Jetec Gas Mass Flow Meter MF 4000 User manual

Gas Mass Flow Meter VC.1
Model MF / FS4000
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Gas Mass Flow Meter
with MEMS calorimetric sensing technology
MF / FS 4000 Series
User Manual
Document No. 06-2021-FM1 EN
Issue date: 2021.06
Revision: VC.1
久德電子
TEL:[phone]
FAX:[phone]
(40349)台中市西區福人街11號
Email: [email protected]
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Attention!
Use with caution!
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for the electrical safety, even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.
•Do not apply for any unknown or non-specified gases that may
damage the product.
•For remote data, please be sure the meter is properly configured.
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Table of Contents
1. Overview .................................................................................................. 5
2. Receipt / unpack of the products ................................................................ 6
3. Knowing the products ............................................................................... 7
3.1. Product description ................................................................................................... 7
3.2. Power and data cable description ............................................................................... 7
3.3. Mechanical dimensions .............................................................................................. 8
4. Installation ............................................................................................... 9
5. Operation and MENU description .............................................................. 11
5.1 Check the product specifications .............................................................................. 11
5.2 Check the leakage ................................................................................................... 11
5.3 Power the product and digital data connection ......................................................... 11
5.4 Meter display and MENU descriptions ...................................................................... 12
5.4.1. Meter display and function keys .................................................................................... 12
5.4.2. MENU function input sequence ..................................................................................... 12
5.4.3. Detailed descriptions of the functions ............................................................................ 15
5.5 RS485 Modbus / RS232 communication protocol ....................................................... 17
5.5.1. Hardware connection .................................................................................................... 17
5.5.2. Communication parameters ........................................................................................... 18
5.5.3. Frame .......................................................................................................................... 18
5.5.4. Function codes ............................................................................................................. 19
5.5.5. Registers ...................................................................................................................... 19
5.6 Analog output (0.5 ~ 4.5Vdc) .................................................................................... 22
5.7 Pressure loss ........................................................................................................... 22
6. Product selection and order information .................................................... 24
6.1 Product selection .................................................................................................... 24
6.2 Order contact and customer support ........................................................................ 24
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7. Technical specifications ............................................................................ 25
8. Technical notes for the product performance .............................................26
8.1 Measurement principle ............................................................................................ 26
8.2 Precautions for the best performance of the product ................................................. 26
8.2.1. Comparison with a third party reference meter ............................................................... 26
8.2.3. Particle contamination and fluidic cleanness ................................................................... 27
8.2.4. Apply to a different gas medium .................................................................................... 27
9. Troubleshooting ..................................................................................... 28
10.Service contact ........................................................................................ 29
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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the MF/FS4000 series of gas mass
flow meter/sensors for general-purpose gas flow monitor and control applications with the full-scale
mass flow rate from 2 to 50 SLPM with both analog and digital outputs. The product performance,
maintenance, and trouble-shooting as well as the information for product order, technical support,
and repair are also included.
MF/FS4000 mass flow meters/sensors are designed for general purpose precise industrial gas
processing monitor and/or control. It can be applied for medical equipment such as anesthesia
application, endoscope, and cancer treatment; industrial applications including welding machine,
laser equipment, gas mixture; and many more. The series covers a wide dynamic flow range with a
working pressure rating of up to 0.5 MPa (5 bar or 73 PSI), and a compensated temperature ranging
from -10 to 55°C.
The products are designed with an easy change of mechanical connectors. The standard connectors
are BSPT 1/4”, and other customized ones are available upon request.
The products are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together
with smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials
together with a water/oil proof nano-coating for performance and reliability.
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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter with LED display or the sensor without the display per the actual order). The power and
data cable as shown below may also be found according to the same packing materials.
Figure 2.1: MF/FS4o00 flow meter Figure 2.2: data cable
Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the LED display shall not be lighted up until the power cable is plugged in). This
user manual shall also either be included in the packing box or via an online request for an electronic
version. In most cases, this manual shall be made available to the customer before the actual order.
