Hamamatsu ENERGETIQ LDLS EQ-400 User manual

Model EQ-400
Laser-Driven Light SourceLDLS®
Operation Manual
Revision 9, May 2022
Part Number DOC-7388

©2021 Energetiq Technology, Inc. All rights reserved.
Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138,
8969841, 9048000, 9185786; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045. All technical information, including drawings, schematics and specifications
contained in this document are the property of Energetiq and shall not be reproduced in
whole or in part without the written consent of Energetiq. The content of this document is
subject to change without notice.
Energetiq Technology, Inc.
205 Lowell St.
Wilmington, MA 01887
Phone: [phone]
Fax: [phone]
Email:[e-mail]
www.energetiq.com

Table of Contents
1. Introduction.............................................................................................................................................................................. 1
2. Safety instructions ................................................................................................................................................................... 1
2.1. General Precautions...................................................................................................................................................... 1
2.2. Definition of equipment and document symbols and designations................................................................................ 2
2.3. Laser Information........................................................................................................................................................... 3
2.4. Labels and Safety Notification ....................................................................................................................................... 4
2.5. Safety Interlocks ............................................................................................................................................................ 6
2.6. Correct disposal of the unit............................................................................................................................................ 6
3. Preparation of System............................................................................................................................................................. 6
3.1. Unpacking guide............................................................................................................................................................ 6
3.2. System Description........................................................................................................................................................ 6
3.3. Physical Specifications .................................................................................................................................................. 9
3.4. Utility requirements........................................................................................................................................................ 9
3.5. Remote Interface ......................................................................................................................................................... 10
3.6. External interlock connection....................................................................................................................................... 10
4. EQ-400 Setup........................................................................................................................................................................ 10
4.1. Connections................................................................................................................................................................. 10
4.2. Chiller Information ....................................................................................................................................................... 11
5. EQ-400 Operation ................................................................................................................................................................. 12
5.1. Startup ......................................................................................................................................................................... 12
5.2. Stopping ...................................................................................................................................................................... 12
5.3. Manual Reset .............................................................................................................................................................. 12
6. Service Requirements ........................................................................................................................................................... 12
7. Troubleshooting Guide .......................................................................................................................................................... 13
8. Accessories........................................................................................................................................................................... 14
9. Warranty................................................................................................................................................................................ 14
10. Appendix .......................................................................................................................................................................... 14
10.1. Dimensional Drawings................................................................................................................................................. 14
10.1.1 Controller Dimensional Drawings....................................................................................................................... 14
10.1.2 Lamp Dimensional Drawings ............................................................................................................................. 15
10.2. Environmental Requirements ...................................................................................................................................... 16
10.3. I/O Connector Pin Assignment .................................................................................................................................... 16
10.4. RS-485 Interface Pin Assignment ............................................................................................................................... 17
10.5. Remote Interface Schematic ....................................................................................................................................... 17
10.6. Serial Interface Commands ......................................................................................................................................... 18
10.7. System Status Word.................................................................................................................................................... 20

1
1. Introduction
The EQ-400 Laser-Driven Light Source (LDLS®) is a broad-band lamp system for use in a wide variety of
applications. The lamp produces high brightness, broad-band light from deep ultraviolet (UV) wavelengths
through visible and beyond. The output is very stable and has a long lifetime before any service is required.
A simple control interface ensures ease of use.
Some of the advantages of the EQ-400 include:
▪Very high brightness across complete spectrum
▪190nm through visible and beyond
▪Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
▪Simplified optical system
▪Excellent spatial stability
▪Repeatable measurements
▪Superior short and long term power stability
▪Repeatable measurements
▪Electrodeless operation for long life
▪Reduced consumable costs
▪Minimal recalibration of instrument
The EQ-400 system consists of a Controller, Lamp unit, and interconnecting cable. Connection to AC
power is required for operation. Connections to nitrogen purge gas and cooling water are required. See
Section 4 for connection details.
For additional information contact Energetiq Technology Technical Support Services at [phone]
X111 or e-mail: [e-mail]
2. Safety instructions
2.1. General Precautions
The output beam from the EQ-400 should be blocked when not in use with an electronic shutter or other
appropriate beam blocking device. Due to the possibility of generating ozone with some models of EQ-400
when ambient oxygen is exposed to short wavelength light, the beam should always be enclosed in an
appropriate beam pipe, tube, or enclosed space. Any beam transport space must be purged with dry
nitrogen gas.
The EQ-400 source must be cabled correctly and connected to a power source with a protective earth
ground prior to operation.
Refer to the Installation section of this manual in Section 4 for details of the facilities connections.
WARNING: This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure
to the direct or reflected output beam. Make certain that the appropriate output beam shields and
optics are in place prior to energizing the unit. All interlocks must be satisfied prior to operation;
failure to do so may lead to hazardous conditions.

