Hamamatsu ENERGETIQ LDLS EQ-400 User manual

Model EQ-400
Laser-Driven Light SourceLDLS®
Operation Manual
Revision 9, May 2022
Part Number DOC-7388

©2021 Energetiq Technology, Inc. All rights reserved.
Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138,
8969841, 9048000, 9185786; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045. All technical information, including drawings, schematics and specifications
contained in this document are the property of Energetiq and shall not be reproduced in
whole or in part without the written consent of Energetiq. The content of this document is
subject to change without notice.
Energetiq Technology, Inc.
205 Lowell St.
Wilmington, MA 01887
Phone: [phone]
Fax: [phone]
Email:[e-mail]
www.energetiq.com

Table of Contents
1. Introduction.............................................................................................................................................................................. 1
2. Safety instructions ................................................................................................................................................................... 1
2.1. General Precautions...................................................................................................................................................... 1
2.2. Definition of equipment and document symbols and designations................................................................................ 2
2.3. Laser Information........................................................................................................................................................... 3
2.4. Labels and Safety Notification ....................................................................................................................................... 4
2.5. Safety Interlocks ............................................................................................................................................................ 6
2.6. Correct disposal of the unit............................................................................................................................................ 6
3. Preparation of System............................................................................................................................................................. 6
3.1. Unpacking guide............................................................................................................................................................ 6
3.2. System Description........................................................................................................................................................ 6
3.3. Physical Specifications .................................................................................................................................................. 9
3.4. Utility requirements........................................................................................................................................................ 9
3.5. Remote Interface ......................................................................................................................................................... 10
3.6. External interlock connection....................................................................................................................................... 10
4. EQ-400 Setup........................................................................................................................................................................ 10
4.1. Connections................................................................................................................................................................. 10
4.2. Chiller Information ....................................................................................................................................................... 11
5. EQ-400 Operation ................................................................................................................................................................. 12
5.1. Startup ......................................................................................................................................................................... 12
5.2. Stopping ...................................................................................................................................................................... 12
5.3. Manual Reset .............................................................................................................................................................. 12
6. Service Requirements ........................................................................................................................................................... 12
7. Troubleshooting Guide .......................................................................................................................................................... 13
8. Accessories........................................................................................................................................................................... 14
9. Warranty................................................................................................................................................................................ 14
10. Appendix .......................................................................................................................................................................... 14
10.1. Dimensional Drawings................................................................................................................................................. 14
10.1.1 Controller Dimensional Drawings....................................................................................................................... 14
10.1.2 Lamp Dimensional Drawings ............................................................................................................................. 15
10.2. Environmental Requirements ...................................................................................................................................... 16
10.3. I/O Connector Pin Assignment .................................................................................................................................... 16
10.4. RS-485 Interface Pin Assignment ............................................................................................................................... 17
10.5. Remote Interface Schematic ....................................................................................................................................... 17
10.6. Serial Interface Commands ......................................................................................................................................... 18
10.7. System Status Word.................................................................................................................................................... 20

1
1. Introduction
The EQ-400 Laser-Driven Light Source (LDLS®) is a broad-band lamp system for use in a wide variety of
applications. The lamp produces high brightness, broad-band light from deep ultraviolet (UV) wavelengths
through visible and beyond. The output is very stable and has a long lifetime before any service is required.
A simple control interface ensures ease of use.
Some of the advantages of the EQ-400 include:
▪Very high brightness across complete spectrum
▪190nm through visible and beyond
▪Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
▪Simplified optical system
▪Excellent spatial stability
▪Repeatable measurements
▪Superior short and long term power stability
▪Repeatable measurements
▪Electrodeless operation for long life
▪Reduced consumable costs
▪Minimal recalibration of instrument
The EQ-400 system consists of a Controller, Lamp unit, and interconnecting cable. Connection to AC
power is required for operation. Connections to nitrogen purge gas and cooling water are required. See
Section 4 for connection details.
For additional information contact Energetiq Technology Technical Support Services at [phone]
X111 or e-mail: [e-mail]
2. Safety instructions
2.1. General Precautions
The output beam from the EQ-400 should be blocked when not in use with an electronic shutter or other
appropriate beam blocking device. Due to the possibility of generating ozone with some models of EQ-400
when ambient oxygen is exposed to short wavelength light, the beam should always be enclosed in an
appropriate beam pipe, tube, or enclosed space. Any beam transport space must be purged with dry
nitrogen gas.
The EQ-400 source must be cabled correctly and connected to a power source with a protective earth
ground prior to operation.
Refer to the Installation section of this manual in Section 4 for details of the facilities connections.
WARNING: This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure
to the direct or reflected output beam. Make certain that the appropriate output beam shields and
optics are in place prior to energizing the unit. All interlocks must be satisfied prior to operation;
failure to do so may lead to hazardous conditions.