The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5
meters.
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3. Knowing the products
3.1. Product description
Figure 3.1: MF/FS4000 parts description
3.2. Power and data cable description
Table 3.1: MF/FS4o00 pin/wire assignments.
Figure 3.2: MF/FS4o00 connection and cable
Note: 1. The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5
meters.
2. The RS485 Modbus is asynchronous, half-duplex communication. When the data are transmitted
or received from the product, the other pin is serving as the ground.
3. The RS232 communication is bi-directional. TX is the transmit pin that sends data from the product.
RX is the receive pin.
Wire
Color
Definition
1
Blue
RS485B / RS232 TX
2
Green
Analog output, 0.5~4.5Vdc
3
Red
Power supply, 8 ~ 24Vdc
4
Black
Ground
5
Yellow
RS485A / RS232 RX
Exchangeable
connector
LED display
MENU keys
Excahngeable
connector
Flow direction
Electrical interface, AMP
MTE, 5 positions
Meter body
Sensor body
Status indicator
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3.3. Mechanical dimensions
Figure 3.3: MF /FS4000 dimensions with BSPT (R1/4”) connectors
Figure 3.4: MF /FS4000 dimensions with one-touch connectors
Note: * Other threads or compressive types can be customized.
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4. Installation
Do not open or alter any part of the product which would lead to malfunction and irrecoverable
damage. It will also forfeit the terms of the warranty and cause liability.
The product at the time of shipment is fully inspected for its quality and meets all safety requirements.
Additional safety measures during the installation should be applied. This includes, but is not limited
to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, DC
voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance
must only be performed by trained personnel. Upon request, the manufacturer will provide
necessary technical support and/or training of the personnel.
There are no preferred space directions for the installation. Flow direction should be aligned with the
arrow mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product's physical integrity should be inspected to ensure no
visual damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Close the upstream valve, if any, completely.
d) During installation, please make sure no foreign materials (such as water, oil, dirt, particles, etc.)
entering into the installation pipeline.
e) Connect electrical wires per the wire definition in Table 3.1. Please be sure of the power supply
range (i.e., 8 ~ 24 VDC) and power supply polarization. If an adapter is used, make sure the
adapter meets industrial standards and has all safety certifications. Alternatively, this product
can also be powered by a 9Vdc battery.
f) For the data communication wire connection, please follow the description in Table 3.1 and make
sure that the wires are correctly connected to the proper ports on your data device/equipment.
Please make sure the data cable meets industrial standards with proper shielding.
g) Once the external power is successfully connected, for the MF serial of meters, the LED should
be lighted up with the proper information displayed.
h) Slowly open the valve(s) of the gas supply if any, upstream or downstream, or both of the
pipeline. the product should then start to measure the flow in the pipeline. Note: because the
meter has a large dynamical measurement range, it could be normal if you see the small instant
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flow rate even if there is “no-flow”in the pipeline. If the value consistently present, double-
check the pipe leakage and then reset the offset if you are sure there is no leakage or flow.
h) This will conclude the installation.
Cautions
a) Don't alter any parts of the product.
b) Ensure the electrical connection is properly done per the instructions.
c) Make sure no mechanical stresses in the connections.
d) The strong electromagnetic interference sources close by or any mechanical shocks at the
pipeline may also create malfunctioning of the product.
e) Slowly open/close valves at the gas supply piping to prevent abrupt pulse flow impact.
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5. Operation and MENU description
5.1 Check the product specifications
Before starting to use this product, check the product specifications that can be found in this manual
or the basic information from the datasheet at the company’s website
The detailed product technical specifications can be found in Section 7. For a specific application,
the pressure rating must not be higher than the system pressure to be measured, and the flow range
should also be within the specified ones. In most cases, the use of a high full-scale ranged meter for
the very low flow rate measurement often results in erroneous data. The gas to be measured must
also be consistent with that specified by the product. Be particularly cautious about the supplied
voltage indicated in the specification. Ahigher voltage may lead to irrecoverable damage, and a
lower voltage will not power the product for any desired functions.