2
CAUTION: The EQ-400 emits dangerous levels of UV radiation. Even short exposures to skin
or eyes may cause burns. Ensure that only authorized personnel are in the vicinity of source
during operation. Personnel in vicinity of operating source should wear protective eyewear,
clothing, and gloves. Lighted UV warning lights and signs posted on doors to lab areas may help
prevent accidental exposure.
WARNING: The EQ-400 utilizes an internal Class 4 IR laser capable of causing severe injury to
eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems
with the unit.
2.2. Definition of equipment and document symbols and designations
Do not operate the EQ-400 if the covers are removed or is defective in any way. Contact Energetiq if any
problems with the equipment are suspected.
The EQ-400 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.
Do not open the enclosure of either the Lamp or the Controller. Dangerous invisible infrared laser
beams and hazardous voltages exist inside the Lamp. Opening the chassis both voids the warranty and
exposes the user to dangerous radiation and hazardous voltages.
This AC cord supplied is for EQ-400 only. This AC cord cannot be used with other electrical
equipment.
CAUTION: controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation
Class 4 laser product
The EQ-400 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before
operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at
all times while operating the system.
The EQ-400 also produces high-intensity UV radiation. Eyewear should protect not only from laser radiation
at 1070 nm, but also from UV radiation in the band from 190 to 400 nm.
For further safety information, refer to ANSI Z136.1 Standard for Safe Use of Lasers, available from Laser
Institute of America (www.laserinstitute.org).

3
2.3. Laser Information
The EQ-400 uses a patented* laser drive system to excite a plasma that radiates in the ultraviolet as well as
the visible bands. A Class 4 laser is located in the Controller enclosure. The optical configuration of the
Lamp ensures that the direct laser beam cannot exit the unit. The EQ-400 laser product is designated as
Class 4 during all normal operation.
Nominal Ocular Hazard Distance (NOHD) based on 400W 1070nm pump laser under a failure mode
condition where aperture is itself accessible: 4 meters
Required Optical Density (OD) for safety eyewear: 6 or higher at 1070 nm. These values are based on a
theoretical failure condition.
The parameters of the non-accessible internal laser are given below in Table 1.
Parameter
Value
Wavelength
1070 nm
Emission Type
CW
Laser Power for classification
400W
Beam Diameter
5 mm
Divergence
0.3 mRad
Transverse Beam Mode
Single Mode
Table 1: Embedded Laser Parameters
* US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045; others pending

4
2.4. Labels and Safety Notification
The following safety labels appear on the product. Table 1shows the location of
each label on the EQ-400 system and Table 1 describes their meanings.
Figure 1: EQ-400 Safety labels location

5
Labels and Safety Notifications
#
Label Picture
Description
1
Manufacturer’s identification label – gives the manufacturer’s name and
address, and the model, serial number, and date of manufacture of the
equipment.
2
Hazard warning label –indicates that a laser hazard is present
3
Aperture label - indicates the outlet aperture for laser radiation
4
UV Hazard warning label –indicates hazardous levels of UV light are present
5
Protective housing label –warns of an enclosed laser radiation hazard
6
Explanatory label –states the classification of the laser product
7
Certification label - states that the equipment has been tested and verified to
meet the standards indicated.
8
Protective housing label –warns of an enclosed laser radiation hazard
located inside chassis on laser module
Table 1: Safety Label Meanings

