingBoxTable 3.

Chapter 4. Installation 
EQ-99X Operation & Maintenance Manual 19of45 
Qty Item Description Picture
1
Black interconnecting cable from
lampheadtopowersupplycontroller
(9pinminiD-sub)
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4.1.2 Optional Accessories
TheEQ-99X systemshippingboxmayalsocontainthefollowingoptionalaccessoriesavailablefromEnergetiq:

Qty Item Description Picture
1EQ-99-RC Remote Control with interlock jumper
plug and 15-pin D-connector I/O cable
1 12 VDC Power Supply (universal input voltage)
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4.2 Attaching the Laser Fiber from the Controller to the Lamp Head
The EQ-99X systemistypicallydeliveredwiththelaserfiberopticcableconnectedtothelamphead.Thisisdoneto
minimize the possibility of debris or particles contaminating the end of the laser fiber. If the power supply controller
ofyourEQ-99X systemisshippedseparatelyfromthelamphead,followtheprocedurebelowtoattachthelaserfiber
opticcablefromthepowersupplycontrollertothelamphead.
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OptionalAccessoriesinShippingBoxTable 4.

Chapter 4. Installation 
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4.2.1 Tools Required
Description Quantity
Nitrile Safety Gloves 1 pair
CompleteEQ-99X system(PowerSupplyControllerandLampHead) 1
Fiber Inspection Microscope 1
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4.2.2 Procedure
Toattachthelaserfiberopticcablefromthepowersupplycontrollertothelamphead:
Note: The lamp head pictured in this procedure may appear slightly different than the lamp head included with
yourEQ-99X system.
Required ToolsTable 5.
1. Put on nitrile safety gloves.
Putting On Nitrile GlovesFigure 7.
2. On the laser fiber optic cable attached to the controller, remove the protective cap.