For the best performance of the product, it is advised that the gas to be measured must be clean and
free of particles or other foreign materials.
5.2 Check the leakage
Check gas leakage before any measurement. If it is needed, the pressurized nitrogen or air can be
used for the leakage check.
5.3 Power the product and digital data connection
Although this product complies with the CE-required EMC regulations, it also requires the product to
be used according to the standard electrical device practice. Before connecting the product with
external DC power or an AC-DC adapter, make sure the supply voltage is within the range of the
specified ones in Section 7. Be cautious that the standard electrical device precautions such as EDS
(electrostatic discharge) and DC voltage are observed. Excessive electrostatic discharge may
damage the product.
The manufacturer-supplied power and data cable have a locking fixture. Lock the cable and make
sure it is properly engaging and will not be accidentally got unplugged.
Half-duplex RS485 Modbus or RS232 is used for digital data communication. Make sure the wires are
properly connected to the receiver side.
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5.4 Meter display and MENU descriptions
Please skip this section for flow sensor products.
5.4.1. Meter display and function keys
Figure 5.1: MF4o00 display and function keys
The meter has a front 3-key board for the user to set the desired functions, access data, and check
for the status. The Menu key (M) is at the upper right position that allows the user to select a function
and confirmation or other related actions that will be detailed described in the MENU key sequence
graphic presentation. Two keys (“Up” and “Down”) are used to select the functions. The two LED
lights (I and II) are used for the indication of display contents. For the default instant flow rate display,
both of these two LEDs will be off. Please refer to the detailed information below.
The default instant flow rate is SLPM with 4 digits, one of the digits is a decimal. When the flow rate
is above the specified flow range, LED I will flash for the flow rates above the upper limit, and LED II
will flash for the flow rates below the lower limit. If both LEDs are flashing, the displayed values are
incorrect.
Once the power is supplied and no abnormal issues are observed, the meter is ready to perform the
measurements. While the LED displays the instant mass flow rate, the accumulated or totalized flow
rate can be accessed by press the “Up” or “Down” key. The accumulated flow rate is registered with
“standard liter” (SL), and the maximum can be 99,999,999 SL. The first four digits of the
accumulated flow rate are indicated by the “I” LED light, and the last four digits are represented when
the “II” LED light is on. The “I” and “II” LED lights will be automatically switched when the
accumulated flow rate is displayed. The accumulated flow rate will be automatically saved every
three minutes. At the time of the power failure or cut-off, the value will be representing the latest
saved ones.
5.4.2. MENU function input sequence
At the flow measurement (main) display, press the three MEMU keys, it will allow the user to perform
a variety of settings of the product. The following graph details the key sequence for each function,
and some detailed explanations are followed after the graphic presentation.
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Figure 5.2: MF4o00 menu flow chart
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Table 5.1: On-screen characters and their corresponding functions
On-screen character
Symbol
Functions
0.unL / Loc
Unlock/lock the keyboard
1.oFF / on
Reset the accumulated flow
2.oFF / on
Reset or calibrate the offset
3. 1 … 255
Set the Modbus address
Available: 1 ~ 255,
The default address is 1.
4. 1 / 2 / 5 / 10 /
20 / 50 / 100
Set the response time
5. 25 / 50 / 100 /
200
Set the display refresh rate
6. 0 … 110
Set the upper flow rate alarm
Available: 0 ~ 110, means of 0% ~ 110%
full scale.
The default value is 100 (100% full scale).
7. 0 … 110
Set the lower flow rate alarm
Available: 0 ~ 110, means of 0% ~ 110%
full scale.
The default value is 0 (0% full scale).
8. 0 / 1 / 2 / 3
Set the display decimal
9. 48/ 96/192/384
Set the communication baud rate
Available: 48, 96, 192, 384, means of baud
rate 4800, 9600, 19200, 38400.