6
2.5. Safety Interlocks
The EQ-400 is equipped with interlocks to prevent operation of the device when any of the following
conditions are present:
▪A remote interlock is open
▪Lamp cover not installed
▪Laser fiber not connected to Lamp
▪Controller cover not in place
2.6. Correct disposal of the unit
When the EQ-400 has finally been removed from service, observe all local environmental regulations for
proper disposal.
3. Preparation of System
3.1. Unpacking guide
Start by inspecting the shipping container for any external damage. Before use inspect all parts of the
system for completeness and any damage incurred in shipping. Carefully unpack the EQ-400. The
shipping box should contain:
▪EQ-400 Power Supply Controller unit
▪EQ-400 Lamp unit
▪Accessory Box
▪Interconnecting cable from Lamp to Power Supply Controller (9-pin D-sub).
▪AC Power cable
▪AC Power plug (differs by country)
▪Chiller tubing Kit
If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any
parts. There are no user-serviceable parts inside the EQ-400 Lamp or Power Supply Controller unit.
3.2. System Description
The EQ-400 system consists of a Controller, lamp, lamp cable, and power input cable. Laser light is
generated in the Controller and transmitted to the Lamp by an optical fiber permanently attached to the
Controller.
The following sections provide descriptions of the system components and controls and give an overview
of their functions. Refer to Section 4 for more detailed information.

7
Figure 2: EQ-400 Controller Front
EQ-400 Controller –Front
#
Component
Description
1
Key switch
Enables or disables operation of the lamp. The keyswitch must be in the ENABLE position
for the lamp to operate. The key can only be removed in the DISABLE position.
2
Operation switch
Turns the lamp on or off.
3
Status indicator
See Table 2 for a list of descriptions
Located on the EQ-400 Controller front panel are LED system status indicators. The function of these
indicators are described below in
Table .
LED Label
Meaning (when lit)
POWER OK
AC power is connected to the EQ-400 PCU
LAMP ON
UV Light is on
LASER ON
Laser power is ON and laser light is being produced within the Lamp
REMOTE
System is in remote control mode
LASER OVERTEMP
Laser internal temperature too high
LASER FAULT
Laser module internal fault
PCU FAULT
One of the following has occurred in the Controller:
LAMPHOUSE OVERTEMP
Lamphouse internal temperature too high
LAMPHOUSE INTERLOCK
One of the following has occurred in the Lamp module:
EXTERNAL INTERLOCK
External interlock open
COVER INTERLOCK
PCU cover(s) not in place
Table 2: Status Indicator LED Functions

8
Figure 3: EQ-400 Controller Back
EQ-400 Controller –Back
Component
Description
1
Water inlet/outlet fittings
Connections for cooling water for the internal laser module.
2
Lamp Control Connector
(9-pin D-sub)
Provides various power and control signals to/from the Lamp module. No other connector
or cable may be used with the EQ-400 other than the one supplied.
3
I/O Interface Connector
Provides access to control and status signals. Control signals are only active when the
system is in remote control mode. See Section 10.3 for pin assignments and functions.
This connector also functions as the remote interlock connector.
4
RS-485 Connector (9-pin
D-sub)
Connector for optional RS-485 interface. See Sections 3 and 4 for electrical details and
commands.
5
Power Input Connector
This is a fused IEC 320 inlet connector for AC power input. Fuses are 5 x 20mm, 10A, 250V,
time delay type.
6
Laser fiber
Transmits laser energy from the Controller to the Lamp
Figure 4: EQ-400 Lamp Side view
EQ-400 Lamp –Side view
Description
1
Output window
The lamp window at the optical output provide protection from the high pressure bulb inside
the Lamp. An internally-threaded SM30 adapter is provided for easy connection of optical
hardware. A retroreflector is installed on the output window on one side of the Lamp. In

