Jetec MF5000 Series User manual

Gas Mass Flow Meter VE.2.01
Model MF5000
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Gas Mass Flow Meter
with MEMS calorimetric sensing technology
MF5000 Series
User Manual
Document No. 07-2022-M7 EN
Issue date: 2022.07
Revision: VE.2.01
久德電子
TEL:[phone]
FAX:[phone]
(40349)台中市西區福人街11號
Email: [email protected]
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MF5000 User Manual

Attention!
Use with caution!
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for the electrical safety, even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.
•Do not apply for any unknown or non-specified gases that may
damage the product.
•For remote data, please be sure the meter is properly configured.
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MF5000 User Manual

Table of Contents
1. Overview .................................................................................................. 5
2. Receipt / unpack of the products ................................................................ 6
3. Knowing the products ............................................................................... 7
3.1. Product description ................................................................................................. 7
3.2. LCD description ....................................................................................................... 7
3.3. Power and data cable description ............................................................................. 8
3.4. Mechanical dimensions ............................................................................................ 9
4. Installation .............................................................................................. 10
5. Operation and MENU description .............................................................. 13
5.1 Check the product specifications ............................................................................ 13
5.2 Check the leakage ................................................................................................. 13
5.3 Power the meter and digital data connection .......................................................... 13
5.4 Meter MENU descriptions ...................................................................................... 14
5.4.1 Starting the measurement ........................................................................................... 14
5.4.2 MENU entry with a verified password ........................................................................... 15
5.4.3 Set the RS485 Modbus address .................................................................................... 15
5.4.4 Set the RS485 communication baud rate ...................................................................... 16
5.4.5 Reset or calibrate the offset ......................................................................................... 16
5.4.6 Gas conversion factor (GCF) for different gas measurement ............................................ 17
5.4.7 Set the 2nd-correction factor ....................................................................................... 18
5.4.8 Set the Response time ................................................................................................. 18
5.4.9 Set the unit for the accumulated or totalized flow rate ................................................... 19
5.4.10 Set the unit for the instant flow rate ............................................................................. 19
5.4.11 Change the default password ....................................................................................... 20
5.4.12 Reset the accumulated or totalized flow rate ................................................................. 20
5.4.13 Reset the 2nd-correction factor .................................................................................... 21
5.4.14 Exit the MENU ............................................................................................................ 21
5.4.15 MENU key sequence for the settings............................................................................. 22
5.5 RS485 Modbus communication protocol ................................................................. 22
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MF5000 User Manual

5.5.1 Hardware connection .................................................................................................. 23
5.5.2 Communication parameters ......................................................................................... 23
5.5.3 Frame ........................................................................................................................ 24
5.5.4 Function codes ........................................................................................................... 24
5.5.5 Registers .................................................................................................................... 24
5.6 Analog (4 ~ 20 mA) output ..................................................................................... 28
6. Product selection .....................................................................................29
7. Technical specifications ............................................................................ 30
7.1 Specifications ....................................................................................................... 30
7.2 Pressure loss ......................................................................................................... 31
8. Technical notes for the product performance ............................................. 34
8.1 Measurement principle .......................................................................................... 34
8.2 Precautions for the best performance of the product ............................................... 34
8.2.1 Comparison with a third party reference meter .............................................................. 34
8.2.2 Particle contamination and fluidic cleanness ................................................................. 35
8.2.3 Apply to a different gas medium................................................................................... 35
9. Troubleshooting ...................................................................................... 36
10. Service contact ........................................................................................ . 37
Appendix I: Product evaluation kit ..................................................................38
Appendix II: Document history ....................................................................... 39
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MF5000 User Manual

1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the 3rd generation of the MF5000
series of gas mass flow meters for general-purpose gas metrology. The product performance,
maintenance, and trouble-shooting as well as the information for product order, technical support,
and repair are also included.
MF5000 mass flow meters are designed for general purpose precise industrial gas measurement,
monitor, or control. The meter series cover a wide dynamic flow range with a working pressure rating
of up to 1.5MPa, and a temperature ranging from -20 to 60°C.
The meters are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together
with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic
materials and with a water/oil proof nano-coating for performance and reliability. The meter body is
made of stainless steel SUS 304 that is ready for application of most gases.
This new release offers applications in a hazardous zone (Ex ia IIC T4 Gb, equivalent to Class I, Div. 1,
zone 0, Group A, T4) as well. It also boosts the protection class to IP66 and offers additional
mechanical connection flexibility with both male and female connectors which can be further
adapted with any other threaded ones. The electrical interface is changed from DB9 to M12 for
better protection.
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MF5000 User Manual

2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the meter with the valve per the actual order). The power adapter and/or data cable as
shown below may also be found according to your actual order.
Flow meter data cable
Figure 2.1: MF5000 flow meter and data cable
Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the LCD screen shall not be lighted until the power cable is plugged in). This
user manual shall also either be included in the packing box or via an online request for an electronic
version. In most cases, this manual shall be made available to the customer before the actual order.
The cable is a standard one with an M12 connector.
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MF5000 User Manual

3. Knowing the products
3.1.Product description
Figure 3.1: MF5000 parts description
3.2.CD description
Figure 3.2: LCD symbol illustration.
The LCD provides all information that the product measures. Some symbols are reserved for
future upgrades, and will not be lighted during the operation. The following table details the
meaning of each of the symbols.
Meter body
LCD display
MENU keys
NPT or other
connectors
Flow direction
Electrical interface, M12
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MF5000 User Manual

Table 3.1: Symbols description
USER
The top row only displays when communication or other user-defined
function is in process.
Total
The middle row displays the accumulated or totalized flow rate in
Nm3(Normalized cubic meters) or SCF (Standard cubic feet). Here
the standard (normalized) conditions refer to 20°C, 101.325kPa.
Flowrate
The bottom row displays the instant flow rate in SLPM (Standard
liters per minute), Nm3/h (Normalized cubic meters per hour), or
SCFM (Standard cubic feet per minute)
E1
Error 1 –Sensor error
E2
Error 2 –ADC error
E3
Error 3 –RTC error
E4
Error 4 –EEPROM error
E5
Error 5 –Oscillator (crystal) error
Temperature, for models with temperature option
P
Pressure, for models with pressure option
*Note: Both the pressure and temperature sensors can be integrated with the current product
but not with the default models. Please contact the manufacturer for further
information.
3.3.Power and data cable description
Table 3.2: MF5o00 wire (M12) assignments.
Socket Cable
Figure 3.3: MF5000 socket and cable
Wire
Color
Definition
1
Brown
12 ~ 24 Vdc
2
White
RS485 B (-)
3
Blue
GND, common ground
4
Black
RS485 A (+)
5
Gray
4 ~ 20mA output
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MF5000 User Manual

3.4.Mechanical dimensions
Figure 3.4: MF5000 meter dimensions
Model
DN (mm)
D (NPTM)
L
MF5003
3
1/8”
138
MF5006
6
1/4”
144
MF5008
8
3/8”
144
MF5012
12
1/2”
150
MF5019
19
3/4”
182.5
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MF5000 User Manual