The default value is 384 (baud rate 38400).
A. 10 … 999
Set the GCF (gas conversion factor)
Available: 10 ~ 999, means of GCF = 100 ~
9990.
Default value is 100, means of GCF = 1000.
b. 0 / 1
Set the accumulated flow rate unit.
➢scc or SL (instant flow rate unit is
sccm);
➢SL or Nm3(instant flow rate unit is
SLPM).
Note: During this process, the meter will continue to measure the flow without being interrupted.
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5.4.3. Detailed descriptions of the functions
0) Keyboard security
This function allows the user to disable the keyboard entry after the meter is set as desired. It
will prevent any accidental key entry that may alter the settings. At the MENU, select “lock”
to lock the keyboard.
1) Reset the accumulated flow rate
The maximum accumulated flow rate that can be registered by the meter is 99,999,999 SL.
Once the value is reached, the accumulating function will stop processing the data. It is
necessary to reset the register for the continuation of this function.
Use this function with caution as it will delete all current accumulated flow rate data.
2) Reset or calibrate the offset
Sometimes or after a long time of use (i.e., over 1 year of usage), the sensor surface could
have a thin deposit from the environment if the gas is not super clean. Depending on the
actual case, this deposit might or might slightly change the thermal sensitivity of the sensor
resulting in a drift of the offset or a tiny flow at the zero flow in the pipeline. Use this function
to reset the offset will not have an impact on the meter performance if such an offset is
outside of the 100:1 calibrated range.
Use this function with caution and make sure there is no flow when executing this function,
otherwise, it may incur some additional errors to the measurement.
3) Set the Modbus address of the meter
Use this function to set the RS485 Modbus address of the meter. This setting can also be
done via the RS485 communication.
4) Set the response time
Use this function to change the response time of the meter. The default one is 10 msec.
Increasing the response time will allow more data to average and output a stabler flow rate if
the actual flow rate may have some undesired fluctuation.
Available response time is 10 msec (4. 1); 20 msec (4. 2); 50 msec (4. 5); 100 msec (4. 10); 200
msec (4. 20); 500 msec (4. 50), and 1000 msec (4.100)
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5) Set the display refresh rate
Change the display refresh rate will just alter the display update time, it will have no impact
on the meter’s measurement. The default refresh rate is 250 msec.
Available refresh rates are 250 msec (5. 25); 500 msec (5. 50); 1000 msec (5.100), and 2000
msec (5.200).
6) Set the upper flow rate alarm
This function allows the user to set a maximum allowable flow rate above which an alarm will
be triggered with a flashing screen.
7) Set the lower flow rate alarm
This function allows the user to set a minimum flow rate below which an alarm will be
triggered with a flashing screen.
8) Set the display decimal
The user can use this function to alter the default one decimal display. Options are listed
below for each flow range:
Table 5.2: decimal options
Flow range
Decimal options
0 ~ 2, 3, 4, 5 SLPM
0, 1, 2, 3
0 ~ 10, 20, 30, 40, 50 SLPM
0, 1, 2
9) Set the communication baud rate
This function allows a MENU entry of the RS485 or RS232 communication baud rate.
10) Set the GCF (the gas conversion factor)
The meter is normally calibrated with air at 20°C and 101.325 kPa. When the user wants to
set the standard conditions other than the specified temperature or applies the meter for
other allowable gases (please contact the manufacturer for the list of gases), it is possible to
use this gas conversion factor function to ensure the readings are correct and desired.
The default value of the GCF is 1000 (1.000). For example, if one wants to alter the standard
temperature to 0°C, the factor can be calculated using the gas equation: PV/T = constant:
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GCF = 1000 x V(new) / V (20°C) = T (o°C) / T (20°C) = 1000 x 273 / 293 = 932
Then the gas conversion factor would be 932.
In some cases, the actual system may have a constant deviation from that at the calibration,
this GCF can also be used to adjust. For additional information, please contact the
manufacturer.
11) Set the accumulated flow rate unit.