9
addition to the light output, invisible laser radiation exceeding Class 1 emission limits is
emitted from the output aperture.
2
Laser collimator
Device that narrows the beam of light
Figure 5: EQ-400 Lamp back view
EQ-400 Lamp –Back view
#
Component
Description
1
Nitrogen Purge
Inlet/Outlet
These are the fittings for the required nitrogen purge gas. With no purge, ozone will form
from atmospheric oxygen and attenuate the light output in the 220 –280nm band. In addition,
atmospheric oxygen and water vapor will attenuate the output below 200nm
2
Cooling Water Inlet /
Outlet
These fittings are for connection of cooling water required by the Lamp.
3
Control Connector (9-pin
D-sub)
Provides various power and control signals to/from the Power Supply Controller. No other
connector or cable may be used with the EQ-400 other than the one supplied.
4
Laser On Indicator
This LED is illuminated when the laser is ON.
3.3. Physical Specifications
Dimensions (H x W x D)
▪Lamp: 136 x 145 x 56 mm (5.4 x 5.7 x 2.2 in)
▪Controller: 133 x 483 x 584 mm (5.2 x 19.0 x 23.0 in)
Weight
▪Lamp: 2.7 kg (6.0 lb)
▪Controller: 18.8 kg (41.5 lb)
3.4. Utility requirements
Electrical: 200 –240 V~, 50/60 Hz, 7A, 1700 W max.
Purge gas: clean dry nitrogen, filtered to 5um, 20 psig (0.14 MPa) supply pressure, maximum flow rate
0.7 liters/minute
▪Fittings: 4mm push-to-connect
Cooling water for EQ-400 system (controller and lamp): flow rate:
▪3 –4 liters/minute, temperature 18 –24 °C
▪Controller Fittings: 8mm push-to-connect
▪Lamp Fittings: 8mm Swagelok

10
3.5. Remote Interface
Digital Inputs
▪Type: Optocoupler LED
▪Logic: Active High
▪Input voltage: 5VDC
▪Input current: 8mA
Digital Outputs
▪Type: Open collector to ground (digital common)
▪Logic: Active Low
▪Voltage: 30VDC max.
▪Sink current: 8mA max.
User Power
▪Voltage: 5VDC, referenced to digital common
▪Current: 200mA maximum
3.6. External interlock connection
External interlock pins are provided for the customer’s use (see Section 4 for connection details). Any
suitable normally-open contact or solid-state switch can operate the interlock circuit. The contact or switch
should be rated for 8mA minimum at 5VDC.
The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection
open during operation or standby, the source is immediately disabled, and all light output from the aperture
ceases.
4. EQ-400 Setup
4.1. Connections
1. Place the Controller in a standard 19-inch rack or on a stable surface. The Controller must be
placed within 3 meters of the Lamp due to the length of the interconnecting cable. See Section 10.1
for dimensional details
Note: The Controller weighs 18.8 kg (41.5 lb). A two-person lift is recommended. Use care when
moving the Controller not to bend the fiber optic cable sharply. Minimum bend radius is 50mm.
2. Connect the Lamp unit optical output to the user equipment. It is recommended the lamp be
connected to a beam pipe. For any other use configuration shielding is strongly recommended.
The beam should always be enclosed in an appropriate beam pipe, tube, or enclosed space and
purged with nitrogen. Operating the source without any output target or beam transport is not
recommended and may lead to unsafe operating conditions. Consult Energetiq for applications
information and suggested configurations.
The Lamp should be mounted in the orientation shown in Error! Reference source not found.,
with the output window on the side and the lamp mounting surface oriented horizontally.
Mounting the lamp in a different orientation will cause the plasma position inside the bulb to shift
slightly and may cause performance variations.
Setup the Lamp unit with appropriate ultraviolet, laser light, and ozone safety measures in place.
It is recommended that any enclosure or aperture-blocking hardware utilize switches wired to the
EQ-400 remote interlock circuit.
See drawing Section 10.1 for dimensional drawings.