2
CAUTION: The EQ-400 emits dangerous levels of UV radiation. Even short exposures to skin
or eyes may cause burns. Ensure that only authorized personnel are in the vicinity of source
during operation. Personnel in vicinity of operating source should wear protective eyewear,
clothing, and gloves. Lighted UV warning lights and signs posted on doors to lab areas may help
prevent accidental exposure.
WARNING: The EQ-400 utilizes an internal Class 4 IR laser capable of causing severe injury to
eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems
with the unit.
2.2. Definition of equipment and document symbols and designations
Do not operate the EQ-400 if the covers are removed or is defective in any way. Contact Energetiq if any
problems with the equipment are suspected.
The EQ-400 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.
Do not open the enclosure of either the Lamp or the Controller. Dangerous invisible infrared laser
beams and hazardous voltages exist inside the Lamp. Opening the chassis both voids the warranty and
exposes the user to dangerous radiation and hazardous voltages.
This AC cord supplied is for EQ-400 only. This AC cord cannot be used with other electrical
equipment.
CAUTION: controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation
Class 4 laser product
The EQ-400 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before
operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at
all times while operating the system.
The EQ-400 also produces high-intensity UV radiation. Eyewear should protect not only from laser radiation
at 1070 nm, but also from UV radiation in the band from 190 to 400 nm.
For further safety information, refer to ANSI Z136.1 Standard for Safe Use of Lasers, available from Laser
Institute of America (www.laserinstitute.org).

3
2.3. Laser Information
The EQ-400 uses a patented* laser drive system to excite a plasma that radiates in the ultraviolet as well as
the visible bands. A Class 4 laser is located in the Controller enclosure. The optical configuration of the
Lamp ensures that the direct laser beam cannot exit the unit. The EQ-400 laser product is designated as
Class 4 during all normal operation.
Nominal Ocular Hazard Distance (NOHD) based on 400W 1070nm pump laser under a failure mode
condition where aperture is itself accessible: 4 meters
Required Optical Density (OD) for safety eyewear: 6 or higher at 1070 nm. These values are based on a
theoretical failure condition.
The parameters of the non-accessible internal laser are given below in Table 1.
Parameter
Value
Wavelength
1070 nm
Emission Type
CW
Laser Power for classification
400W
Beam Diameter
5 mm
Divergence
0.3 mRad
Transverse Beam Mode
Single Mode
Table 1: Embedded Laser Parameters
* US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045; others pending

4
2.4. Labels and Safety Notification
The following safety labels appear on the product. Table 1shows the location of
each label on the EQ-400 system and Table 1 describes their meanings.
Figure 1: EQ-400 Safety labels location

5
Labels and Safety Notifications
#
Label Picture
Description
1
Manufacturer’s identification label – gives the manufacturer’s name and
address, and the model, serial number, and date of manufacture of the
equipment.
2
Hazard warning label –indicates that a laser hazard is present
3
Aperture label - indicates the outlet aperture for laser radiation
4
UV Hazard warning label –indicates hazardous levels of UV light are present
5
Protective housing label –warns of an enclosed laser radiation hazard
6
Explanatory label –states the classification of the laser product
7
Certification label - states that the equipment has been tested and verified to
meet the standards indicated.
8
Protective housing label –warns of an enclosed laser radiation hazard
located inside chassis on laser module
Table 1: Safety Label Meanings

6
2.5. Safety Interlocks
The EQ-400 is equipped with interlocks to prevent operation of the device when any of the following
conditions are present:
▪A remote interlock is open
▪Lamp cover not installed
▪Laser fiber not connected to Lamp
▪Controller cover not in place
2.6. Correct disposal of the unit
When the EQ-400 has finally been removed from service, observe all local environmental regulations for
proper disposal.
3. Preparation of System
3.1. Unpacking guide
Start by inspecting the shipping container for any external damage. Before use inspect all parts of the
system for completeness and any damage incurred in shipping. Carefully unpack the EQ-400. The
shipping box should contain:
▪EQ-400 Power Supply Controller unit
▪EQ-400 Lamp unit
▪Accessory Box
▪Interconnecting cable from Lamp to Power Supply Controller (9-pin D-sub).
▪AC Power cable
▪AC Power plug (differs by country)
▪Chiller tubing Kit
If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any
parts. There are no user-serviceable parts inside the EQ-400 Lamp or Power Supply Controller unit.
3.2. System Description
The EQ-400 system consists of a Controller, lamp, lamp cable, and power input cable. Laser light is
generated in the Controller and transmitted to the Lamp by an optical fiber permanently attached to the
Controller.
The following sections provide descriptions of the system components and controls and give an overview
of their functions. Refer to Section 4 for more detailed information.