When the instant flow rate unit is sccm, the accumulated flow rate unit can be set to scc or
SL;
When the instant flow rate unit is SLPM, the accumulated flow rate unit can be set to SL or
Nm3.
5.5 RS485 Modbus / RS232 communication protocol
The digital communication protocol is based on standard Modbus RTU Half-plex mode or the RS232
communication protocol. A master (PC or PLC) can communicate with multiple slaves (the current
product) for data exchange and communication parameter configuration. Refer to Table 3.2 for
cable connection. RS232 only supports single-meter communication, and Flow control is always
NONE.
5.5.1. Hardware connection
The RS485 hardware layer is TIA/EIA-485-A, as illustrated below. In this configuration, the product
(MF/FS4000) is a slave.
Figure 5.3: RS485 hardware
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5.5.2. Communication parameters
The PC UART communication parameters are listed in table 5.3.
Table 5.3: PC UART communication parameters
Parameters
Protocol
RTU
Baud rate (Bits per second)
38400 bps
Start bits
1
Data bits
8
Stop bits
1
Even/Odd parity
None
Bits period
104.2 µsec
Bytes period
1.1458 msec
Maximum data length
20
Maximum nodes
247
5.5.3. Frame
The frame function is based on the standard Modbus RTU framing:
Table 5.4: frame function
Start_bits
Address
Function codes
Data
CRC
Stop_bits
T1-T2-T3-T4
8 bit
8 bit
N 8 bit (20≥n≥0)
16 bit
T1-T2-T3-T4
Start_bits: 4 periods bit time, for a new frame.
Address: The address can be set from 1 to 255 except for 157 (0x9d). 0 is the broadcast address.
Function codes: Define the product's functions/actions (slaves), either execution or response.
Data: The address of the register, length of data, and the data themselves.
CRC: CRC verification code. The low byte is followed by the high byte. For example, a 16 bit
CRC is divided into BYTE_H and BYTE_L. In the framing, the BYTE_L will come first, then
followed by the BYTE_H. The last one is the STOP signal.
Stop_bits: 4 periods bit time, for ending the current frame.
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5.5.4. Function codes
The Modbus function codes applied for the product are the sub-class of the standard Modbus
function codes. These codes are used to set or read the registers of the product:
Table 5.5: function codes
Code
Name
Functions
0x03
Read register
Read register(s)
0x06
Set single register
Write one single 16-bit register
0x10
Set multiple registers
Write multiple registers
5.5.5. Registers
The product (MF4600) has multiple registers available for the assignment of the various functions. With these
functions, the user can obtain the data from the products, such as product address and flow rates from the
registers, or set the product functions by writing the corresponding parameters.
The currently available registers are listed in the following table, and the registers may be customized upon
contact the manufacturer. Where R: read; W: write-only; W/R: read and write.
Note: At the time of shipping, the write protection function is enabled except for address and baud rate.
Once the user completes the register value change, the write protection will be automatically enabled
once again to prevent incidental data loss.
Table 5.6: Registers
Functions
Description
Register
Modbus reference
Address
Product address (R/W)
0x0001
40002 (0x0001)
Flow rate
Current flow rate (R)
0x0002 ~ 0x0003
40003 (0x0003)
Totalizer
Totalizer or accumulated flow rate (R)
0x0004 ~ 0x0006
40005 (0x0005)
Baud rate
Communication baud rate (R/W)
0x0015
40022 (0x0015)
Gas conversion factor
Gas conversion factor (R/W)
0x0016
40023 (0x0016)
Response time
Response time or sampling time (R/W)
0x0017
40024 (0x0017)
Offset reset
Reset or calibrate offset (R/W)
0x0027
40040 (0x0027)
High flow alarm
Set high flow rate alarm (R/W)
0x0031
40050 (0x0031)
Low flow alarm
Set low flow rate alarm (R/W)
0x0033
40052 (0x0033)
Write protect
Disable a specific parameter entry (W)
0x0014
40021 (0x0014)
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