11
Connect the laser fiber to the Lamp as follows:
WARNING: The collimator must never be detached from its mounting bracket. Doing so could
allow dangerous invisible laser radiation to be emitted
a. Remove plastic cap from the end of the laser collimator
Note: always keep this cap in place when the laser fiber is not
connected to the Lamp.
b. Inspect collimator lens for dust or contamination
c. Carefully insert the collimator and bracket into the socket in the Lamp
d. Secure the bracket to the Lamp using the four socket head screws and a 3mm hex driver.
Torque the screws to 20 in-lbs.
3. Connect the 9-pin D-sub interconnect cable from the Controller to the Lamp.
4. Connect nitrogen purge gas to the 4mm push-to-connect fittings on the Lamp.
5. Connect cooling water to the 8mm Swagelok fittings on the Lamp.
6. Connect cooling water to the 8mm push-to-connect fittings on the rear of the Controller.
7. Connect an interlock switch to the interlock pins of the remote I/O connector (functions as remote
interlock connector).
If using remote control mode, connect user’s control system to the remote I/O connector using a
suitable cable.Error! Reference source not found. 10 gives the pin assignments and functions for
the remote interface. Mating connector is a standard high-density 15-pin d-sub male (for example,
Amp part no. 748364-1 with contacts 1658670-2).
User I/O can be powered either by the EQ-400 internal isolated power supply, or an external supply.
Section 10.3 shows connection schematics for both configurations.
8. If using the optional RS-485 interface, connect the host computer to the RS-485 connector on the
rear of the Controller. Mating connector is a standard 9-pin female d-sub (for example, AMP part
no. 205203-3 with contacts 1-66504-0). See Section 10.4 for pin connections.
9. Connect an AC input power source to the standard IEC 320 style inlet on the rear of the
Controller.
The system is now ready to operate.
4.2. Chiller Information
The system must be connected to a cooling system see Section 8 for recommended chiller.

12
5. EQ-400 Operation
5.1. Startup
Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp system are
aware of the potential hazards involved. It is theresponsibility of the user to verify that the lamp is being used
safely and to consult their laser safety officer for safety measures specific to their use of the source. All safety
measures appropriate for a Class 4 laser product should be taken, including protective eyewear as described
in Section 1.
1. Verify that all interlocks are in place and none of the red fault LEDs on the Controller front panel
are lit. The green POWER OK LED should be lit.
2. Place the keyswitch in the ENABLE position.
3. Turn on the OPERATE Switch (place switch in UP position).
Note: If the lamp has been on within the last 5 minutes, the POWER OK LED will be flashing and
re-start will not be possible. This is to allow the Lamp to cool down before the next ignition cycle
4. Within several seconds the LASER ON LED will light. Laser light is now present in the Lamp.
5. Within several seconds the igniter will be turned on automatically and the plasma will ignite. The
LAMP ON LED will light. To avoid thermal shock to the Lamp components, the EQ-400 starts with
the laser at half power. After 20 seconds the laser will switch to full power.
5.2. Stopping
The following steps explain the proper procedures stopping
To turn the lamp off, simply turn the OPERATE Switch to the OFF position. It is recommended to turn the
keyswitch to the DISABLE position. The key can be removed if needed for safety or personnel access
reasons. If the lamp will not be used for some time, the AC supply can be turned off.
To minimize wear on the ignition components, it is best to avoid frequently starting and stopping the lamp. It
is recommended to run the lamp continuously if long off-periods are not required.
5.3. Manual Reset
If any fault occurs during operation of the lamp (including actuation of the remote interlock), the laser is
immediately shut off, and light output ceases. When the fault condition is cleared, the lamp will not
automatically restart. The system must be manually reset by turning the OPERATE switch to the OFF
position. Then, assuming that the fault or interlock condition no longer exists, the lamp can be restarted by
turning the switch to the OPERATE position.
If a fault occurs while the lamp is not operating (switch in the OFF position), the switch must be turned to
OPERATE and then back to OFF to clear the fault. The lamp can then be started normally by turning the
switch to OPERATE.
6. Service Requirements
There are no user-serviceable parts inside the EQ-400. For any problems encountered during operation,
please contact Energetiq Technology for assistance.

13
If there is a component failure, do not attempt to open the Controller or Lamp enclosure of the EQ-
400.
Any service to the system must be performed only by factory authorized and trained technicians. To avoid
injury, under no circumstances should the user open or modify the Lamp or Controller enclosure.
7. Troubleshooting Guide
If any errors are detected, a front panel indicator LED will be lit, indicating the source of the fault. The below
table describes the fault conditions and possible remedies.
Indicator
Fault condition
Possible remedies
LASER
OVERTEMP
Laser internal temperature too
high
1. Check for sufficient Controller cooling water flow
2. Ensure that cooling water temperature is between 18
and 24 degC
LASER FAULT
Laser module internal fault
1. Cycle power to the PCU
2. Contact Energetiq if condition persists
PCU FAULT
Controller internal temperature
too high
1. Confirm that cooling fan is operating
2. Ensure that fan opening and front panel vents are not
obstructed
PCU FAULT
Laser power not reaching setpoint
1. Contact Energetiq
PCU FAULT
Internal power supply voltage low
1. Contact Energetiq
PCU FAULT
Lamp failed to ignite
1. If lamp was previously running, allow to cool for 5
minutes then try again
2. Contact Energetiq if condition persists
LAMPHOUSE
OVERTEMP
Lamphouse internal temperature
too high
1. Check for sufficient lamphouse cooling water flow
2. Ensure that cooling water temperature is between 18
and 24 degC
LAMPHOUSE
INTERLOCK
Control Cable not connected
properly
1. Ensure that the cable is plugged in and retaining
screws tightened at both ends (Lamp and Controller)
LAMPHOUSE
INTERLOCK
Laser fiber not connected
properly
1. Ensure that the collimator bracket is seated in the
lamphouse, and the screws are properly tightened
LAMPHOUSE
INTERLOCK
Lamphouse cover loose or
missing
1. Tighten or replace cover
2. NEVER attempt to operate the unit with the lamphouse
cover removed
EXTERNAL
INTERLOCK
External interlock open
1. Ensure that pins 5 and 13 of the remote I/O connector
are jumpered, or that pin 13 receives +5VDC from an
external supply
2. Check any external interlock switches that may be
connected
COVER
INTERLOCK
Controller cover(s) not in place
1. Ensure that covers are in place and screws properly
tightened
2. NEVER attempt to operate the unit with the Controller
covers removed
Additionally, if the bulb fails to ignite within 6 seconds after the OPERATE switch was activated, the
LASER ON LED will go out, the PCU FAULT LED will be lit, and LAMP ON LED will remain off. If this
occurs, turn the OPERATE switch to the OFF position (down) and begin at Step 1 of start up again. If this
occurs multiple times, contact Energetiq service.

14
8. Accessories
The EQ-400 requires a chiller to maintain the cooling requirements in Section 3.4. For your convenience
Energetiq offers a suitable chiller produced by SMC Corporation. You may also choose to procure a
chiller directly through your local SMC Corporation representative (SMC PN HRS018-A-10-T).
PN
Description
EQ-400-CHILLER-KIT
EQ-400 Chiller / with Tubing Kit
Note: Cooling fluid is not included and must be locally sourced.
9. Warranty
Energetiq Technology, Inc’s warranty for the product is set forth in Section 5 of Energetiq Technology
Inc’s standard terms and conditions, found at www.energetiq.com.
10. Appendix
10.1.Dimensional Drawings
10.1.1 Controller Dimensional Drawings
EQ-400 Controller front (in. [mm])
EQ-400 Controller back (in. [mm])

15
EQ-400 Controller top (in. [mm])
10.1.2 Lamp Dimensional Drawings
EQ-400 Side view (in. [mm])

16
EQ-400 back view (in. [mm]) EQ-400 top view (in. [mm])
10.2.Environmental Requirements
Operating
•Ambient temperature: 15–35°C
•Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C, decreasing linearly
to 50% max. at 35°C.
•Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary
condensation possible)
•Installation Category II
•Indoor use only
Transport
•Temperature: -5–70°C
•Relative Humidity: non-condensing, 95% max.
10.3.I/O Connector Pin Assignment